• 제목/요약/키워드: coating system

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반도체 생산공정의 감광액 도포를 위한 FPCS에 관한 연구 (Study on the FPCS for Photoresist Coating of Semiconductor Manufacturing Process)

  • 박형근
    • 한국산학기술학회논문지
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    • 제14권9호
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    • pp.4467-4471
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    • 2013
  • 본 연구에서는 Nano급 반도체 생산공정에서 필수적인 스피너(spinner) 설비의 감광액 도포(photo resist coating)시스템의 효율을 획기적으로 개선할 수 있는 새로운 완전스캔(Full-scan) 방식의 감광액 도포시스템(FPCS : Full-scan Photo-resist Coating System)을 개발하였다. 또한, 감광액의 미 도포로 인한 복합적인 공정불량을 예방하기 위하여 실시간(real-time)으로 상태요소들을 감시할 뿐만 아니라 상태요소의 비정상적 변화나 웨이퍼 가공불량이 발생할 경우 해당 유니트(unit)를 정지시킴과 동시에 원격지에 있는 엔지니어에게 경보를 전송함으로써 즉각적인 대처가 가능할 수 있도록 개발하였다.

자동화 장비를 이용한 대형 상수관로 갱생을 위한 코팅재료 선정 및 방법에 관한 연구 (Investigating coating material and conditions for rehabilitation of water transmission pipe using a robotic system)

  • 김진원;김동현;이영건;이세완;김두일
    • 상하수도학회지
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    • 제30권6호
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    • pp.725-736
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    • 2016
  • There is a growing concern on the improvement of water distribution pipeline for multi-regional water supply system in Korea along with its aging infrastructure. Rehabilitation of large diameter pipeline is more efficient in cost and time compared to replacement with trenching. The procedure for rehabilitation are diagnosis, cleaning, spraying coating material, and final inspection. The internal state of pipeline was carefully diagnosed and got C grade, which required rehabilitation. We found that 17,274,787,000 Korean won could be saved after pipe surface coating because of increased C coefficient of Hazen-Williams equation. Optimal coating material was D polyurea. We also found optimal distance between spraying nozzle and pipe wall to be 70 - 80 cm, which were critical factors for coating quality. This study also illustrated the time for spray drying to be more than 30 min. These results could be used in the quality control process during rehabilitation of aged pipelines.

Eddy Current System For Coating Thickness Measurement

  • Rerkratn, Apinai;Pulkham, Jirayut;Chitsakul, Kitiphol;Sangworasil, Manas;Keawpoonsuk, Anucha;Songsataya, Kiettiwan
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 2005년도 ICCAS
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    • pp.1907-1910
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    • 2005
  • Coating thickness is an important variable that plays a role in product quality, process control, and cost control. Measurement of film thickness can be done with many different instruments. In this paper, we introduce the new eddy current system for measure the thickness of nonconductive coatings on nonferrous metal substrates. The experimental results are shown that the proposed system is able to measure thickness of plastic film coating on aluminum plates in the range of 0 to 1000 microns with satisfy sensitivities, linearity, resolution and stability of the system.

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EFFECT OF COATING COMPOSITION IN DOUBLE COATING ON THE PENETRATION OF FINE PARTICLES INTO SUBSTRATE

  • Kim, Byeong-Soo;Douglas W. Bousfield
    • 한국인쇄학회지
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    • 제18권1호
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    • pp.1-11
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    • 2000
  • The influence of the first coating layer on the properties of the second coating layer is reported. For various model coating composition, ratios of first and second coating weights are used to generate coating layers. The void volume, pore size distribution and light scatter coefficient of the coatings are measured. In some cases, the fine material from the second layer seems to penetrate the first layer to reduce the void fraction of the total system. Rapid setting coating, for example thin layers on porous first layer tends to generate porous coating layers.

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가스터빈의 열차폐용 탑코팅의 내구성 향상 설계기술 (Design Technique for Improving the Durability of Top Coating for Thermal Barrier of Gas Turbine)

  • 구재민;석창성
    • 한국정밀공학회지
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    • 제31권1호
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    • pp.15-20
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    • 2014
  • Thermal barrier coating (TBC) is used to protect the substrate and extend the operating life of the gas turbine for a power plant and an aircraft. The major cause of failure of such a coating is the spallation of coating, and it results from the thermal stress between top coating and bond coating. To improve the durability of TBC system, the dense vertical cracked (DVC) coating method to insert vertical cracks is applied to a gas turbine blade. In this study, a criterion for the design of vertical crack in the DVC coating was presented using the finite element analysis.

Application of High Performance Coatings for Service Life Extension of Steel Bridge Coatings

  • Lee, Chan-Young
    • Corrosion Science and Technology
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    • 제20권4호
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    • pp.169-174
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    • 2021
  • In this study, performance tests, a field evaluation, and a life cycle cost (LCC) analysis for high performance coating systems were conducted to prepare a plan to reduce the cost of maintenance coating and contribute to the service life extension of steel bridges by applying high performance coatings to steel bridges that will be constructed in the future. From the deterioration models based on the field evaluation for chlorinated rubber and urethane topcoat systems, which have been applied often, the mean service lives were derived as 20.8 and 26.6 years, respectively. For the other coating systems that have not been applied in practice, the coordination factors were differentially applied with evaluation items. The most durable coating system was predicted to be thermal spray coating (TSC) primer/epoxy intermediate coat/fluoride resin topcoat, with a predicted value as long as 42.2 years. The LCC analysis indicates that partial application of high performance coating, such as TSC and fluoride resin, to specific parts vulnerable to corrosion and ultraviolet ray (UV) is more advantageous than the use of general coating systems.

