• 제목/요약/키워드: critical dimension

검색결과 294건 처리시간 0.037초

Methods to Measure the Critical Dimension of the Bottoms of Through-Silicon Vias Using White-Light Scanning Interferometry

  • Hyun, Changhong;Kim, Seongryong;Pahk, Heuijae
    • Journal of the Optical Society of Korea
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    • 제18권5호
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    • pp.531-537
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    • 2014
  • Through-silicon vias (TSVs) are fine, deep holes fabricated for connecting vertically stacked wafers during three-dimensional packaging of semiconductors. Measurement of the TSV geometry is very important because TSVs that are not manufactured as designed can cause many problems, and measuring the critical dimension (CD) of TSVs becomes more and more important, along with depth measurement. Applying white-light scanning interferometry to TSV measurement, especially the bottom CD measurement, is difficult due to the attenuation of light around the edge of the bottom of the hole when using a low numerical aperture. In this paper we propose and demonstrate four bottom CD measurement methods for TSVs: the cross section method, profile analysis method, tomographic image analysis method, and the two-dimensional Gaussian fitting method. To verify and demonstrate these methods, a practical TSV sample with a high aspect ratio of 11.2 is prepared and tested. The results from the proposed measurement methods using white-light scanning interferometry are compared to results from scanning electron microscope (SEM) measurements. The accuracy is highest for the cross section method, with an error of 3.5%, while a relative repeatability of 3.2% is achieved by the two-dimensional Gaussian fitting method.

편광자-보정기-시료-보정기-검광자 배치를 가지는 준 수직입사 타원계의 타원식 (Ellipsometric Expressions for a Near-normal-incidence Ellipsometer with the Polarizer-compensator-sample-compensator-analyzer Configuration)

  • 김상열
    • 한국광학회지
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    • 제32권4호
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    • pp.172-179
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    • 2021
  • 높은 종횡비를 가지는 미세 패턴 시료의 하부층 구조결함에 대해 높은 민감도를 가지는 광학적 임계치수 측정 장비로서 준 수직입사 타원계를 제안한다. 이 준 수직입사 타원계에서는 입사광은 편광자와 위상지연자를 순차적으로 통과하며 반사광은 이들을 역순으로 통과한다. 하나의 편광자와 하나의 위상지연자를 입사광과 반사광이 공유하며 편광자와 위상지연자의 여러 방위각 조합에서 측정한 빛의 세기로부터 타원상수를 결정하는 이 준 수직입사 타원계의 측정원리를 검토하고 최적의 타원상수 측정방법을 제시한다.

상온상압 초전도체(LK-99) 개발을 위한 고찰 (Consideration for the development of room-temperature ambient-pressure superconductor (LK-99))

  • 이석배;김지훈;임성연;안수민;권영완;오근호
    • 한국결정성장학회지
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    • 제33권2호
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    • pp.61-70
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    • 2023
  • 이 논문에서는 기존의 초전도 현상을 바라보는 물리학자들의 생각의 흐름과 한계들을 살펴보고, 통계 열역학적 액체론의 관점에서 제시한 이론적 배경을 통해 상온 상압 초전도체가 개발될 수 있음을 약술하였다. 이것이 가능 할 방안은, 전자들이 돌아다닐 수 있는 상태수가 현저히 제한되는 1-Dimension에 가까운 전자 상태이어야 한다는 것과 그 상태에 있는 전자들이 액체적 특성이 나타날 수 있을 정도로 전자-전자 상호작용이 빈번한 상태이어야 한다는 것이다. 이러한 실행 예로서 우연한 기회에 실마리를 얻어 수많은 실험으로 구조를 밝혀낸 LK-99(본 연구에서 개발한 상온 상압 초전도체의 이름)의 개발 자료를 보고하며, 이에 세계 최초로 상압에서 임계온도가 97℃를 능가하는 초전도 물질의 특성과 발견에 대한 이론적, 실험적 근거를 요약하였다.

