• 한국표면공학회지
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• 제49권3호
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• pp.286-300
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• 2016

Pd-Ag alloy membranes have attracted a great deal of attention for their use in hydrogen purification and separation due to their high theoretical permeability, infinite selectivity and chemical compatibility with hydro-carbon containing gas streams. For commercial application, Pd-based membranes for hydrogen purification and separation need not only a high perm-selectivity but also a stable long-term durability. However, it has been difficult to fabricate thin, dense Pd-Ag alloy membranes on a porous stainless steel metal support with surface pores free and a stable diffusion barrier for preventing metallic diffusion from the porous stainless steel support. In this study, thin Pd-Ag alloy membranes were prepared by advanced Pd/Ag/Pd/Ag/Pd multi-layer sputter deposition on the modified porous stainless steel support using rough polishing/$ZrO_2$ powder filling and micro-polishing surface treatment, and following Ag up-filling heat treatment. Because the modified Pd-Ag alloy membranes using rough polishing/$ZrO_2$ powder filling method demonstrate high hydrogen permeability as well as diffusion barrier efficiency, it leads to the performance improvement in hydrogen perm-selectivity. Our membranes, therefore, are expected to be applicable to industrial fields for hydrogen purification and separation owing to enhanced functionality, durability and metal support/Pd alloy film integration.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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• pp.214.2-214.2
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• 2013

Device performance for the 45 and 32 nm node CMOS technology requires the integration of ultralow-k materials. To lower the dielectric constant for PECVD and spin-on materials, partial replacement of the solid network with air (k=1.01) appears to be more intuitive and direct option. This can be achieved introducting of second "labile" phase during depositoin that is removed during a subsequent UV curing and annealing step. Besides, with shrinking line dimensions the resistivity of barrier films cannot meet the International Technology Roadmap for Semiconductors (ITRS) requirements. To solve this issue self-forming diffusion barriers have drawn attention for great potential technique in meeting all ITRS requirments. In this present work, we report a Cu-V alloy as a materials for the self-forming barrier process. And we investigated diffusion barrier properties of self-formed layer on low-k dielectrics with or without UV curing treatment. Cu alloy films were directly deposited onto low-k dielectrics by co-sputtering, followed by annealing at various temperatures. X-ray diffraction revealed Cu (111), Cu (200) and Cu (220) peaks for both of Cu alloys. The self-formed layers were investigated by transmission electron microscopy. In order to compare barrier properties between V-based interlayer on low-k dielectric with UV curing and interlayer on low-k dielectric without UV curing, thermal stability was measured with various heat treatment temperature. X-ray photoelectron spectroscopy analysis showed that chemical compositions of self-formed layer. The compositions of the V based self-formed barriers after annealing were strongly dominated by the O concentration in the dielectric layers.

• 열처리공학회지
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• 제13권3호
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• pp.143-150
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• 2000

Ferritic plasma nitrocarburising was performed on pure iron using a modified DC plasma unit. This investigation was carried out with various gas compositions which consisted of nitrogen, hydrogen and carbon monoxide gases, and various gas pressures for 3 hours at $570^{\circ}C$. After treatment, the different cooling rates(slow cooling and fast cooling) were used to investigate its effect on the structure of the compound layer. The ${\varepsilon}$ phase occupied the outer part of the compound layer and ${\gamma}^{\prime}$ phase existed between the ${\varepsilon}$ phase and the diffusion zone. The gas composition of the atmosphere influenced the constitution of the compound layer produced, i.e. high nitrogen contents were essential for the production of ${\varepsilon}$ phase compound layer. It was found that with increasing carbon content in the gas mixture the compound layer thickness increased up to 10%. In the gas pressure around 3 mbar, the compound layer characteristics were slightly effected by gas pressure. However, in the low gas pressure and high gas pressure, the compound layer characteristics were significantly changed. The constitution of the compound layer was altered by varying the cooling rate. A large amount of ${\gamma}^{\prime}$ phase was transformed from the ${\varepsilon}$ phase during slow cooling.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.190.1-190.1
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• 2015

