• 제목/요약/키워드: co-substrate

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하지층기판온도에 따른 CoCrTa/Si 이층박막의 특성변화 (Characteristics variation of CoCrTa/Si double layer thin film on variation of underlayer substrate temperature)

  • 박원효;김용진;금민종;가출현;손인환;최형욱;김경환
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 추계학술대회 논문집 Vol.14 No.1
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    • pp.77-80
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    • 2001
  • Crystallographic and magnetic characteristics of CoCr-based magnetic thin film for perpendicular magnetic recording media were influenced on preparing conditions. In these, there is that substrate temperature was parameter that increases perpendicular coercivity of CoCrTa magnetic layer using recording layer. While preparation of CoCr-based doublelayer, by optimizing substrate temperature, we expect to increase perpendicular anisotropy of CoCr magnetic layer and prepare ferromagnetic recording layer with a good quality by epitaxial growth. CoCrTa/Si doublelayer showed a good dispersion angle of c-axis orientation $\Delta\theta_{50}$ caused by inserting amorphous Si underlayer which prepared at underlayer substrate temperature 250C. Perpendicular coercivity was constant, in-plane coercivity was controlled a low value about 200Oe. This result implied that Si underlayer could restrain growth of initial layer of CoCrTa thin film, which showed bad magnetic properties effectively without participating magnetization patterns of magnetic layer. In case of CoCrTa/Si that prepared with ultra thin underlayer, crystalline orientation of CoCrTa was improved rather underlayer thickness 1nm, it was expected that amorphous Si layer played a important role in not only underlayer but also seed layer.

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반투명 기층에 의한 후면반사를 고려한 회전검광자 방식의 타원측정 및 분석 (Analysis of the Spectro-ellipsometric Data with Backside Reflection from Semi-transparent Substrate by Using a Rotating Polarizer Ellipsometer)

  • 서영진;박상욱;양성모;김상열
    • 한국광학회지
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    • 제22권4호
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    • pp.170-178
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    • 2011
  • 기층의 후면에서 반사한 빛이 미치는 영향을 고려하여 반투명한 기층 위에 박막이 있는 시료의 분광타원상수를 모델링 분석하였다. 후면반사가 타원상수에 미치는 영향을 기층의 복소굴절률과 두께를 사용하여 나타내었고 이를 모델링 분석에 적용하였다. 유리 기층 위에 ITO 박막이 있는 시료에 대해 후면반사를 고려한 표현들을 사용하여 박막의 두께와 복소굴절률 등을 구한 결과가 후면에서 반사된 빛을 제거하여 측정, 분석하는 통상적인 타원법에 의한 결과와 일치함을 보였다.

ADHESION STRENGTH OF DIAMOND COATED WC-Co TOOLS USING MICROWAVE PLASMA CVD

  • Kiyama, Nobumichi;Sakamoto, Yukihiro;Takaya, Matsufumi
    • 한국표면공학회지
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    • 제29권5호
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    • pp.540-544
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    • 1996
  • To apply the CVD diamond film to coated tools, it is necessary to make adhesion strength between diamond film and substrate stronger. So adhesion strength of diamond coated WC-Co tools using Microwave Plasma CVD and cutting test of Al-18mass%Si alloy using diamond cutting tools were studied. Diamond coating was carried out using Microwave Plasma CVD apparatus. Reaction gas was used mixture of methane and hydrogen. Substrate temperature were varied from 673K to 1173K by control of microwave output power and reaction pressure. By observation of SEM, grain size became larger and larger as substrate temperature became higher and higher. Also all deposits were covered with clear diamond crystals. XRD results, the deposits were identified to cubic diamond. An analysis using Raman spectroscopy, the deposit synthesized at lower substrate temperature (673K) showed higher quality than deposit synthesized at higher substrate temperature (1173K). As a result of scratch adhesion strength test, from 873K to 1173K adhesion strength decreased by rising of substrate temperature. The deposit synthesized at 873K showed best adhesion strength. In the cutting test of Al-18mass%Si alloy using diamond coated tools and the surface machinability of Al-Si works turned with diamond coating tools which synthesized at 873K presented uniform roughness. Cutting performance of Al-18mass%Si alloys using diamond coated WC-Co tools related to the adhesion strength.

