• Journal of the Semiconductor & Display Technology
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• v.15 no.2
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• pp.26-31
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• 2016

The Townsend to glow discharge mode transition was investigated in the dielectric barrier discharge (DBD) helium plasma source which was powered by 20 kHz / $4.5 kV_{rms}$ high voltage at atmospheric pressure. The spatial profile of the electric field strength at each modes was measured by using the intensity ratio method of two helium emission lines (667.8 nm ($3^1D{\rightarrow}2^1P$) and 728.1 nm ($3^1S{\rightarrow}2^1P$)) and the Stark effect. ICCD images were analyzed with consideration for the electric field property. The Townsend discharge (TD) mode at the initial stage of breakdown has the light emission region located in the vicinity of the anode. The electric field of the light emitting region is close to the applied field in the system. Immediately, the light emitting region moves to the cathode and the discharge transits to the glow discharge (GD) mode. This mode transition can be understood with the ionization wave propagation. The electric field of the emitting region of GD near cathode is higher than that of TD near anode because of the cathode fall formation. This observation may apply to designing a DBD process system and to analysis of the process treatment results.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2009.05a
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• pp.95-95
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• 2009

대기압 플라즈마 발생장치를 이용한 식각장비 개발은 낮은 공정단가, 저온 공정, 다양한 표면처리 응용 효과와 같은 이점을 가지고 있어 현재, 많은 분야에서 연구되고 있다. 본 연구에서는, dielectric barrier discharge(DBD) 방식을 이용한 대기압 발생장치를 통해 평판형 디스플레이 제작에 응용이 가능한 $SiO_2$ 층의 식각에 대한 연구를 하였다. $N_2/NF_3$ gas 조합에 $CF_4$ 또는 $C_{4}F_{8}$ gas를 부가적으로 첨가하였다. 이때 N2 60 slm / NF3 600 sccm/CF4 7 slm/Ar 200 sccm의 gas composition에서 최대 260 nm/min의 식각 속도를 얻을 수 있었다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.07a
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• pp.783-786
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• 2001

Recently deep interests and attractions have been paid on the generation of ozone, which is widely used to remove bad smell and to clear water. Silent discharge is considered as one of the most effective methods to generator ozone. In this paper, silent discharge reactors were made, waich were filled with different dielectric materials, and some silent discharge charactistics were investigated experimantaiiy.

• Korean Chemical Engineering Research
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• v.45 no.5
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• pp.455-459
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• 2007

Plasma catalytic methane conversion was carried out in the presence of sol-gel derived $Pt/TiO_2$ catalysts within a dielectric-barrier discharge (DBD) reactor. Plasma-assisted reduction (PAR) was applied to reduce the prepared $Pt/TiO_2$ catalysts in DBD reactor, and prepared catalysts were successively reduced by PAR within 20 min irrespective of the Pt loading and the calcination temperature. The highest methane conversion was 40% when 3 wt% $Pt/TiO_2$ and 5 wt% $Pt/TiO_2$ catalysts were used after calcination at $600^{\circ}C$. The selectivities of light alkanes ($C_2H_6$, $C_3H_8$, $C_4H_{10}$) were highly increased when $Pt/TiO_2$ catalysts were used in DBD reactor.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.28 no.8
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• pp.646-652
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• 2017

The effect of plasma on mono-static radar cross section under atmospheric pressure is demonstrated when the dielectric barrier discharge actuator has plasma layer. The volume of plasma layer is increased by using planar array of electrodes. Because the incident wave has electric field which is perpendicular to the electrode array, the undesired effect on radar cross section caused by structure of plasma actuator is minimized. In experiments, mono-static radar cross section is measured at the frequencies from 2 GHz to 25 GHz. The generated plasma reduces the radar cross section at frequencies above 18 GHz, and the amount of reduction reaches to 8 dB in maximum. The reduction can be controlled by changing the peak-to-peak voltage from high voltage generator. The result shows the possibility of plasma as a flexible radar cross section controller.

