• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.19 no.1
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• pp.58-63
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• 2006

In this Paper, ZnO films mixed with iron oxide were prepared by an ultrasonic spray pyrolysis method. The chemical composition and structural properties as a function of the Fe atomic ratio in the deposition solution were studied. Zinc acetate and ferrous chloride were used as precursors of Zn and Fe, respectively. Fe atomic ratio to Zn varied from 0.15 to 10.0. Substrate temperature was fixed at $250^{\circ}C$. The crystallographic properties and surface morphologies of the films were studied by X-ray diffraction (XRD) and scanning electron microscopy (SEM), respectively. Electron probe X-ray microanalysis (EPMA) and X-ray photoelectron spectroscopy (XPS) were carried out to analyse the chemical composition and state of Zn and Fe atoms.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.161-161
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• 2008

The oxide film of silicon wafer has been mainly polished by fumed silica, colloidal silica or ceria slurry. Because colloidal silica slurry is uniform and highly dispersed composed of spherical shape particles, by which the oxide film polished remains to be less scratched in finishing polishing process. Even though the uniformity and spherical shape is advantage for reducing the scratch, it may also be the factor to decrease the removal rate. We have studied the correlation of silica abrasive particles and CMP characteristics by varying pH, down force, and table rotation rate in polishing. It was found that the CMP polishing is dependent on the morphology, aggregation, and the surface property of the silica particles.

• Bulletin of the Korean Chemical Society
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• v.27 no.8
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• pp.1171-1174
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• 2006

Various off-the-shelf Lewis acids in conjunction with various onium salts are screened for coupling reaction of $CO_2$ with epoxides. Among the tested ones, $VCl_3/n-Bu_4NOAc$, $VCl_3/(n-Bu_4NCl$ or PPNCl), $FeCl_3/ n-Bu_4NOAc$, and $FeCl_3/ n-Bu_4NOAc$are proved to be highly active. Propylene oxide, epichlorohydrin, styrene oxide, and cyclohexene oxide can be converted over 90% yields to the corresponding cyclic carbonates without the use of organic solvents under mild conditions by 0.1-1.0 mol% catalyst charge.

• Bulletin of the Korean Chemical Society
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• v.35 no.7
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• pp.2139-2142
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• 2014

A one-pot, facile and ecofriendly approach to the fabrication of covalently fluorinated graphene using mild reaction conditions is reported. This straightforward and efficient strategy allows fluorine groups to be covalently and stably anchored onto graphene to produce single-layer functionalized graphene sheets from a graphene oxide precursor.

• Bulletin of the Korean Chemical Society
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• v.35 no.7
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• pp.1999-2003
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• 2014

Indium tin oxide ($In_2Sn_{1-x}O_{5-y}$) nanoparticles were synthesized by hydrothermal method from stable indium tin acetylacetone complexes and postannealing at $600^{\circ}C$. The absence of chlorine ions shortened the synthesis process, decreased the particle agglomeration and improved the particle purity. The introduced complexing ligand acetylacetone decreased the obtained nanoparticle size. The improved powder properties accelerated the sintering of the $In_2Sn_{1-x}O_{5-y}$ nanoparticles and reached a relative density of 96.4% when pressureless sintered at $1400^{\circ}C$.

• Bulletin of the Korean Chemical Society
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• v.35 no.8
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• pp.2519-2522
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• 2014

Recently, the observation of the electrocatalytic behavior of individual nanoparticles (NPs) by electrochemical amplification method has been reported. For example, the Iridium oxide ($IrO_x$) NP collision on the Pt UME was observed via electrocatalytic water oxidation. However, the bare Pt UME had poor reproducibility for the observation of NP collision signal and required an inconvenient surface pre-treatment for the usage. In this manuscript, we has been investigated other metal electrode such as Cu UME for the reproducible data analysis and convenient use. The $IrO_x$ NP collision was successively observed on the bare Cu UME and the reproducibility in collision frequency was improved comparing with previous case using the $NaBH_4$ pre-treated Pt UME. Also, the adhesion coefficient between NP and the Cu UME was studied for better understanding of the single NP collision system.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11b
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• pp.189-192
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• 2001

Recently, STI process is getting attention as a necessary technology for making high density of semiconductor by devices isolation method. However, it does have various problems caused by CMP nprocess, such as torn oxide defects, nitride residues on oxide, damages of si active region, contaminations due to post-CMP cleaning, difficulty of accurate end point detection in CMP process, etc. In this work, the various defects induced by CMP process was introduced and the above mentioned problems of CMP process was examined in detail. Finally, the guideline of future CMP process was presented to reduce the effects of these defects.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.548-548
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• 2012

Thermomechanical and surface chemical properties of composite films of poly(D, L-lactic-co-glycolic acid) (PLGA) were significantly improved by the addition of graphene oxide (GO) nanosheets as nanoscale fillers to the PLGA polymer matrix. Enhanced thermomechanical properties of the PLGA/GO (2 wt.%) composite film, including an increase in the crystallization temperature and reduction in the weight loss, were observed. The tensile modulus of a composite film with increased GO fraction was presumably enhanced due to strong chemical bonding between the GO nanosheets and PLGA matrix. Enhanced hydrophilicity of the composite film due to embedded GO nanosheets also improved the biocompatibility of the composite film. Improved thermomechanical properties and biocompatibility of the PLGA composite films embedded with GO nanosheets may be applicable to biomedical applications such as scaffolds.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.478-478
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• 2011

The thermomechanical and surface chemical properties of nanocomposite of poly( D, L-actic-co-glycolic acid) (PLGA) were improved significant due to concentration of graphene oxide (GO) nanosheets as nanoscale fillers to PLGA film. Thermomechanical properties of the PLGA/GO (2wt.-%.) nanocomposite were decreased crystallization and melting temperature, weight loss. The storage and loss moduli of the nanocomposite were enhanced by chemical bonding between the oxygenated functional groups of the GO nanosheets and the polymer chains in the PLGA matrix. Enhanced hydrophilicity of nanocomposite caused by embedded GO nanosheets also improved for good biocompatibility. Our findings indicate that thermomechanical properties and biocompatibility of nanocomposite embedded with GO nanosheets are attractive candidates for use in biomedical applications such as scaffolds.

• Carbon letters
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• v.15 no.4
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• pp.282-289
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• 2014

Blends of poly(vinyl alcohol) (PVA), polyethyleneimine (PEI), and graphene oxide (GO) were prepared by solution casting method. Calorimetric thermal properties of the blends were investigated. The $T_gs$ of PVA/PEI blends were higher than the $T_gs$ of either of the component polymers at low concentrations of PEI. These abnormal increases of $T_gs$ may be due to the negative entropy of mixing which is associated with strong hydrogen bonding between PVA and PEI. The degree of depression of $T^0_ms$ was not reduced by the negative entropy of mixing, since strong hydrogen bonding also causes an increase in the magnitude of negative ${\chi}$ between PVA and PEI. The $T_g$ of PVA was increased significantly by adding 0.7 wt.% GO into PVA. The magnitude of negative ${\chi}$ was increased by adding GO into the blends of PVA and PEI.