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http://dx.doi.org/10.3807/KJOP.2011.22.4.170

Analysis of the Spectro-ellipsometric Data with Backside Reflection from Semi-transparent Substrate by Using a Rotating Polarizer Ellipsometer  

Seo, Yeong-Jin (Ellipsotechnology Co.)
Park, Sang-Uk (Ellipsotechnology Co.)
Yang, Seong-Mo (Department of Molecular Science and Technology, Ajou University)
Kim, Sang-Youl (Ellipsotechnology Co.)
Publication Information
Korean Journal of Optics and Photonics / v.22, no.4, 2011 , pp. 170-178 More about this Journal
Abstract
The spectroscopic ellipsometric constants are analyzed to determine the thickness and the complex refractive index of a film coated on a semi-transparent substrate, with the reflection from the backside of the substrate properly considered. Expressions representing the effect of the backside reflection on ellipsometric constants are derived using the thickness and the complex refractive index of the substrate. The thickness and the complex refractive of an ITO thin film coated on a glass substrate are obtained by using this method. The results agree quite well with the ones obtained by following the conventional modeling procedure where the backside reflection is neglected during ellipsometric measurement and analysis.
Keywords
Backside reflection; Semi-transparent substrate; Ellipsometry; Extinction coefficient of glass; ITO thin film;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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