• 반도체디스플레이기술학회지
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• 제15권2호
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• pp.26-31
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• 2016

The Townsend to glow discharge mode transition was investigated in the dielectric barrier discharge (DBD) helium plasma source which was powered by 20 kHz / $4.5 kV_{rms}$ high voltage at atmospheric pressure. The spatial profile of the electric field strength at each modes was measured by using the intensity ratio method of two helium emission lines (667.8 nm ($3^1D{\rightarrow}2^1P$) and 728.1 nm ($3^1S{\rightarrow}2^1P$)) and the Stark effect. ICCD images were analyzed with consideration for the electric field property. The Townsend discharge (TD) mode at the initial stage of breakdown has the light emission region located in the vicinity of the anode. The electric field of the light emitting region is close to the applied field in the system. Immediately, the light emitting region moves to the cathode and the discharge transits to the glow discharge (GD) mode. This mode transition can be understood with the ionization wave propagation. The electric field of the emitting region of GD near cathode is higher than that of TD near anode because of the cathode fall formation. This observation may apply to designing a DBD process system and to analysis of the process treatment results.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2009년도 춘계학술대회 논문집
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• pp.95-95
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• 2009

대기압 플라즈마 발생장치를 이용한 식각장비 개발은 낮은 공정단가, 저온 공정, 다양한 표면처리 응용 효과와 같은 이점을 가지고 있어 현재, 많은 분야에서 연구되고 있다. 본 연구에서는, dielectric barrier discharge(DBD) 방식을 이용한 대기압 발생장치를 통해 평판형 디스플레이 제작에 응용이 가능한 $SiO_2$ 층의 식각에 대한 연구를 하였다. $N_2/NF_3$ gas 조합에 $CF_4$ 또는 $C_{4}F_{8}$ gas를 부가적으로 첨가하였다. 이때 N2 60 slm / NF3 600 sccm/CF4 7 slm/Ar 200 sccm의 gas composition에서 최대 260 nm/min의 식각 속도를 얻을 수 있었다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 하계학술대회 논문집
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• pp.783-786
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• 2001

Recently deep interests and attractions have been paid on the generation of ozone, which is widely used to remove bad smell and to clear water. Silent discharge is considered as one of the most effective methods to generator ozone. In this paper, silent discharge reactors were made, waich were filled with different dielectric materials, and some silent discharge charactistics were investigated experimantaiiy.

• Korean Chemical Engineering Research
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• 제45권5호
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• pp.455-459
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• 2007

배리어(dielectric-barrier discharge: DBD) 반응기에서 솔-젤 방법으로 제조한 $Pt/TiO_2$를 넣고 플라즈마 에너지를 사용하여 메탄전환반응 연구를 수행하였다. 제조된 촉매는 기존 금속산화물과는 다른 방법으로 환원을 하였으며, 플라즈마를 사용한 환원방법(plasma-assisted reduction: PAR)이라고 명명하였다. $Pt/TiO_2$ 촉매는 Pt 담지량 및 소성온도에 관계없이 20분 이내에 환원이 완료되었다. 3 wt% $Pt/TiO_2$ 촉매와 5 wt% $Pt/TiO_2$ 촉매를 $600^{\circ}C$에서 소성하여 PAR 방법으로 환원했을 때 메탄의 전환율은 40%로 가장 높았다. DBD 반응기에서 $Pt/TiO_2$ 촉매를 사용하였을 경우 촉매가 없을 때보다 $C_2H_6$, $C_3H_8$와 $C_4H_{10}$과 같은 알칸의 선택성의 매우 높게 나타났다.

• 한국전자파학회논문지
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• 제28권8호
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• pp.646-652
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• 2017

큰 부피의 플라즈마를 발생시키기 위하여 플라즈마 층을 포함하는 유전체 장벽 방전 구조(dielectric barrier discharge)를 제안하고, 발생기 동작 유무에 따른 모노스태틱 레이다 단면적(mono-static radar cross section)을 측정함으로써 대기압 플라즈마가 전자기파에 미치는 영향을 분석하였다. 다수의 전극을 평면으로 평행 배열함으로써 플라즈마 층의 부피를 증가시켰으며, 전극 배열과 수직인 방향의 전기장을 포함하는 전자기파를 입사시킴으로써 발생기와의 원치 않는 커플링을 최소화 시켰다. 실험 결과, 모노스태틱 레이다 단면적을 2 GHz부터 25 GHz까지 측정하였을 때, K band에서 최대 8 dB까지 감소하는 것을 확인하였다. 또한, 고전압 발생기의 인가 전압을 최대 20 kV까지 변화시킴으로써 원하는 주파수에서 플라즈마로 인한 감소치를 유연하게 조절 가능함을 보였다.

