• Title/Summary/Keyword: conditioning temperature

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A Study on Pad Profile Variation Using Kinematical Analysis on Swing Ann Conditioner (스윙 암 컨디셔너의 기구학적 해석을 통한 CMP 패드 프로파일 변화에 관한 연구)

  • Oh, Ji-Heon;Kim, Yong-Min;Lee, Ho-Jun;Lee, Sang-Jik;Kim, Hyoung-Jae;Jeong, Hae-Do
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.11a
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    • pp.47-48
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    • 2007
  • A CMP Process has many factors that affect result of a polished wafer. Dominant factors are velocity, pressure and temperature in process. A pad profile is also considered as affecting factor of CMP. Accoding to variation of a pad profile, the each pan of a wafer is differently pressured. It appears to affect the uniformity of a wafer. A pad profile varies as a swing arm conditioner which have been ordinarily used in industry. A swing arm conditioner has several sectors in its swing path. This study aims that a wafer get a good uniformity as swing arm conditioner's path on pad is analyzed and simulated. Through the simulation, tendency of pad profile after conditioning will be predicted and the result of simulation compared with the result of experiment. The optimized pad profile would be made by to vary swing arm's velocity on each sector. In order to maintain the optimized profile, conditioner design or swing arm's velocity should be changed and designed.

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A Study on Plate & Shell type Evaporator in HVAC System for Offshore Plant (해양플랜트 HVAC 시스템용 플레이트·쉘 타입 증발기에 관한 연구)

  • Park, Jae-Hong
    • Journal of the Korean Institute of Gas
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    • v.24 no.1
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    • pp.33-40
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    • 2020
  • Chiller systems which have better temperature stability than Direction expansion coils are often used as condensing units in HVAC systems for offshore plants. Large capacity compressors and electronic expansion valves in chiller systems are mostly imported, and the size of a chiller system depends on heat exchangers such as evaporators and condensers which are locally produced. Due to limited space in the offshore plants, shipyards are demanding manufacturers to make equipment compact. In this paper, a shell & tube heat exchanger, which is used as an evaporator in the conventional flooded chiller system, is replaced by a newly developed compact plate & shell heat exchanger. The main development process of the plate & shell heat exchanger is introduced, and its performances were experimentally evaluated with a real flooded chiller system, and the results are presented.

Demand Analysis of Technology Development for Smart Village based on Community Activities (공동체 활동을 기반으로 한 스마트빌리지 기술개발 수요분석)

  • Park, So Yeon;Cho, Hyejin;Jung, Nam-Su
    • Journal of Korean Society of Rural Planning
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    • v.26 no.2
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    • pp.117-126
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    • 2020
  • In this study, demands of smart technology development were analyzed for rural village communities. Questionnaire items were derived by grasping the current status of information and communication technology. 49 villages in 8 regions were selected and surveys and statistical analysis were conducted. The main results of the study are as follows. First, 92% of community leaders use smartphones, search for information (38%), communicate with the Internet (36%) using smartphones, use KakaoTalk (31%), and Facebook (24%). Second, in the rural and urban exchange activities, promote support information service (51%) and promote method suggestion service (48.5%) showed that the demand for services in promote field was high. It is linked to the creation of economic opportunities. Third, in the income and production activities, demand for distribution services technology (39.3%) was high in the field of production and distribution, and cold chains that help maintain freshness until food, such as meat, fish, and vegetables are delivered to consumers when agricultural products are distributed. The constant temperature control system needs to be actively introduced. Fourth, autonomy activities showed the highest demand for air conditioning and control systems (34.2%) of community building, and the lowest demand for electronic voting (9.4%) and videoconferencing (9.4%) services. Lastly, in the general activity area of the community, the demand for technology of emergency services (37.1%) and health self-diagnosis service (35.4%), which are technologies in the welfare sector, ranked first and second respectively.

Study of Hydration Reaction Characteristics of Inorganic Salts for Chemical Cold Storage and Method of Enhancement of Heat and Mass Transfer (화학축냉용 무기염들의 수화반응 및 열 및 물질전달 향상방안)

