• Title/Summary/Keyword: channel morphology

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CMOS 소자 응용을 위한 Plasma doping과 Silicide 형성

  • Choe, Jang-Hun;Do, Seung-U;Seo, Yeong-Ho;Lee, Yong-Hyeon
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.456-456
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    • 2010
  • CMOS 소자가 서브마이크론($0.1\;{\mu}m$) 이하로 스케일다운 되면서 단채널 효과(short channel effect), 게이트 산화막(gate oxide)의 누설전류(leakage current)의 증가와 높은 직렬저항(series resistance) 등의 문제가 발생한다. CMOS 소자의 구동전류(drive current)를 높이고, 단채널 효과를 줄이기 위한 가장 효율적인 방법은 소스 및 드레인의 얕은 접합(shallow junction) 형성과 직렬 저항을 줄이는 것이다. 플라즈마 도핑 방법은 플라즈마 밀도 컨트롤, 주입 바이어스 전압 조절 등을 통해 저 에너지 이온주입법보다 기판 손상 및 표면 결함의 생성을 억제하면서 고농도로 얕은 접합을 형성할 수 있다. 그리고 얕은 접합을 형성하기 위해 주입된 불순물의 활성화와 확산을 위해 후속 열처리 공정은 높은 온도에서 짧은 시간 열처리하여 불순물 물질의 활성화를 높여주면서 열처리로 인한 접합 깊이를 얕게 해야 한다. 그러나 접합의 깊이가 줄어듦에 따라서 소스 및 드레인의 표면 저항(sheet resistance)과 접촉저항(contact resistance)이 급격하게 증가하는 문제점이 있다. 이러한 표면저항과 접촉저항을 줄이기 위한 방안으로 실리사이드 박막(silicide thin film)을 형성하는 방법이 사용되고 있다. 본 논문에서는 (100) p-type 웨이퍼 He(90 %) 가스로 희석된 $PH_3$(10 %) 가스를 사용하여 플라즈마 도핑을 실시하였다. 10 mTorr의 압력에서 200 W RF 파워를 인가하여 플라즈마를 생성하였고 도핑은 바이어스 전압 -1 kV에서 60 초 동안 실시하였다. 얕은 접합을 형성하기 위한 불순물의 활성화는 ArF(193 nm) excimer laser를 통해 $460\;mJ/cm^2$의 에니지로 열처리를 실시하였다. 그리고 낮은 접촉비저항과 표면저항을 얻기 위해 metal sputter를 통해 TiN/Ti를 $800/400\;{\AA}$ 증착하고 metal RTP를 사용하여 실리사이드 형성 온도를 $650{\sim}800^{\circ}C$까지 60 초 동안 열처리를 실시하여 $TiSi_2$ 박막을 형성하였다. 그리고 $TiSi_2$의 두께를 측정하기 위해 TEM(Transmission Electron Microscopy)을 측정하였다. 화학적 결합상태를 분석하기 위해 XPS(X-ray photoelectronic)와 XRD(X-ray diffraction)를 측정하였다. 접촉비저항, 접촉저항과 표면저항을 분석하기 위해 TLM(Transfer Length Method) 패턴을 제작하여 I-V 특성을 측정하였다. TEM 측정결과 $TiSi_2$의 두께는 약 $580{\AA}$ 정도이고 morphology는 안정적이고 실리사이드 집괴 현상은 발견되지 않았다. XPS와 XRD 분석결과 실리사이드 형성 온도가 $700^{\circ}C$에서 C54 형태의 $TiSi_2$ 박막이 형성되었고 가장 낮은 접촉비저항과 접촉저항 값을 가진다.

