• Title/Summary/Keyword: deposition rate

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Rear Surface Passivation of Silicon Solar Cell with AlON Layer by Reactive Magnetron Sputtering

  • Moon, Sun-Woo;Kim, Eun-Kyeom;Park, Won-Woong;Kim, Kyung-Hoon;Kim, Sung-Min;Kim, Dong-Hwan;Han, Seung-Hee
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.430-430
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    • 2012
  • The surface recombination velocity of the silicon solar cell could be reduced by passivation with insulating layers such as $SiO_2$, SiNx, $Al_2O_3$, a-Si. Especially, the aluminium oxide has advantages over other materials at rear surface, because negative fixed charge via Al vacancy has an additional back surface field effect (BSF). It can increase the lifetime of the hole carrier in p-type silicon. The aluminium oxide thin film layer is usually deposited by atomic layer deposition (ALD) technique, which is expensive and has low deposition rate. In this study, ICP-assisted reactive magnetron sputtering technique was adopted to overcome drawbacks of ALD technique. In addition, it has been known that by annealing aluminium oxide layer in nitrogen atmosphere, the negative fixed charge effect could be further improved. By using ICP-assisted reactive magnetron sputtering technique, oxygen to nitrogen ratio could be precisely controlled. Fabricated aluminium oxy-nitride (AlON) layer on silicon wafers were analyzed by x-ray photoelectron spectroscopy (XPS) to investigate the atomic concentration ratio and chemical states. The electrical properties of Al/($Al_2O_3$ or $SiO_2/Al_2O_3$)/Si (MIS) devices were characterized by the C-V measurement technique using HP 4284A. The detailed characteristics of the AlON passivation layer will be shown and discussed.

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Annealing effects of organic inorganic hybrid silica material with C-H hydrogen bonds (C-H 수소결합을 갖는 유무기 하이브리드 물질에서의 열처리 효과)

  • Oh, Teresa
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.44 no.11
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    • pp.20-25
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    • 2007
  • In this paper, It was reported the dielectric constant in organic inorganic hybrid silica material such as SiOC film modeling of bond structure by annealing in organic properties. The organic inorganic hybrid silica material were deposited using bis-trimethylsilymethane (BTMSM, [(CH3)3Si]2CH2) and oxygen gas precursor by a plasma chemical vapor deposition (CVD). The organic inorganic hybrid silica material have three types according to the deposition condition. The dielectric constant of the films were performed MIS(Al/Si-O-C film/p-Si) structure. The C 1s spectra in organin inorganic silica materials with the flow rate ratio of O2/BTMSM=1.5 was organometallic carbon with the peak 282.9 eV by XPS. It means that organometallic carbon component is the cross-link bonding structure with good stability. The dielectric constant was the lowest at annealed films with cross-link bonding structure.

Image Evaluation and Association Analysis of the Cardiovascular Disease of the Degree of Pancreatic Steatosis in Ultrasonography

  • Cho, Jin-Young;Ye, Soo-Young;Ko, Seong-Jin
    • Transactions on Electrical and Electronic Materials
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    • v.17 no.6
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    • pp.375-379
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    • 2016
  • Increasing fat tissue of obese people, increases the rate of cardiovascular disease, diabetes, metabolic syndromes and dyslipidemia. An increase in the focal tissue of pancreas is a known risk factor of these diseases. Although there exists sufficient research on the diagnosis and treatment of pancreatic cancer, studies have been done on fatty pancreas. In this study, based on ultrasound imaging and using a texture characteristic of GLCM, fatty pancreas was divided into three categories: mild, moderate and severe. We compared and analyzed the three groups was by Pancreatic ultrasonography and body characteristics, serological tests, pressure and the degree of arteriosclerosis, against normal control group. The following parameters of control and test groups were measured: WC (waist circumference),BMI (body mass index), TC (total cholesterol), TG (triglyceride), HDL-C (High-density lipoprotein cholesterol) and LDL-C (Low-density lipoprotein cholesterol), SBP (systolic blood pressure), BST (Blood Sugar Test) and aortic PWV (pulse wave velocity). We observed the values correspondingly increasing fat deposition. However, ABI (Ankle Brachial pressure index) stenosis and HDL-C levels decreased with increasing fat deposit (p <0.05); a drop in these parameters are known to be harmful to the human body. The difference in texture characteristics between normal control group and pancreatic fatty group (mild, moderate, and severe) was statistically confirmed. Ultrasound imaging of pancreatic steatosis categorized the disease as mild, moderate and severe based on the characteristic texture. In conclusion, we observed on increase in metabolic syndrome, dyslipidemia, and arteriosclerosis, proportional to the degree of pancreatic fat deposition. The escalation of these diseases was confirmed and was directly related with predictors of cardiovascular diseases.

