Fabrication of SiCOI Structures Using SDB and Etch-back Technology for MEMS Applications (SDB와 etch-back 기술에 의한 MEMS용 SiCOI 구조 제조)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2003.07b
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- pp.830-833
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- 2003