• Korean Chemical Engineering Research
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• v.57 no.3
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• pp.432-437
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• 2019

An atmospheric pressure floating electrode-dielectric barrier discharge (FE-DBD) system having flexible electrodes was developed and its plasma characteristics was investigated. Polytetrafluoroethylene (PTFE), polydiemethylsiloxane (PDMS), and polyethylene terephthalate (PET) were used as flexible dielectrics for flexible powered-electrodes. The optical intensity and electron temperature of the atmospheric pressure FE-DBD plasma increased with the voltage applied to the powered electrode, and increased in the order of PTFE < PDMS < PET at a fixed voltage. This behavior was explained in terms of the change in the capacitance of the flexible dielectrics with the dielectric type and voltage, implying that the plasma characteristics of an atmospheric pressure FE-DBD having flexible electrodes can be controlled by modulating the flexible dielectrics for the flexible powered-electrode and the voltage applied to the powered electrode. Because an atmospheric pressure FE-DBD system can generate a plasma along the curvature of skins, it is expected to have useful applications in plasma medicine.

• Proceedings of the KSME Conference
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• 2007.05b
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• pp.2344-2347
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• 2007

To generate negative ion, a small dielectric barrier discharge (DBD) plasma reactor was used in this study and operated by high AC voltage. With increasing of voltage, we can get more negative ions. However unfortunately, if the input voltage is too high, it will also cause formation of ozone which is very harmful to human being health. So the work of finding out the best condition of Voltage and frequency was carried out firstly. After several times of measurement, operating at 20 kHz frequency is the best condition generating high ion concentration without ozone. For the purpose of finding out the best reactor structure, two types of surface dielectric barrier discharge (DBD) reactors were examined to produce negative oxygen ions at the conditions of 20 kHz frequency. The results indicated that the surface DBD reactor with several small tips showed better characteristics for generation of negative oxygen ions at the same condition.

• Journal of the Korean Society of Industry Convergence
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• v.9 no.1
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• pp.13-19
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• 2006

The ozone produced by a dielectric barrier discharge device was injected into the exhaust gas to oxidize a part of NO to $NO_2$, and then the exhaust gas containing the mixture of NO and $NO_2$ was further treated in a catalytic reactor where both NO and $NO_2$ were reduced to $N_2$ in the presence of ammonia as the reducing agent. The $NO_2$ content in the mixture of NO and $NO_2$ was changed by the amount of ozone added to the exhaust gas. The experiments were primarily concerned with the effect of reaction temperature on the catalytic $NO_x$ reduction at various $NO_2$ contents. The increase in the $NO_2$ content by the ozone injection remarkably improved the performance of the catalytic $NO_x$ reduction, especially at low temperatures.

• Korean Journal of Materials Research
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• v.26 no.8
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• pp.406-411
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• 2016

In order to reuse the photocatalyst and enhance the photolysis efficiency, we have used atmospheric pressure dielectric barrier discharge (APDBD) to clean and activate $TiO_2$ powder. The photocatalytic activity of the $TiO_2$ powder before and after APDBD treatment was evaluated by the degradation of methylene blue (MB) in aqueous solution. The apparent reaction rate constant of photolysis of the first sample of reused $TiO_2$ cleaned by APDBD improved to a level up to 0.32h-1 higher than the 30 % value of the initial $TiO_2$ powder. As the number of photolysis reactions and APDBD cleanings increased, the apparent rate constants gradually decreased; however, the fourth photolysis reaction still showed a value that was greater than 10% of the initial value. In addition, APDBD treatment enhanced the process by which $TiO_2$ effectively adsorbed MB at every photolysis stage.

• Journal of electromagnetic engineering and science
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• v.18 no.1
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• pp.52-57
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• 2018

Surface dielectric barrier discharge (SDBD), which is widely used to control turbulence in aerodynamics, has a significant effect on the radar cross-section (RCS). A four-way linearly synthesized SDBD air plasma actuator is designed to bolster the plasma effects on electromagnetic waves. The diffraction angle is calculated to predict the RCS because of the periodic structure of staggered electrodes. The simplified plasma modeling is utilized to calculate the inhomogeneous surface plasma distribution. Monostatic RCS shows the diffraction in the plane perpendicular to the electrode array and the notable distortion by plasma. In comparison, the overall pattern is maintained in the parallel plane with minor plasma effects. The trends also appear in the bistatic RCS, which has a significant difference in the observation plane perpendicular to the electrodes. The peaks by Bragg's diffraction are shown, and the RCS is reduced by 10 dB in a certain range by the plasma effect. The diffraction caused by the actuator and the inhomogeneous air plasma should be considered in designing an SDBD actuator for a wide range of application.