• 제목/요약/키워드: bulk method

검색결과 1,320건 처리시간 0.025초

3차원 LIGA 미세구조물 제작을 위한 마이크로 액추에이터 내장형 X-선 마스크 (Deep X-ray Mask with Integrated Micro-Actuator for 3D Microfabrication via LIGA Process)

  • 이광철;이승섭
    • 대한기계학회논문집A
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    • 제26권10호
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    • pp.2187-2193
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    • 2002
  • We present a novel method for 3D microfabrication with LIGA process that utilizes a deep X-ray mask in which a micro-actuator is integrated. The integrated micro-actuator oscillates the X-ray absorber, which is formed on the shuttle mass of the micro-actuator, during X-ray exposures to modify the absorbed dose profile in X-ray resist, typically PMMA. 3D PMMA microstructures according to the modulated dose contour are revealed after GG development. An X-ray mask with integrated comb drive actuator is fabricated using deep reactive ion etching, absorber electroplating, and bulk micromachining with silicon-on-insulator (SOI) wafer. 1mm $\times$ 1 mm, 20 $\mu$m thick silicon shuttle mass as a mask blank is supported by four 1 mm long suspension beams and is driven by the comb electrodes. A 10 $\mu$m thick, 50 $\mu$m line and spaced gold absorber pattern is electroplated on the shuttle mass before the release step. The fundamental frequency and amplitude are around 3.6 kHz and 20 $\mu$m, respectively, for a do bias of 100 V and an ac bias of 20 $V_{p-p}$ (peak-peak). Fabricated PMMA microstructure shows 15.4 $\mu$m deep, S-shaped cross section in the case of 1.6 kJ $cm^{-3}$ surface dose and GG development at 35$^{\circ}C$ for 40 minutes.

주기적으로 배열된 회전하는 원형 실린더를 이용한 채널유동의 열전달 증진 (Heat Transfer Enhancement in Channel Flow by a Streamwise-Periodic Array of Rotating Circular Cylinders)

  • 정태경;양경수
    • 대한기계학회논문집B
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    • 제38권12호
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    • pp.999-1008
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    • 2014
  • 채널 내 회전하는 원형 실린더가 주기적으로 존재하는 경우 회전하는 실린더를 지나는 유동에 의한 채널 내 유동 특성 및 채널 벽에서의 열전달 효율증진을 파악하였다. 본 연구에서 사용된 유동 모델은 마이크로 채널, 열교환기 등에서 평판 사이의 열전달 효율을 높이기 위해 흔히 사용되는 와류 생성기의 가장 단순한 모델이다. 실린더와 채널 벽과의 간격 및 Re 수를 변화해가며 수치적 해석을 수행하였으며, 직교좌표계에서 채널 내 원형 실린더를 구현하기 위해 가상경계법이 적용 되었다. 채널 내 실린더가 회전하고 있는 경우, 실린더가 정지해 있는 경우에 비해 특히 실린더와 채널 벽과의 간격이 작아질수록 채널 벽에서의 열전달 효과는 더 높은 것으로 파악되었다.

구리박막 시험편의 인장시험 (Tension Tests of Copper Thin Films)

  • 박경조;김정엽
    • 대한기계학회논문집A
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    • 제41권8호
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    • pp.745-750
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    • 2017
  • 본 연구에서는 두께 $12{\mu}m$의 구리박막에 대한 인장시험을 수행하였으며, 변위 측정은 디지털이미지를 기반으로 한 디지털이미지상관법을 이용하였다. 일반적인 디지털이미지상관법에서 시험편 표면의 큰변형으로 인해 변형률계산에 큰 오차가 발생하는 문제점을 개선하여, 시험편 전영역에 걸쳐 정밀하게 변형률을 계산할 수 있었으며 직접 시험편의 표면에서 변형률을 정확하게 측정할 수 있었다. 계산된 시험편 표면의 변형률 분포는 일반적인 벌크소재의 시험편에서와는 달리 전체적으로 균일하지가 않고 그 변화폭이 매우 크며, 항복응력이하의 탄성범위에 있는 경우에도 변형률분포는 균일하지 않다. 이것은 구리박막의 전해증착 제조공정에서 발생한 시험편의 거칠기가 비교적 큰 영향을 준 것으로 판단된다.

