• 제목/요약/키워드: cap oxide

검색결과 28건 처리시간 0.025초

Effects of Temperature Stress on VFB Shifts of HfO2-SiO2 Double Gate Dielectrics Devices

  • Lee, Kyung-Su;Kim, Sang-Sub;Choi, Byoung-Deog
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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    • pp.340-341
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    • 2012
  • In this work, we investigated the effects of temperature stress on flatband voltage (VFB) shifts of HfO2-SiO2 double gate dielectrics devices. Fig. 1 shows a high frequency C-V of the device when a positive bias for 10 min and a subsequent negative bias for 10 min were applied at room temperature (300 K). Fig. 2 shows the corresponding plot when the same positive and negative biases were applied at a higher temperature (473.15 K). These measurements are based on the BTS (bias temperature stress) about mobile charge in the gate oxides. These results indicate that the positive bias stress makes no difference, whereas the negative bias stress produces a significant difference; that is, the VFB value increased from ${\Delta}0.51$ V (300 K, Fig. 1) to ${\Delta}14.45$ V (473.15 K, Fig. 2). To explain these differences, we propose a mechanism on the basis of oxygen vacancy in HfO2. It is well-known that the oxygen vacancy in the p-type MOS-Cap is located within 1 eV below the bottom of the HfO2 conduction band (Fig. 3). In addition, this oxygen vacancy can easily trap the electron. When heated at 473.15 K, the electron is excited to a higher energy level from the original level (Fig. 4). As a result, the electron has sufficient energy to readily cross over the oxide barrier. The probability of trap about oxygen vacancy becomes very higher at 473.15 K, and therefore the VFB shift value becomes considerably larger.

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Gradient YZO Buffer Deposition on RABiTS for Coated Conductor

  • Kim, T.H.;Kim, H.S.;Ko, R.K.;Song, K.J.;Lee, N.J.;Ha, D.W.;Ha, H.S.;Oh, S.S.;Pa, K.C.
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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    • pp.240-241
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    • 2007
  • In general, high temperature superconducting coated conductors have intermediary buffers layer consisting of seed, diffusion barrier and cap layers. Simplification of the oxide materials buffer architecture in the fabrication of high temperature superconducting coated conductors is required because the deposition of multi-layers buffer architecture leads to a longer manufacturing time and a higher cost process of coated conductors. Thus, single buffer layer deposition seems to be important for practical coated conductor manufacturing process. In this study, a single gradient layered buffer deposition process of YZO for low cost coated conductors has been tried using DC reactive sputtering technique. About several thick YZO gradient single buffer layers deposited by DC co-sputtering process were found to act as a diffusion layer.

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Corrosion Behavior of Carbon Steel in Diluted Sulfuric Acid based on Seawater

  • Kim, Mun Su;Jeong, Jin-A
    • Corrosion Science and Technology
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    • 제18권3호
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    • pp.78-85
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    • 2019
  • The International Maritime Organization (IMO) will administer a new 0.5% global sulfur cap on fuel content from 1 January 2020, lowering from the present 3.5% limit. Seawater $SO_x$ (sulfur oxide) scrubbing is especially spray scrubbing and a promising alternative to complying with the IMO regulation. However, the ionization of $SO_2$ (sulfur dioxide) and the $H_2SO_4$ (sulfuric acid) formed from $SO_3$ (sulfur trioxide) is proposed to accelerate corrosion of the internal seawater pipe. Apparently, the corrosion of the scrubber seawater piping system occurs in a severe and frequent manner. Hence, in this study, electrochemical measurement and weight loss of carbon steel (used as seawater pipe in most of the ships) in diluted sulfuric acid solution were investigated to determine corrosion rate, corrosion current density, corrosion potential, electrochemical behavior, and impressed-current density. Accordingly, the corrosion rate of carbon steel sheet in various diluted sulfuric acid solutions was observed to be greater than that in natural seawater, thus suggesting the fundamental data to deal with corrosion problems in scrubber seawater pipe.

