1 |
S.J. Cho, K.R. Lee, K.Y. Eun, J.H. Hahn and D.H. Ko, "Evaluation of elastic properties of DLC films using substrate etching techniques", J. Kor. Ceram. Soc. 35 (1998) 813.
|
2 |
Q. Wei, R.J. Narayan, J. Narayan, J. Sankar and A.K. Sharma, "Improvement of wear resistance of pulsed laser deposited diamond-like carbon films through incorporation of metals", Mater. Sci. and Eng. B53 (1998) 262.
|
3 |
A. Grill, B.S. Meyerson, V.V. Patel, J.A. Reimer and M.A. Petrich, "Inhomogeneous carbon bonding in hydrogenated amorphous carbon films", J. Appl. Phys. 61 (1987) 2874.
DOI
|
4 |
K. Enke, "Some new results on the fabrication of and the mechanical, electrical and optical properties of i-carbon layers", Thin Sold Films 80 (1981) 227.
DOI
ScienceOn
|
5 |
H. Tsai and D.B. Bogy, "Charaterization of diamond-like carbon films and their application as overcoats on thin-film media for magnetic recording", J. Vac. Sci. Technol. A 5 (1987) 3287.
DOI
|
6 |
B. Kim and T. Grotjohn, "Comparison of a-C:H films deposited from methane-argon and acetylene-argon mixtures by electron cyclotron resonance-chemical vapor deposition discharges", Diamond Relat. Mater. 9 (2000) 37.
DOI
ScienceOn
|
7 |
A. von Keudell and W. Jacob, "Interaction of hydrogen plasmas with hydrocarbon films, investigated by infrared spectroscopy using an optical cavity substrate", J. Vac. Sci. Technol. A 15(2) (1997) 402.
DOI
ScienceOn
|
8 |
E. Braca, J.M. Kenny, D. Korzec and J Engemann, "Transition from polymer-like to diamond-like carbon coatings synthesized by a hybrid radiofrequency-microwave plasma source", Thin Solid Films 394 (2001) 29.
DOI
ScienceOn
|
9 |
R.O. Dillon, J.A. Woolam and V. Katkanant, "Use of Raman scattering to investigate disorder and crystallite formation in as deposited and annealed carbon films", Phys. Rev. B29 (1984) 3482.
|
10 |
S.S. Camargo Jr., R.A. Santos, A.L. Baia Neto, R. Carius and F. Finger, "Structural modifications and temperature stability of silicon incorporated diamond-like a-C:H films", Thin Sold Films 332 (1998) 130.
DOI
ScienceOn
|
11 |
T. Kawato and K. Kondo, "Effects of oxygen on CVD diamond synthesis", Jpn. J. Appl. Phy. 26 (1987) 1429.
DOI
|
12 |
V. Paishin, E.I. Meletis, S. Ves and S. Logothetidis, "Characterization of ion-beam-deposited diamond-like carbon films", Thin Solid Films 270 (1995) 165.
DOI
ScienceOn
|
13 |
J.H. Kaufman, S. Metin and D.D. Saperstein, "Symmetry breaking in nitrogen-doped amorphous carbon: Infrared observation of the Raman-active G and D bands", Phys. Rev. B39 (1989) 13053.
|
14 |
K.R. Lee, Y.J. Baik and K.Y. Eun, "Stress relief behavior of diamond-like carbon films on glasses", Dia. Rel. Mater. 2 (1993) 218.
DOI
ScienceOn
|
15 |
D.F. Franceschini, C.A. Achete and F.L. Freire, Jr., "Internal stress reduction by nitrogen incorporation in hard amorphous carbon thin films", Appl. Phys. Lett. 60 (1992) 3229.
DOI
|
16 |
G.J. Vandendentop, M. Kawasaki, R.M. Nix, I.G. Brown, M. Salmeron and G.A. Somorjai, "Formation of hydrogenated amorphous carbon films of controlled hardness from a methane plasma", Phys. Rev. B41 (1990) 3200.
|
17 |
T. Yoshitake, T. Nishiyama and K. Nagayama, "The role of hydrogen and oxygen gas in the growth of carbon thin films by pulsed laser deposition", Diamond Relat. Mater. 9 (2000) 689.
DOI
ScienceOn
|
18 |
T. Inoue, S. Ohshio, H. Saitoh and K. Kamata, "Preparation of nitrogen containing carbon films using chemical vapor deposition enhanced by electron cyclotron resonance plasma", Appl. Phys. Lett. 67 (1995) 353.
DOI
ScienceOn
|
19 |
W.C. Chan, M.K. Fung, K.H. Lai, I. Bello, S.T. Lee and C.S. Lee, "Mechanical properties of amorphous carbon nitride films synthesized by electron cyclotron resonance microwave plasma chemical vapor deposition", J. Non-Cryst. Solids. 254 (1999) 180.
DOI
ScienceOn
|
20 |
D. Beeman, J. Silverman, R. Lynds and M.R. Anderson, "Modeling studies of amorphous carbon", Phys. Rev. B30 (1984) 870.
DOI
|
21 |
S. Kumar, "Unhydrogenated diamond-like carbon films prepared by dc plasma chemical vapor deposition at room temperature", Appl. Phys. Lett. 58 (1991) 1836.
DOI
|
22 |
L.A. Farrow, B.J. Wilkens, A.S. Gozdz and D.L. Hart, "Raman scattering and hydrogen-content analysis of amorphous hydrogenated carbon films irradiated with 200-KeV ions", Phys. Rev. B 41 (1990) 10132.
DOI
ScienceOn
|
23 |
J. Shiao and R.W. Hoffman, "Studies of diamond-like and nitrogen-containing diamond-like carbon using laser Raman spectroscopy", Thin Solid Films 283 (1996) 145.
DOI
ScienceOn
|
24 |
M. Guerino, M. Massi, H.S. Maciel, C. Otani and R.D. Mansano, "The effects of the nitrogen on the electrical and structural properties of the diamond-like carbon (DLC) films", Microelectronics Journal 34 (2003) 639.
DOI
ScienceOn
|
25 |
S.M. Smith, S.A. Voigh, H. Tompkins, A. Hooper, A.A. Talin and J. Vella, "Nitrogen-doped plasma enhanced chemical vapor deposited (PECVD) amorphous carbon:processes and properties", Thin Solid Films 398 (2001) 163.
|
26 |
S.F. Yoon, K.H. Tan, R.J. Ahn, and Q.F. Huang, "Effect of microwave power on diamond-like carbon films deposited using electron cyclotron resonance chemical vapor deposition", Diam. Relat. Mater. 9 (2000) 2024.
DOI
ScienceOn
|
27 |
M.S. Hwang and C. Lee, "Effects of oxygen and nitrogen addition on the optical properties of diamond-like carbon films", Mater. Sci. Eng. B75 (2000) 24.
DOI
ScienceOn
|
28 |
M. Guerino, M. Massi, H.S. Maciel, C. Otani, R.D. Mansano, P. Verdonck and J. Libardi, "The influence of nitrogen on the dielectric constant and surface hardness in diamond-like carbon (DLC) films", Diamond Relat. Mater 13 (2004) 316.
DOI
ScienceOn
|