• Title/Summary/Keyword: deposition rate

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Thermal CVD of Silica Thin Film by Organic Silane Compound (유기 실란화합물을 이용한 SiO2 박막의 열CVD)

  • Kim, Byung-Hoon;Ahn, Ho-Geun;Imaishi, Nobuyuki
    • Applied Chemistry for Engineering
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    • v.10 no.7
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    • pp.985-989
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    • 1999
  • Silica($SiO_2$) thin film was synthesized by a low pressure metal organic chemical vapor deposition(LPMOCVD) using organic silane compound. Triethyl orthosilicate was used as a source material. Operation pressure was 1~100 torr at outlet of the reactor and deposition temperature was $600{\sim}900^{\circ}C$. The experimental results showed that the high reaction temperature and high source gas concentration led to higher growth rate of $SiO_2$. The step coverage of films on micro-scale trenches was fairly good, which resulted from the phenomena that the condensed oligomers flow into the trenches. We estimated a reaction path that the source gas polymerizes and produces oligomers (dimer, trimer, tetramer, etc.), which diffuse and condense on the solid surface. The chemical species in the gas phase at the outlet of reactor tube were analyzed by quadrapole mass spectrometer. The peaks, assigned to be monomer, dimer of source gas and geavier molecules, were observed at 650 or $700^{\circ}C$. At higher temperature($900^{\circ}C$), the peaks of the heavy molecules disappeared, because almost all the source gas and intermediate(polymerized oligomer) molecules were oxidized or condensed on colder tube wall.

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Boron Doping Method Using Fiber Laser Annealing of Uniformly Deposited Amorphous Silicon Layer for IBC Solar Cells (IBC형 태양전지를 위한 균일하게 증착된 비정질 실리콘 층의 광섬유 레이저를 이용한 붕소 도핑 방법)

  • Kim, Sung-Chul;Yoon, Ki-Chan;Kyung, Do-Hyun;Lee, Young-Seok;Kwon, Tae-Young;Jung, Woo-Won;Yi, Jun-Sin
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.456-456
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    • 2009
  • Boron doping on an n-type Si wafer is requisite process for IBC (Interdigitated Back Contact) solar cells. Fiber laser annealing is one of boron doping methods. For the boron doping, uniformly coated or deposited film is highly required. Plasma enhanced chemical vapor deposition (PECVD) method provides a uniform dopant film or layer which can facilitate doping. Because amorphous silicon layer absorption range for the wavelength of fiber laser does not match well for the direct annealing. In this study, to enhance thermal affection on the existing p-a-Si:H layer, a ${\mu}c$-Si:H intrinsic layer was deposited on the p-a-Si:H layer additionally by PECVD. To improve heat transfer rate to the amorphous silicon layer, and as heating both sides and protecting boron eliminating from the amorphous silicon layer. For p-a-Si:H layer with the ratio of $SiH_4$ : $B_2H_6$ : $H_2$ = 30 : 30 : 120, at $200^{\circ}C$, 50 W, 0.2 Torr for 30 minutes, and for ${\mu}c$-Si:H intrinsic layer, $SiH_4$ : $H_2$ = 10 : 300, at $200^{\circ}C$, 30 W, 0.5 Torr for 60 minutes, 2 cm $\times$ 2 cm size wafers were used. In consequence of comparing the results of lifetime measurement and sheet resistance relation, the laser condition set of 20 ~ 27 % of power, 150 ~ 160 kHz, 20 ~ 50 mm/s of marking speed, and $10\;{\sim}\;50 {\mu}m$ spacing with continuous wave mode of scanner lens showed the correlation between lifetime and sheet resistance as $100\;{\Omega}/sq$ and $11.8\;{\mu}s$ vs. $17\;{\Omega}/sq$ and $8.2\;{\mu}s$. Comparing to the singly deposited p-a-Si:H layer case, the additional ${\mu}c$-Si:H layer for doping resulted in no trade-offs, but showed slight improvement of both lifetime and sheet resistance, however sheet resistance might be confined by the additional intrinsic layer. This might come from the ineffective crystallization of amorphous silicon layer. For the additional layer case, lifetime and sheet resistance were measured as $84.8\;{\Omega}/sq$ and $11.09\;{\mu}s$ vs. $79.8\;{\Omega}/sq$ and $11.93\;{\mu}s$. The co-existence of $n^+$layeronthesamesurfaceandeliminating the laser damage should be taken into account for an IBC solar cell structure. Heavily doped uniform boron layer by fiber laser brings not only basic and essential conditions for the beginning step of IBC solar cell fabrication processes, but also the controllable doping concentration and depth that can be established according to the deposition conditions of layers.

