• Korean Journal of Materials Research
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• v.15 no.9
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• pp.594-597
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• 2005

The barrier characteristics of ZrN films deposited by remote plasma enhanced atomic layer deposition(PEALD) using TDEAZ and $N_2$ remote plasma have been investigated under various deposition conditions such as temperatures, plasma power and processing pressures. ZrN films showed generally improved properties as the processing temperature, pressure and plasma power increased. The optimized processing temperature, plasma power and pressure were $300^{\circ}C$, 200 Watt and 1 torr. respectively ZrN films deposited at the optimized processing conditions showed the carbon contents and resistivity of $6at.\%$ and $400{\mu}{\Omega}cm$ respectively.

• Bulletin of the Korean Chemical Society
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• v.15 no.1
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• pp.79-83
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• 1994

The organometallic chemical vapor deposition of single precursors, $[Me_2Al({\mu}-NHR)]_2\;(R=^iPr,\;^tBu)$, for alumininum nitride thin films has been investigated to evaluate their poroperties as potential precursors. In chemical vapor deposition processes the gas phase products scattered from a Ni(100) substrate were analyzed by mass spectrometry and the deposited films were characterized by X-ray photoelectron spectroscopy (XPS). The optimum temperatures for the formation of AlN films have been found to be between 700 K and 800 K. Carbon contamination of the films seems to be attributed mainly to the methyl groups bonded to the aluminum atoms. It is apparent that $^tBu$ group is better than $^iPr$ group as a substituent on the nitrogen atom of the single precursors for the AlN thin film formation.

• Journal of Radiation Industry
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• v.5 no.3
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• pp.249-252
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• 2011

Lignin is one of the natural macromolecules. Every year large amount of lignin arises from the cellulose production as a by-product worldwide. The use of lignin as a precursor to carbonaceous materials has gained interest due to its low cost and high availability. Therefore, we improved the properties of alkali-lignin by exposing to gamma ray in this study. The alkali-lignin is irradiated by Gamma ray irradiation with varying doses. The char yields of alkali-lignin were investigated by increasing up to 50 kGy. The cross-linking and bond scission of alkali-lignin occur simultaneously during gamma ray irradiation. The crosslinking was predominantly accelerated by gamma ray irradiation up to 50 kGy. Bond scission predominantly occurs between 50 and 500 kGy. ESCA analysis indicated that the alcoholic carbon increase up to 50 kGy. Solution viscosity was increased as absorbed dose increased up to 20 kGy. In addition, the aromatic ring was not influenced by irradiation at doses ranging from 20 to 500 kGy as shown in FT-IR results.

• Environmental Engineering Research
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• v.24 no.3
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• pp.513-520
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• 2019

In this investigation, nano ZnO was sonochemically synthesized by a novel method using a methionine precursor. A narrow size distribution (41-50 nm) of nano ZnO was achieved that was immobilized on perlite and applied as a catalyst in catalytic ozonation. The catalyst was characterized by fourier transform infrared spectroscopy, BET surface area, and field emission scanning electron microscope. The ozonation of recalcitrant Remazol black 5 (RB5) di-azo dye solution by means of the synthesized catalyst was investigated in a bubble column slurry reactor. The influence of pH values (7, 9, 11), catalyst dosage (8, 12, 15, $20g\;L^{-1}$) and reaction time (10, 20, 30, 60 min) was investigated. Although the dye color was completely removed by single ozonation at a higher reaction time, the applied nanocatalyst improved the dye declorination kinetics. Also, the degradation of the hazardous aromatic fraction of the dye was enhanced five-times by catalytic ozonation at a low reaction time (10 min) and a neutral pH. The second-order kinetics was best fitted in terms of both RB5 color and its aromatic fraction removal. The total organic carbon analysis indicated a significant improvement in the mineralization of RB5 by catalytic ozonation using the nano-ZnO/perlite catalyst.