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Glucocorticoid Regulation of Gene Expression in Hippocampal CA3 and Dentate Gyrus (글루코코티코이드 호르몬에 의한 뇌해마의 CA와 Dentate Gyrus 부분의 유전자 발현 변화)

  • Kim, Dong-Sub;Ahn, Soon-Cheol;Kim, Young-Jin;Park, Byoung-Keun;Ahn, Yong-Tae;Kim, Ji-Youn;Kyoji, Morita;Her, Song
    • Journal of Life Science
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    • v.17 no.3 s.83
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    • pp.305-311
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    • 2007
  • Glucocorticoids (GCs) alter metabolism, synaptogenesis, apoptosis, neurogenesis, and dendritic morphology in the hippocampus. To better understand how glucocorticoids regulate these aspects of hippocampal biology, we studied gene expression patterns in the CA3 (Hippocampal pyramidal cell field CA3) and dentate gyrus (DG). Litter-matched Lewis inbred rats treated for 20 days with either 9.5 mg per day sustained-release corticosterone or placebo pellets were compared with high-density oligonucleotide microarray analysis (Rat Neurobiology U34 Arrays, Affymetrix). In placebo-treated rats, 32 genes were expressed at greater levels in CA3 than DG, whereas 3 genes were expressed at great levels in DC than CA3. Regional differences were also apparent in corticosterone-induced changes in the hippocampal transcriptome. Six genes in CA3 and 41 genes in DC were differentially regulated by corticosterone. As per the glucocorticoid effects on gene transcription in the brain, forty three of these genes were upregulated, and 4 genes were downregulated. Genes differentially expressed in hippocampus included those for 13 neurotransmitter proteins, 5 ion channel related proteins, 4 transcription factors, 3 neurotrophic factors, 1 cytokine, 1 apoptosis related protein, and 5 genes involved in synaptogenesis. Interestingly, GCs can have suppressive effects on brain BDNF mRNA transcription, one of the neurotrophic factors. These results indicate the diversity of targets affected by chronic exposure to corticosterone and highlight important regional differences in hippocampal neurobiology.

Investigation of Convective Heat Transfer Characteristics of Aqueous SiO2 Nanofluids under Laminar Flow Conditions (층류유동 조건에서 SiO2 나노유체의 대류 열전달 특성에 대한 연구)

  • Park, Hyun-Ah;Park, Ji-Hyun;Jeong, Rag-Gyo;Kang, Seok-Won
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.17 no.9
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    • pp.1-11
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    • 2016
  • The effect of the migration of nanoparticles near the wall of a channel on the convective heat transfer in a laminar flow of $SiO_2$ nanoparticle suspensions (nanofluids) under constant wall heat flux boundary conditions was numerically and experimentally investigated in this study. The dynamic thermal conductivity of the aqueous $SiO_2$ nanofluids was measured using T-type thermocouples attached to the outer surface of a stainless steel circular tube (with a length of 1 m and diameter of 1.75 mm). The nanofluids used in this study were synthesized by dispersing $SiO_2$ spherical nanoparticles with a diameter of 24 nm in de-ionized water (DIW). The enhancement of the thermal conductivity of the nanofluids (e.g., an increase of up to 7.9 %) was demonstrated by comparing the temperature profiles in the flow of the nanofluids with that in the flow of the basefluids (i.e., DIW). However, this trend was not demonstrated in the computational analysis, because the numerical models were based on continuum assumptions and flow features involving nanoparticles in a stable colloidal solution. Thus, to explore the non-continuum effects, such as the modification of the morphology caused by nanoparticle-wall interactions on the heat exchanging surfaces (e.g., the isolated and dispersed precipitation of the nanoparticles), additional experiments were performed using DIW right after the measurements using the nanofluids.

A study on the relationship between Schmidt Hammer's 'R' and bedrock microforms (기반암 하상 미지형과 슈미트 해머 반발 값과의 관계에 대한 연구)

