• 제목/요약/키워드: copper particle

검색결과 238건 처리시간 0.029초

동축원통 전극내 금속이물의 부상 및 하강전압 특성 (The Lift-off and Fall-down Characteristics due to Particles in Coaxial Electrode)

  • 이재걸;이곤;진상범;박현수;조국희;김경화;곽희로
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1998년도 하계학술대회 논문집 E
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    • pp.1711-1713
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    • 1998
  • This paper describes the insulation characteristics of GIS by the free conducting particles under alternating voltage. The particles of the GIS can cause decrease in breakdown voltages. Various materials and sizes of free conducting particles were used to study the lift-off and fall-down characteristics. The measured lift-off voltage for copper particle agreed with the calculated one.

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나노유체를 냉각유체로 사용하는 마이크로채널 히트 싱크의 냉각효율 (Cooling Performance of a Microchannel Heat Sink with Nanofluids)

  • 장석필
    • 설비공학논문집
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    • 제17권9호
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    • pp.849-854
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    • 2005
  • In this paper, the cooling performance of a microchannel heat sink with nano-particle-fluid suspensions ('nanofluids') is numerically investigated. By using theoretical models of thermal conductivity and viscosity of nanofluids that account for the fundamental role of Brownian motion respectively, we investigate the temperature contours and thermal resistance of a microchannel heat sink with nanofluids such as 6nm copper-in-water and 2nm diamond-in-water. The results show that a microchannel heat sink with nanofluids has high cooling performance compared with the cooling performance of that with water, the classical coolant. Nanofluids reduce both the thermal resistance and the temperature difference between the heated microchannel wall and the coolant.

매향리 내륙 사격장 토양의 중금속 오염 분포 (Heavy Metal Distribution in Soils from the Maehyang-ri Inland Shooting Range Area)

  • 이준호;박갑성
    • 한국물환경학회지
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    • 제24권4호
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    • pp.407-414
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    • 2008
  • This study was conducted to evaluate the heavy metal contamination in the soils of Maehyang-ri inland shooting range area. The texture of the Maehyang-ri inland shooting range soil was sandy. Extraction of heavy metals reached quasi-equilibrium within 6 hours using shaking with 0.1 N HCl. 95% and 94% of extraction efficiency was observed for Cu and Pb in the Maehyang-ri shooting range soils, respectively. And Cu and Pb contamination of level of the T-1 region soil was $114.4{\pm}5.7mg/kg$ and $362.3{\pm}20.5mg/kg$. This may be due to the effects of mineralogical factor, soil particle size and un-residual fractions such as exchangeable, carbonate, Fe-Mn oxide and organic+sulfide.

Fabrication of W-Cu Composite by Resistance Sintering under Ultrahigh Pressure

  • Kwon, Y.S.;Kim, J.S.;Zhou, Z.J.
    • 한국분말재료학회지
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    • 제10권3호
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    • pp.181-185
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    • 2003
  • Resistance sintering under ultra-high pressure if developed to fabricate W-Cu composite containing 5 to 80v/o copper. The consolidation was carried out under pressure of 6 to 8 GPa and input power of 18 to 23 kW for 50 seconds. The densification effect and microstructure of these W-Cu composites are investigated. The effect of W particle size on ,sintering density was also studied. The micro hardness was measured to evaluate the sintering effect.

Post-Cu CMP cleaning에서 연마입자 제거에 buffing 공정이 미치는 영향 (The effect of buffing on particle removal in Post-Cu CMP cleaning)

  • 김영민;조한철;정해도
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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    • pp.537-537
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    • 2008
  • Copper (Cu) has been widely used for interconnection structure in intergrated circuits because of its properties such as a low resistance and high resistance to electromigration compared with aluminuim. Damascene processing for the interconnection structure utilizes 2-steps chemical mechanical polishing(CMP). After polishing, the removal of abrasive particles on the surfaces becomes as important as the polishing process. In the paper, buffing process for the removal of colloidal silica from polished Cu wafer was proposed and demonstrated.

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다공성소결윅구조에 따른 루프 히트파이프에서 압력손실의 이론적 분석 (Theoretical Analysis of the Pressure Drop in Loop Heat Pipe by Sintered Porous Wick Structure)

  • 이기우;이욱현;박기호;이계중;전원표;인현만
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2004년도 춘계학술대회
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    • pp.1225-1230
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    • 2004
  • In this paper, the pressure drops were investigated according to the sintered porous wick structure in loop heat pipe(LHP) by theoretical analysis. LHP has the wick only in evaporator for the circulation of working fluid, so utilizes porous wick structure which pore diameter is very small for large capillary force. This paper investigates the effects of different parameters on the pressure drops of the LHP such as particle diameter of sintered porous wick, wick porosity, vapor line diameter, thickness of wick and heating capacity. Working fluid is water and the material of sintered porous wick is copper. According to the these different parameters, capillary pressure, pressure drop in wick were analized by theoretical design method of LHP.