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Relationship between Higher Protein Contents in the Diet and Adipose Tissue Fat Accumulation (II) -Effect of isocaloric low, medium and high protein diets on the cellular activities of rat liver- (높은률의 단백질 함유 식이와 지방 세포의 지방축적과 상호 관계(II) -동 열량의 저, 중, 고 단백식이가 흰쥐의 간 세포활성에 미치는 영향-)

  • Park, Ock-Jin;Lee, Jung-Hee;Lee, In-Sook
    • Journal of Nutrition and Health
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    • v.17 no.3
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    • pp.210-216
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    • 1984
  • The growth response, lipid deposition, fat free body mass and energy expenditure of weanling rats fed the equal amount of isocaloric diets containing 8%, 13% and 18% casein were investigated. After a period of 30day feeding, the rats fed low level of protein diet were 43.01g lighter than 18% protein group (weight gains of ${85.57}{\pm}{7.50g}$ vs. ${128.58}{\pm}{11.64g}$, p<0.01). Despite of the smaller body size, there were no significant differences in lipid deposition in grams per carcass. Whereas, nitrogen accumulation was significantly greater in 13% and 18% protein fed groups compared to 8%. The estimated energy expenditure were 4,576.61 kJ, 5,440.80kJ and 5,607.67kJ for 8%, 13% and 18% protein groups respectively. The part of excess energy consumed by the low protein group may have been dissipated. The malic enzyme activity in the liver of rats was found to be unaltered by different dietary treatments. From these observations, it was conluded that the retarded growth response in lower protein level may have been originated from the shortage ge of protein supply rather than that of the energy. The protein restriction appeared to be resulted in the lower fat free compartment without affecting the ability of rats to synthesize body lipid in a similar rate to the higher protein group when energy intakes were equalized.

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Transportation and Deposition of Modern Sediments in the Southern Yellow Sea

  • Shi, Xuefa;Chen, Zhihua;Cheng, Zhenbo;Cai, Deling;Bu, Wenrui;Wang, Kunshan;Wei, Jianwei;Yi, Hi-Il
    • Journal of the korean society of oceanography
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    • v.39 no.1
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    • pp.57-71
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    • 2004
  • Based on the data obtained under the China-Korea joint project (1997-2001) and historic observations, the distribution, transportation and sedimentation of sediment in the southern Yellow Sea (SYS) are discussed, and the controversial formation mechanism of muddy sediments is also explored. The sediment transport trend analysis indicates that the net transport direction of sediment in the central SYS (a fine-grained sediment deposited area) points to $123.4^{\circ}E,\;35.1^{\circ}N$, which is a possible sedimentation center in the central SYS. The sediment transport pattern is verified by the distribution of total suspended matter (TSM) concentration and ${\delta}^{13}C$ values of particulate organic carbon (POC), the latter indicates that the bottom water plays a more important role than the surface water in transporting the terrigenous material to the central deep-water area of the SYS, and the Yellow Sea circulation is an important control factor for the sediment transport pattern in the SYS. The carbon isotope signals of organic matter in sediments indicate that the Shandong subaqueous delta has high sedimentation rate and the deposited sediments originate mainly from the modern Yellow River. The terrigenous sediments in deep-water area of the SYS originate mainly from the old Yellow River and the modern Yellow River, and only a small portion originates from the modern Yangtze River. The analytical results of TSM and stable carbon isotopes are further confirmed by another independent tracer of sediment source, polycyclic aromatic hydrocarbons (PAHs). Five light mineral provinces in the SYS can be identified and they indicate inhomogeneity in sources and sedimentary environment. The modern shelf sedimentary processes in the SYS are controlled by shelf dynamic factors. The muddy depositional systems are produced in the shelf low-energy environments, which are controlled by some meso-scale cyclonic eddies (cold eddies) in the central SYS and the area southwest of the Cheju Island. On the contrary, an anticyclonic muddy depositional system (warm eddy sediment) appears in the southeast of the SYS (the area northwest of the Cheju Island). In this study, we give the cyclonic and anticyclonic eddy sedimentation patterns.

