• Transactions on Electrical and Electronic Materials
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• v.8 no.1
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• pp.1-4
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• 2007

This paper discusses two approaches for pre-polishing optimization of oxide chemical mechanical planarization (CMP) that can be used as alternatives to the commonly applied dummy structure insertion in shallow trench isolation (STI) and replacement gate (RG) technologies: reverse nitride masking (RNM) and oxide etchback (OEB). Wafers have been produced using each optimization technique and CMP tests have been performed. Dishing, erosion and global planarity have been investigated with the help of conductive atomic force microscopy (C-AFM). The results demonstrate the effectiveness of both techniques which yield excellent planarity without dummy structure related performance degradation due to capacitive coupling.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.22 no.8
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• pp.682-688
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• 2009

A periodic away of zinc oxide(ZnO) micro-rods as fabricated by using chemical bath deposition and photo-lithography. Vertically aligned ZnO micro-rods array was successfully grown by chemical bath deposition method on ZnO seed layer. The ZnO seed layer was deposited on glass and the patterning was made by standard photo-lithography technique. The selective growth of ZnO micro-rods as achieved with the masked ZnO seed layer. The fabricated ZnO micro rods were found to be single crystalline and have grown along hexagonal c-axis direction of (0002) which is same as the preferred growth orientation of ZnO seed layer.

• Journal of the Korean Chemical Society
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• v.7 no.4
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• pp.245-250
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• 1963

Synergistic effect was observed in the extraction of trivalent lanthanides by the mixed solvent of TBPO (tri-n-butyl phosphine oxide) and TOPO (tri-n-octyl phosphine oxide) in toluene diluent. The reason of the enhancement was verified as mainly due to the formation of new extractable species $M(NO_3)_3(TBPO)_2\;(TOPO)$ besides of the formation of $M(NO_3)_3(TBPO)_3$and $M(NO_3)_3(TOPO)_3$.

• Journal of the Korean Chemical Society
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• v.45 no.4
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• pp.318-324
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• 2001

The reaction of 6-chloro-2-hydrazinoquinoxaline(4) or 6-chloro-2-hydrazinoquinoxaline 4-oxide(7) with alkyl (ethoxymethylene)cyanoacetates gave pyrazolylquinoxalines(5, 8). The reaction of compounds 8 with dimethyl acetylenedicarboxylate resulted in the 1,3-dipolar cycloaddition reaction and then ring transformation to afford pyrazolylpyrrolo[1,2-a]quinoxalines(9).

• Journal of the Korean Chemical Society
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• v.44 no.3
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• pp.229-236
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• 2000

The reaction of 6-chloro-2-hydrazinoquinoxaline 4.oxide(10) with acetylacetone or dibenzoylmethane gave 6-chloro-2-(3,5-disubstituted pyrazol-1-yl)quinoxaline 4-oxides (11) through the intramolecular·cyclization.The chlorination of compound 11 with phosphoryl chloride afforded 3,6-dichloro-2-(3,5-disubstituted pyrazol-1-yl)quinoxalines (12), whose reaction with hydrazine hydrate provided 6-chloro-3-hydrazinodehydes, benzenesulfonyl chloride, substituted benzoyl chlohdes or acyl chlorides gave novel pyrazolylquinoxalines (14-17).

• Journal of the Korean Institute of Telematics and Electronics A
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• v.31A no.4
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• pp.63-69
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• 1994

The Ultrahigh Vacuum Electron Cyclotron Resonance Chemical Vapor Deposition(UHV-ECRCVD) system whose base pressure is 1${\times}10^{9}$ torr has been constructed. In-situ cleaning prior to the epitaxial growth was carried out at 56$0^{\circ}C$ by ECR generated uniform hydrogen plasma whose density is $10^{10}/cm{3}$. The natural oxide was effectively removed without damage by applying positive DC bias(+10V) to the substrate. RHEED(Reflection High Energy Electron Diffraction) analysis has been used to confirm the removal of the surgace oxide and the streaky 2$\times$1 reconstruction of the Si surface, and the suppression of the substrate damage is anaylized by X-TEM(cross-sectional Transmission Electron Microscopy). Surface cleaning technique by ECR hydrogen plasma confirmed good quality epitaxial growth at low temperature.

• Proceedings of the KIEE Conference
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• 2000.11c
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• pp.425-427
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• 2000

We describe the preparation of a cobalt oxide in which the solid-pore architecture of the material is controllably varied. All $CoO_2$ gels derived from $CoCl_2$-based sol-gel synthesis, but exhibit markedly different final pore structures based on how the pore fluid is removed from forces that result from extraction are either low or nonexistent. These nanoscale mesoporous materials have higher $CoO_2$ crystallites. Controlling both the pore and solid architecture on the nanoscale offers a strategy for the design of new supercapacitor and charge-storage materials.

• Journal of the Society of Cosmetic Scientists of Korea
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• v.12 no.1
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• pp.17-33
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• 1986

The interfacial Properties of ferrosoferric oxide suspended in aqueous KNO3 solution are investigated by studying the zeta potentials and surface charge densities at $25^{\circ}C$. The zeta potentials are obtained by measuring the electrophoretic mobility and the surface charge densities by potentiometric titrations in the aqueous KNO3 solutions of different concentrations from 10-3 to 10-1M. The data are interpreted by the surface dissociation and complexation model of Davis, et als. and the modified model.

• Bulletin of the Korean Chemical Society
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• v.33 no.1
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• pp.209-214
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• 2012

In this work, the reduced graphene nanosheets were synthesized from pre-exfoliated graphite flakes. The pristine graphite flakes were firstly pre-exfoliated to graphite nanoplatelets in the presence of acetic acid. The obtained graphite nanoplatelets were treated by Hummer's method to produce graphite oxide sheets and were finally exfoliated to graphene nanosheets by ultrasonication and reduction processes. The prepared graphene nanosheets were studied by X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), atomic force microscopy (AFM), and transmission electron microscopy (TEM). From the results, it was found that the preexfoliation process showed significant influence on preparation of graphite oxide sheets and graphene nanosheets. The prepared graphene nanosheets were applied to the preparation of conductive materials, which yielded a greatly improved electrical resistance of $200{\Omega}/sq$.

• Bulletin of the Korean Chemical Society
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• v.35 no.1
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• pp.313-315
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• 2014