Determination of reaction kinetics during vitrification of radioactive liquid waste for different types of base glass

  • Suneel, G.;Rajasekaran, S.;Selvakumar, J.;Kaushik, Chetan P.;Gayen, J.K.;Ravi, K.V.
    • Nuclear Engineering and Technology
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    • 제51권3호
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    • pp.746-754
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    • 2019
  • Vitrification of radioactive liquid waste (RLW) provides a feasible solution for isolating radionuclides from the biosphere for an extended period. In vitrification, base glass and radioactive waste are added simultaneously into the melter. Determination of heat and mass transfer rates is necessary for rational design and sizing of melter. For obtaining an assured product quality, knowledge of reaction kinetics associated with the thermal decomposition of waste constituents is essential. In this study Thermogravimetry (TG) - Differential Thermogravimetry (DTG) of eight kinds of nitrates and two oxides, which are major components of RLW, is investigated in the temperature range of 298-1273 K in the presence of base glasses of five component (5C) and seven component (7C). Studies on thermal behavior of constituents in RLW were carried out at heating rates ranging from 10 to $40\;K\;min^{-1}$ using TG - DTG. Thermal behavior and related kinetic parameters of waste constituents, in the presence of 5C and 7C base glass compositions were also investigated. The activation energy, pre-exponential factor and order of the reaction for the thermal decomposition of 24% waste oxide loaded glasses were estimated using Kissinger method.

Non-stoichiometry-induced metal-to-insulator transition in nickelate thin films grown by pulsed laser deposition

  • Lee, Jongmin;Choi, Kyoung Soon;Lee, Tae Kwon;Jeong, Il-Seok;Kim, Sangmo;Song, Jaesun;Bark, Chung Wung;Lee, Joo-Hyoung;Jung, Jong Hoon;Lee, Jouhahn;Kim, Tae Heon;Lee, Sanghan
    • Current Applied Physics
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    • 제18권12호
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    • pp.1577-1582
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    • 2018
  • While controlling the cation contents in perovskite rare-earth nickelate thin films, a metal-to-insulator phase transition is reported. Systematic control of cation stoichiometry has been achieved by manipulating the irradiation of excimer laser in pulsed laser deposition. Two rare-earth nickelate bilayer thin-film heterostructures with the controlled cation stoichiometry (i.e. stoichiometric and Ni-excessive) have been fabricated. It is found that the Ni-excessive nickelate film is structurally less dense than the stoichiometric film, albeit both of them are epitaxial and coherent with respect to the underlying substrate. More interestingly, as a temperature decreases, a metal-to-insulator transition is only observed in the Ni-excessive nickelate films, which can be associated with the enhanced disproportionation of the Ni charge valence. Based on our theoretical results, possible origins (e.g. anti-site defects) of the low-temperature insulating state are discussed with the need of future work for deeper understanding. Our work can be utilized to realize unusual physical phenomena (e.g. metal-to-insulator phase transitions) in complex oxide films by manipulating the chemical stoichiometry in pulsed laser deposition.

연료극 지지체식 평관형 고체산화물 연료전지 단위 번들의 제조 및 성능 (Fabrication and Performance of Anode-Supported Flat Tubular Solid Oxide Fuel Cell Unit Bundle)

  • 임탁형;김관영;박재량;이승복;신동열;송락현
    • 전기화학회지
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    • 제10권4호
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    • pp.283-287
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    • 2007
  • 한국에너지기술연구원에서는 중온 ($700{\sim}800^{\circ}C$) 작동용 연료극 지지체 평관형 SOFC 스택을 구성하는 단위 번들을 개발했다. 연료극 지지체 평관형 셀은 Ni/YSZ 서밋 연료극 지지체 튜브, 8몰% $Y_2O_3$ stabilized $ZrO_2$ (YSZ) 전해질, $LaSrMnO_3$ (LSM)과 LSM-YSZ composite 및 $LaSrCoFeO_3(LSCF)$로 구성된 다중층 공기극으로 구성됐다. 제조된 연료극지지체 평관형 셀은 유도 브레이징 법에 의해 페리틱 (ferritic) 금속 캡에 접합됐고, 공기극의 전류집전을 위해 공기극 외부에 Ag 선 및 $La_{0.6}Sr_{0.4}CoO_3(LSCo)$ paste를 이용했으며, 연료극의 전류집전은 Ni felt, wire, 그리고 paste를 이용했다. 단위 번들을 만들기 위한 연료극 지지체 평관형 셀의 반응 면적은 셀 당 $90\;cm^2$ 이었으며, 2개의 셀이 병렬로 연결되어 1개의 단위 번들이 됐고, 총 12개의 단위 번들이 직렬로 연결되어 스택을 구성한다. 공기 및 3%의 가습된 수소를 산화제 및 연료로 사용한 단위 번들의 운전 결과 최대 성능은 $800^{\circ}C$에서 $0.39\;W/cm^2$의 출력이 나타났다. 본 연구를 통해 연료극 지지체 평관형 SOFC 셀의 기본 기술과 KIER 만의 독특한 연료극 지지체 평관형 SOFC 스택을 구성하는 단위 번들의 개념을 확립할 수 있었다.