The study of X-ray detection characteristic and fabrication photoconductor film thickness for Screen printing method (Screen printing method로 제작된 의료용 광도전체 필름의 Tickness의 따른 X선 검출 특성 평가)

  • Lee, Y.K.;Yon, M.S.;KIM, D.H.;Chun, S.L.;Jung, B.D.;Gang, Sang-Sik;Park, J.G.;Mun, C.W.;Nam, S.H.
    • Journal of the Korean Society of Radiology
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    • v.3 no.2
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    • pp.11-16
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    • 2009
  • Mercury Iodide as good sensitivity at radiation and has an easy peculiarity that operates at low voltage for other photoconductors(a-Se, a-Si, Ge, etc) Based on this characteristic, we studied about an efficiency of the digital x-ray detector in acccordance with the thickness of photoconductor. To solve the problem that is difficult to make a large area film using PVD(Physical Vapor Deposition)method, we used a PIB(Particle In Binder)method. To make a binder paste, we used a PVB(Polyvinylbutyral) as a binder and a DGME(Diethylene Glycol Monobutyl Ether), DGMEA(Diethylene Glycol Monobutyl Ether Acetate) as a solvent. Using this binder paste, we made a polycrystal mercury iodide film that has an each thickness. To evaluate the electrical properties of this films, we measured a darkcurrent, sensitivity and SNR(Signal to Noise Ratio). Mercury iodide film of the 200um thickness has good electrical properties as a result of the measurement. From this result there is a good chance that replace the existing a-Se(Amnorphous seleinum; a-se) with the mercury iodide.

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Comparison of Histopathological Changes on the Three Drugs of Carbon Tetrachloride, Dimethylnitrosamine, Thioacetamide, and Bile Duct Ligation used for Induction of Liver Fibrosis in Rat

  • Kim, Jung-Hun;Park, Mi-Jung;Kim, Yo-El;Kim, Jin-Yeong;Sin, Jin-Hee;Park, Su-Young;Jekal, Seung-Joo
    • Korean Journal of Clinical Laboratory Science
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    • v.43 no.4
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    • pp.194-204
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    • 2011
  • This study was carried out to compare the histopathological differences of liver lesions in carbon tetrachloride ($CCI_4$), dimethylnitrosamine (DMN), thioacetamide (TAA) and bile duct ligation (BDL)-induced rats. $CCl_4$, DMN and TAA were administered intraperitoneally and conducted bile duct ligation for 4 weeks to induce hepatic fibrosis. Indices of liver cell injury (steatosis, hydropic degeneration, bile duct hyperplasia, hemorrhage & hemosiderin deposition), the extent of liver fibrosis (fibrotic area) and the rate of regeneration (number of PCNA-positive cells) were investigated in each group. Liver tissues were stained with hematoxylin-eosin (HE), sirius red, prussian blue and immunostained with ${\alpha}$-smooth muscle actin (${\alpha}$-SMA), transforming growth factor-${\beta}1$ (TGF-${\beta}1$), proliferative cell nuclear antigen (PCNA), and quantified using a computerized image analysis system. Liver cell steatosis was significantly increased in $CCl_4$ and TAA groups, and hydropic degeneration and bile duct hyperplasia were significantly increased in TAA and BDL groups when compared with that in normal control, respectively. Fibrosis area was significantly increased in all four groups, especially in $CCl_4$ group. Correlation between ${\alpha}$-SMA and TGF-${\beta}1$ expressions in four groups was good. Hemorrhage area in liver parenchyma was significantly increased in DMN group only when compared with that in normal control, while hemosiderin deposition area was significantly increased in TAA and BDL groups as well as DMN group. The Number of PCNA-positive cells was significantly increased in all four groups, especially in TAA group. These results indicate that the duration and methods of hepatotoxic drug treatment are very important factors to make plans for animal experimentation on the induction of hepatic fibrogenesis in rats.

