• Clean Technology
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• v.10 no.1
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• pp.47-51
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• 2004

현재 반도체 공정에서 사용되는 세정기술은 대부분이 1970년대 개발된 RCA 세정법인 과산화수소를 근간으로 하는 습식 세정으로, 표면의 입자를 제거하기 위한 SC-1 세정액은 강력한 산화제인 과산화수소에 의한 표면과 입자의 산화와 암모니아에 의한 표면의 에칭이 동시에 일어나 입자를 표면으로부터 분리시킨다. 금속 불순물을 제거하기 위한 SC-2 세정액은 염산과 과산화수소 혼합액을 사용하며 금속 불순물을 용해시켜 알칼리나 금속 이온을 형성하거나 용해 가능한 화합물을 형성시켜 제거한다. 또한 황산과 과산화수소를 혼합한 Piranha 세정액은 효과적인 유기물 제거제로서 웨이퍼에 오염된 유기물을 용해 가능한 화합물로 만들거나 과산화수소에 의해 형성되는 산화막내에 오염물을 포함시켜 불산 용액으로 산화막을 제거할 때 함께 제거된다. 최근 금속과 산화막을 동시에 제거하기 위해 희석시킨 불산에 과산화수소를 첨가한 세정공정이 사용되고 있으며 불산에 의해 표면의 산화막이 제거될 때 산화막내에 포함된 금속 불순물을 동시에 제거시킬 수 있다. 그러나 이와 같이 습식세정액 내에 공통적으로 포함되어 있는 과산화수소의 분해는 그만큼 가속화되어 사용되는 화학 약품의 양이 그만큼 증가하게 되고 조작하기 어려운 단점도 있다. 이를 해결하기 위해 환경친화적인 관점으로 화학약품의 사용을 최소화하는 등 RCA세정을 보완하는 연구가 계속 진행되고 있다. 본 연구에서는 RCA세정법을 환경적으로 대체할 수 있는 세정에 사용되는 전리수의 pH변화에 따른 전리수 분석을 하였다. 전리수의 제조를 위하여 전해질로는 NH4CI (HCI:H2O:NH4OH=1:1:1)를 사용하였다. pH 11 이상, ORP -700mV~-850mV인 환원수와 pH 3 이하, ORP 1000mV~1200mV인 산화수를 제조하였으며, 초순수를 첨가하여 pH 7.2와 ORP 351.1mV상태까지 조절하였다. 이렇게 만들어진 산화수와 환원수를 시간 변화와 pH 변화에 따라 Clean Room 안에서 FT-IR과 접촉각 측정기로 실험하였다. FT-IR분석에서 산화수는 pH가 높아질수록, 환원수는 낮아질수록 흡수율이 낮아졌다. 접촉각 실험에서는 산화수의 pH가 높아질수록 환원수의 pH가 낮아질수록 접촉각이 커짐을 확인하였다. 결론적으로 전리수를 이용하여 세정을 하면, 접촉성을 조절할 수 있어 반도체 세정을 가능하게 할 수 있으며, 환경친화적인 결과를 도출할 것으로 전망된다.

• Analytical Science and Technology
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• v.14 no.5
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• pp.451-457
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• 2001

Because liquids with high molecular weight such as mineral oil have low vapor pressure at room temperature, it is generally thought to be difficult to lose them to evaporation. However, when they are dispersed into air in small droplets during application in machining processes, their surface area becomes considerably higher. To determine the potential for metalworking fluids (MWF) filter losses, MWF mist was generated and collected on polyvinyl chloride (PVC) filters in test chamber. After collected MWF was exposed to clean air during designated period (range 10~240 minutes) and the filters were desiccated, losses were evaluated. As duration of clean air passing through PVC filter increased, loss of MWF gradually increased. MWF lost after 10 minutes ranged form 12.4 % to 21.8 % of the original loading mass, on average 53.3 % of the total loss. These results indicate that significant mass of MWF collected on PVC filters can be lost at the beginning of air sampling. Loss of MWF collected on PVC filter also occurred during desiccation without active airflow. In multiple regression to identify which factors influence the loss of MWF collected on PVC filter, both duration of air passing through PVC filter and MWF age (fresh vs. used) were significant predictor (p=0.0001). Therefore, workers' exposure to MWF measured method 0500, may underestimate true concentration. Further study is needed to develop a new method to quantify the workers' exposure to airborne MWF mist accurately.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.9 no.2
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• pp.45-50
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• 2009