  • KIM, Jong Yeon
    • Journal of The Geomorphological Association of Korea
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    • v.19 no.3
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    • pp.51-69
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    • 2012
  • Physical strength of the rock is the most important factor of resistance to erosion and has been measured through various way. Bedrock microforms, like potholes and grooves, are the forms sculpted by the erosional processes of flow and the location and morphology are strongly affected by the differential erosion. It also assumed that the physical strength of the rock controls the erosion rate and mode of erosion. The schmidt hammer has been used to measure the rock strength in the field for the geomorphological research. To find the relationship between the rock strength and microforms, Schmidt hammer's R(rebound) were measured in the Baeksuktan, middle reach of Gilancheon, Cheongsong, Gyungsangbuk do. The overall values of rebound of the local sandstone showed over 65 in most cases, so it can be regarded as 'very strong'. It is found that the rebound values of the rock surface decreased towards current water level. It also, however, found that there was no systematic differences in rebound values among the topographically high and lows in the bedrock surface. There was no statistically significant difference in rebound values of the area with well developed microforms and others. The values of R from the exposed faces and inside of the microforms are similar. In the case of conglomerate, the part with the gravel showed higher values that the parts with sands. The rebound values are decreased near of(<1cm) the geological discontinuities(including joint and faults), so this line of weakness could be the point of initiation of active erosion to form microforms. However there is large variations in rebound values within this part. It also should be mentioned that topological relation between the strike of the geologic discontinuities and flow direction looks control the mode of erosional processes.

Detection for Region of Volcanic Ash Fall Deposits Using NIR Channels of the GOCI (GOCI 근적외선 채널을 활용한 화산재 퇴적지역 탐지)

  • Sun, Jongsun;Lee, Won-Jin;Park, Sun-Cheon;Lee, Duk Kee
    • Korean Journal of Remote Sensing
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    • v.34 no.6_4
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    • pp.1519-1529
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    • 2018
  • The volcanic ash can spread out over hundreds of kilometers in case of large volcanic eruption. The deposition of volcanic ash may induce damages in urban area and transportation facilities. In order to respond volcanic hazard, it is necessary to estimate efficiently the diffusion area of volcanic ash. The purpose of this study is to compare in-situ volcanic deposition and satellite images of the volcanic eruption case. In this study, we used Near-Infrared (NIR) channels 7 and 8 of Geostationary Ocean Color Imager (GOCI) images for Mt. Aso eruption in 16:40 (UTC) on October 7, 2016. To estimate deposit area clearly, we applied Principal Component Analysis (PCA) and a series of morphology filtering (Eroded, Opening, Dilation, and Closing), respectively. In addition, we compared the field data from the Japan Meteorological Agency (JMA) report about Aso volcano eruption in 2016. From the results, we could extract volcanic ash deposition area of about $380km^2$. In the traditional method, ash deposition area was estimated by human activity such as direct measurement and hearsay evidence, which are inefficient and time consuming effort. Our results inferred that satellite imagery is one of the powerful tools for surface change mapping in case of large volcanic eruption.

Tectonic Structures and Hydrocarbon Potential in the Central Bransfield Basin, Antarctica (남극 브랜스필드 해협 중앙분지의 지체구조 및 석유부존 가능성)

  • Huh Sik;Kim Yeadong;Cheong Dae-Kyo;Jin Young Keun;Nam Sang Heon
    • The Korean Journal of Petroleum Geology
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    • v.5 no.1_2 s.6
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    • pp.9-15
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    • 1997
  • The study area is located in the Central Bransfield Basin, Antarctica. To analyze the morphology of seafloor, structure of basement, and seismic stratigraphy of the sedimentary layers, we have acquired, processed, and interpreted the multi-channel seismic data. The northwest-southeastern back-arc extension dramatically changes seafloor morphology, volcanic and fault distribution, and basin structure along the spreading ridges. The northern continental shelf shows a narrow, steep topography. In contrast, the continental shelf or slope in the south, which is connected to the Antarctic Peninsula, has a gentle gradient. Volcanic activities resulted in the formation of large volcanos and basement highs near the spreading center, and small-scale volcanic diapirs on the shelf. A very long, continuous normal fault characterizes the northern shelf, whereas several basinward synthetic faults probably detach into the master fault in the south. Four transfer faults, the northwest-southeastern deep-parallel structures, controlled the complex distributions of the volcanos, normal faults, depocenters, and possibly hydrocarbon provinces in the study area. They have also deformed the basement structure and depositional pattern. Even though the Bransfield Basin was believed to be formed in the Late Cenozoic (about 4 Ma), the hydrocarbon potential may be very high due to thick sediment accumulation, high organic contents, high heat flow resulted from the active tectonics, and adequate traps.