  • 김상욱;한종훈;황용준;이건홍
    • Proceedings of the Korea Society for Energy Engineering kosee Conference
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    • 1999.05a
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    • pp.185-191
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    • 1999
  • An air-conditioning system based on the chemical heat storage principle was considered. $H_2O$ was chosen as the reaction gas and the working fluid as well. Na$_2$S, CaCl$_2$, MnCl$_2$, BaCl$_2$, MgCl$_2$, Fe$_2$(SO$_4$)$_3$ and MnSO$_4$ were tested as the solid reactants by using Cahn pressure balance. Na$_2$S was superior to other salts in respect of high capability of absorption of water gas, 5 moles of $H_2O$ per unit mole of Na$_2$S, and adequate temperature of adsorption, $65^{\circ}C$ at 7torr, and of desorption, 13$0^{\circ}C$ at 76torr. Clausius-Clapeyron diagram of Na$_2$S was obtained via adsorption experiments at several vapor pressures of water gas. To enhance heat and mass transfer characteristics, usually below 1W/m K, of the reactor bed of general adsorption systems, expanded graphite block was adapted as the support of Na$_2$S salt. Expanded graphite blocks had thermal conductivity values of 20~80W/mK with respect to 100~400kg/㎥ of block bulk density. Permeability values of expanded graphite blocks were 10$^{-13}$ ~ 10$^{-14}$ $m^2$ with respect to 100~300kg/㎥ of block bulk density showing highly decreasing values of permeability, below 10$^{-l4}$$m^2$, in the range of above 150kg/㎥ of block bulk density.y.

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Coupled Thermal-Stress Analysis of Scrolls in Automotive Scroll Compressor (전동식 Scroll Compressor의 Scroll 열변형 해석)

  • Lee, Hyoung-wook;Kim, Jeongbae;Lee, Geun-An;Lee, Jong Sup;Lee, Young-Seon
    • Journal of Institute of Convergence Technology
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    • v.2 no.1
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    • pp.38-42
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    • 2012
  • A scroll compressor used in the air conditioning in automobile consists of the fixed scroll and the orbiting scroll. Temperature gradient in the scroll compressor during the operation induces the thermal expansion of two scrolls. Therefore, the gap between scrolls in the initial stage is regarded as an important variable in structural design of the scroll compressor. The coupled thermal-stress analysis was carried out for the scrolls of a scroll compressor. The temperatures of major points of two scrolls in the steady states were referred by the literature of C. Lin. The sequentially coupled thermal-stress analysis is utilized to the heat transfer analysis and the thermal expansion analysis. In the thermal expansion analysis, the contact analysis was considered between the fixed and the orbiting scrolls in order to obtain the penetration distance and the contact pressure between two scrolls. The range of deformation was from 44 to $76{\mu}m$ according to the height of the scroll. The maximum penetration distance of $60{\mu}m$ occurred at the top surface of the fixed scroll in the center of the scroll parts.

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Numerical Analysis on the Flow Characteristics in Steam Ejector

  • Shin, You-Sik;Jin, Zhen-Hua;Chun, You-Sin;Lee, Sang-Chul;Jeong, Hyo-Min;Chung, Han-Shik
    • Proceedings of the SAREK Conference
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    • 2006.06a
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    • pp.749-754
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    • 2006
  • This study performed of a water cooling system by using a steam ejector and jet condenser to drop the temperature of the water in aquafarm by about $5^{\circ}C$ from $25^{\circ}C$ or higher in this research, to replace the present water cooling system, Ive focused on a water cooling system operated by latent heat of evaporation, thus this system needs a vacuum pressure to evaporate the water in enclosed tank. The water cooling effects are dependent on the vacuum pressure in the enclosed tank, and the cooling water is generated by evaporation. As the experimental results, the absolute vacuum pressure obtained was about $5{\sim}8mmHg$ using a steam driven ejector with jet condenser in experiments. The obtained results are respectively ${\Delta}T=7^{\circ}C$, ${\Delta}T=5^{\circ}C$ and ${\Delta}T=5.5^{\circ}C$ at heat exchanger flow rate 4L/M. The obtained results are respectively ${\Delta}T=5.5^{\circ}C$, ${\Delta}T=5.5^{\circ}C$ and ${\Delta}T=5.5^{\circ}C$ at heat exchanger flow rate 4.5L/M.

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Analysis of Indoor Air & thermal environment with Hybrid Ventilation system during summer (하계 공동주택 하이브리드 환기시스템 적용에 따른 실내공기 및 열 환경 평가)

  • Kim, Sang-Jin;Kim, Eun-Soo;Kim, Tae-Yeon;Leigh, Seung-Bok
    • Proceedings of the SAREK Conference
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    • 2006.06a
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    • pp.387-392
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    • 2006
  • The recent on indoor air problem has led to many studies on the methods and effects of ventilation for better indoor air quality. Although natural ventilation is the most effective and energy-saving method in residental housings, the small size of openable window has been a problem in high-rise residential buildings to ventilate only through natural ventilation. Consequently, the installation of mechanical ventilation system has been a requirement in residential buildings, and has caused other problems such as increase of energy consumption and SBS. Hybrid ventilation which uses forces of both natural and mechanical power has been introduced to solve the problem of increase in energy consumption with natural ventilation. In this paper, two types of hybrid ventilation systems in residential building were introduced. One type was with natural ventilation through vent grille in the window, and another type was with natural ventilation through ceiling duct while both types used mechanical ventilation system with the outlets. The indoor temperature distribution and pollution density distribution in summer while operating the ceiling air conditioner were analyzed through CFD simulation. In this paper, the optimal location of diffusers to achieve thermal comfort would be proposed.

