Alternative Optimization Techniques for Shallow Trench Isolation and Replacement Gate Technology Chemical Mechanical Planarization |
Stefanova, Y.
(Institute for Semiconductor Technology, Darmstadt University of Technology)
Cilek, F. (Institute for Semiconductor Technology, Darmstadt University of Technology) Endres, R. (Institute for Semiconductor Technology, Darmstadt University of Technology) Schwalke, U. (Institute for Semiconductor Technology, Darmstadt University of Technology) |
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