The environment exploration is an essential process for indoor robots such as clean robot and security robot. Apartment house and office building has common frame structure, but internal arrangement of each room may be slightly different. So, it is more convenient to use a common frame map than to build a new map at every time the arrangement is changed. In this case, it is important to recognize invariant features such as wall, door and window. In this paper, an indoor mobile robot is implemented, and by using the laser scanner data and line segment histogram with respect to segment orientation and distance, an environment exploration method is presented and tested. This robot is fitted with a laser scanner, gyro sensor, ultra sonic sensor and IR sensor, and programed with C language.

• Smart Structures and Systems
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• v.12 no.1
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• pp.1-22
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• 2013

Magnetic nanoparticle based bioseparation in microfluidics is a multiphysics phenomenon that involves interplay of various parameters. The ability to understand the dynamics of these parameters is a prerequisite for designing and developing more efficient magnetic cell/bio-particle separation systems. Therefore, in this work proof-of-concept experiments are combined with advanced numerical simulation to design and optimize the capturing process of magnetic nanoparticles responsible for efficient microfluidic bioseparation. A low cost generic microfluidic platform was developed using a novel micromolding method that can be done without a clean room techniques and at much lower cost and time. Parametric analysis using both experiments and theoretical predictions were performed. It was found that flow rate and magnetic field strength greatly influence the transport of magnetic nanoparticles in the microchannel and control the capturing efficiency. The results from mathematical model agree very well with experiments. The model further demonstrated that a 12% increase in capturing efficiency can be achieved by introducing of iron-grooved bar in the microfluidic setup that resulted in increase in magnetic field gradient. The numerical simulations were helpful in testing and optimizing key design parameters. Overall, this work demonstrated that a simple low cost experimental proof-of-concept setup can be synchronized with advanced numerical simulation not only to enhance the functional performance of magneto-fluidic capturing systems but also to efficiently design and develop microfluidic bioseparation systems for biomedical applications.

• Journal of environmental and Sanitary engineering
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• v.14 no.3
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• pp.116-122
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• 1999

The purpose of this study is to develop new process named "hydrogen peroxide dissolution method". This process used hydrogen peroxide, which is harmless to human body and oxidize molybdenum wire selectively.The advantages of hydrogen peroxide dissolution method were no discharge of noxious matter when dissolution of molybdenum wire which used as the center supporter, reactions occur in room temperature and easy to recover dissolved molybdenum. This study was aimed at gathering the basic data of molybdenum wire dissolution-recovery process and proposes the reaction condition of molybdenum wire dissolution-recovery process and the factors influencing those reactions. The results were as follows:1. In the dissolution of molybdenum wire, the early condition of reaction was $15^{\circ}C$, and the temperature condition of state was $32^{\circ}C$. 2. 1) In the GSL-60W type, P.W.(Piece weight) was 11.89mg, C.R. was $65.6\Omega$. 2) In the FL-20W type, P.W. was 11.60mg, C.R. was $4.6\Omega$. 3. The molybdenum of process water was treated of a precipitation after dry and after stagnation in the one day, the molybdenum of upper water was treated of precipitation after dry and after congelation.

• The Transactions of the Korean Institute of Electrical Engineers D
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• v.50 no.5
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• pp.241-246
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• 2001

The conventional stethoscope can not store its stethoscopic sounds. Therefor a doctor diagnoses a patient with instantaneous stethoscopic sounds at that time, and he can not remember the state of the patient's stethoscopic sounds on the next. This prevent accurate and objective diagnosis. If the electronic stethoscope, which can store the stethoscopic sound, is developed, the auscultation will be greatly improved. This study describes an amplifier for electronic stethoscope system that can extract heart sounds of fetus as well as adult and alow us hear and record the sounds. Using the developed stethoscopic amplifier, clean heart sounds of fetus and adult can be heard in noisy environment, such as a consultation room of a university hospital, a laboratory of a university. Surprisingly, the heart sound of a 22-week fetus was heard through the developed electronic stethoscope. Pitch detection experiments using the detected heart sounds showed that the signal represents distinct periodicity. It can be expected that the developed electronic stethoscope can substitute for conventional stethoscopes and if proper analysis method for the stethoscopic signal is developed, a good electronic stethoscope system can be produced.