3차원 마이크로 구조를 위한 포토레지스트 스프레이 코팅 (Photoresist spray coating for three-dimensional micro structure)

  • 김도욱;은덕수;배영호;유인식;석창길;정종현;조찬섭;이종현
    • 센서학회지
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    • 제15권3호
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    • pp.153-157
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    • 2006
  • This paper presents the method for three-dimensional micro structure with photoresist spray coating system. The system consists of a high temperature rotational chuck, ultrasonic spray nozzle module, angle control module and nozzle moving module. Spray coating system is effected by several parameters such as the solid contents, the dispensed volume, the scanning speed of the spray nozzle and the wafer of dimension. The photoresist (AZ 1512) has been coated on the three-dimensional micro structure by spray coating system and the characteristics have been evaluated.

플라즈마 용사코팅강재의 피로균열성장에 미치는 감화열처리의 영향 (Effect of Heat Treatment of Fatigue Crack Growth of Plasma-Sprayed Coating Steels)

  • 김귀식;현창해;김영식
    • 동력기계공학회지
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    • 제7권4호
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    • pp.55-60
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    • 2003
  • This paper is to investigate the fatigue crack growth of plasma-sprayed coating steels according to heat treatments. The experimental materials are carbon steels(substrate: S45C) with plasma-sprayed coating layers of Ni-4.5%Al and $TiO_2$. The fatigue test is conducted on compact tension specimen by a servo-hydraulic fatigue testing machine. The specimens are heat-treated at $400^{\circ}C\;and\;800^{\circ}C$, respectively. Loading condition is a constant amplitude sinusoidal wave with a frequency of 10Hz and a load ratio of 0.1. The fatigue crack growth length is automatically measured by a compliance method. In the case of non-heat treated specimens, the fatigue crack growth rates of both substrate and coating specimen are almost same. The crack growth rates of substrates and coating steels by heat treatment are larger than those of the non-heat treated one, because the ductile property increase by heat treatment. In ${\Delta}K<18MPa{\cdot}m^{1/2}$, the crack growth rates of the heat-treated specimens are slightly taster than non-heat treated one. But the both heated and non-heated one are almost same in ${\Delta}K>18MPa{\cdot}m^{1/2}$.

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Improvement of Zinc Coating Weight Control for Transition of Target Change

  • Chen, Chien-Ming;Lin, Jeng-Hwa;Hsu, Tse-Wei;Lin, Rui-Rong
    • Corrosion Science and Technology
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    • 제9권3호
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    • pp.105-108
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    • 2010
  • The product specification of the Continuous Hot Dip Galvanizing Line (CGL) changes and varies constantly with different customers' requirements, especially in the zinc coating weight which is from 30 to 150 g/$m^2$ on each side. Since the coating weight of zinc changes often, it is very important to reduce time spent in the transfer of target values changed for low production cost and yield loss. The No.2 CGL in China Steel Corporation (CSC) has improved the control of the air knife which is designed by Siemens VAI. CSC proposed an experiment design which is an $L_9(3^4)$ orthogonal array to find the relations between zinc coating weight and the process parameters, such as the line speed, air pressure, gap of air knife and air knife position. A non-linear regression formula was derived from the experimental results and applied in the mathematical model. A new air knife feedforward control system, which is coupled with the regression formula, the air knife control system and the process computer, is implemented into the line. The practical plant operation results have been presented to show the transfer time is obviously shortened while zinc coating weight target changing and the product rejected ratio caused by zinc coating weight out of specification is significantly reduced from 0.5% to 0.15 %.

Magni 565 코팅 볼트의 내식성 및 토오크 특성에 대한 연구 (A Study of Corrosion Resistance and Torque in Bolt Coated with Magni 565)

  • 김상수;김무길;정병호
    • 열처리공학회지
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    • 제20권4호
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    • pp.195-202
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    • 2007
  • Corrosion resistance and torque of M10 bolt coated with Magni 565 were investigated. Corrosion protection mechanism were also studied with the microstructure of coating film. The bolts with the optimum conditions showed around $10{\mu}m$ layer thickness, a great corrosion resistance in salt spray test and a proper torque in torque/tension test. But torque coefficient k increased with the number of bolting and clamping force of M10 bolt showed significantly lower than that of specified value 28.3kN. It was thought that the repeated bolting made the coating film peel off and powdery. The sample coated with optimum coating conditions showed more higher polarization resistance and corrosion potential than the specimens of top and base coat only. The base coating film was composed of lamellar zinc flakes, which provides a large sacrificial cathodic protection. Meanwhile, the top coating film was composed of organic aluminium pigments layer, which provides barrier protection to the corrosion circumstances.