• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.87-90
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• 2005

An experimental investigation of the basic characteristics of a micro-cantilever sensor was performed by inspecting the amplitude and frequency characteristics using a commercial tuning fork. Application of acetone and ethanol with a volume of $1 {\mu}l$ on the tine of a vibrating tuning fork cause immediate response in its amplitude and frequency. It has shown that the tuning fork has ability to recognize a chemical agent with high sensitivity.

• Journal of Sensor Science and Technology
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• v.14 no.4
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• pp.225-230
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• 2005

This paper describes a novel tip position sensor made of a triangularly shaped piezoelectric PVDF (polyvinylidene fluoride) film for a cantilever beam. Due to the boundary condition of the cantilever beam and the spatial sensitivity function of the sensor, the charge output of the sensor is proportional to the tip position of the beam. Experimental results with the PVDF sensor were compared with those using two commercially available position sensors: an inductive sensor and an accelerometer. The resonance frequencies of the test beam, measured using the PVDF sensor, matched well with those measured with the two commercial sensors and the PVDF sensor also showed good coherence over wide frequency range, whereas the inductive sensor became poor above a certain frequency.

• Smart Structures and Systems
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• v.19 no.6
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• pp.625-631
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• 2017

In the fields of civil engineering and seismology, it is essential to detect and tracking the vibrations, and the fiber Bragg gratings (FBGs) are typically used as sensors to measure vibrations. Where, one of the most popular and detailed approaches to use FBGs as vibration sensors involves the use of cantilever beam designs, which adds a mass to measure low and moderate frequencies (from 20 Hz up to 1 kHz) with high sensitivities (greater than 10 pm/g). The design consists of a bending strain in the cantilever that is simultaneously transferred to the FBG, resulting in a shift in the wavelength that is proportional to the strain experienced by the cantilever. In this work, we present the experimental results of a vibration sensor design using a cantilever beam to generate an axial uniform strain in the FBG in-line with the vertical axis, which modifies the cantilever's natural frequency that allows the sensor to have a wide frequency broadband without losing sensitivity. This sensor achieved a sensitivity of about 339 pm/g and a natural frequency of 227.3 Hz. The presented design compared with the traditional cantilever beam-based FBG vibration sensors, has the advantages of a simple design for detection on vibration-sensitive structures and its physical parameters can be easily modified in order to satisfy the requirements of the desired vibration measurements.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.186-189
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• 2004

Sensor used by semiconductor process produced an MAP sensor and applied to several industry. Among those sensors divided as transducer which convert physical quantity into electrical value, piezoresistive type sensor has been studied for the properties and sensitivity of piezoresistor. In this paper, the variation of seismic mass which have been functioned as actuator moving the cantilever beam analyzed the effect on distribution of resistance change ratio and supposed the optimal shape and position of piezoresistor. The resulting are following; According to the increment of seismic mass size, the value of resistance change ratio decreased caused by improve the stiffness. Y directional piezoresistor is formed in spot of 100 m apart from cantilever edge and length of that is 800$\mu$m. To increase the sensitivity, piezoresistor is made as n-type and x-direction.

• Journal of Sensor Science and Technology
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• v.14 no.3
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• pp.156-159
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• 2005

Liposomes are microscopic spherical vesicles that form when lipids are hydrated and have been widely used for biochemical assay, drug delivery and molecular imaging. In particular, they are well known for artificial cell membranes to study cellular functions such as cell fusions and membrane proteins. Here, we firstly report the detection of liposomes by the highly sensitive microfabricated piezoresistive cantilever sensor chip and the phosphatidylserine recognition protein C2A which is chemically immobilized on the sensor surface. The signal created from the bending motion of piezoresistive cantilever after the liposome attachment has been monitored in real time.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.07a
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• pp.412-413
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• 2005

This paper describes resonant frequency of the structural behavior of micro-cantilever beam simulated by FEM (Finite Element Method). The resonant characteristics and the sensitivity of cantilever-shaped SOI resonant were measured for the application of chemical sensor. The resonant frequency of the fabricated micro-cantilever system was found to be 5.59kHz when the size of cantilever is $500{\mu}m$ long, $100{\mu}m$ wide and $1{\mu}m$ thick. Generation of resonant frequency measured by Modal Analysis is resulted in length of cantilever. The length was found to be a dominant factor for the selection of required resonant frequency range. On the other side, the width had influenced very little on either the magnitude of resonant frequency or the sensitivity.