• Journal of Microbiology and Biotechnology
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• v.33 no.6
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• pp.780-787
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• 2023

Two mannitol producing lactic acid bacteria were isolated from pa (green onion)- kimchi, identified and named as Leuconostoc mesenteroides SKP 88 and Leuconostoc citreum SKP 92, respectively. Both isolates grew well at 25-30℃, initial pH 6-8, and 3% and lower NaCl concentration. Both isolates converted fructose into mannitol efficiently when grown on MRS broth containing fructose and glucose. Glucose was used as a carbon source and fructose was used as a precursor for mannitol. Mannitol yields were the highest in MRS broth with 3% fructose and 2% glucose. Shine muscat juice fermentation was done using each isolate as a starter. As fermentation progressed, decrease in pH and increases in titratable acidity and viable counts were observed. L. mesenteroides SKP 88 showed better mannitol conversion ability than L. citreum SKP 92, and shine muscat juice fermented with L. mesenteroides SKP 88 showed the mannitol production of 41.6 g/l at 48 h, and juice fermented with L. citreum SKP 92 showed 23.4 g/l at the same time. Yogurt fermentations showed similar patterns, and yogurt fermented with L. mesenteroides SKP 88 showed the mannitol production of 15.13 g/l. These results showed that both strains are useful as starters for healthy fermented foods with reduced fructose contents.

• Clean Technology
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• v.30 no.2
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• pp.123-133
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• 2024

Zeolite template carbon (ZTC) was synthesized as an adsorbent to remove low-concentration CH₄ from the atmosphere. The synthesis of ZTC was performed using CH₄ and C₂H₂ as carbon precursors and their impact on adsorption was investigated. ZTC was also synthesized using Y zeolite ion-exchanged with CaCl₂ and LiCl as templates to investigate the effect of using metals in ion exchange. The comparison of the carbon precursors revealed that C₂H₂ had a higher carbon yield than CH₄. The synthesized ZTC exhibited developed micropores due to carbon deposition deep inside the micropores of the zeolite template. The kinetic diameter of C₂H₂ (0.33 nm) is smaller than that of CH₄ (0.38 nm), which allowed for its deposition. The study compared metal precursors used for ion exchange and confirmed that the CaCl₂-based ZTC developed more micropores compared to the LiCl-based ZTC. The ion-exchanged Ca inhibited pore blocking by the carbon precursor, allowing it to enter the pores. The ability of synthesized ZTC to adsorb N₂ and CH₄ at 298 K was investigated. The results showed that CH₄ had a higher overall adsorption amount than N₂. The sample synthesized using C₂H₂ and CaY exhibited the highest N₂ and CH₄ adsorption capacity. However, the sample synthesized with CH₄ had the highest CH₄/N₂ gas uptake ratio, which is a crucial factor in designing an adsorption process. The observed difference was likely caused by the underdevelopment of ultrafine pores that are associated with N₂ adsorption. This resulted in a reduction of N₂ adsorption, leading to an increase in CH₄/N₂ separation.

• Applied Chemistry for Engineering
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• v.10 no.5
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• pp.737-742
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• 1999

This study was conducted for the two purposes; one was removal of dissolved humic acid, the well-known precursor of trihalomethanes (THMs), by physicochemical treatment processes such as ozone oxidation, coagulation and activated carbon adsorption. The other was qualitative identification of by-products in chlorination of the dissolved humic acid. When ozone oxidation was applied to remove the dissolved humic acid, pH was abruptly decreased. It was indicated that humic acid was not perfectly converted to $CO_2$ and $H_2O$, but to low fatty acid. In coagulation process, the coagulant was polyaluminumchloride which was widely used for drinking water treatment in recent years. With the dosage of 160 mg/L, total organic carbon(TOC), $COD_{Cr}$ and color were removed with 23%, 24% and 5% respectively. Color was effectively removed by ozone oxidation process, which was the first order reaction, with the reaction rate constant of $0.067min^{-1}$. In activated carbon adsorption process, preozonation process could remove more effectively the dissolved humic acid than that without preozonation. When the dissolved humic acid and sodium hydrochloride were reacted with 1 mg-NaOCl/mg-TOC, only trihalomethanes were detected.