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Characterization Analysis for Cardiogenic Potential of Three Human Adult Stem Cells (세 종류 줄기세포의 특성 분석과 지방유래 줄기세포의 심근세포로의 분화)

  • Park, Se-Ah;Kang, Hyeon-Mi;Kim, Eun-Su;Kim, Jin-Young;Kim, Hae-Kwon
    • Development and Reproduction
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    • v.11 no.3
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    • pp.167-177
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    • 2007
  • In the present study, we isolated three human adult stem cells including adipose tissue-derived stem cells(HAD), umbilical cord-derived stem cells(HUC), and amnion-derived stem cells(HAM) and analysed their characteristics. And we examined whether HAD could be used as therapeutical cells for the heart diseases. Both HAM and HUC appeared very similar morphology but HAD was different. Doubling time of HUC was most fast, but total doubling numbers of HUC was same with HAM. Total doubling numbers of HAD was much more than others. Expression patterns of genes and proteins of three human adult stem cells were very similar. Also they were differentiated into adipocytes, osteocytes, and chondrocytes. In addition, they expressed many cardiomyocyte-related genes. But expression pattern of genes is a little different. When HAD were cultivated in the presence or absence of various combinations of BMP and FGF after 5-azacytidine expose for 24 h, expression of Cmlc-1, and ${\alpha}1c$ genes was significantly increased. However, expression of troponin T, troponin I and Kv4.3 genes was not changed. Based on these observations, it is suggested that HAD, HUC, and HAM might be used as potentially therapeutical cells for clinical application.

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Correlations between the Stream Morphological Characteristics and the Hydraulic Geometry Characteristics for the Basin (유역(流域)의 하천형태학적(河川形態學的) 특성(特性)과 수리기하학적(水理幾何學的) 특성(特性)과의 상관성(相關性))

  • Ahn, Sang Jin;Yoon, Yong Nam;Kang, Kwan Won
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.2 no.1
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    • pp.1-17
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    • 1982
  • The stream morphological characteristics of a river basin has a close correlation with the hydrological and hydraulic characteristics of the basin. In this study the correlations of flow duration and Hydraulic geometry with the stream morphological characteristics as well as the correlation between flow duration and hydraulic geometry were analyzed bases on the data for the Geum River basin. The purpose of this study was to provide the necessary informations for water utilization projects at ungauged locations along the river course. First of all, the stream morphological characteristics was analyzed based on the Horton's three laws on the morphology of a stream that is, the law of stream number, the law of average stream length and the law of average stream slope. As is the case for majority of the rivers it was found that the Geum River basin was well developed according to the Horton's laws. High correlations were also found between the basin characteristics and the channel characteristics. The flow duration curves obtained with the daily stream flow data of 10~90% frequency of occurences at the five stage gauging stations in the Geum River could, in general, be expressed as an exponential functional relationship. The concept of proportional stream ordering system was employed to describe continuously the longitudinal variation of the stream morphological characteristics, and the mathematical model was formulated for the discharge-frequency-proportional stream order relationship. With the morphological characteristics as a common parameter the relationships with flow duration, drainage area were established in mathematical expressions, respectively.

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Assessment of fish fineness ratios passing through a fishway (어도를 통과하는 어류의 형태 체형비 평가)

