Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2005.07a
- /
- Pages.412-413
- /
- 2005
Optimum Design of Micro-Cantilever Sensor for measuring CO gas
CO 가스측정을 위한 마이크로 캔틸레버 센서의 최적화 설계
- Son, H.J. (Department of Electrical Engineering, Korea Univ.) ;
- Na, D.S. (Department of Electrical Engineering, Korea Univ.) ;
- Peak, K.K. (Department of Electronic Engineering Daejin, Univ.) ;
-
Park, B.H.
(Department of Physics Konkuk, Univ.) ;
- Kwon, K.H. (Department of Electronic Engineering, Hanseo Univ.) ;
-
Nahm, S.
(Department of Materials Science and Engineering, Korea Univ.) ;
-
Ju, B.K.
(Department of Electrical Engineering, Korea Univ.)
- 손희주 (고려대학교 전기공학과) ;
- 나대석 (고려대학교 전기공학과) ;
- 백경갑 (대진대학교 전자공학과) ;
-
박배호
(건국대학교 물리학과) ;
- 권광호 (한서대학교 전자공학과) ;
-
남산
(고려대학교 신소재공학과) ;
-
주병권
(고려대학교 전기공학과)
- Published : 2005.07.07
Abstract
This paper describes resonant frequency of the structural behavior of micro-cantilever beam simulated by FEM (Finite Element Method). The resonant characteristics and the sensitivity of cantilever-shaped SOI resonant were measured for the application of chemical sensor. The resonant frequency of the fabricated micro-cantilever system was found to be 5.59kHz when the size of cantilever is