Effect of the additive gas on the bonding structure and mechanical properties of the DLC films deposited by RF-PECVD (RF-PECVD법에 의해 증착된 DLC 박막의 결합구조와 기계적 특성에 관한 보조가스의 영향)
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- Journal of the Korean Crystal Growth and Crystal Technology
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- v.25 no.4
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- pp.145-152
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- 2015