• Title/Summary/Keyword: boron effect

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Effect of boron doping on the chemical and physical properties of hydrogenated amorphous silicon carbide thin films prepared by PECVD (플라즈마 화학증착법으로 제조된 수소화된 비정질 탄화실리콘 박막의 물성에 대한 붕소의 도핑효과)

  • 김현철;이재신
    • Journal of the Korean Vacuum Society
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    • v.10 no.1
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    • pp.104-111
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    • 2001
  • B-doped hydrogenated amorphous silicon carbide (a-SiC:H) thin films were prepared by plasma-enhanced chemical-vapor deposition in a gas mixture of $SiH_4, CH_4,\;and\; B_2H_6$. Physical and chemical properties of a-SiC:H films grown with varing the ratio of $B_2H_6/(SiH_4+CH_4)$ were characterized with various analysis methods including scanning electron microscopy (SEM), X-ray diffractometry (XRD), Raman spectroscopy, Fourier-transform infrared (FTIR) spectroscopy, secondary ion mass spectroscopy (SIMS), UV absorption CH_4spectroscopy and electrical conductivity measurements. With the B-doping concentration, the doping efficiency and the micro-crystallinity were decreased and the film became amorphous when $B_2H_6/(SiH_4{plus}CH_4)$ was over $5{\times}10^{-3}$. The addition of $B_2H_6$ gas during deposition decreased the H content in the film by lowering the quantity of Si-C-H bonds. Consequently, the optical band gap and the activation energy of a-SiC:H films were decreased with increasing the B-doping level.

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$Si_xGe_{1-x}/Si/Si_xGe_{1-x}$ Channel을 가진 JFET의 전기적 특성

  • Park, Byeong-Gwan;Yu, Ju-Tae;Kim, Dong-Hun;Kim, Tae-Hwan
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.626-626
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    • 2013
  • P-N 접합에 의해 절연된 게이트를 통해 전류 통로를 제어하는 접합형 전계효과 트랜지스터(Junction Field Effect Transistors; JFETs)는, 입력 임피던스가 크고, 온도에 덜 민감하며, 제조가 간편하여 집적회로(IC) 제조가 용이하고, 동작의 해석이 단순하다는 장점을 가지고 있다. 특히 JFET는 선형적인 전류의 증폭 특성을 가지고 있으며, 잡음이작기 때문에, 감도가 우수한 음향 센서의 증폭회로, 선형성이 우수한 증폭회로, 입력 계측 증폭 회로 등에 주로 사용되고 있다. 기존에 사용되는 JFET 소자는 구조와 제조 공정에 따라서, 컷 오프 전압($V_{cut-off}$)과 드레인-소스 포화 전류($I_{DSS}$)의 변화가 심하게 발생하여, 소자의 전기적 특성 제어가 어렵고, 소자의 수율이 낮다는 문제점이 있다. 본 연구에서는 TCAD 시뮬레이션을 통해 게이트 전압에 의해 채널이 형성되는 채널 층의 상하부에 각각 $Si_xGe_{1-x}$로 이루어진 상부 및 하부 확산 저지층을 삽입한 JFET 소자 형성하여, 게이트 접합부의 접합 영역 확산을 저지하고, 상기 게이트 접합부가 계면에서 날카로운 농도 구배를 갖도록 함으로써, 공정 변화에 따른 전기적 특성의 편차가 작아지는 JFET 소자 구조를 만들어 전기적 특성을 개선하였다. JFET은 채널층에 삽입된 $Si_xGe_{1-x}$ 층의 두께, Ge 함유량 및 n채널층의 두께를 변화하였을 때, off 상태의 게이트-소스 전압이 감소한 반면에 드레인-소스 포화 전류($I_{DSS}$)와 컨덕턴스(gm) 값이 증가하였다. 삽입된 $Si_xGe_{1-x}$층이 Boron이 밖으로 확산되는 현상이 감소하여 채널이 좁아지는 현상을 막아 소자의 전기적 특성을 개선함으로써 제조공정의 변화에 관계없이 컷오프 전압을 정확하고 안정되게 제어할 수 있고 이를 통해 소자의 수율을 높일 수 있을 것으로 기대된다.

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Studies on Application of Organic-Compound Fertilizer on Hilly Mixed Sward Ⅱ. Effect of organic-compound fertilizer application on qualities of grasses (山地草地에 對한 有機質 複合肥料의 施用에 關한 硏究 Ⅱ. 有機質 複合肥料의 施用이 牧草의 品質에 미치는 影響)

