• Korean Chemical Engineering Research
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• v.45 no.3
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• pp.264-268
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• 2007

The filtration performance of micron-sized metal fibrous filter was improved by synthesizing carbon nanotubes grown on the surface of metal fibers. The carbon nanotubes are grown with bush-like nanostructures covered around the micron-fibers or web-like nanostructures crossing between the fibers at different synthetic conditions. Filtration efficiency of CNT-metal-filter was measured and compared with the efficiency of the raw metal filter without CNTs. The developed CNT-metal-filter has higher filtration efficiency without significant difference in pressure drop compared with the conventional metal filter, which is because the carbon nanotubes function as the trap of pollutant nanoparticles.

• Journal of the Korean Applied Science and Technology
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• v.41 no.1
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• pp.19-26
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• 2024

Recently, separation membranes have been applied to fields such as water supply, sewage treatment, gray water reuse, and air pollution control. Chemical cleaning technology is attracting attention among the methods of reusing these expensive separation membranes. It was found that the separation membrane could be regenerated using chemical cleaning. Specifically, it was found that the use time of the separation membranes regenerated by chemical cleaning was sustainable for more than 1,700 hours. Additionally, it was found that the flux recovery ratio after chemical cleaning was maintained at least 60%. In addition, the flux recovery ratio of HYDREX 4710, an organic membrane cleaner, and 4703, an inorganic membrane cleaner, was 76% and 62%, respectively, showing the highest flux recovery ratio among the chemicals used. Considering that the target raw water of this study is biological secondary treatment water, it was suggested that chemical cleaning could be actively used to regenerate separation membranes in future water treatment.

• Journal of Korean Society for Atmospheric Environment
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• v.24 no.4
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• pp.483-491
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• 2008

The filtration characteristics of $CYBAGFILTER^{(R)}$ unit with pleated filter bags were evaluated by comparing the performance of the unit with the lower part of cyclone shape with that of the unit with conventional lower part. Results from the test were also compared with those from the previous research with the $CYBAGFILTER^{(R)}$ in which round filter bags were installed. $CYBAGFILTER^{(R)}$ is the unit which combines the centrifugal separation mechanism and the fabric filtration mechanism in a single unit for efficient removal of particulate matters. The pleated filter bags are made of pleated fabric with an extension of the filtration area about 3 times compared with the conventional round filter bags. The results from the test using pleated filter bags showed an overall collection efficiency of over 99.9% regardless of the shape of lower part installed. When the lower part of cyclone shape was installed, the filter cleaning interval was over 2 times longer compared with that when the conventional lower part was installed. At the same conditions of filtration velocity and filter pressure drop, the $CYBAGFILTER^{(R)}$ with the lower part of cyclone shape, in which the pleated filter bags are installed, can be operated with a flow rate of round 3 times higher than that with conventional round filter bags.

• Membrane Journal
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• v.19 no.1
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• pp.47-53
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• 2009

The aim of this paper is to prepare metal/ceramic composite ultrafiltration membranes by coating inorganic particles on a metallic hollow fiber filter. The diameter and the pore size of the filter was 2.0 mm and $2{\sim}8{\mu}m$. The metal/ceramic composite ultrafiltration membranes were obtained by a coating process of silica and titania sols on top of the metallic filter. For this purpose the method of fast freeze drying and dip-coating were used. It was found that the pore size of the membrane was about 50 nm from SEM and PMI characterization. The pore size was controlled by changing the size of the particles, sintering period and temperature.

• Korean Chemical Engineering Research
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• v.60 no.3
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• pp.363-370
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• 2022

In this paper, an estimation algorithm for state of charge (SOC) was applied using an equivalent circuit model (ECM) and an Extended Kalman Filter (EKF) to improve the estimation accuracy of the battery system states. In particular, an observer was designed to estimate SOC along with the aged capacity. In the case of the fresh battery, when SOC was estimated by Kalman Filter (KF), the mean absolute percentage error (MAPE) was 0.27% which was smaller than MAPE of 1.43% when the SOC was calculated by the model without the observer. In the driving mode of the vehicle, the general KF or EKF algorithm cannot be used to estimate both SOC and capacity. Considering that the battery aging does not occur in a short period of time, a strategy of periodically estimating the battery capacity during charging was proposed. In the charging mode, since the current is fixed at some intervals, a strategy for estimating the capacity along with the SOC in this situation was suggested. When the current was fixed, MAPE of SOC estimation was 0.54%, and the MAPE of capacity estimation was 2.24%. Since the current is fixed when charging, it is feasible to estimate the battery capacity and SOC simultaneously using the general EKF. This method can be used to periodically perform battery capacity correction when charging the battery. When driving, the SOC can be estimated using EKF with the corrected capacity.