희생양극 하에서 알루미늄의 해수 부식 거동 (Corrosion Behavior of Aluminium Coupled to a Sacrificial Anode in Seawater)

  • 김종수;김희산
    • 한국표면공학회지
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    • 제39권1호
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    • pp.25-34
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    • 2006
  • Al-Mg alloy, an open rack vaporizer(ORV) material was reported to be corroded in seawater environments though the ORV material was coupled to thermally sprayed Al-Zn alloy functioning a sacrificial anode. In addition, the corrosion behavior based on the calculated corrosion potential did not match the observed corrosion behavior. Hence, the goal of this study is to get better understanding on Al or Al-Mg alloy coupled to Al-Zn alloy and to provide the calculated corrosion potential representing the corrosion behavior of the ORV material by immersion test, electrochemical tests, and calculation of corrosion and galvanic potential. The corrosion potentials of Al and Al alloys also depended on alloying element as well as surface defects. The corrosion potentials of Al and Al-Mg alloy were changed with time. In the meantime, the corrosion potentials of Al-Zn alloys were not. The corrosion rates of Al-Zn alloys were exponentially increased with zinc contents. The phenomena were explained with the stability of passive film proved by passive current density depending on pH and confirmed by the model proposed by McCafferty. Dissimilar material crevice corrosion (DMCC) test shows that higher content of zinc caused Al-Mg alloy corroded more rapidly, which was due to the fact that higher corrosion rate of Al-Zn makes [$H^+$] and [$Cl^-$] more concentrated within pit solution to corrode Al-Mg alloy. Considering electrochemical reactions within pit as well as bulk in the calculation gives better prediction on the corrosion behavior of Al and Al-Mg alloy as well as the capability of Al-Zn alloy for corrosion protection.

소결온도에 따른 $0.8Mg_4Ta_2O_9-0.2CaTiO_3$ 세라믹스의 마이크로파 유전 특성 (Microwave Dielectric Properties of $0.8Mg_4Ta_2O_9-0.2CaTiO_3$ Ceramics with Sintering Temperatuer)

  • 김재식;최의선;이문기;류기원;이영희
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
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    • pp.659-662
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    • 2004
  • The microwave dielectric properties of the $0.8Mg_4Ta_2O_9-0.2CaTiO_3$ ceramics with sintering temperature were investigated. All the sample of the $0.8Mg_4Ta_2O_9-0.2CaTiO_3$ ceramics prepared by conventional mixed oxide method and sintered at $1400^{\circ}C-1450^{\circ}C$. According to X-ray diffraction patterns of the $0.8Mg_4Ta_2O_9-0.2CaTiO_3$ ceramics, major phase of the hexagonal $Mg_4Ta_2O_9$ phase were showed. Porosity of the $0.8Mg_4Ta_2O_9-0.2CaTiO_3$ ceramics were reduced with increasing sintering temperature, but the bulk density was increased. In the case of $0.8Mg_4Ta_2O_9-0.2CaTiO_3$ ceramics sintered at $1425^{\circ}C$, dielectric constant, quality factor and temperature coefficient of resonant frequency(TCRF) were 13.69, 63,754GHz and -29.37 $ppm/^{\circ}C$, respectively.

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The Nature of Water in Tactic Poly (2-Hydroxyethyl Methacrylate) Hydrogels

  • Kim, Eui-Hwan;Jeon, Sang-Il;Yoon, Sung-Chul;Jhon, Mu-Shik
    • Bulletin of the Korean Chemical Society
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    • 제2권2호
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    • pp.60-66
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    • 1981
  • The hypothesis that three classes of water exist in hydrogels, namely X water (free water-like), Z-water (bound water-like), and Y water (interfacial water-like), has been verified and generally accepted. To further check the validity of this hypothesis and to study the nature of X, Y, and Z water as conformation changes, several experiments have been done using Tactic Poly(2-hydroxyethyl methacrylate) (P-HEMA) gels. Thermal expansively data for tactic P-HEMA gel was obtained. In each case of isotactic and syndiotactic P-HEMA, the higher water content gels showed an extremely sharp volume change at $0^{\circ}C$, indicating the presence of normal free water-like. Lower water content gels showed no anomalous change in thermal expansion, indicating that the water is bound water-like. The medium water content gels exhibited intermediate behavior. These results were also confirmed by bulk gel conductivity measurments. The differential scanning calorimeter(DSC) experiment was simply introduced to further verify the bound water-like quantities which was obtained by the method of dilatometry and specific conductivity. Observing the amounts of X, Y, and Z water with the change of tacticity, the similar content of bound water-like may be due to the same primary structure of isotactic and syndiotactic polymer and the difference in free and interfacial water-like content may be due to the difference in secondary and tertiary structure of tactic polymer. Therefore, as the polymer conformation varies, the free and interfacial water-like content will be varied. In order to demonstrate these concepts, Russel et al.'s CPK space-filling molecular models of isotactic and syndiotactic P-HEMA was utilized.

