• Journal of Sensor Science and Technology
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• v.29 no.2
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• pp.100-104
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• 2020

Thus far, several in vivo biosensing platforms have been proposed to measure the mechanical contractility of cultured cardiomyocytes. However, the low sensitivity and screening rate of the developed sensors severely limit their practical applications. In addition, intensive research and development in cardiovascular disease demand a high-throughput drug-screening platform based on biomimetic engineering. To overcome the drawbacks of the current state-of-the-art methods, we propose a high-throughput drug-screening platform based on 16 functional high-sensitivity well plates. The proposed system simulates the physiological accuracy of the heart function in an in vitro environment. We fabricated 64 cantilevers using highly flexible and optically transparent silicone rubber and placed in 16 independent wells. Nanogrooves were imprinted on the surface of the cantilever to promote cell alignment and maturation. The adverse effects of the cardiovascular drugs on the cultured cardiomyocytes were systematically investigated. The 64 cantilevers demonstrated a highly reliable and reproducible mechanical contractility of the drug-treated cardiomyocytes. Real-time high-throughput screening and simultaneous evaluation of the cardiomyocyte mechanical contractility under multiple drugs verified that the proposed system could be used as an efficient drugtoxicity test platform.

• Progress in Superconductivity
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• v.11 no.1
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• pp.36-41
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• 2009

Superconducting quantum phenomena are getting attention from the field of metrology area. Following its first successful application of Josephson effect to voltage standard, piconewton force standard was suggested as a candidate for the next application of superconducting quantum effects in metrology. It is predicted that a micron-sized superconducting Nb ring in a strong magnetic field gradient generates a quantized force of the order of sub-piconewtons. In this work, we studied the design and fabrication of Nb superconducting quantum interference device (SQUID) on an ultra-thin silicon cantilever. The Nb SQUID and electrodes were structured on a silicon-on-insulator (SOI) wafer by dc magnetron sputtering and lift-off lithography. Using the resulting SOI wafer, we fabricated V-shaped and parallel-beam cantilevers, each with a $30-{\mu}m$-wide paddle; the length, width, and thickness of each cantilever arm were typically $440{\mu}m,\;4.5{\mu}m$, and $0.34{\mu}m$, respectively. However, the cantilevers underwent bending, a technical difficulty commonly encountered during the fabrication of electrical circuits on ultra-soft mechanical substrates. In order to circumvent this difficulty, we controlled the Ar pressure during Nb sputtering to minimize the intrinsic stress in the Nb film and studied the effect of residual stress on the resultant device.

• JSTS:Journal of Semiconductor Technology and Science
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• v.2 no.4
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• pp.246-252
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• 2002

Two kinds of PZT cantilevers integrated with a piezoresistor have been newly designed, fabricated, and characterized for high speed AFM. In first cantilever, a piezoresistor is used to sense atomic force acting on tip, while in second cantilever, a piezoresistor is integrated to calibrate hysteresis and creep phenomena of the PZT cantilever. The fabricated PZT cantilevers provide high tip displacement of $0.55\mu\textrm{m}/V$ and high resonant frequency of 73 KHz. A new cantilever structure has been designed to prevent electrical coupling between sensor and PZT actuator and the proposed cantilever shows 5 times lower coupling voltage than that of the previous cantilever. The fabricated PZT cantilever shows a crisp scanned image at 1mm/sec, while the conventional piezo-tube scanner shows blurred image even at $180\mu\textrm{m}/sec$. The non-linear properties of the PZT actuator are also well calibrated using the piezoresistive sensor for calibration.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.04a
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• pp.61-67
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• 1997

The electronic speckle pattern interferometer (ESPI) has been applied to many technical problems such as deformation and displacement measurement, strain visualization and surface roughness monitoring. In this study, we used an ESPI system based on the dual beam speckle interferometer method in order to measure in-plane displacement and vibration mode using the ESIP technique. This research was carried out for the purpose of applying the vibration analysis method employing Electro-Optic holographic interference technique to the vibration analysis of uniform rectangular cantilevers plate(SS400,STS304) with cantilevers span to breadth ratio of 150 by 75. And thickness of 1mm and 0.8mm respectively. We improved the ESPI technique in order to obtain the distribution of displacement component resolved in one direction through a CCD camera combined with an image processing system. To certify and to assess the accuracy in measuring by this ESPI, the results obtained with the speckle method and vibration mode analysis are to be compared with those results by Warbuton's Theoretical expression and vibration made in FEM analysis.

• Journal of the Korean Society for Precision Engineering
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• v.32 no.5
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• pp.483-490
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• 2015

This paper presents a proof-of-concept of a wheel-based magnetostrictive energy harvester (EH), which is a vibration-based EH. Coil-wound Galfenol cantilevers with two permanent magnets (PMs) act EH, while rotating wheels provide a forced vibration to EH. Four different cantilevers are designed and simulated for various end deflection. As expected from the simulation, the cantilever end deflection with triple cavity is the most. Three experiments are conducted to characterize the EH: the first with a magnetostrictive actuator, the second with a motor-driven wheel, and the third with the dummy weights. From the first experiment, the power reaches about 50 mV due to the relatively small displacement of the magnetostrictive actuator. From the second experiment, the power reaches about 120 mW. The power from the Galfenol cantilever is estimated to be about 60% of the total power from the wheel-based magnetostrictive EH.