  • Park, Geun-Je;Shin, Jae-Soon;Lee, Pil-Sang;Kim, Jae-Kyu
    • Journal of The Korean Society of Grassland and Forage Science
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    • v.8 no.2
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    • pp.99-103
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    • 1988
  • With a purpose of finding out the effects of magnesium and boron enriched organic-compound fertilizer application on qualities of grasses on the hilly pasture, a field experiment was arranged with five different treatments as a randomized block design and lasted from September, 1984 to the end of growing season in 1986. The results obtained are summarized as follows: 1. Mean chemical components except NFE of grasses at the plots with organic-compound fertilizer application were appeared to contain slightly high comparing to single dressing. 2. Production of DCP with organic-compound fertilizer (1,170.2 kg/ha) was significanty increased by 20% comparing to single dressing (975.7 kg/ha) in the conventional fertilization level (p<0.05), but it was not significantly different between them in the low dressing level. 3. Production of energies (TDN, StE and NEL) with organic-compound fertilizer of low and conventional dressing level were appeared to increase by 10 and 13 to 15% than those of single dressing of the same levels, respectively. But it was not significant difference. 4. Like single dressing nutrient productions with organic-compound fertilizer were appeared significantly high due to increasing of dressing gradually (P<0.05-0.01) 5. Mineral contents of P and Mg at the plots with organic-compound fertilizer were a little higher, on the other hand, K, C/P and K/Ca + Mg equivalent ratio were slightly lower than those of single dressing, but the content of Ca tended to similar between them.

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Mechanistic insights of metal acetylacetonate-aided dehydrocoupling of liquid-state ammonia borane NH3BH3

  • Pereza, Manon;Mieleb, Philippe;Demirci, Umit B.
    • Advances in Energy Research
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    • v.4 no.2
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    • pp.177-187
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    • 2016
  • Ammonia borane $NH_3BH_3$ solubilized in organic solvent is a potential liquid-state chemical hydrogen storage material. In this study, metal acetylacetonates like $Fe(O_2C_5H_7)_3$, $Co(O_2C_5H_7)_2$, $Ni(O_2C_5H_7)_2$, $Pd(O_2C_5H_7)_2$, $Pt(O_2C_5H_7)_2$ and $Ru(O_2C_5H_7)_3$ are considered for assisting dehydrocoupling of ammonia borane in diglyme (0.135 M) at $50^{\circ}C$. The molar ratio between ammonia borane and metal acetylacetonate is fixed at 100. A protocol for the separation of the soluble and insoluble fractions present in the slurry is proposed; it consists in using acetonitrile to make the precipitation of metal-based compounds easier and to solubilize boron-based intermediates/products. The nature of the metal does not affect the dehydrocoupling mechanisms, the $^{11}B\{^1H\}$ NMR spectra showing the formation of the same reaction intermediates. The aforementioned metal acetylacetonates do mainly have effect on the kinetics of dehydrocoupling. Dehydrocoupling takes place heterogeneously and dehydrogenation of ammonia borane in these conditions leads to the formation of polyborazylene via intermediates like e.g., B-(cyclodiborazanyl) amine-borane and borazine. Our main results are reported and discussed herein.

Effect of Additives on the Refractive Index of B2O3-SiO2-Al2O3 Glasses for Photolithographic Process in Electronic Micro Devices

  • Won, Ju-Yeon;Hwang, Seong-Jin;Lee, Jung-Ki;Kim, Hyung-Sun
    • Korean Journal of Materials Research
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    • v.20 no.7
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    • pp.370-373
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    • 2010
  • In fabricating plasma display panels, the photolithographic process is used to form patterns of barrier ribs with high accuracy and high aspect ratio. It is important in the photolithographic process to control the refractive index of the photosensitive paste. The composition of this paste for photolithography is based on the $B_2O_3-SiO_2-Al_2O_3$ glass system, including additives of alkali oxides and rare earth oxides. In this work, we investigated the density, structure and refractive index of glasses based on the $B_2O_3-SiO_2-Al_2O_3$ system with the addition of $Li_2O$, $K_2O$, $Na_2O$, CaO, SrO, and MgO. The refractive index of the glasses containing K2O, Na2O and CaO was similar to that of the [BO3] fraction while that of the SrO, MgO and Li2O containing glasses were not correlated with the coordination fraction. The coordination number of the boron atoms was measured by MAS NMR. The refractive index increased with a decrease of molar volume due to the increase in the number of non-bridging oxygen atoms and the polarizability. The lowest refractive index (1.485) in this study was that of the $B_2O_3-SiO_2-Al_2O_3-K_2O$ glass system due to the larger ionic radius of $K^+$. Based on our results, it has been determined that the refractive index of the $B_2O_3-SiO_2-Al_2O_3$ system should be controlled by the addition of alkali oxides and alkali earth oxides for proper formation of the photosensitive paste.

A Study on the Enhancement of Soil Fertility in the Reclaimed Land for Growing Tobacco (연초 재배를 위한 개간지 토양의 비옥도 증진에 관한 연구)

  • 정훈채;조성진
    • Journal of the Korean Society of Tobacco Science
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    • v.2 no.1
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    • pp.37-52
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    • 1980
  • Two-year experiment was conducted to investigate the effect of phosphorous, lime, increased compost, and/or boron application on the yield and quality of leaf tobacco growm in the results are summarized as follows; 1) Compared to the conventional treatment, plants grown in the treated plots in the second year showed much better growth and their yield components such as leaf area index and unit leaf weight were much greater. 2) At the end of first year crop, the pH and amount of exchangeable cations in the treated plots reached those in mature soil, but the amount of organic matter and of available phosphorous were still below those of the mature soil. Application of additional compost was more effective in enhancing soil fertility than was additional phosphorous application. 3) The yield of tobacco grown in the second year was 15-20% higher in the treated plots, compared to conventional plot, with high statistical significance. Though the quality of leaf tobacco was not significantly different among treatments, the increase of 3-7% was obtained in the treated plot. The highest total income(yield x price/kg) came from the plot treated with additional compost and phosphorous application (adjusted at 3% level on the basis of phosphorous absorption coefficient), which produced 34% more than the conventional plot.

