Analysis of the Spectro-ellipsometric Data with Backside Reflection from Semi-transparent Substrate by Using a Rotating Polarizer Ellipsometer |
Seo, Yeong-Jin
(Ellipsotechnology Co.)
Park, Sang-Uk (Ellipsotechnology Co.) Yang, Seong-Mo (Department of Molecular Science and Technology, Ajou University) Kim, Sang-Youl (Ellipsotechnology Co.) |
1 | F. Wooten, Optical Properties of Solids (Academic Press, New York, USA, 1972), Chapter 3. |
2 | S. Y. Kim, Ellipsometry (Ajou University, Korea, 2000), Chapter 3. |
3 | R. A. Synowicki, "Suppression of backside reflections from transparent substrates," Phys. Stat. Sol. C 5, 1085-1088 (2008). DOI |
4 | H. Fujiwara, Spectroscopic Ellipsometry: Principles and Applications (John Wiley & Sons, Ibaraki, Japan, 2007), Chapter 5. |
5 | Y. H. Yang and J. R. Abelson, "Spectroscopic ellipsometry of thin films on transparent substrate: a formalism for data interpretation," J. Vac. Sci. Technol. A 13, 1145 (1995). DOI |
6 | M. Kildemo, R. Ossikovski, and M. Stchakovsky, "Measurement of the absorption edge of thick transparent substrate using the incoherent reflection model and spectroscopic UV-visible-near IR ellipsometry," Thin Solid Films 313-314, 108-113 (1988). |
7 | K. Forcht, A. Gombert, R. Joerger, and M. Kohl, "Incoherent superposition in ellipsometric measurement," Thin Solid Films 302, 43-50 (1997). DOI |
8 | A. R. Forouhi and I. Bloomer, Handbook of Optical Constants of Solids II, E. D. Palik, ed. (Academic Press, Inc., Toronto, Canada, 1991), Chapter 7. |
9 | S. Y. Kim and K. Vedam, "Proper choice of the error function in modelling spectroscopic ellipsometric data," Appl. Opt. 25, 2013 (1986). DOI |
10 | H. J. Kim, H. Y. Pang, and S. Y. Kim, "Determination of the refractive index and the extinction coefficient of thin films by using optical methods and of the packing density variation with growth technique," Sae Mulli 37, 45-52 (1997). |
11 | R. A. Synowichi, "Spectroscopic ellipsometry characterization of indium tin oxide film microstructure and optical constants," Thin Solid Films 313-314, 394-397 (1998). DOI |
12 | G. R. Fowles, Introduction to Modern Optics (Dover Publications, New York, USA, 1968), Chapter 6. |