Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Optimum Design of Micro-Cantilever Sensor for measuring CO gas

CO 가스측정을 위한 마이크로 캔틸레버 센서의 최적화 설계

  • Son, H.J. (Department of Electrical Engineering, Korea Univ.) ;
  • Na, D.S. (Department of Electrical Engineering, Korea Univ.) ;
  • Peak, K.K. (Department of Electronic Engineering Daejin, Univ.) ;
  • Park, B.H. (Department of Physics Konkuk, Univ.) ;
  • Kwon, K.H. (Department of Electronic Engineering, Hanseo Univ.) ;
  • Nahm, S. (Department of Materials Science and Engineering, Korea Univ.) ;
  • Ju, B.K. (Department of Electrical Engineering, Korea Univ.)
  • 손희주 (고려대학교 전기공학과) ;
  • 나대석 (고려대학교 전기공학과) ;
  • 백경갑 (대진대학교 전자공학과) ;
  • 박배호 (건국대학교 물리학과) ;
  • 권광호 (한서대학교 전자공학과) ;
  • 남산 (고려대학교 신소재공학과) ;
  • 주병권 (고려대학교 전기공학과)
  • Published : 2005.07.07
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Abstract

This paper describes resonant frequency of the structural behavior of micro-cantilever beam simulated by FEM (Finite Element Method). The resonant characteristics and the sensitivity of cantilever-shaped SOI resonant were measured for the application of chemical sensor. The resonant frequency of the fabricated micro-cantilever system was found to be 5.59kHz when the size of cantilever is $500{\mu}m$ long, $100{\mu}m$ wide and $1{\mu}m$ thick. Generation of resonant frequency measured by Modal Analysis is resulted in length of cantilever. The length was found to be a dominant factor for the selection of required resonant frequency range. On the other side, the width had influenced very little on either the magnitude of resonant frequency or the sensitivity.

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