• Bulletin of the Korean Chemical Society
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• v.16 no.12
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• pp.1167-1172
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• 1995

A coverage of about 1 μm-sized pores of a membrane filter by four monolayers of maleic acids copolymers and poly(allylamine) (PAA) was attained by Langmuir-Blodgett (LB) technique through a covalent cross-linking followed a polyion complexation at the air-water interface. The copolymers were prepared to have side chains of hydrocarbon tail, carboxyl, and/or oligoether in the repeat unit. The surface pressure-area isotherms showed that the monolayers on an aqueous PAA have more expanded area than on pure water. The monolayers were transferable on a calcium fluoride substrate and a fluorocarbon membrane filter as Y deposition type, and the resulting LB films were characterized by FT-IR spectroscopy and scanning electron microscopy. A polymer network produced through interchain amide formation was confirmed in as-deposited films. The films were heat-treated in order to complete the cross-linking. SEM observation of the heat-treated film on a porous membrane filter showed that the four layer film was sufficiently stable to cover the filter pore of about 1 μm. Immersion of the film in water or in chloroform did not cause any change in its appearance on SEM and in FT-IR spectra.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.7
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• pp.557-561
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• 2001

Chemical mechanical polishing (CMP) process has been widely used to planarize dielectric layers, which can be applied to the integraded circuits for sub-micron technology. Despite the increased use of CMP process, it is difficult to accomplish the global planarization of in the defect-free inter-level dielectrics (ILD). Especially, defects such as micro-scratch lead to severe circuit failure which affect yield. CMP slurries can contain particles exceeding 1㎛ in size, which could cause micro-scratch on the wafer surface. The large particles in these slurries may be caused by particles agglomeration in slurry supply line. To reduce these defects, slurry filtration method has been recommended in oxide CMP. In this work, we have studied the effects of filtration and the defect trend as a function of polished wafer count using various filters in inter-metal dielectrics(IMD)-CMP process. The filter installation in CMP polisher could reduce defects after IMD-CMP process. As a result of micro-scratch formation, it is shown that slurry filter plays an important role in determining consumable pad lifetime. The filter lifetime is dominated by the defects. We have concluded that slurry filter lifetime is fixed by the degree of generating defects.

• Journal of the Korean Society of Tobacco Science
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• v.23 no.2
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• pp.179-184
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• 2001

This study was conducted to determine the smoke component distribution and the relationship between chemical components and physical characteristics of cigarettes. 16 different cigarette brands which were sold in the market were selected for this study. Five kinds of smoke components which have been tar, nicotine, water, carbon monoxide(CO) puff No., and six kinds of physical characteristics which were filter type, leaf weight, filter weight, UPD, EPD, dilution rate were analyzed. The average values in tar, nicotine, water, CO concentration were 6.5 mg/cig. 0.66 mg/cig, 1.12 mg/cig. and 6.32 mg/cig., respectively. The average ratios of nicotine/tar and CO/tar were 0.10, and 1.02 respectively. The distribution of smoke components collected in the cambridge filter and cigarette filter was different. The averages of tar and nicotine removal efficiency by a cigarette filter were 53%, and 48%, respectively. All smoking components were positively correlated with other smoking components. filter types, EPD, and dilution rate were showed high correlation to the changes of smoke components. Especially, dilution rate of cigarette strongly affected on the changes of all smoke components.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11a
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• pp.185-188
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• 2001

Chemical mechanical polishing(CMP) process is widely used for global planarization of inter-metal dielectric (IMD) layer and inter-layer dielectric (ILD) for deep sub-micron technology. However, as the IMD and ILD layer gets thinner, defects such as micro-scratch lead to severe circuit failure, which affect yield. In this paper, for the improvement of CMP Process, deionized water (DIW) pressure, purified $N_2$ (P$N_2$) gas, slurry filter and high spray bar were installed. Our experimental results show that DIW pressure and P$N_2$ gas factors were not related with removal rate, but edge hot-spot of patterned wafer had a serious relation. Also, the filter installation in CMP polisher could reduce defects after CMP process, it is shown that slurry filter plays an important role in determining consumable pad lifetime. The filter lifetime is dominated by the defects. However, the slurry filter is impossible to prevent defect-causing particles perfectly. Thus, we suggest that it is necessary to install the high spray bar of de-ionized water (DIW) with high pressure, to overcome the weak-point of slurry filter. Finally, we could expect the improvements of throughput, yield and stability in the ULSI fabrication process.

• Particle and aerosol research
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• v.9 no.4
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• pp.261-269
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• 2013

The chemical mechanical polishing (CMP) process is widely used in semiconductor manufacturing process for planarization of various materials and structures. Point-of-use (POU) filters are used in most of the CMP processes in order to reduce the unwanted micro-scratches which may result in defects. The performance of the POU filter is depends on type and size of the abrasives used during cleaning process. For this reason, there is a need to evaluate POU filters for their filtration efficiency (FE) with different types of abrasives. In this study, we developed filter test system to evaluate the FE of POU using ceria and silica abrasives (slurry). The POU filter is roll type capsule filter with retention size of 0.2 ${\mu}m$. Two POU filters of different make are evaluated for FE. We observed that both POU filters show similar filtration efficiency for silica and ceria slurry. Results reveal that the ceria slurry and the colloidal silica particle are removed not only by mechanical way but also hydrodynamic and electrostatic interaction way.