Graphite has excellent mechanical and physical properties. It is known to advanced materials and is used to materials for molds, thermal treatment of furnace, sinter of diamond and cemented carbide tool etc. SiC materials are coated on the surface and holes of graphite to protect particles emitted from porous graphite with 5%~20% porosity and make graphite hard surface. SiC materials have high durability and thermal stability. Thermal CVD method is widely used to manufacture SiC thin films but high cost of machine investment and production are required. SiC thin films manufactured by Si reaction liquid and vapore with carbon are effective because of low cost of machine and production. SiC thin films made by vapor silicon infiltration into porous graphite can be obtained for shorter time than liquid silicon. Si materials are evaporated to the graphite surface in about $10^{-2}$ torr and high temperature. Si materials are melted in $1410^{\circ}C$. Si vapor is infiltrated into the surface hole of porous graphite and $Si_xC_y$ compound is made. $Si_x$ component is proportional to the Si vapor concentration. Si diffusion coefficient is estimated from quadratic equation obtained by Fick's second law. The steady stae is assumed. Si concentration variation for the depth from graphite surface is fitted to quadratic equation. Diffusion coefficient of Si vapor is estimated at about $10^{-8}cm^2s^{-1}$.

• 한국재료학회지
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• 제17권9호
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• pp.463-468
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• 2007

The interdiffusion characteristics of Cu-plug/Capping Layer/NiSi contacts were investigated. Capping layers were deposited on Ni/Si to form thermally-stable NiSi and then were utilized as diffusion barriers between Cu/NiSi contacts. Four different capping layers such as Ti, Ta, TiN, and TaN with varying thickness from 20 to 100 nm were employed. When Cu/NiSi contacts without barrier layers were furnace-annealed at $400^{\circ}C$ for 40 min., Cu diffused to the NiSi layer and formed $Cu_3Si$, and thus the NiSi layer was dissociated. But for Cu/Capping Layers/NiSi, the Cu diffusion was completely suppressed for all cases. But Ni was found to diffuse into the Cu layer to form the Cu-Ni(30at.%) solid solution, regardless of material and thickness of capping layers. The source of Ni was attributed to the unreacted Ni after the silicidation heat-treatment, and the excess Ni generated by the transformation of $Ni_2Si$ to NiSi during long furnace-annealing.

• 한국표면공학회지
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• 제48권1호
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• pp.11-22
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• 2015

Pd alloy hydrogen membranes for hydrogen purification and separation need thermal stability at high temperature for commercial applications. Intermetallic diffusion between the Pd alloy film and the porous metal support gives rise to serious problems in long-term stability of Pd alloy membranes. Ceramic barriers are widely used to prevent the intermetallic diffusion from the porous metal support. However, these layers result in poor adhesion at the interface between film and barrier because of the fundamentally poor chemical affinity and a large thermal stress. In this study, we developed Pd alloy membranes having a dense microstructure and saturated composition on modified metal supports by advanced DC magnetron sputtering and heat treatment for enhanced thermal stability. Experimental results showed that Pd-Cu and Pd-Ag alloy membranes had considerably enhanced long-term stability owing to stable, dense alloy film microstructure and saturated composition, effective diffusion barrier, and good adhesive interface layer.

• 대한금속재료학회지
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• 제48권9호
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• pp.842-846
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• 2010

In the present study, the reduction-diffusion method was employed to produce Sm-Fe alloy powder. It was confirmed that the amount of unreacted ${\alpha}-Fe$ in $Sm_2Fe_{17}$ matrix gradually decreased as the percentage of $Sm_2O_3$ increased. $Sm_2Fe_{17}$ single-phase powder was produced by the reduction-diffusion method with 40% excess $Sm_2O_3$. The Ca and Oxygen contents of the powder were approximately 300 ppm and 1600 ppm, respectively, after washing and acid treatment. By a subsequent nitrogenation, $Sm_2Fe_{17}N_x$ magnetic powders were produced. The coercivity of the powder increased with decreasing of the particle size by ball milling, and the highest coercivity of 2850 Oe was obtained after milling for 10 hours.

• 콘크리트학회논문집
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• 제28권4호
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• pp.481-488
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• 2016

콘크리트는 공용기간동안 구조물 자체의 자중 및 이동 하중에 따른 응력을 받게 되며, 이러한 응력은 구조적인 거동뿐 아니라 내구적인 거동에도 영향을 준다. 대단위 콘크리트 부재의 시공은 시공이음을 요구하는데, 면처리 불량 또는 이어치기의 지연에 의해 콜드조인트가 발생하게 된다. 이러한 콜드조인트는 전단력에 취약할 뿐 아니라 염화물 확산성에도 영향을 미친다. 본 연구에서는 응력조건과 콜드조인트가 콘크리트의 염화물 확산에 미치는 영향을 정량적으로 평가하였다. 콜드조인트를 가진 콘크리트는 인장하중 수준이 30%에서 60%로 커질 때, 확산계수는 꾸준하게 증가하여 건전부와 큰 차이를 보이지 않았다. 그러나 압축부에서는 하중재하 30% 수준부터 콜드조인트 콘크리트에서 염화물 확산계수가 크게 증가하여 확산계수가 170% 이상 증가하였다. 이러한 특성은 압축하중을 받는 건전부 콘크리트와 큰 차이가 있으므로 이음부를 가지는 콘크리트의 내구성 설계에 주의가 필요하다.