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Performance Evaluation of Nano-Lubricants at Thrust Slide-Bearing of Scroll Compressors (나노 윤활유를 이용한 스크롤 압축기 스러스트 베어링의 윤활특성 평가)

  • Cho, Sang-Won;Kim, Hong-Seok;Ahn, Young-Chull;Lee, Jung-Eun;Lee, Jae-Keun;Lee, Hyeong-Kook;Lee, Byeong-Chul;Kim, Dong-Han;Park, Jin-Sung
    • Proceedings of the SAREK Conference
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    • 2006.06a
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    • pp.1219-1224
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    • 2006
  • This paper presents the friction and anti-wear characteristics of nano-oil with n mixture of a refrigerant oil and carbon nano-particles in the thrust slide-bearing of scroll compressors. Frictional loss in the thrust slide-bearing occupies a large part of total mechanical loss in scroll compressors. The characteristics of friction and anti-wear Lising nano-oil is evaluated using the thrust bearing tester for measuring friction surface temperature and the coefficient of friction at the thrust slide-bearing as a function of normal loads up to 4,000 N and orbiting speed up to 3,200 rpm. It is found that the coefficient of friction increases with decreasing orbiting speed and normal force. The friction coefficient of carbon nano-oil is 0.015, while that of pure oil is 0.023 under the conditions of refrigerant gas R-22 at the pressure of 5 bars. It is believed that carbon nano-particles can be coated on the friction surfaces and the interaction of nano-particles between surfaces can be improved the lubrication in the friction surfaces. Carbon nano-oilenhances the characteristics of the anti-wear and friction at the thrust slide-bearing of scroll compressors.

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Development of Oxygen Diffusion Test Method for Crack Width Evaluation of Self-Healing Concrete (자기치유 콘크리트의 균열치유 성능평가를 위한 개선된 산소확산 시험방법 제안)

  • Lee, Do-Keun;Shin, Kyung-Joon
    • Journal of the Korean Recycled Construction Resources Institute
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    • v.9 no.3
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    • pp.375-382
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    • 2021
  • Self-healing concrete is in the spotlight in that it can effectively extend the lifespan of concrete structures by healing cracks in the structure by themselves without additional repairing or retrofiting actions. Currently, self-healing concrete is a field that is being actively studied around the world, but since most studies focus on the improvement of healing performance, there is a lack of methods to rationally evaluate the self-healing performance of concrete. Although the gas diffusion test method has been developed for the use in the performance evaluation of self-healing concrete, it has revealed that for gas diffusion through the matrix affect the crack diffusion coefficients depending on the environmental conditions such as the saturation of the specimen, the temperature, and humidity during the experiment. Therefore, in this study, the method has been proposed to eliminate the influence of the matrix diffusion when calculating the crack diffusion coefficient. In addition, a pre-conditioning process was introduced to shorten the experimental time. As a result, the crack width could be estimated with an error level of less than 3% in the test time of about 20 minutes.

Simulation on the performance of an automobile climate control system with Internal heat exchanger and TXV (내부열교환기와 TXV를 적용한 자동차용 공조시스템의 성능에 관한 수치적 연구)

  • Park, Cha-Sik
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.22 no.1
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    • pp.31-36
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    • 2021
  • Recently, automobile air conditioning systems have applied an alternative refrigerant that can replace the high GWP refrigerant R134a due to the global warming problem. This study simulated the performance of an automobile climate control system with an internal heat exchanger and TXV. Refrigerant R1234yf was applied as the working fluid. Amesim, a commercial software program, was used to model the main components of the compressor, condenser, TXV, evaporator, and internal heat exchanger. As the outside temperature increased from 30℃ to 40℃, the cooling capacity of the system decreased by 3.1%, and the power consumption of the compressor increased by 17.1%. In addition, The performance characteristics of the refrigeration cycle were simulated by increasing the fin pitch of the condenser from 0.8 mm to 1.4 mm. When the fin pitch was larger than 1.0 mm, the condenser capacity decreased, and the system COP was lowered by 5.9%. When the fin pitch of the condenser was 0.8 mm, which was smaller than 1.0 mm, there was no significant change in the system performance. Hence, the optimal performance was observed at a fin pitch of 1.0 mm.