A study of improving filtration efficiency through SiC whisker synthesis on carbon felt by CVD VS method

  • Kim, Gwang-Ju;Choe, Du-Jin
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.150-150
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    • 2016
  • Mankind is enjoying a great convenience of their life by the rapid growth of secondary industry since the Industrial Revolution and it is possible due to the invention of huge power such as engine. The automobile which plays the important role of industrial development and human movement is powered by the Engine Module, and especially Diesel engine is widely used because of mechanical durability and energy efficiency. The main work mechanism of the Diesel engine is composed of inhalation of the organic material (coal, oil, etc.), combustion, explosion and exhaust Cycle process then the carbon compound emissions during the last exhaust process are essential which is known as the major causes of air pollution issues in recent years. In particular, COx, called carbon oxide compound which is composed of a very small size of the particles from several ten to hundred nano meter and they exist as a suspension in the atmosphere. These Diesel particles can be accumulated at the respiratory organs and cause many serious diseases. In order to compensate for the weak point of such a Diesel Engine, the DPF(Diesel Particulate Filter) post-cleaning equipment has been used and it mainly consists of ceramic materials(SiC, Cordierite etc) because of the necessity for the engine system durability on the exposure of high temperature, high pressure and chemical harsh environmental. Ceramic Material filter, but it remains a lot of problems yet, such as limitations of collecting very small particles below micro size, high cost due to difficulties of manufacturing process and low fuel consumption efficiency due to back pressure increase by the small pore structure. This study is to test the possibility of new structure by direct infiltration of SiC Whisker on Carbon felt as the next generation filter and this new filter is expected to improve the above various problems of the Ceramic DPF currently in use and reduction of the cost simultaneously. In this experiment, non-catalytic VS CVD (Vapor-Solid Chemical Vaporized Deposition) system was adopted to keep high mechanical properties of SiC and MTS (Methyl-Trichloro-Silane) gas used as source and H2 gas used as dilute gas. From this, the suitable whisker growth for high performance filter was observed depending on each deposition conditions change (input gas ratio, temperature, mass flow rate etc.).

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The Thermal Stability and Elevated Temperature Mechanical Properties of Spray-Deposited $SiC_P$/Al-11.7Fe-1.3V-1.7Si Composite

  • Hao, L.;He, Y.Q.;Wang, Na;Chen, Z.H.;Chen, Z.G.;Yan, H.G.;Xu, Z.K.
    • Advanced Composite Materials
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    • v.18 no.4
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    • pp.351-364
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    • 2009
  • The thermal stability and elevated temperature mechanical properties of $SiC_P$/Al-11.7Fe-1.3V-1.7Si (Al-11.7Fe-1.3V-1.7Si reinforced with SiC particulates) composites sheets prepared by spray deposition (SD) $\rightarrow$ hot pressing $\rightarrow$ rolling process were investigated. The experimental results showed that the composite possessed high ${\sigma}_b$ (elevated temperature tensile strength), for instance, ${\sigma}_b$ was 315.8 MPa, which was tested at $315^{\circ}C$, meanwhile the figure was 232.6 MPa tested at $400^{\circ}C$, and the elongations were 2.5% and 1.4%, respectively. Furthermore, the composite sheets exhibited excellent thermal stability: the hardness showed no significant decline after annealing at $550^{\circ}C$ for 200 h or at $600^{\circ}C$ for 10 h. The good elevated temperature mechanical properties and excellent thermal stability should mainly be attributed to the formation of spherical ${\alpha}-Al_{12}(Fe,\;V)_3Si$ dispersed phase particulates in the aluminum matrix. Furthermore, the addition of SiC particles into the alloy is another important factor, which the following properties are responsible for. The resultant Si of the reaction between Al matrix and SiC particles diffused into Al matrix can stabilize ${\alpha}-Al_{12}(Fe,\;V)_3Si$ dispersed phase; in addition, the interface (Si layer) improved the wettability of Al/$SiC_P$, hence, elevated the bonding between them. Furthermore, the fine $Al_4C_3$ phase also strengthened the matrix as a dispersion-strengthened phase. Meanwhile, load is transferred from Al matrix to SiC particles, which increased the cooling rate of the melt droplets and improved the solution strengthening and dispersion strengthening.