• Applied Chemistry for Engineering
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• v.26 no.2
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• pp.224-228
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• 2015

The carbon precursor pitch from pyrolyzed fuel oil (PFO), by-product of Naphta cracking process (NCC), was prepared through heat and UV irradiation treatments with various concentrations of $AlCl_3$, which is a new pitch preparation method. The reformed pitches were characterized by measuring their elemental composition, chemical structure of components, molecular weight distribution, and softening point. The oxygen contents of reformed pitch increased as increasing $AlCl_3$ amounts on the other hand, the carbon and hydrogen contents were not nearly changed. UV irradiated reformed pitches were composed of more aromatic carbon compounds than that of using only heat-treatment without any UV irradiation. The addition of $AlCl_3$ catalyst was ineffective on the aromaticity of reformed pitches. The softening point of prepared pitches was in the range of $103.3{\sim}168.9^{\circ}C$. Also the yield of prepared pitch increased from 48% to 80% when 5 wt% of $AlCl_3$ was added during the heat and UV irradiation reforming. It is expected that the UV irradiation reforming method can be practical and helpful to produce high yields of pitches with diverse properties.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.377-377
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• 2012

Microprocessor technology now relies on copper for most of its electrical interconnections. Because of the high diffusivity of copper, Atomic layer deposition (ALD) $TaN_x$ is used as a diffusion barrier to prevent copper diffusion into the Si or $SiO_2$. Another problem with copper is that it has weak adhesion to most materials. Strong adhesion to copper is an essential characteristic for the new barrier layer because copper films prepared by electroplating peel off easily in the damascene process. Thus adhesion-enhancing layer of cobalt is placed between the $TaN_x$ and the copper. Because, cobalt has strong adhesion to the copper layer and possible seedless electro-plating of copper. Until now, metal film has generally been deposited by physical vapor deposition. However, one draw-back of this method is poor step coverage in applications of ultralarge-scale integration metallization technology. Metal organic chemical vapor deposition (MOCVD) is a good approach to address this problem. In addition, the MOCVD method has several advantages, such as conformal coverage, uniform deposition over large substrate areas and less substrate damage. For this reasons, cobalt films have been studied using MOCVD and various metal-organic precursors. In this study, we used $C_{12}H_{10}O_6(Co)_2$ (dicobalt hexacarbonyl tert-butylacetylene, CCTBA) as a cobalt precursor because of its high vapor pressure and volatility, a liquid state and its excellent thermal stability under normal conditions. Furthermore, the cobalt film was also deposited at various $H_2/NH_3$ gas ratio(1, 1:1,2,6,8) producing pure cobalt thin films with excellent conformality. Compared to MOCVD cobalt using $H_2$ gas as a reactant, the cobalt thin film deposited by MOCVD using $H_2$ with $NH_3$ showed a low roughness, a low resistivity, and a low carbon impurity. It was found that Co/$TaN_x$ film can achieve a low resistivity of $90{\mu}{\Omega}-cm$, a low root-mean-square roughness of 0.97 nm at a growth temperature of $150^{\circ}C$ and a low carbon impurity of 4~6% carbon concentration.

• Membrane Journal
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• v.26 no.3
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• pp.220-228
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• 2016

Carbon molecular sieve (CMS) hollow fiber membranes were prepared by carbonizing a polyimide precursor manufactured by non-solvent induced phase separation process. Gas separation performance of CMS hollow fiber membrane was investigated on the effect of three carbonization conditions. CMS membrane with the highest gas separation performance was obtained at the pyrolysis temperature of $250-450^{\circ}C$: $N_2$, $SF_6$, and $CF_4$ permeance were 20, 0.32, 0.48 GPU, respectively, and $N_2/SF_6$ and $N_2/CF_4$ selectivities were 62 and 42, respectively. In the $SF_6/CF_4/N_2$ mixture gas test, when the stage cut was 0.2, the recovery ratio of $SF_6$ and $CF_4$ was over 99% and 98%. $SF_6$ concentration ratio was 4.5 times higher than the $SF_6$ concentration at the feed side. From the results, it was concluded that CMS membrane was one of the promising membranes for recovery Perfluorocompound gases process.