CsCl 구조를 가지는 CoX(X = Ti, V, Nb) (001) 표면의 자성에 대한 제일원리 연구 (A First-principles Study on the Surface Magnetism of the CsCl Structured CoX (X = Ti, V, Nb) (001) Surface)

  • 김동철
    • 한국자기학회지
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    • 제25권5호
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    • pp.139-143
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    • 2015
  • CsCl 구조를 가지는 CoX(X = Ti, V, Nb) 이원화합물에서 (001) 표면계의 전자구조를 제일원리 전자구조 계산방법을 이용하여 계산하고 표면자성을 연구하였다. Co 원자로 끝나는 CoTi(001)계에서 표면 Co 원자의 자기모멘트는 가운데 층 Co 원자에 비해 상당히 증가한 $1.19{\mu}_B$였다. V 원자로 끝나는 CoV(001) 표면계에서 표면 V 원자의 자기모멘트는 가운데 층의 2.5배로서 $1.64{\mu}_B$이고, Co 원자로 끝나는 계에서 표면 Co 원자의 자기모멘트는 $1.34{\mu}_B$로 덩치 Co 원자에 비해 다소 감소하였다. CoNb(001)계에서 Nb 원자로 끝나는 계의 경우, 표면 Nb 원자의 자기모멘트는 가운데 층 Nb 원자에 비해 다소 감소한 $0.26{\mu}_B$였으며, Co 원자로 끝나는 표면계의 경우 자성이 사라졌다.

마그네타이트 극미세 나노입자의 자기저항 현상 (Large Magneto-Resistance in Magnetite Nanoparticles)

  • 장은영;이년종;최등장;김태희
    • 한국자기학회지
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    • 제18권4호
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    • pp.154-158
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    • 2008
  • 역 스피넬 구조(Inverse Spinel structure)를 갖는 마그네타이트($Fe_3O_4$) 나노입자에서 거대 자기저항(Giant Magneto-Resistance, GMR) 거동을 주의 깊게 관찰하였다. 이 연구 결과로부터 MR 현상이 100%의 스핀 분극 값을 갖는 마그네타이트 전자기적 특성뿐만 아니라 입자들의 표면에 형성된 절연체 터널 장벽(tunnel barrier)의 특성에 영향을 받음을 확인할 수 있었다. 이는 박막형태의 터널 접합소자에서 터널링 특성이 벌크가 아닌 자성 층과 산화 층 사이의 계면 특성에 매우 큰 영향을 받는다는 연구 결과와 일치한다. 따라서 나노입자의 I-V 특성을 측정하여 박막의 터널 접합에 대한 이론 모델 중 하나인 Brinkman 이론을 적용하여 입자 표면의 심층적 분석을 시도하였다. 한편 GMR을 측정하기에 앞서 입자의 구조와 자기적 특성의 상호작용에 대한 연구 또한 진행되었다.

PIV measurement and numerical investigation on flow characteristics of simulated fast reactor fuel subassembly

  • Zhang, Cheng;Ju, Haoran;Zhang, Dalin;Wu, Shuijin;Xu, Yijun;Wu, Yingwei;Qiu, Suizheng;Su, G.H.
    • Nuclear Engineering and Technology
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    • 제52권5호
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    • pp.897-907
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    • 2020
  • The flow characteristics of reactor fuel assembly always intrigue the designers and the experimentalists among the myriad phenomena that occur simultaneously in a nuclear core. In this work, the visual experimental method has been developed on the basis of refraction index matching (RIM) and particle image velocimetry (PIV) techniques to investigate the detailed flow characteristics in China fast reactor fuel subassembly. A 7-rod bundle of simulated fuel subassembly was fabricated for fine examination of flow characteristics in different subchannels. The experiments were performed at condition of Re=6500 (axial bulk velocity 1.6 m/s) and the fluid medium was maintained at 30℃ and 1.0 bar during operation. As for results, axial and lateral flow features were observed. It is shown that the spiral wire has an inhibitory effect on axial flow and significant intensity of lateral flow mixing effect is induced by the wire. The root mean square (RMS) of lateral velocity fluctuation was acquired after data processing, which indicates the strong turbulence characteristics in different flow subchannels.

정수처리 공정 적용을 위한 MCDI (Membrane Capacitive Deionization) Module의 수용액 내 TDS 제거 특성에 관한 연구 (A study on the TDS removal characteristics in aqueous solution using MCDI module for application of water treatment process)

  • 오창석;안주석;오현제
    • 상하수도학회지
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    • 제35권4호
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    • pp.293-300
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    • 2021
  • Recently, various researches have been studied, such as water treatment, water reuse, and seawater desalination using CDI (Capacitive deionization) technology. Also, applications like MCDI (Membrane capacitive deionization), FCDI (Flow-capacitive deionization), and hybrid CDI have been actively studied. This study tried to investigate various factors by an experiment on the TDS (Total dissolved solids) removal characteristics using MCDI module in aqueous solution. As a result of the TDS concentration of feed water from 500 to 2,000 mg/L, the MCDI cell broke through faster when the higher TDS concentration. In the case of TDS concentration according to the various flow rate, 100 mL/min was stable. In addition, there was no significant difference in the desorption efficiency according to the TDS concentration and method of backwash water used for desorption. As a result of using concentrated water for desorption, stable adsorption efficiency was shown. In the case of the MCDI module, the ions of the bulk solution which is escaped from the MCDI cell to the spacer during the desorption process are more important than the concentration of ions during desorption. Therefore, the MCDI process can get a larger amount of treated water than the CDI process. Also, prepare a plan that can be operated insensitive to the TDS concentration of backwash water for desorption.