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Assessment of Palm Press Fibre and Sawdust-Based Substrate Formulas for Efficient Carpophore Production of Lentinus squarrosulus (Mont.) Singer

  • Osibe, Dandy Ahamefula;Chiejina, Nneka Virginia
    • Mycobiology
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    • 제43권4호
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    • pp.467-474
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    • 2015
  • Development of efficient substrate formulas to improve yield and shorten production time is one of the prerequisites for commercial cultivation of edible mushrooms. In this study, fifteen substrate formulas consisting of varying ratios of palm press fibre (PPF), mahogany sawdust (MS), Gmelina sawdust, wheat bran (WB), and fixed proportions of 1% calcium carbonate ($CaCO_3$) and 1% sucrose were assessed for efficient Lentinus squarrosulus production. Proximate compositions of mushrooms produced on the different substrate formulas were also analysed and compared. Substrate formulations containing 85% PPF, 13% WB, 1% $CaCO_3$, and 1% sucrose were found to produce the highest carpophore yield, biological efficiency and size (206.5 g/kg, 61.96%, and 7.26 g, respectively). Days to production (first harvest) tended to increase with an increase in the amount of WB in the substrate formulas, except for PPF based formulas. The addition of WB in amounts equivalent to 8~18% in substrate formulas containing 80~90% PPF resulted in a decrease in the time to first harvest by an average of 17.7 days compared to 80~90% MS with similar treatment. Nutritional content of mushrooms was affected by the different substrate formulas. Protein content was high for mushrooms produced on formulas containing PPF as the basal substrate. Thus, formulas comprising PPF, WB, $CaCO_3$, and sucrose at 85% : 13% : 1% : 1%) respectively could be explored as starter basal ingredients for efficient large scale production of L. squarrosulus.

Monte Carlo Simulation of Interacting Liquid Crystal and Substrate using Rigid Model Molecules

  • Hyodo, Yosuke;Koda, Tomonori;Momoi, Yuichi;Kim, Woo-Yeol;Nishioka, Akihiro;Miyata, Ken;Murasawa, Go
    • Journal of Information Display
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    • 제8권4호
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    • pp.1-4
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    • 2007
  • In the present study, we propose Monte Carlo simulation that takes into consideration the interface phenomena between liquid crystal and substrate. We use rigid model molecules of liquid crystal and substrate. Interface is generated using potential field that induces decomposition of molecules. We use hard spherocylinders as model liquid crystal molecules. Substrate is modeled as region composed of shorter spherocylinders. Our results show that there is a case in which nematic order is reinforced in the vicinity of rubbed substrate.

반응성 동시 증착법에 의한 As-grown $YBa_2Cu_3O_{7-x}$ 박막의 결정 특성 및 표면형상에 관한 연구 (Crystalline Qualities and Surface Morphologies of As-Grown $YBa_2Cu_3O_{7-x}$ Thin Films on MgO(100) Substrate by Reactive Coevaporation Method)

  • 장호연;도부안광;토신전농;청수현사;추빈량삼;강본당일;송진태
    • 한국재료학회지
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    • 제1권2호
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    • pp.93-98
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    • 1991
  • The as-grown $YBa_2Cu_3O_{7-x}$ superconducting thin films on MgO(100) substrate have been prepared by a reactive coevaporation method. The superconducting transition temperature, surface morphology and crystalline quality were examined as a function of the substrate temperature ranging from $450^{\circ}C$ to $590^{\circ}C$. From the reflection high energy electron diffraction (RHEED) analysis, it was found the film consisted of almost amorphous phase with a halo pattern deposited at the substrate temperature of $450^{\circ}C$. The film deposited at the substrate temperature of $510^{\circ}C$ consisted of polycrystalline phase, showing a broad ring pattern. On the other hand, for the film deposited at $590^{\circ}C$, RHEED showed spotty pattern indicating that this film consisted of single crystal phase. It has rough film surface due to the surface outgrowth. The surface outgrowth increased as the substrate temperature increased from $510^{\circ}C$ to $590^{\circ}C$. the surface outgrowth may be due to the anisotropic growth rate. The highest transition temperature obtained in this study was $Tc_{zero}$ of 83K with $Tc_{onset}$ of 88K for the film deposited at $590^{\circ}C$ using activated RF oxygen plasma.

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NiO(Co0.25Mn0.75)2O3 and BaSrTiO3 thick films on alumina substrate as temperature and humidity ceramic multisensors

  • 오영제;이득용
    • 센서학회지
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    • 제18권5호
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    • pp.343-348
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    • 2009
  • $NiO{\cdot}(Co_{0.25}Mn_{0.75})_2O_3$(Mn-Ni-Co) and $Ba_{0.5}Sr_{0.5}TiO_3$(BST) thick films were screen printed on Pt patterned alumina substrate to investigate the effects of sintering temperature on humidity and temperature sensing properties of ceramic sensors. A raise in sintering temperature increased resistance and B constant of the Mn-Ni-Co temperature sensor. This may have derived from the synergic effects of the reduction in charge carriers caused by the substitution of Co for Mn as well as the formation of microcracks from the difference in thermal expansion coefficients. Dependence of resistance on humidity of the Mn-Ni-Co temperature sensor, however, was not found. BST films sintered at temperatures in the range of $1100^{\circ}C$ to $1150^{\circ}C$ showed excellent humidity sensing properties. The BST humidity sensor was faster in its response than the Mn-Ni-Co temperature sensor. The humidity sensor, however, proved to be unstable under various temperatures, suggesting a need for a temperature stabilizing device. In contrast, the Mn-Ni-Co temperature sensor was stable under humid conditions.

