• The Transactions of the Korean Institute of Electrical Engineers C
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• v.50 no.7
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• pp.346-350
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• 2001

We present a surface-micromachined polysilicon capacitive accelerometer using unevenly distributed comb electrodes. The unique features of the accelerometer include a perforated proof-mass and the inner and outer comb electrodes with uneven electrode gaps. The perforated proof-mass reduces stiction between the structure and the substrate and the unevenly distributed electrodes shorten the electrode length required for a given sensitivity. The polysilicon accelerometer has been fabricated by the conventional 6-mask surface-micromachining process and showes a sensitivity of 1.03mV/g with a hybrid detection circuitry.

• Journal of the Korean Electrochemical Society
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• v.12 no.3
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• pp.287-294
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• 2009

Desalination effects of Capacitive deionization(CDI) process using activated carbon $TiO_2$ composite electrode. In this study, we made the activated carbon electrod and activated carbon $TiO_2$ composite electrode, which analysed at cyclic voltammetry and charge-discharge. The results measured for discharge capacitance in cyclic voltammetry were 125 F/g in activated carbon electrode and capacitance of activatd carbon composite electrode was increased about two time, 243 F/g. The $TiO_2$ content of activated carbon composite electrode was 10 wt.%. When it was added wtih TiO2, electric double layer adsorption content was increased, so it was increased 25% in ion removal ratio of activated carbon electrode.

• The Transactions of the Korean Institute of Electrical Engineers B
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• v.55 no.9
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• pp.443-448
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• 2006

Non-contacting capacitive sensor based on Thompson-Lampard theorem have been fabricated and characterized for measuring of 때 order displacements. To overcome disadvantages of the existed capacitive sensors of parallel plate type with 2-electrodes and 3-electrodes, the developed new sensor was designed to have 4-electrodes with a constant gap of 0.2mm between the electrodes. Two of the electrodes were used as a high potential electrode and a low one, the other two electrodes were used as guard electrodes. These electrodes were made from copper using RF sputtering system on a sapphire plate with diameter 17 mm and thickness 0.7 mm. This sensor can be used for measuring the distance not only between the sensor and metallic target connected to ground potential but also non-metallic target without ground connection.

• Transactions on Electrical and Electronic Materials
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• v.16 no.1
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• pp.42-45
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• 2015

The ability to take electrocardiographic measurements while performing our daily activities has become the people-choice for modern age vital sign sensing. Currently, wet and dry ECG electrodes are known to pose threats like inflammations, allergic reactions, and metal poisoning due to their direct skin interaction. Therefore, the main goal in this work is to implement a very small ECG sensor system with a capacitive coupling, which is able to detect electrical signals of heart at a distance without the conductive gel. The aim of this paper is to design, implement, and characterize the contactless ECG electrodes. Under a careful consideration of factors that affect a capacitive electrode functional integrity, several different sizes of ECG electrodes were designed and tested with a pilot ECG device. A very small cotton-insulated copper tape electrode ($2.324cm^2$) was finally attained that could detect and measure bioelectric signal at about 500 um of distance from the subject's chest.

• Applied Chemistry for Engineering
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• v.31 no.5
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• pp.552-559
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• 2020

Activated carbon-nickel (II) oxide (AC-NiO) electrodes were studied as materials for the capacitive deionization (CDI) of aqueous sodium chloride solution. AC-NiO electrodes were fabricated through physical mixing and low-temperature heating of precursor materials. The amount of NiO in the electrodes was varied and its effect on the deionization performance was investigated using a single-pass mode CDI setup. The pure activated carbon electrode showed the highest specific surface area among the electrodes. However, the AC-NiO electrode with approximately 10 and 20% of NiO displayed better deionization performance. The addition of a dielectric material like NiO to the carbon material resulted in the enhancement of the electric field, which eventually led to an improved deionization performance. Among all as-prepared electrodes, the AC-NiO electrode with approximately 10% of NiO gave the highest salt adsorption capacity and charge efficiency, which are equal to 7.46 mg/g and 90.1%, respectively. This finding can be attributed to the optimum enhancement of the physical and chemical characteristics of the electrode brought by the addition of the appropriate amount of NiO.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.247.1-247.1
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• 2014

The capacitive coupled plasma is used widely in the semiconductor industries. Especially, the uniformity of the industrial plasma is heavily related with defect ratio of devices. Therefore, the industries need the capacitive coupled plasma source which can generate the uniform plasma and control the plasma's uniformity. To achieving the uniformity of the large area plasma, we designed multi-powered electrodes. We controlled the uniformity by controlling the power of each electrode. After this work, we started to research another concept of the plasma device. We make the plasma chamber that has multi-ground electrodes imaginary (CST microwave studio) and simulate the electric field. The shape of the multi-ground electrodes is ring type, and it is same as the shape of the multi-power electrodes that we researched before. The diameter of the side electrode's edge is 300mm. We assumed that the plasma uniformity is related with the impedance of ground electrodes. Therefore we simulated the imaginary chamber in three cases. First, we connected L (inductor) and C (capacitor) at the center of multi-ground electrodes. Second, we changed electric conductivity of multi-ground electrode. Third, we changed the insulator's thickness between the center ground electrode and the side ground electrode. The driving frequency is 2, 13.56 and 100 MHz. We switched our multi-powered electrode system to multi-ground electrode system. After switching, we measured the plasma uniformity after installing a variable vacuum capacitor at the ground line. We investigate the effect of ground electrodes' impedance to plasma uniformity.