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Characteristics of the PbO-Bi2O3-B2O3-ZnO-SiO2 Glass System Doped with Pb Metal Filler (Pb 금속필러가 첨가된 PbO-Bi2O3-B2O3-ZnO-SiO2계 유리의 특성)

  • Choi, Jinsam;Jeong, DaeYong;Shin, Dong Woo;Bae, Won Tae
    • Journal of the Korean Ceramic Society
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    • v.50 no.3
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    • pp.238-243
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    • 2013
  • We investigated the effect of Pb-metal filler added to a hybrid paste(PbO-$Bi_2O_3-B_2O_3$-ZnO glass frit and Pb-powder), for joining flip-chip sat lower temperatures than normal. The glass transition temperature was detected at $250^{\circ}C$ and the softening point occurred at $330^{\circ}C$. As the temperature increased, the specific density decreased due to the volatility of the Pb-metal and boron component in the glass. When the glass was heat-treated at $350^{\circ}C$ for 5 min, XRD results revealed a crystalline $Pb_4Bi_3B_7O_{19}$ phase that had been initiated by the addition of Pb-filler in the hybrid paste. The addition of the Pb-metal filler caused are action between the Pb-metal and glass that accelerated the formation of the liquid phase. The liquid phase that formed, promoted bonding between the flip-chip substrate sat lower temperature.

Fabrication and Electrical Properties of Local Damascene FinFET Cell Array in Sub-60nm Feature Sized DRAM

  • Kim, Yong-Sung;Shin, Soo-Ho;Han, Sung-Hee;Yang, Seung-Chul;Sung, Joon-Ho;Lee, Dong-Jun;Lee, Jin-Woo;Chung, Tae-Young
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.6 no.2
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    • pp.61-67
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    • 2006
  • We fabricate local damascene FinFET cell array in sub-60nm feature sized DRAM. The local damascene structure can remove passing-gate-effects in FinFET cell array. p+ boron in-situ doped polysilicon is chosen for the gate material, and we obtain a uniform distribution of threshold voltages at around 0.7V. Sub-threshold swing of 75mV/d and extrapolated off-state leakage current of 0.03fA are obtained, which are much suppressed values against those of recessed channel array transistors. We also obtain a few times higher on-state current. Based on the improved on- and off-state current characteristics, we expect that the FinFET cell array could be a new mainstream structure in sub-60nm DRAM devices, satisfying high density, low power, and high-speed device requirements.

Ion-Pair Extraction of Boron Complex Anions (Ⅱ). Effect of Fluoride and Bifluoride Ions (붕소 착물 음이온의 이온쌍 추출 (제2보). $F^-$$HF_2^-$-이온의 영향)

  • Hyung-Soo Song;Hai-Dong Kim;Kim Kang-Jin
    • Journal of the Korean Chemical Society
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    • v.27 no.6
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    • pp.411-418
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    • 1983
  • The effects of existing anions in hydrofluoric acid solutions, $F^-$ and $HF_2$on the extraction of methylene blue-$BF_4^-$ ion-pair into 1,2-dichloroethane have been investigated by spectrophotometry. The absorbance of the extracted ion-pair is found to be independent of $F^-$ion up to $10^{-2}$ molar concentration, which implies that $F^-$ion dose not directly interfere with the extraction. However, $HF_2^-$ ion competes with $BF_4^-$ion for methylene blue and the extraction constant for methylene blue-H$F_2$ion-pair is calculated to be 8.5 at $25^{\circ}C$.

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A Study on the Removal Method of Radioactive Corrosion Product using its Magnetic Property (방사성 부식생성물의 자기적 성질을 이용한 제거방법에 대한 연구)

  • 송민철;공태영;이건재
    • Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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    • v.1 no.1
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    • pp.73-79
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    • 2003
  • In a pressurized water reactor, radioactive corrosion products (CRUD) in primary coolant system are one of the major sources for the occupational radiation exposure of the personnel in a nuclear power plant. Through the recent trend of long term fuel cycle in a nuclear power Plant, radioactive corrosion products deposited in reactor core for a long time are also the cause of Axial Offset Anomaly (AOA) having m effect on reactor power by the hideout of boron. CRUD consist primarily of magnetite, nickel ferrite, cobalt ferrite, and so on. They have the characteristic of strong magnetism. Therefore it is performed the conceptual design to develop the filter which removes the CRUD by magnetic field that is generated by an arrangement of permanent and electric magnets. Contrary to the conventional filter, the proposed filter does not interrupt the fluid flow, so there is little pressure drop and it can be used continuously. It is expected to be applied as one of the technologies for removal of the CRUB.

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