Browse > Article
http://dx.doi.org/10.4313/JKEM.2006.19.1.058

Preparation of Iron Oxide-mixed ZnO films by Ultrasonic Spray Pyrolysis  

Choi Mu-Hee (경상대학교 전기공학과)
Ma Tae-Young (경상대학교 전기공학과)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.19, no.1, 2006 , pp. 58-63 More about this Journal
Abstract
In this Paper, ZnO films mixed with iron oxide were prepared by an ultrasonic spray pyrolysis method. The chemical composition and structural properties as a function of the Fe atomic ratio in the deposition solution were studied. Zinc acetate and ferrous chloride were used as precursors of Zn and Fe, respectively. Fe atomic ratio to Zn varied from 0.15 to 10.0. Substrate temperature was fixed at $250^{\circ}C$. The crystallographic properties and surface morphologies of the films were studied by X-ray diffraction (XRD) and scanning electron microscopy (SEM), respectively. Electron probe X-ray microanalysis (EPMA) and X-ray photoelectron spectroscopy (XPS) were carried out to analyse the chemical composition and state of Zn and Fe atoms.
Keywords
ZnO; Iron oxide; Ultrasonic spray Pyrolysis; XPS;
Citations & Related Records
연도 인용수 순위
  • Reference
1 Y. Kashiwaba, K. Sugawara, K. Haga, H. Watanabe, B. P. Zhang, and Y. Segawa, 'Characteristics of c-axis oriented large grain ZnO films prepared by low pressure MOCVD method', Thin Solid Films, Vol. 411, p. 87, 2002   DOI   ScienceOn
2 T. Kobayashi, M. Haruta, H. Sana, and M. Nakane, 'A selective CO sensor using Tidoped ${\alpha}-Fe_{2}O_{3}$ with coprecipitated ultrafine particles of gold', Sensors and Actuators, Vol. 13, Iss. 4, p. 339, 1988   DOI   ScienceOn
3 B. Yan, J. Peng, and C. Chai, 'Gas-sensing properties of ${\alpha}-Fe_{2}O_{3}$ thin films prepared by plasma-enhanced chemical vapour deposition', Thin Solid Films, Vol. 245, p. 225, 1994   DOI   ScienceOn
4 H. Tabet-Derraz, N. Benramdane, D. Nacer, A. Bouzidi, and M. Medles, ''nvestigations on $Zn_{x}Cd_{1-x}$ thin films obtained by spray pyrolysis', Solar Energy Mater. Solar Cells, Vol. 73, p. 249, 2002   DOI   ScienceOn
5 K. Y. Cheong, N. Muti, and S. Roy Ramanan, 'Electrical and optical studies of ZnO:Ga thin films fabricated via the sol-gel technique', Thin Solid Films, Vol. 410, p. 142, 2002   DOI   ScienceOn
6 T. Yamamoto, T. Shiosaki, and A. Kawabata, 'Characterization of ZnO piezoelectric films prepared by RF planar-magnetron sputtering', J. Appl. Phys., Vol. 51, p. 3113, 1980   DOI   ScienceOn
7 T. Y. Ma and D. K. Shim, 'Effects of rapid thermal annealing on the morphology and electrical properties of ZnO/In films', Thin Solid Films, Vol. 410, p. 8, 2002
8 최무희, 마대영, '초음파분무법으로 제조한 ZnO/MgO막의 특성', 센서학회논문지, 14권, 5호, p. 362, 2005
9 T. Y. Ma and I. C. Lee, 'Influence of substrate temperature on the structural and electrical properties of ${\alpha}-Fe_{2}O_{3}(0001)$ films prepared by ultrasonic spray pyrolysis', J. of Mater Sci: Materials in electronics, Vol. 15, p. 775, 2004   DOI   ScienceOn
10 I. Naoto Koshizaki and T. Oyama, 'Sensing characteristics of ZnO-based $NO_x$ sensor', Sensor Actuat. Vol. B66, p. 119, 2000
11 S. Basu and A. Dutta, 'Room temperature hydrogen sensors based on ZnO', Mater. Chem. Phys., Vol. 47, p. 93, 1997
12 T. Y. Ma and S. C. Lee, 'Effects of aluminum content and substrate temperature on the structural and electrical properties of aluminum-doped ZnO films prepared by ultrasonic spray pyrolysis', J. Mater. Sci., Vol. 11, p. 305, 2000
13 S. I. Yi, Y. Liang, S. Thevuthasan, and S. A. Chambers, 'Morphological and structural investigation of the early stages of epitaxial growth of ${\alpha}-Fe_{2}O_{3}(0001)$ on and ${\alpha}-Al_{2}O_{3}(0001)$ by oxygen-plasma-assisted MBE', Surf. Sci., Vol. 443, p. 212, 1999   DOI   ScienceOn
14 K. Tominaga, T. Murayama, I. Mori, T. Ushiro, T. Moriga, and I. Nakabayashi, 'Effect of insertion of thin ZnO layer in transparent conductive ZnO:AI film', Thin Solid Films, Vol. 386, p. 267, 2001
15 S. Wang, W. wang, Z. Jiao, J, Liu, and Y. Qian, 'Characterization and gas-sensing properties of nanocrystalline iron(lll) oxide films prepared by ultrasonic spray pyrolysis on silicon', Sens. Actuators, Vol. B69, p. 22, 2000