Carcass Characteristics and Qualitative Attributes of Pork from Immunocastrated Animals

  • Caldara, Fabiana Ribeiro;Moi, Marta;Santos, Luan Sousa Dos;Paz, Ibiara Correia De Lima Almeida;Garcia, Rodrigo Garofallo;Naas, Irenilza De Alencar;Fernandes, Alexandre Rodrigo Mendes
    • Asian-Australasian Journal of Animal Sciences
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    • v.26 no.11
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    • pp.1630-1636
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    • 2013
  • An investigation was carried out to assess the carcass characteristics and meat quality aspects of immunocastrated male pigs of medium genetic potential for lean meat deposition in carcass (53 to 55%). When the crossbred Large White x Landrace pigs (n = 45) were 70 days old, they were distributed in a totally randomized design in three treatments (castrated males, females and immunocastrated males) with three replicates of five animals. The pigs were slaughtered when they were 140 days old. Carcass temperature and pH were recorded twice, at 45 min and 24 h after slaughter. The carcasses were evaluated for hot and cold carcass yield, commercial cuts yield, length and depth, back fat thickness, loin eye area and lean meat percentage. The Longissimus dorsi muscle was extracted for analysis of color ($L^*$, $a^*$, $b^*$), exudate loss, cooking loss and centesimal and sensorial analysis of the meat. There were no significant differences for the evaluated parameters between castrated males, immunocastrated males and females, except for backfat thickness between the 7th and 8th thoracic vertebra and the point P2 (lower for immunocastrated males) and carcass temperature at 45 min post slaughter (higher in immunocastrated males), however, this did not interfer with the rate of pH decrease post mortem and the meat quality. The results from this research did not indicate a benefit of immunocastration on carcass characteristics of pigs of medium genetic potential for lean meat deposition in carcass, when compared to surgical castration.

$Ba(Zr_{0.85}Y_{0.15})O_{3-\delta}$-NI Composite Membrane for Hydrogen Separation by Aerosol Deposition Method (에어로졸 증착법(Aerosol Depostion method)에 의한 $Ba(Zr_{0.85}Y_{0.15})O_{3-\delta}$-NI 수소분리막 제조)

  • Park, Young-Soo;Choi, Jin-Sub;Byoun, Myoung-Sub;Kim, Jin-Ho;Hwang, Kwang-Taek
    • Journal of Hydrogen and New Energy
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    • v.21 no.4
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    • pp.271-277
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    • 2010
  • $(Ba(Zr_{0.85}Y_{0.15})O_{3-\delta})$ oxide, showing high protonic conductivity at high temperatures and good chemical stability with $CO_2$ are referred to as hydrogen separation membrane. For high efficiency of hydrogen separation ($H_2$ flux and selectivity) and low fabrication cost, ultimate thin and dense BZY-Ni layer has to be coated on a porous substrate such as $ZrO_2$. Aerosol depostion (AD) process is a novel technique to grow ceramic film with high density and nano-crystal structure at room-temperature, and may be applicable to the fabrication process of AD integration ceramic layer effectively. XRD, SEM, X-ray mapping measurements were conducted in order to analyze the characteristics of BZY-Ni membrane fabricated by AD process. it is observed that it is homogeneous distribution for BZY-Ni. The result of $H_2$ permeation rate suggests that BZY-Ni composite is higher than BZY.