• Journal of Mechanical Science and Technology
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• v.18 no.5
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• pp.789-797
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• 2004

The nanoscale sensing and manipulation have become a challenging issue in micro/nano-robotic applications. In particular, a feedback sensor-based manipulation is necessary for realizing an efficient and reliable handling of particles under uncertain environment in a micro/nano scale. This paper presents a piezoresistive MEMS cantilever for nanoscale force measurement in micro robotics. A piezoresistive MEMS cantilever enables sensing of gripping and contact forces in nanonewton resolution by measuring changes in the stress-induced electrical resistances. The calibration of a piezoresistive MEMS cantilever is experimentally carried out. In addition, as part of the work on nanomanipulation with a piezoresistive MEMS cantilever, the analysis on the interaction forces between a tip and a material, and the associated manipulation strategies are investigated. Experiments and simulations show that a piezoresistive MEMS cantilever integrated into a micro robotic system can be effectively used in nanoscale force measurements and a sensor-based manipulation.

• Journal of KSNVE
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• v.7 no.3
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• pp.377-386
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• 1997

A cantilever type piezoceramic vibration sensor was developed that could make up for the short-comings of current vibration sensors, such as high price, low sensitivity, and complex structure. For the design, in conjunction with piezoelectric constitutive equations, we derived full analytic response equations of the piezoelectric bimorph sensor to external forces. The external forces were supposed to take the form of either step or sinusoidal force. Based on the results, actual piezoelectric vibration sensors were fabricated and tested for verification of the theoretical results. Further, comparison of the performance of the developed sensor was made with that of a commercially available representative vibration sensor so that quantitative evaluation of its sensitivity could be made. The sensor developed in this work showed excellent sensitivity and thermal stability in addition to the merits of simple structure and low fabrication cost in comparison with conventional mass-loaded piezoelectric sensors.

• Journal of the Korean Society for Precision Engineering
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• v.14 no.3
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• pp.107-113
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• 1997

This paper presents the active control of a flexible cantilever beam vibration. The cantilever beam was excitied by a steady-state harmonic and white noise point force and the control was performed by one piezo ceramic actuator bonded to the surface of the beam. An adaptive controller based on filtered-x LMS algorithm was used and the controller was defined by minimizing the square of the response of error sensor. In the experiment, gap sensor was used as an error sensor while the sinusoidal or white noise was applied as a disturbance. In the case of sinusoidal input, more than 20 dB of vibration reduction was achieved over all range of the natural frequencies and it takes 5 seconds to control the vibration at first natural frequency and 1 second at other natural frequencies. In the case of white noise input, 7 dB of vibration reduction was achieved at the first natural frequency and good control performance was achieved in the considered whole frequency range. Results indicate that the vibration of a flexible cantilever beam could be controlled effectively when the piezo ceramic actuator was used with filtered-x LMS algorithm.

• JSTS:Journal of Semiconductor Technology and Science
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• v.2 no.4
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• pp.246-252
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• 2002

Two kinds of PZT cantilevers integrated with a piezoresistor have been newly designed, fabricated, and characterized for high speed AFM. In first cantilever, a piezoresistor is used to sense atomic force acting on tip, while in second cantilever, a piezoresistor is integrated to calibrate hysteresis and creep phenomena of the PZT cantilever. The fabricated PZT cantilevers provide high tip displacement of $0.55\mu\textrm{m}/V$ and high resonant frequency of 73 KHz. A new cantilever structure has been designed to prevent electrical coupling between sensor and PZT actuator and the proposed cantilever shows 5 times lower coupling voltage than that of the previous cantilever. The fabricated PZT cantilever shows a crisp scanned image at 1mm/sec, while the conventional piezo-tube scanner shows blurred image even at $180\mu\textrm{m}/sec$. The non-linear properties of the PZT actuator are also well calibrated using the piezoresistive sensor for calibration.