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Synthesis and Characterization of the Co-electrolessly Deposited Metallic Interconnect for Solid Oxide Fuel Cell (무전해 코발트 코팅된 금속계 SOFC분리판의 제조 및 특성 평가)

  • Han, Won-Kyu;Ju, Jeong-Woon;Hwang, Gil-Ho;Seo, Hyun-Seok;Shin, Jung-Chul;Jun, Jae-Ho;Kang, Sung-Goon
    • Korean Journal of Materials Research
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    • v.20 no.7
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    • pp.356-363
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    • 2010
  • For this paper, we investigated the area specific resistance (ASR) of commercially available ferritic stainless steels with different chemical compositions for use as solid oxide fuel cells (SOFC) interconnect. After 430h of oxidation, the STS446M alloy demonstrated excellent oxidation resistance and low ASR, of approximately 40 $m{\Omega}cm^2$, of the thermally grown oxide scale, compared to those of other stainless steels. The reason for the low ASR is that the contact resistance between the Pt paste and the oxide scale is reduced due to the plate-like shape of the $Cr_2O_3$(s). However, the acceptable ASR level is considered to be below 100 $m{\Omega}cm^2$ after 40,000 h of use. To further improve the electrical conductivity of the thermally grown oxide on stainless steels, the Co layer was deposited on the stainless steel by means of an electroless deposition method; it was then thermally oxidized to obtain the $Co_3O_4$ layer, which is a highly conductive layer. With the increase of the Co coating thickness, the ASR value decreased. For Co deposited STS444 with 2 ${\mu}m$hickness, the measured ASR at $800^{\circ}$ after 300 h oxidation is around 10 $m{\Omega}cm^2$, which is lower than that of the STS446M, which alloy has a lower ASR value than that of the non-coated STS. The reason for this improved high temperature conductivity seems to be that the Mn is efficiently diffused into the coating layer, which diffusion formed the highly conductive (Mn,Co)$_3O_4$ spinel phases and the thickness of the $Cr_2O_3$(S), which is the rate controlling layer of the electrical conductivity in the SOFC environment and is very thin

Effect of the Yeast (Phaffia rhodozyma) in the Diet on Growth, Body Composition, Muscle Elasticity and Pigmentation of Israeli Strain of Common Carp, Colored Carp (Cyprinus carpio) and Nile Tilapia (Oreochromis niloticus) (사료 중에 첨가된 효모(Phaffia rhodozyma)가 이스라엘 잉어와 비단잉어 및 틸라피아의 성장, 체조성, 근육 탄력도 및 색소 착색에 미치는 영향)

  • Jo Jae-Yoon;Lee Jin Hwan;Jang Dae Hung;Lee Sang Ho;Choi Ji Man
    • Journal of Aquaculture
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    • v.9 no.4
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    • pp.363-375
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    • 1996
  • The effects of the yeast, Phaffia rhodozyme in the diet on growth, body composition, muscle elasticity and pigmentation of Israeli strain of common carp, colored carp and Nile tilapia were investigated. Ten percent of the yeast was added to semi purified diet as an experimental feed 1. Ten percent of brewers yeast in the semi purified diet (experimental feed 2) was tested for comparing the growth performance between two semi purified diets. A commercial diet was also used for the check of growth rate of the semi purified diets. All experimental fish were fed for 10 weeks. The weight gains among the experimental fish were not significantly different (P>0.05). There were not significantly different in body composition, muscle elasticity among the the fishes fed three experimental diets. There were significant differences (P<0.05) of pigment deposition in the muscle of Israeli strain of common can and on the skin of colored carp between treated and non treated group. But there were no differences of pigment deposition in flesh and skin of tilapia among the three diets.