반응성 CVD를 이용한 다결정 실리콘 기판에서의 CoSi2 layer의 성장거동과 열적 안정성에 관한 연구 (Growth Behavior and Thermal Stability of CoSi2 Layer on Poly-Si Substrate Using Reactive Chemical Vapor Deposition)

  • 김선일;이희승;박종호;안병태
    • 한국재료학회지
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    • 제13권1호
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    • pp.1-5
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    • 2003
  • Uniform polycrystalline $CoSi_2$layers have been grown in situ on a polycrystalline Si substrate at temperature near $625^{\circ}C$ by reactive chemical vapor deposition of cyclopentadienyl dicarbonyl cobalt, Co(η$^{5}$ -C$_{5}$ H$_{5}$ )(CO)$_2$. The growth behavior and thermal stability of $CoSi_2$layer grown on polycrystalline Si substrates were investigated. The plate-like CoSi$_2$was initially formed with either (111), (220) or (311) interface on polycrystalline Si substrate. As deposition time was increasing, a uniform epitaxial $CoSi_2$layer was grown from the discrete $CoSi_2$plate, where the orientation of the$ CoSi_2$layer is same as the orientation of polycrystalline Si grain. The interface between $CoSi_2$layer and polycrystalline Si substrate was always (111) coherent. The growth of the uniform $CoSi_2$layer had a parabolic relationship with the deposition time. Therefore we confirmed that the growth of $CoSi_2$layer was controlled by diffusion of cobalt. The thermal stability of $CoSi_2$layer on small grain-sized polycrystalline Si substrate has been investigated using sheet resistance measurement at temperature from $600^{\circ}C$ to $900^{\circ}C$. The $CoSi_2$layer was degraded at $900^{\circ}C$. Inserting a TiN interlayer between polycrystalline Si and $_CoSi2$layers improved the thermal stability of $CoSi_2$layer up to $900^{\circ}C$ due to the suppression of the Co diffusion.

전착법을 이용한 Co계 합금박막의 표면형태와 자기특성과의 관계 (Relation between Magnetic Properties and Surface Morphology of Co-Base Alloy Film by Electrodeposition Method)

  • 한창석;김상욱
    • 한국재료학회지
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    • 제27권11호
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    • pp.624-630
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    • 2017
  • In this study, we investigated the overpotential of precipitation related to the catalytic activity of electrodes on the initial process of electrodeposition of Co and Co-Ni alloys on polycrystalline Cu substrates. In the case of Co electrodeposition, the surface morphology and the magnetic property change depending on the film thickness, and the relationship with the electrode potential fluctuation was shown. Initially, the deposition potential(-170 mV) of the Cu electrode as a substrate was shown, the electrode potential($E_{dep}$) at the $T_{on}$ of electrodeposition and the deposition potential(-600 mV) of the surface of the electrodeposited Co film after $T_{off}$ and when the pulse current was completed were shown. No significant change in the electrode potential value was observed when the pulse current was energized. However, in a range of number of pulses up to 5, there was a small fluctuation in the values of $E_{dep}$ and $E_{imm}$. In addition, in the Co-Ni alloy electrodeposition, the deposition potential(-280 mV) of the Cu electrode as the substrate exhibited the deposition potential(-615 mV) of the electrodeposited Co-Ni alloy after pulsed current application, the $E_{dep}$ of electrodeposition at the $T_{on}$ of each pulse and the $E_{imm}$ at the $T_{off}$ varied greatly each time the pulse current was applied. From 20 % to less than 90 % of the Co content of the thin film was continuously changed, and the value was constant at a pulse number of 100 or more. In any case, it was found that the shape of the substrate had a great influence.

바이어스 스퍼터링 법으로 제조된 LiCoO2박막 I. 전기화학적 특성 ([ LiCoO2 ] Thin Film Deposited by Bias Sputtering Method I. Electrochemical Characteristics)

  • 이영재;박호영;조병원;조원일;김광범
    • 전기화학회지
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    • 제6권4호
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    • pp.261-265
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    • 2003
  • 박막전지의 제조공정 중 열처리 공정은 많은 문제점들을 가지고 있다. 본 연구에서는 열처리 공정 없이 박막의 구조변화를 유발하는 바이어스 스퍼터링(Bias sputtering) 방법으로 $LiCoO_2$ 양극 활물질 박막을 제조하여 그 특성을 고찰하였다. 제조된 박막은 다양한 분석 방법을 이용하여 결정구조, 표면형상, 방전용량을 관찰하였다, 제조된 $LiCoO_2$양극활물질 박막 중 -50 V의 기판 바이어스 전압$(substrate\;bias\;voltage:\;V_b)$을 인가하여 제조된 $LiCoO_2$ 양극 활물질 박막에서 약 $60{\mu}Ah/cm^2{\mu}m.$의 초기 방전 용량을 가짐을 확인하였다. 본 연구는 열처리 공정 없이도 박막전지의 양극활물질로서 $LiCoO_2$ 박막을 사용할 수 있음을 알 수 있었다.