• Aerospace Engineering and Technology
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• v.9 no.2
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• pp.116-122
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• 2010

It is necessary to be careful about contamination control to minimize the accumulation of the contamination material on satellite surface during the I&T phase. In the space environment which characterized by high vacuum, high and very low temperature, contamination material causes satellite to lose its own performance. Especially, contamination material can accumulate on critical surfaces such as lenses, mirrors, and sensors. KARI(Korea Aerospace Research Institute) conducts the clean room to control and minimize the contamination effect. This paper introduces the principle of contamination and the method of measure and analysis for the contamination.

• Proceedings of the Korean Institute of Interior Design Conference
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• 2004.05a
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• pp.100-105
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• 2004

Recently, the assisted living facilities for the elderly are increasing due to the facts, such as rapid increasing ratio of old people, rising incomes and the changing concepts towards family relationship. For the elderly, there is a need to re-examine how environment can incorporate design concepts which enhance accessibility and adaptability. For this survey each seven cases in Korean & American facilities were examined and also 120 copies of a questionnaire for the elderly who are above 60 were analysed. This survey revealed that; 1. The consciousness of the majority elderly was favorably aware of the assisted living facilities for the elderly by a social phenomenon. 2. At a response of the scale for the living unit, majority subjects preferred to live in size of 16${\sim}$20 pyung. 3. Subjects preferred not only clean and modern atmosphere, but also medical area and fitness room, design considerations for these points are needed. 4. Enough spaces for their hobbies and social activities, which are important factors for smooth understanding, communication and psychological remedy effect for the elderly should be provided in the facilities for the elderly. 5.Korean facilities were lack of accessibility, safety and adaptability, thus it is very important to select the suitable materials for the safety and lighting plans with regard to their physical and mental qualities.

• Journal of environmental and Sanitary engineering
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• v.24 no.3
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• pp.16-27
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• 2009

In this paper, I examined the level of fine dust in medical institutions, educational institutions and multi-purposed facilities to grasp the exact state of the present, and decided the level of air-borne particulate(KSM ISO Standard and ISO Standard 14644-1). We compared new proposed cleaner equipped with HEPA Filter with general cleaner and analyzed the rate of removal according to height, air volume and the equipment with the compulsive air intake. Through this comparison, I reached the conclusion as follows: 1. According to the examination, the fine dust of medical institutions, educational institutions and multi-purposed facilities in Kwang Ju is class 9. 2. The filter used in general cleaner on the market is that of HEPA-type, and its removal efficiency for fine particles($0.3{\sim}0.5{\mu}m$) is very low. 3. In the removal efficiency of new proposed cleaner equipped with HEPA Filter, the higher it is, the better, especially more than 180cm in height. 4. In case it is operated for 5 minutes under the condition of the space of $9.4m^{3}$ and the maximum air volume equipped with two induction pipes, we can keep the air cleanness level of 5 ~ 6. 5. To maintain the air cleanness for a long time, if we first operate for 5 minutes at maximum air volume and then operate at medium maximum air volume, we can keep the air cleanness with low energy.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.30 no.10
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• pp.615-624
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• 2017

This study investigated the various physical and electrical effects of silicon direct bonding. Direct bonding means the joining of two wafers together without an intermediate layer. If the surfaces are flat, and made clean and smooth using HF treatment to remove the native oxide layer, they can stick together when brought into contact and form a weak bond depending on the physical forces at room temperature. An IR camera and acoustic systems were used to analyze the voids and bonding conditions in an interface layer during bonding experiments. The I-V and C-V characteristics are also reported herein. The capacitance values for a range of frequencies were measured using a LCR meter. Direct wafer bonding of silicon is a simple method to fuse two wafers together; however, it is difficult to achieve perfect bonding of the two wafers. The direct bonding technology can be used for MEMS and other applications in three-dimensional integrated circuits and special devices.