• Steel and Composite Structures
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• v.4 no.4
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• pp.281-301
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• 2004

The paper begins by presenting a unified variational approach to the lateral-torsional buckling (LTB) analysis of doubly symmetric prismatic and tapered thin-walled beams with open cross-sections, which accounts for the influence of the pre-buckling deflections. This approach (i) extends the kinematical assumptions usually adopted for prismatic beams, (ii) consistently uses shell membrane theory in general coordinates and (iii) adopts Trefftz's criterion to perform the bifurcation analysis. The proposed formulation is then applied to investigate the influence of the pre-buckling deflections on the LTB behaviour of prismatic and web-tapered I-section simply supported beams and cantilevers. After establishing an interesting analytical result, valid for prismatic members with shear centre loading, several elastic critical moments/loads are presented, discussed and, when possible, also compared with values reported in the literature. These numerical results, which are obtained by means of the Rayleigh-Ritz method, (i) highlight the qualitative differences existing between the LTB behaviours of simply supported beams and cantilevers and (ii) illustrate how the influence of the pre-buckling deflections on LTB is affected by a number of factors, namely ($ii_1$) the minor-to-major inertia ratio, ($ii_2$) the beam length, ($ii_3$) the location of the load point of application and ($ii_4$) the bending moment diagram shape.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2013.04a
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• pp.809-809
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• 2013

We report a new method for highly controllable local patterning of a hydrogel on microfabricated cantilevers and fabrication of all hydrogel microcantilevers. We constructed a dynamic mask based photolithography setup using a commercial beam projector, a 3-axis microstage and other optical components. Dynamic masks generated from the beam projector controlled the shape, size, and position of hydrogel patterns while the 3-axis microstage mainly controlled the thickness of hydrogel patterns and hydrogel microcantilevers. Using the constructed setup, polyethyleneglycol diacrylate (PEGDA) was patterned on microfabricated cantilevers in a highly controlled manner. Currently, the smallest PEGDA patternable is a 5-${\mu}m$-diameter circle with a thickness of ~$10{\mu}m$. To confirm thicknesses of patterned PEGDAs on silicon microcantilevers, resonance frequencies of microcantilevers were measured before and after each PEGDA patterning. Thicknesses extracted from resonance measurements showed good agreement with measurements using an optical microscope. In addition, PEGDA microcantilevers with various dimensions and thicknesses were fabricated on glass and silicon substrates. Surfaces of fabricated all hydrogel microcantilevers were flat enough to facilitate other post processing and to be used for various sensing applications.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.48 no.9
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• pp.665-671
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• 1999

The paper represents the effects of the drive-in process parameters on the residual stress profile of the $p^+$ silicon film. Since the residual stress profile is notuniform along the direction normal to the surface, the residual stress is assumed to be a polynomial function of the depth. All the coefficients of the polynomial can be determined by measuring of the thicknesses and the deflections of cantilevers and the deflection of a rotating beam with a surface profiler meter and a microscope. As the drive-in temperature or the drive-in time increases, the boron concentration decreases and the magnitude of the average residual tensile stress decreases. Then, near the surface of the $p^+$ film the residual tensile stress is transformed into the residual compressive stress and its magnitude increases.

• JSTS:Journal of Semiconductor Technology and Science
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• v.7 no.3
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• pp.151-160
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• 2007

We report the label-free biomolecules detection based on nanomechanical micro cantilevers operated in dynamic mode for detection of two marker proteins (myoglobin and creatin kinase-MB (CK-MB)) of acute myocardical infarctions. When the specific binding between the antigen and its antibody occurred on the fuctionalized microcantilever surface, mechanical response (i.e. resonant frequency) of microcantilevers was changed in lower frequency range. We performed the label-free biomolecules detection of myoglobin and CK-MB antigen in the low concentration (clinical threshold concentration range) as much as 1 ng/ml from measuring the dynamic response change of micro cantilevers caused by the intermolecular force. Moreover, we estimate the surface stress on the dynamic microcantilevers generated by specific antibody-antigen binding. It is suggested that our dynamic microcantilevers may enable one to use the sensitive label-free biomolecules detection for application to the disease diagnosis system based on mechanical immuno-sensor.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.59-62
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• 2005

Small force measurements ranging from 1 pN to $100{\mu}N$, we call it Nano Force, become the questions of common interests of biomechanics, nanomechanics, material researches, and so on. However, unfortunately, quantitative and accurate force measurements have not been taken so far. This is because there ,are no traceable force standards and a calibration scheme. This paper introduces a quantitative force metrology, which provides traceable link to SI (International Systems of Units). We realize SI traceable force ranging from 1 nN to $100{\mu}N$ using an electrostatic balance and disseminate it through transfer standards, which are self-sensing cantilevers that have integrated piezoresistive strain gages. We have been built a prototype electrostatic balance and Nano Force Calibrator (NFC), which is an AFM cantilever calibration system. As a first experiment, we calibrated normal spring constants of commercial AFM cantilevers using NFC. Calibration results show that the spring constants of them are quite differ from each other and nominal values provided by a manufacturer (up to 240% deviation).