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A Study on Photon Characteristics Generated from Target of Electron Linear Accelerator for Container Security Inspection using MCNP6 Code (MCNP6 코드를 이용한 컨테이너 보안 검색용 전자 선형가속기 표적에서 발생한 광자 평가에 관한 연구)

  • Lee, Chang-Ho;Kim, Jang-Oh;Lee, Yoon-Ji;Jeon, Chan-hee;Lee, Ji-Eun;Min, Byung-In
    • Journal of the Korean Society of Radiology
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    • v.14 no.3
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    • pp.193-201
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    • 2020
  • The purpose of this study is to evaluate the photon characteristics according to the material and thickness of the electrons incidented through a linear accelerator. The computer simulation design is a linear accelerator target consisting of a 2 mm thick tungsten single material and a 1.8 mm and 2.3 mm thick tungsten and copper composite material. In the research method, First, the behavior of primary particles in the target was evaluated by electron fluence and electron energy deposition. Second, photons occurring within the target were evaluated by photon fluence. Finally, the photon angle-energy distribution at a distance of 1 m from the target was evaluated by photon fluence. As a result, first, electrons, which are primary particles, were not released out of the target for electron fluence and energy deposition in the target of a single material and a composite material. Then, electrons were linearly attenuated negatively according to the target thickness. Second, it was found that the composite material target had a higher photon generation than the single material target. This confirmed that the material composition and thickness influences photon production. Finally, photon fluence according to the angular distribution required for shielding analysis was calculated. These results confirmed that the photon generation rate differed depending on the material and thickness of the linear accelerator target. Therefore, this study is necessary for designing and operating a linear accelerator use facility for container security screening that is being introduced in the country. In addition, it is thought that it can be used as basic data for radiation protection.

Magnetic Properties of Spin Valve Ta Underlayer Depending on N2 Concentration and Annealing Temperature (스핀 밸브 Ta 하지층의 질소함유량 변화와 열처리 온도에 따른 자기적 특성)

  • Choi, Yeon-Bong;Kim, Ji-Won;Jo, Soon-Chul;Lee, Chang-Woo
    • Journal of the Korean Magnetics Society
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    • v.15 no.4
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    • pp.226-230
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    • 2005
  • In this research, magnetic properties and annealing effects of the spin valve structures were investigated, which have Ta underlayer deposited with Ar and $N_2$ gas mixture. Also, TaN underlayer as a diffusion barrier and the substrate were investigated. The structure of the spin valve was Si($SiO_2$)/Ta(TaN)/NiFe/CoFe/Cu/CoFe/FeMn/Ta. Deposition rate was decreased and resistivity and roughness of the TaN films were increased as the $N_2$ gas flow was increased. The XRD results after high temperature annealing showed that Silicides were created in Si/Ta layer, but not in Si/TaN layer. Magnetoresistance ratio (MR) and exchange coupling field ($H_{ex}$) were decreased when the $N_2$ gas flow was increased over 4.0 sccm. The MR of the spin valves with Ta and TaN films deposited with up to 4.0 sccm of $N_2$ gas flow was increased about $0.5\%$ until the annealing temperature of up to $200^{\circ}C$ and then, decreased. TaN film deposited with 8.0 sccm of $N_2$ gas flow showed twice the adhesion of the Ta film. The above results indicate that with 3.0 sccm of $N_2$ gas flow during the Ta underlayer deposition, the magnetic properties of the spin valves are maintained, while the underlayer may be used as a diffusion barrier and the adhesion between the Si substrate and the underlayer is increased.