• The Transactions of the Korean Institute of Electrical Engineers P
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• v.55 no.1
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• pp.26-30
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• 2006

For the purpose of developing capacitive humidity sensor having interdigital electrodes, interdigital electrode was modeled and simulated to obtain capacitance and sensitivity as a function of geometric parameters like the structural gap and thickness. For the development of ASIC, switched capacitor signal processing circuits for capacitive humidity sensor were designed and simulated by Cadence using $0.25{\mu}m$ CMOS process parameters. The signal processing circuits are composed of amplifier for voltage gain control, and clock generator for sensor driving and switch control. The characteristics of the fabricated sensors are; 1) sensitivity is 9fF/%R.H., 2) temperature coefficient of offset(TCO) is $0.4%R.H./^{\circ}C$, 3) nonlinearity is 1.2%FS, 4) hysteresis is 1.5%FS in humidity range of $3%R.H.{\sim}98%R.H.$. The response time is 50 seconds in adsorption and 70 seconds in desorption. Fabricated process used in this capacitive humidity sensor having interdigital electrode are just as similar as conventional IC process technology. Therefore this can be easily mass produced with low cost, simple circuit and utilized in many applications for both industrial and environmental measurement and control system, such as monitoring system of environment, automobile, displayer, IC process room, and laboratory etc.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.50 no.3
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• pp.144-148
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• 2001

For the purpose of developing capacitive humidity sensor having interdigit electrodes, interdigit electrode was modeled and simulated to obtain capacitance and sensitivity as a function of geometric parameters like the structural gap and thichness. For the development of ASIC, switched capacitor signal conditioning circuits for capacitive humidity sensor were designed and simulated by cadence using 0.25um CMOS process parameters. The signal conditioning circuits are composed of amplifier for voltage gain control, and clock generator for sensor driving and switch control The characteristics of the fabricated sensors are; 1) sensitivity is 9fF/%R.H., 2) temperature coefficient of offset(TCO) is 0.4%R.H./$^{\circ}C$, 3) nonlinearity is 1.2%FS, 4) hysteresis is 1.5%FS in humidity range of 3%R.H. ${\sim}$ 98%R.H.. The response time is 50 seconds in adsorption and 70 seconds in desorption. Fabricated process used in this capacitive humidity sensor having interdigit electrode are just as similar as conventional IC process technology. Therefore this can be easily mass produced with low cost, simple circuit and utilized in many applications for both industrial and environmental measurement and control system, such as monitoring system of environment, automobile, displayer, IC process room, and laboratory etc..

• Journal of Sensor Science and Technology
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• v.28 no.2
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• pp.133-138
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• 2019

The a-InGaZnO (a-IGZO) thin film transistor (TFT) has the advantages of larger mobility than that of amorphous silicon TFTs, acceptable reliability and uniformity over a large area, and low process cost. A capacitive-type touch sensor was studied with an a-IGZO TFT that can be used on the front side of a display due to its transparency. A capacitive sensor detects changes of capacitance between the surface of the finger and the sensor electrode. The capacitance varies according to the distance between the sensor plate and the touching or non-touching of the sensing electrode. A capacitive touch sensor using only one a-IGZO TFT was developed with the reduction of two bus lines, which made it easy to reduce the pixel pitch. The proposed sensor circuit maintained the amplification performance, which was investigated for various drive conditions.

• Applied Chemistry for Engineering
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• v.24 no.1
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• pp.49-54
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• 2013

We fabricated a composite carbon electrode to remove nitrate ions selectively from a mixed solution of anions. The electrode was fabricated by coating the surface of a carbon electrode with the nitrate-selective anion exchange resin (BHP55, Bonlite Co.) powder. We performed capacitive deionization (CDI) experiments on a mixed solution containing chloride, nitrate, and sulfate ions using a BHP55 cell constructed with the fabricated electrode. The removal of nitrate ions in the BHP55 cell was compared to that of a membrane capacitive deionization (MCDI) cell constructed with ion exchange membranes. The total quantity of ions adsorbed in BHP55 cell was $38.3meq/m^2$, which is 31% greater than that of MCDI cell. In addition, the number of nitrate adsorption in the BHP55 cell was $15.9meq/m^2$ (42% of total adsorption), 2.1 times greater than the adsorption in the MCDI cell. The results showed that the fabricated composite carbon electrode is very effective in the selective removal of nitrate ions from a mixed solution of anions.