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http://dx.doi.org/10.3365/KJMM.2010.48.08.730

Sample Preparation for EBSD Analysis: Tips for Metals with Delicate Surfaces  

Kang, Joo-Hee (Grain Structure Control Group, Korea Institute of Materials Science)
Kim, Su-Hyeon (Grain Structure Control Group, Korea Institute of Materials Science)
Publication Information
Korean Journal of Metals and Materials / v.48, no.8, 2010 , pp. 730-740 More about this Journal
Abstract
Aluminum, magnesium, titanium and high Mn steel are difficult to use in electron backscatter diffraction (EBSD) sample preparation due to the formation of an oxidation layer under conventional polishing. Alcohol-based polishing with colloidal silica suspension was introduced for these delicate samples. A hard particle-embedded sample was analyzed successfully using mechanical polishing. Ion-milling was effective in removing oxidized, deformed and transformed layers after mechanical polishing and was able to reduce artifacts significantly. The microstructure of a cross-section of a thin copper film was evaluated by attachment of a dummy to the film for mechanical polishing.
Keywords
EBSD; metals; microstructure; mechanical polishing; ion-milling;
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Times Cited By KSCI : 1  (Citation Analysis)
Times Cited By SCOPUS : 5
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