The Study of WET Cleaning Effect on Deep Trench Structure for Trench MOSFET Technology (Trench MOSFET Technology의 Deep Trench 구조에서 WET Cleaning 영향에 대한 연구)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2009.06a
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- pp.88-89
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- 2009