유리 덮개로 보호된 OLED소자의 발광특성 저하 연구 (Degradation Mechanisms of Organic Light-emitting Devices with a Glass Cap)

  • 양용석;추혜용;이정익;박상희;황치선;정승묵;도이미;김기현
    • 한국진공학회지
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    • 제15권1호
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    • pp.64-72
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    • 2006
  • 우리는 tris-(8-hydroxyquinoline) aluminum (Alq3)와 같은 단분자 유기물 박막을 사용하여 유기물 발광 소자(OLEDs)를 제작하였다. OLEDs는 ITO가 증착된 유기 기판 위에서 제조되었고, 수명 측정 이후의 OLEDs에 대한 발광, 축전 용량, 유전 손실 특성 등을 측정하였다. 여기서, 수명 측정을 위하여 사용한 인가 전류는 0.5mA 에서 9mA까지 였고, 수명의 인가 전류 의존성은 약 2 mA 부근에서 다르게 관찰되었다. C-V 특성 곡선에서 나타난 축전 용량의 봉우리들은 유기물 내의 분극과 유기물과 금속의 경계에서 나타난 분극의 영향으로 추측된다. 그리고, 2 mA 보다 낮은 전류 하에서 수명 측정 후 발광특성이 저하된 OLEDs에서는 소자 내의 분극 크기의 감소와 전하 유입 장벽의 낮아짐이 같이 관찰되었다.

GaAs 기판위에 성장된 단결정 AlAs층의 선택적 산화 및 XPS (X-ray photonelectron spectroscopy) 분석 (Selective Oxidation of Single Crystalline AlAs layer on GaAs substrate and XPS(X-ray photoelectron spectroscopy) Analysis)

  • 이석헌;이용수;태흥식;이용현;이정희
    • 센서학회지
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    • 제5권5호
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    • pp.79-84
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    • 1996
  • $n^{+}$형 GaAs 기판위에 MBE로 $1\;{\mu}m$ 두께의 GaAs층과 AlAs층 및 GaAs cap 단결정층을 차례로 성장시켰다. AlAs/GaAs epi층을 $400^{\circ}C$에서 각각 2시간 및 3시간동안 $N_{2}$로 bubbled된 $H_{2}O$ 수증기(水蒸氣)($95^{\circ}C$)에서 산화시켰다. 산화시간에 따른 산화막의 XPS 분석결과, 작은 양의 $As_{2}O_{3}$ 및 AlAS 그리고 원소형 As들이 2시간동안 산화된 시편에서 발견되었다. 그러나 3시간동안 산화시킨 후에는, 2시간동안 산화시켰을 때 산화막내에 존재하던 소량의 As 산화물과 As 원자들은 발견되지 않았다. 따라서 As-grown된 AlAs/GaAs epi층은 3시간동안 $400^{\circ}C$의 산화온도에서 선택적으로 $Al_{2}O_{3}/GaAs$으로 변화되었다. 그러므로 산화온도 및 산화시간은 AlAs/GaAs 계면에서 결함이 없는 표면을 형성하고 기판쪽으로 산화가 진행되는 것을 멈추기 위해서는 매우 결정적으로 작용하는 것으로 조사되었다.

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