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Cu/Polyamide 혼합분말의 선택적 레이저 소결 (Selective Laser Sintering of Cu/Polyamide Mixed Powder)

  • 박흥일;이길근
    • 한국분말재료학회지
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    • 제8권4호
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    • pp.239-244
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    • 2001
  • To investigate the effect of process parameters on selective laser sintering of Cu/polyamide mixed powder, Cu/polyamide mixed powder was sintered by selective laser with changing laser power and scanning speed. The properties of sintered body were evaluated by measuring the density and tensile strength, and analysis of XRD, FT-Raman and microstructure. With an increase in the laser power, the density and ultimate tensile strength of sintered Cu/polyamide body increase and then decrease. The maximum values of the density and ultimate tensile strength were decreased with increasing laser scanning speed. These changes were concerned with the difference of irradiation energy of laser into the powder layer. It was considered that the change of the mechanical property of the sintered body with irradiation energy of laser is due to the changes of amount of copper particle and property of polyamide.

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반응가스로 $H_2$$H_2O$를 사용한 $Co(hfac)_2$ 전구체의 플라즈마에 대한 영향 분석

  • 서경천;신재수;나정길;최재붕;김태성;윤주영;김진태;신용현;강상우
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2009년도 제38회 동계학술대회 초록집
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    • pp.239-239
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    • 2010
  • Cobalt (Co) 박막은 낮은 저항과 우수한 열적 안정성에 의해 금속 배선공정에서 copper의 확산 및 산화를 방지하기 위해 사용된다. Co 박막을 증착하기 위해서는 유기화학 증착법이 많이 사용되고, 이를 위해 많은 Co 전구체들이 연구되어지고 있다. 본 연구에서는 $Co(hfac)_2$ 전구체의 플라즈마 및 반응가스에 따른 기상상태의 변화와 증착공정에서 발생되는 입자의 크기와의 상관관계를 연구하였다. 실험의 변수로 반응가스 ($H_2$, $H_2O$)와 플라즈마 파워 (0~50W)를 사용하였다. 또한 Co 전구체의 기상분해 및 반응을 분석을 위해 fourier transform infrared (FT-IR) spectroscopy를 사용하였다. 그리고 기상상태의 변화가 입자 형성에 끼치는 영향을 관찰하기 위해 저압에서 실시간으로 나노입자를 측정할 수 있는 장비인 particle beam mass spectrometer (PBMS)를 활용하였다.

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표면처리가 어려운 금속재료의 EBSD 분석을 위한 시편 준비 (Sample Preparation for EBSD Analysis: Tips for Metals with Delicate Surfaces)

  • 강주희;김수현
    • 대한금속재료학회지
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    • 제48권8호
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    • pp.730-740
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    • 2010
  • Aluminum, magnesium, titanium and high Mn steel are difficult to use in electron backscatter diffraction (EBSD) sample preparation due to the formation of an oxidation layer under conventional polishing. Alcohol-based polishing with colloidal silica suspension was introduced for these delicate samples. A hard particle-embedded sample was analyzed successfully using mechanical polishing. Ion-milling was effective in removing oxidized, deformed and transformed layers after mechanical polishing and was able to reduce artifacts significantly. The microstructure of a cross-section of a thin copper film was evaluated by attachment of a dummy to the film for mechanical polishing.

루프 히트파이프의 작동에 영향을 미치는 인자에 대한 이론적 분석 (A Theoretical Analysis on the Factors Affecting the Operation of Loop Heat Pipe)

  • 이기우;전원표;이욱현;박기호
    • 설비공학논문집
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    • 제16권12호
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    • pp.1107-1116
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    • 2004
  • In this paper, the effects of diverse parameters on the operation of loop heat pipe (LHP), such as particle diameter of sintered porous wick, wick porosity, vapor line diameter, thickness of wick and heating capacity were investigated by a theoretical analysis. A LHP has a wick only in its evaporator for the circulation of working fluid, and utilizes a porous wick structure of which pore size is very small to obtain a large capillary force. The working fluid is water and the material of sintered porous wick is copper. For these different parameters, capillary pressure, pressure drop in wick, pressure drops and temperature distribution were analyzed by a theoretical design method of LHP.