Browse > Article

Development of a Non-contacting Capacitive Sensor Based on Thompson-Lampard Theorem for Measurement of ${\mu}m-order$ Displacements  

Kim, Han-Jun (한국표준과학연구원 기반표준부)
Kang, Jeon-Hong (한국표준과학연구원 기반표준부)
Han, Sang-Ok (충남대학교 공대 전기공학과)
Publication Information
The Transactions of the Korean Institute of Electrical Engineers B / v.55, no.9, 2006 , pp. 443-448 More about this Journal
Abstract
Non-contacting capacitive sensor based on Thompson-Lampard theorem have been fabricated and characterized for measuring of 때 order displacements. To overcome disadvantages of the existed capacitive sensors of parallel plate type with 2-electrodes and 3-electrodes, the developed new sensor was designed to have 4-electrodes with a constant gap of 0.2mm between the electrodes. Two of the electrodes were used as a high potential electrode and a low one, the other two electrodes were used as guard electrodes. These electrodes were made from copper using RF sputtering system on a sapphire plate with diameter 17 mm and thickness 0.7 mm. This sensor can be used for measuring the distance not only between the sensor and metallic target connected to ground potential but also non-metallic target without ground connection.
Keywords
Capacitive Sensor; Capacitance; Electrode; Parallel Plate; Guard;
Citations & Related Records
연도 인용수 순위
  • Reference
1 D. G. Lampard, 'A New Theorem in Electrostatics with Applications to Calculable Standards of Capacitance', Inst. of Elect. Engr. Monograph no. 216M, pp. 271-280.1957
2 Zang Yan-Fen, Liu-Xiang-Yang, Zhang Guo-Xiong, 'Method for the Straightness measurement of vertical guideways of machine tools using capacitive and inductive sensors,' Proceedings of the SPIE, Vol. 2101(2), pp. 843-847, 1993   DOI
3 F. N. Toch, D. Bertels, G. C. M. Meijer, 'A low-cost, highly stable reference capacitor for capacitive sensor system', IEEE I&M Conf. IMTC Proceedings, pp. 412-415. 1995   DOI
4 R. Nerino, 'Capacitive sensor arrays in dimensional analysis of surfaces,' IEEE I&M Vol. 44(4), pp. 875-880, 1995   DOI   ScienceOn
5 P. H. Sydenham, 'Microdisplacement Transdusers', J. ？Phys. E: Sci. Instrum., Vol. 5, pp. 721-733, 1972   DOI   ScienceOn
6 Hermann K. P. Neubert, 'Instrument Transducers', Oxford, Claren Press, pp. 68-290, 1975
7 P. H. Mansfield, 'Electrical Transducers for Industrial Measurement', London, Butterworths, 1973
8 Rae Duk Lee, Han Jun Kim et al, 'Development of a Vertical Cross Capacitor as a National Standard of Capacitances at KRISS', submitted at CPEM 2006, Torino, Italy, 2006