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http://dx.doi.org/10.4313/JKEM.2009.22.8.682

Array of 2-dimensions and Vertical Alignment of Zinc Oxide Micro Rod by the CBD Method  

Lee, Yeok-Kyoo (영남대학교 나노시스템공학과)
Nam, Hyo-Duk (영남대학교 전자정보공학부)
Lee, Sang-Hwan (영남대학교 디스플레이화학공학부)
Jeon, Chan-Wook (영남대학교 디스플레이화학공학부)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.22, no.8, 2009 , pp. 682-688 More about this Journal
Abstract
A periodic away of zinc oxide(ZnO) micro-rods as fabricated by using chemical bath deposition and photo-lithography. Vertically aligned ZnO micro-rods array was successfully grown by chemical bath deposition method on ZnO seed layer. The ZnO seed layer was deposited on glass and the patterning was made by standard photo-lithography technique. The selective growth of ZnO micro-rods as achieved with the masked ZnO seed layer. The fabricated ZnO micro rods were found to be single crystalline and have grown along hexagonal c-axis direction of (0002) which is same as the preferred growth orientation of ZnO seed layer.
Keywords
CBD; ZnO; Seed layer; Micro-rod; Photo-lithography;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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