수직접지전극의 임계길이 산정 (Computation of Critical Length for Vertical Grounding Electrode and Counterpoise)

  • 이복희;조정현;이봉;김종호;이승주;이강수;김기복;김태기
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2009년도 제40회 하계학술대회
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    • pp.1491_1492
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    • 2009
  • The impedance of a vertical grounding electrode is not lowered by expanding the dimension of the grounding electrode, and the length of thr vertical grounding electrode which shows the minimum value of the grounding impedance for each condition of frequency and soil characteristics is existent, and it is defined as Critical length. In this paper, the critical lengths for the vertical grounding electrodes are calculated by using the distributed parameter circuit model. The adequacy of the simulations has been confirmed by comparing the simulated results with the measured results.

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WEAKLY EINSTEIN CRITICAL POINT EQUATION

  • Hwang, Seungsu;Yun, Gabjin
    • 대한수학회보
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    • 제53권4호
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    • pp.1087-1094
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    • 2016
  • On a compact n-dimensional manifold M, it has been conjectured that a critical point of the total scalar curvature, restricted to the space of metrics with constant scalar curvature of unit volume, is Einstein. In this paper, after derivng an interesting curvature identity, we show that the conjecture is true in dimension three and four when g is weakly Einstein. In higher dimensional case $n{\geq}5$, we also show that the conjecture is true under an additional Ricci curvature bound. Moreover, we prove that the manifold is isometric to a standard n-sphere when it is n-dimensional weakly Einstein and the kernel of the linearized scalar curvature operator is nontrivial.

댐퍼의 두께와 재질 변화에 따른 초전도 선재에 미치는 자장특성 분석 (Analysis of Magnetic Field of Superconducting Winding According to the Changed Damper Thickness and Material)

  • 정재식;이상호;홍정표;조영식
    • 한국초전도ㆍ저온공학회논문지
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    • 제14권3호
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    • pp.5-8
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    • 2012
  • Superconducting windings of synchronous machine have to be operated in below the critical temperature, critical current density and critical magnetic field. If one of these characteristics does not satisfied, then the quench occurred in superconducting winding. Especially the armature current dramatically increased as the superconducting generator is short-circuited at the rated load condition and magnetic field in field winding increased due to the armature current. Therefore, damper is required to reduce the magnetic field of field winding which increases reliability of the superconducting generator. Damper dimension can be decided by time constant[1-2]. In this paper the basic model is high-power and low-speed superconducting generator. Damper time constant was calculated from the changed damper thickness and material. Magnetic flux of field coil at the basic model and changed damper time constant model is analyzed.

결정적 사건기법(CIT)을 이용한 소비자의 유통채널 이용경험에 대한 연구 (Understanding the Consumer Experience in Retailing Channel Using Critical Incident Technique)

  • 최아영;나종연
    • 한국생활과학회지
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    • 제20권6호
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    • pp.1185-1198
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    • 2011
  • This research explores the consumers' experience in retailing channel(offline channel and online channel) using the critical incident technique. This research aims to clarify the common incidents within retailing channels which implies decisive factors over the channels, and to clarify the contrasts between channels to compare advantages and disadvantages. Therefore, the research is designed to collect the consumers' narrative of those who have used both channels in 3 months. Classifications are conducted with other researchers majoring consumer science. The results address how impressive experiences are constructed on each channel in three dimensions: product, information search, and the purchase-service dimension. These results are able to provide implications for offline and online retailers and directions for future research.

박판 스탬핑 공정의 주름발생 예측에 관한 연구 (Study on the Wrinkling Prediction in Sheet Metal Stamping Processes)

  • 황보원;금영탁
    • 한국자동차공학회논문집
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    • 제9권3호
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    • pp.131-142
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    • 2001
  • A wrinkling is the instability phenomenon influenced by material properties, shape geometry, forming conditions, stress state, etc. The wrinkling is considered as a critical defect in appearance of product. Many wrinkling prediction methods using thickness strain distribution and farming analysis have been proposed. The wrinkling, however, is not easily predicted precisely by these methods. In this study, the region in the biaxial plane stress state is modeled with a rectangular plate introducing the effective dimension, and critical stress values for the wrinkling are calculated. Prediction index for the wrinkling is then evaluated by normalizing the actual stress with respect to the critical stress. In order to show the validity and efficiency of the method proposed, the wrinkling prediction for a squared sheet in the uniaxial tensile stress and auto-body front finder panel is performed.