Changes in Sediment Characteristics in the Eastern Tidal Flat of Donggum Island in Ganghwa, west coast of Korea (강화 동검도 동부 갯벌의 퇴적 특성 변화)

  • Woo, Han Jun;Jang, Seok;Kwon, Su Jae
    • Journal of Wetlands Research
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    • v.14 no.3
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    • pp.375-384
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    • 2012
  • The sedimentary processes of the Ganghwa tidal flat has been changed over 20 years because of the large-scale construction projects. The sedimentary environment of the Donggum tidal flat, located in the eastern part of Ganghwa tidal flat and in the lower reaches of Yeomha channel, was affected by changes the tidal current regime and estuarine circulation. These resulted an occurrence of rapid deposition in the tidal flat. The silt-clay laminated silt facies in the upper parts of two core sediments suggested that deposition had been relatively high in the tidal flat. The sedimentation rates from the cores using $^{210}Pb$ analysis were 3.25cm/year(st. 3) and 3.47cm/year(st. 5). However the short-term sediment accumulation rates from 2010 to 2012 were mostly less than 1cm/year, indicated that the sediments deposited relatively low rates. As a result, the sediment in the Donggum tidal flat rapidly accumulated during 2000s due to constructions of man-made structures. Recently, the increase of elevation in the tidal flat resulted to show relatively low sedimentation rate with seasonal variations.

Tunable Magnetism by Magnetic Phase in $Fe_3O_4$/ZnO Multilayer

  • Yun, Jong-Gu;Park, Chang-Yeop;Yun, Sun-Gil
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2011.10a
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    • pp.21.2-21.2
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    • 2011
  • $Fe_3O_4$ having half metallic property is one of the efficient spin filtering materials which are widely used in spintronic research field and ZnO is wide band gap semiconductor which can be used by tunnel barrier or semiconductor channel in spin MOSFET. We investigated the magnetic and the electric properties of $Fe_3O_4$/ZnO multilayer fabricated on c-$Al_2O_3$ substrate by pulsed laser deposition (PLD). For multilayer films, PLD was performed at variable temperatures such as $200{\sim}750^{\circ}C$ and at target distance from 40 to 80 mm, KrF eximer laser of 1.5 $J/cm^2$ and a reputation rate of 2Hz. $Fe_3O_4$/ZnO multilayers were deposited at $4{\times}10^{-6}$ Torr. After fabricating $Fe_3O_4$/ZnO multilayers, $Fe_3O_4$/ZnO multilayers were treated by RTA(Rapid Thermal Annealing) at various temperature to change magnetic phase. The magnetism of the multilayer is changed by thickness of the ZnO tunnel barrier. Magnetic phase of FexOy showed a very small magnetism due to $Fe_2O_3$ ${\alpha}$-phase, but large magnetism from $Fe_3O_4$ or $Fe_2O_3$ ${\gamma}$-phase was observed. In the present study, effect of the ZnO thickness on the MR (magnetoresistance) ratio was investigated in detail.

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Improvement of Electrical Properties by Controlling Nickel Plating Temperatures for All Solid Alumina Capacitors

  • Jeong, Myung-Sun;Ju, Byeong-Kwon;Oh, Young-Jei;Lee, Jeon-Kook
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2011.10a
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    • pp.25.2-25.2
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    • 2011
  • Recently, thin film capacitors used for vehicle inverters are small size, high capacitance, fast response, and large capacitance. But its applications were made up of liquid as electrolyte, so its capacitors are limited to low operating temperature range and the polarity. This research proposes using Ni-P alloys by electroless plating as the electrode instead of liquid electrode. Our substrate has a high aspect ratio and complicated shape because of anodic aluminum oxide (AAO). We used AAO because film thickness and effective surface area are depended on for high capacitance. As the metal electrode instead of electrolyte is injected into AAO, the film capacitor has advantages high voltage, wide operating temperature, and excellent frequency property. However, thin film capacitor made by electroless-plated Ni on AAO for full-filling into etched tunnel was limited from optimizing the deposition process so as to prevent open-through pore structures at the electroless plating owing to complicated morphological structure. In this paper, the electroless plating parameters are controlled by temperature in electroless Ni plating for reducing reaction rate. The Electrical properties with I-V and capacitance density were measured. By using nickel electrode, the capacitance density for the etched and Ni electroless plated films was 100 nFcm-2 while that for a film without any etch tunnel was 12.5 nFcm-2. Breakdown voltage and leakage current are improved, as the properties of metal deposition by electroless plating. The synthesized final nanostructures were characterized by scanning electron microscopy (SEM).

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