  • Moon, Woon-ki;Bae, Dae-Yeul;Kim, Do-Hyun;Shin, Hyun-Beom;Suh, Jung Bin;Lim, Kyeong Hun;Lee, Eui-Haeng;Yoo, Jae-Sang;An, Kwang-Guk;Kim, Jai-Ku
    • Korean Journal of Environmental Biology
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    • v.37 no.4
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    • pp.726-734
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    • 2019
  • To understand the relationship between water velocity in a fishway and fish morphology, the fineness ratio of fish, expressed as the standard length to the body depth, was measured. The fineness ratios of fish groups belonging to Cyprinidae, Acheilognathinae, Centropomidae, and Centrachidae were relatively low. The FRs of other groups, excluding eel-shaped types of fish, were over 4.5, indicating streamlined structures. The fineness ratios of Korean fish were classified into three different types: type I was Bitterling-Carp group that favored a slow-flowing pool habitat(FRs ranged from 2.1 to 3.3), type II was the Chub group representing streamlined types (FRs FRs ranged from 3.7 to 5.2), and type III was the Smelt-Barbel fish group that preferred riffle-run habitats with high velocity (FRs is over 5.2). Fish abundance analysis of fish using the fishway during the experimental periods showed a relatively high abundance of both type II and III compared to type I. The FRs of the fish passing through fishway(velocity 0.5-1.0 m s-1) ranged from 4.5 to 5.0, indicating that the fish using the fishway were mainly the streamlined type. As one of the standard fishways in Korea, the flow rate of the ice harbor type ranged from 0.2 to 2.6 m s-1. The FR values of the fish groups using the fishway ranged from 4.3 to 5.0. In contrast, the flow rate measured in an artificial channel type of fishway (same as a natural type of fishway) ranged from 0.1 to 1.9 m s-1 and the FR values for the fish groups using a natural type of fishway ranged from 3.3 to 5.3. The low FR values in natural fish are considered to be due to differences in the flow rates between the two types of fishways.

A CYANOACETYLENE STUDY OF THE MOLECULAR DISK IN STAR FORMING REGIONS

  • Chung, H.S.;Kameya, Osamu;Morimoto, Masaki
    • Journal of The Korean Astronomical Society
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    • v.24 no.2
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    • pp.217-271
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    • 1991
  • We have observed dense core around young stellar objects, DR21, S140, Orion-KL, and L1551 using four millimeter-wave transitions of $HC_3N\;J$=4-3, J=5-4, J=10-9, and J=12-11. The spatial distribution of $HC_3N$ emission closely resembles the morphology of the previous CS observations that trace high density gas. These observations reveal the existence of $HC_3N$ dense cores around central IR source, elliptical in shape and almost perpendicular to the CO bipolar outflow axis. Small differences can be explained by that $HC_3N$ molecular line is more optically thin and is seen to be more detailed structure in the neighborhood of central IR sources. In S140 and Orion-KL, massive(${\sim}10\;M_{\odot}$), slowly rotating dense cores lie near at the central IR sources of bipolar outflows. The velocity channel maps of DR21 show that the bipolar outflow gas may have a correlation with the dense core of DR21. We analyzed intensities of the four lines to derive physical conditions in dense core from two methods, LTE and LVG. The column density of $HC_3N$, $N(HC_3N)$, between LTE and LVG calculations agree well with each other. The abundances of $HC_3N$ in each observing source have been estimated using the average values of $n(H_2)$ and $N(HC_3N)$ and assuming the size of dense core. The fractional $HC_3N$ abundances in massive dense cores of DR21, S140, and Orion-KL have a range of $(2-7){\times}10^{-10}$, while that of low mass dense core, L1551, has one order of magnitude greater value of $2{\times}10^{-9}$. This should be considered good agreement with the result by Morris et al.(1976). It may be considered that dense cores of DR21, S140, and Orion-KL may have almost same stage of chemical evolution, and their abundances have a small values relative to that of L1551. The column density $N(HC_3N)$ decreases with increasing distance from the densest part of the cloud, the central infrared source, and have the relation of $N(HC_3N){\varpropto}R^{\alpha}$, where a has a range of 0.65 to 0.89. The values of $n(H_2)$ are not varied with increasing distance from the dense core, and have almost same values. Therefore, it is considered that the dense cores in these regions probably consist of dense clumps in diffuse molecular gas medium, and $n(H_2)$ of each clump is ${\sim}10^5\;cm^{-3}$. Levels in the $T_{ex}$ increases with $n(H_2)$. It is considered that the $HC_3N$ dense cores are not completely thermalized. We examine the relationships between the luminosity of central infrared sources versus mass of the dense cores, and the luminosity of central infrared sources versus molecular hydrogen column density. Luminosities of the central IR sources show good correlation with mass and hydrogen column density of the dense core. Same has been found from CS observations. However, mass and size derived from $HC_3N$ observations are one order of magnitude smaller than those from CS. It can be interpreted that we see more central part of the cloud cores in $NC_3N$ lines than CS lines.

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