• Korean Chemical Engineering Research
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• 제57권3호
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• pp.432-437
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• 2019

유연전극 기반의 대기압 부유전극 유전체 장벽 방전 (floating electrode-dielectric barrier discharge, FE-DBD) 시스템을 개발하여 플라즈마 특성을 분석하였다. 유연한 파워전극(powered electrode)을 구성하는 유연유전체로 polytetrafluoroethylene (PTFE), polydiemethylsiloxane (PDMS), polyethylene terephthalate (PET)를 사용하여 플라즈마를 발생하였을 때 플라즈마의 광학적 세기와 전자온도는 파워전극에 인가하는 전압이 증가할수록 증가하였고, 전압이 일정할 때는 PTFE < PDMS < PET 순으로 증가하였다. 이는 유전체의 종류와 전압에 따른 축전용량의 변화로 설명할 수 있었고, 유연전극 기반의 대기압 FE-DBD 플라즈마의 특성은 유연한 파워전극을 구성하는 유전체와 파워전극에 인가되는 전압을 변화함으로써 조절될 수 있음을 의미한다. 유연전극 대기압 FE-DBD 시스템은 피부 곡면을 따라 플라즈마가 발생될 수 있으므로 플라즈마 메디신(plasma medicine)에 유용할 것으로 기대한다.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회B
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• pp.2344-2347
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• 2007

To generate negative ion, a small dielectric barrier discharge (DBD) plasma reactor was used in this study and operated by high AC voltage. With increasing of voltage, we can get more negative ions. However unfortunately, if the input voltage is too high, it will also cause formation of ozone which is very harmful to human being health. So the work of finding out the best condition of Voltage and frequency was carried out firstly. After several times of measurement, operating at 20 kHz frequency is the best condition generating high ion concentration without ozone. For the purpose of finding out the best reactor structure, two types of surface dielectric barrier discharge (DBD) reactors were examined to produce negative oxygen ions at the conditions of 20 kHz frequency. The results indicated that the surface DBD reactor with several small tips showed better characteristics for generation of negative oxygen ions at the same condition.

• 한국산업융합학회 논문집
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• 제9권1호
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• pp.13-19
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• 2006

The ozone produced by a dielectric barrier discharge device was injected into the exhaust gas to oxidize a part of NO to $NO_2$, and then the exhaust gas containing the mixture of NO and $NO_2$ was further treated in a catalytic reactor where both NO and $NO_2$ were reduced to $N_2$ in the presence of ammonia as the reducing agent. The $NO_2$ content in the mixture of NO and $NO_2$ was changed by the amount of ozone added to the exhaust gas. The experiments were primarily concerned with the effect of reaction temperature on the catalytic $NO_x$ reduction at various $NO_2$ contents. The increase in the $NO_2$ content by the ozone injection remarkably improved the performance of the catalytic $NO_x$ reduction, especially at low temperatures.

• 한국재료학회지
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• 제26권8호
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• pp.406-411
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• 2016

In order to reuse the photocatalyst and enhance the photolysis efficiency, we have used atmospheric pressure dielectric barrier discharge (APDBD) to clean and activate $TiO_2$ powder. The photocatalytic activity of the $TiO_2$ powder before and after APDBD treatment was evaluated by the degradation of methylene blue (MB) in aqueous solution. The apparent reaction rate constant of photolysis of the first sample of reused $TiO_2$ cleaned by APDBD improved to a level up to 0.32h-1 higher than the 30 % value of the initial $TiO_2$ powder. As the number of photolysis reactions and APDBD cleanings increased, the apparent rate constants gradually decreased; however, the fourth photolysis reaction still showed a value that was greater than 10% of the initial value. In addition, APDBD treatment enhanced the process by which $TiO_2$ effectively adsorbed MB at every photolysis stage.

• Journal of electromagnetic engineering and science
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• 제18권1호
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• pp.52-57
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• 2018

Surface dielectric barrier discharge (SDBD), which is widely used to control turbulence in aerodynamics, has a significant effect on the radar cross-section (RCS). A four-way linearly synthesized SDBD air plasma actuator is designed to bolster the plasma effects on electromagnetic waves. The diffraction angle is calculated to predict the RCS because of the periodic structure of staggered electrodes. The simplified plasma modeling is utilized to calculate the inhomogeneous surface plasma distribution. Monostatic RCS shows the diffraction in the plane perpendicular to the electrode array and the notable distortion by plasma. In comparison, the overall pattern is maintained in the parallel plane with minor plasma effects. The trends also appear in the bistatic RCS, which has a significant difference in the observation plane perpendicular to the electrodes. The peaks by Bragg's diffraction are shown, and the RCS is reduced by 10 dB in a certain range by the plasma effect. The diffraction caused by the actuator and the inhomogeneous air plasma should be considered in designing an SDBD actuator for a wide range of application.