• Investigative Magnetic Resonance Imaging
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• 제25권1호
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• pp.23-34
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• 2021

Purpose: Differentiating between glioblastoma and solitary metastasis is very important for the planning of further workup and treatment. We assessed the ability of various morphological parameters using conventional MRI and diffusion-based techniques to distinguish between glioblastomas and solitary metastases in tumoral and peritumoral regions. Materials and Methods: We included 38 patients with solitary brain tumors (21 glioblastomas, 17 solitary metastases). To find out if there were differences in the morphologic parameters of enhancing tumors, we analyzed their shape, margins, and enhancement patterns on postcontrast T1-weighted images. During analyses of peritumoral regions, we assessed the extent of peritumoral non-enhancing lesion on T2- and postcontrast T1-weighted images. We also aimed to detect peritumoral neoplastic cell infiltration by visual assessment of T2-weighted and diffusion-based images, including DWI, ADC maps, and exponential DWI, and evaluated which sequence depicted peritumoral neoplastic cell infiltration most clearly. Results: The shapes, margins, and enhancement patterns of tumors all significantly differentiated glioblastomas from metastases. Glioblastomas had an irregular shape, ill-defined margins, and a heterogeneous enhancement pattern; on the other hand, metastases had an ovoid or round shape, well-defined margins, and homogeneous enhancement. Metastases had significantly more extensive peritumoral T2 high signal intensity than glioblastomas had. In visual assessment of peritumoral neoplastic cell infiltration using T2-weighted and diffusion-based images, all sequences differed significantly between the two groups. Exponential DWI had the highest sensitivity for the diagnosis of both glioblastoma (100%) and metastasis (70.6%). A combination of exponential DWI and ADC maps was optimal for the depiction of peritumoral neoplastic cell infiltration in glioblastoma. Conclusion: In the differentiation of glioblastoma from solitary metastatic lesions, visual morphologic assessment of tumoral and peritumoral regions using conventional MRI and diffusion-based techniques can also offer diagnostic information.

• 콘크리트학회논문집
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• 제26권1호
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• pp.71-78
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• 2014

사용후핵연료의 중간저장시설인 콘크리트 캐스크(cask)는 해안부근에 입지할 가능성이 크기 때문에 염해에 대한 문제가 크게 우려된다. 그리고 염해에 의한 철근의 부식 및 균열발생은 철근콘크리트구조물의 방사선 차폐기능뿐 아니라 구조성능 저하의 주요 원인이기 때문에 염해에 대한 평가는 매우 중요한 사항이다. 특히 염해환경과 함께 콘크리트 캐스크 내부에서는 사용후핵연료의 발열에 의해 $60^{\circ}C$정도의 고온 환경이 예상되기 때문에 고온에서의 염해에 대한 검토가 요구되지만, 기존 콘크리트 구조물의 염해평가에서는 온도에 대한 영향이 전혀 고려되어 있지 않아 고온에서 염해에 노출된 철근콘크리트구조물들의 내구설계 및 수명예측을 위해 참고할 만한 자료가 거의 없다. 이 연구에서는 다양한 온도환경에서의 염수(NaCl)침지시험을 통해 콘크리트의 염화물이온 확산계수를 측정하고 염화물이온 확산계수와 온도의 관계를 규명하고자 하였다. 실험 결과, 콘크리트의 염화물이온 확산계수는 온도의 증가에 따라 현저히 증대하여 고온환경에서의 염해 발생가능성이 매우 큰 것으로 조사되었다. 또한 크리트의 염화물이온 확산계수는 물시멘트(W/C)비가 낮아질수록 감소하였고, 이 경향은 온도가 증가(고온환경)하여도 동일하게 나타났다. 염화물이온 확산계수의 온도의존성은 아레니우스식(Arrhenius equation)으로 나타내어졌고 회귀분석 결과, 확산계수의 대수 값은 절대온도의 역수와 선형관계를 나타내었다. 또한 온도의존성을 나타내는 활성화에너지(activation energy)는 물시멘트(W/C)비가 낮을수록 높게 나타났다.