Study on the Gas Separation of Carbon Molecular Sieve (CMS) Membrane for Recovering the Perfluorocompound Gases from the Electronics Industry
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Jeong, Su Jung
(Airrane Co. Ltd.)
Lim, Joo Hwan (Airrane Co. Ltd.) Han, Sang Hoon (Airrane Co. Ltd.) Koh, Hyung Chul (Airrane Co. Ltd.) Ha, Seong Yong (Airrane Co. Ltd.) |
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