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Prediction of the welding distortion of large steel structure with mechanical restraint using equivalent load methods

  • Park, Jeong-ung;An, Gyubaek
    • International Journal of Naval Architecture and Ocean Engineering
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    • 제9권3호
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    • pp.315-325
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    • 2017
  • The design dimension may not be satisfactory at the final stage due to the welding during the assembly stage, leading to cutting or adding the components in large structure constructions. The productivity is depend on accuracy of the welding quality especially at assembly stage. Therefore, it is of utmost importance to decide the component dimension during each assembly stage considering the above situations during the designing stage by exactly predicting welding deformation before the welding is done. Further, if the system that predicts whether welding deformation is equipped, it is possible to take measures to reduce deformation through FE analysis, helping in saving time for correcting work by arresting the parts which are prone to having welding deformation. For the FE analysis to predict the deformation of a large steel structure, calculation time, modeling, constraints in each assembly stage and critical welding length have to be considered. In case of fillet welding deformation, around 300 mm is sufficient as a critical welding length of the specimen as proposed by the existing researches. However, the critical length in case of butt welding is around 1000 mm, which is far longer than that suggested in the existing researches. For the external constraint, which occurs as the geometry of structure is changed according to the assembly stage, constraint factor is drawn from the elastic FE analysis and test results, and the magnitude of equivalent force according to constraint is decided. The comparison study for the elastic FE analysis result and measurement for the large steel structure based on the above results reveals that the analysis results are in the range of 80-118% against measurement values, both matching each other well. Further, the deformation of fillet welding in the main plate among the total block occupies 66-89%, making welding deformation in the main plate far larger than the welding deformation in the longitudinal and transverse girders.

Introducing Smart Learning Framework in the Digital World: Towards the Enhancement of Technology-Driven Innovation of Arabic Smart Learning

  • Alkhammash, Eman H.
    • International Journal of Computer Science & Network Security
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    • 제22권11호
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    • pp.331-337
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    • 2022
  • Smart learning is augmented with digital, context-aware, and adaptable technologies to encourage students to learn better and faster. To ensure that digital learning is successful and that implementation is efficient, it is critical that the dimensions of digital learning are arranged correctly and that interactions between the various elements are merged in an efficient and optimal manner. This paper builds and discusses a basic framework for smart learning in the digital age, aimed to improve students' abilities and performance in learning. The proposed framework consists of five dimensions: Teacher, Technology, Learner, Digital content, and Evaluation. The Teacher and Learner dimensions operate on two levels: (a) an abstract level to fit in knowledge and skills or interpersonal characteristics and (b) a concrete level in the form of digital devices used by teachers and learners. Moreover, this paper proposes asynchronous online course delivery model. An Arabic smart learning platform has been developed, based on these smart learning core dimensions and the asynchronous online course delivery model, because despite the official status of this language in many countries, there is a lack of Arabic platforms to teach Arabic. Moreover, many non-native Arabic speakers around the world have expressed an interest in learning it. The Arabic digital platform consists of over 70 lessons classified into three competence levels: beginner, intermediate, and advanced, delivered by Arabic experts and Arabic linguists from various Arab countries. The five dimensions are described for the Arabic platform in this paper. Learner dimension is the Arabic and non-Arabic speakers, Teacher dimension is Arabic experts and Arabic linguistics, Technology dimension consists of technology for Arabic platform that includes web design, cloud computing, big data, etc. The digital contents dimension consists of web-based video, records, etc. The evaluation dimension consists of Teachers rating, comments, and surveys.