• Title/Summary/Keyword: bonding technology

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Fabrication of SiCOI Structures Using SDB and Etch-back Technology for MEMS Applications (SDB와 etch-back 기술에 의한 MEMS용 SiCOI 구조 제조)

  • Jung, Su-Yong;Woo, Hyung-Soon;Chung, Gwiy-Sang
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.07b
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    • pp.830-833
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    • 2003
  • This paper describes the fabrication and characteristics of 3C-SiCOI sotctures by SDB and etch-back technology for high-temperature MEMS applications. In this work, insulator layers were formed on a heteroepitaxial 3C-SiC film grown on a Si(001) wafer by thermal wet oxidation and PECVD process, successively. The pre-bonding of two polished PECVD oxide layers made the surface activation in HF and bonded under applied pressure. The wafer bonding characteristics were evaluated by the effect of HF concentration used in the surface treatment on the roughness of the oxide and pre-bonding strength. Hydrophilic character of the oxidized 3C-SiC film surface was investigated by ATR-FTIR. The strength of the bond was measured by tensile strengthmeter. The bonded interface was also analyzed by SEM. The properties of fabricated 3C-SiCOI structures using etch-back technology in TMAH solution were analyzed by XRD and SEM. These results indicate that the 3C-SiCOI structure will offers significant advantages in the high-temperature MEMS applications.

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Formation of Ultrafine Grains in Cu-Fe-P Alloy by Accumulative Roll-Bonding Process (ARB법에 의한 Cu-Fe-P합금의 초미세결정립 형성)

  • Lee, Seong-Hee;Han, Seung-Zeon;Kim, Hyoung-Wook;Lim, Cha-Yong
    • Korean Journal of Materials Research
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    • v.19 no.8
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    • pp.432-436
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    • 2009
  • A Cu-Fe-P copper alloy was processed by accumulative roll-bonding (ARB) for ultra grain refinement and high strengthening. Two 1mm thick copper sheets, 30 mm wide and 300 mm long, were first degreased and wire-brushed for sound bonding. The sheets were then stacked on top of each other and roll-bonded by about 50% reduction rolling without lubrication at ambient temperature. The bonded sheet was then cut into two pieces of the same dimensions and the same procedure was repeated for the sheets up to eight cycles. Microstructural evolution of the copper alloy with the number of the ARB cycles was investigated by optical microscopy (OM), transmission electron microscopy(TEM), and electron back scatter diffraction(EBSD). The grain size decreased gradually with the number of ARB cycles, and was reduced to 290 nm after eight cycles. The boundaries above 60% of ultrafine grains formed exhibited high angle boundaries above 15 degrees. In addition, the average misorientation angle of ultrafine grains was 30 degrees.

Effect of Die Bonding Epoxy on the Warpage and Optical Performance of Mobile Phone Camera Packages (모바일 폰 카메라 패키지의 다이 본딩 에폭시가 Warpage와 광학성능에 미치는 영향 분석)

  • Son, Sukwoo;Kihm, Hagyong;Yang, Ho Soon
    • Journal of the Semiconductor & Display Technology
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    • v.15 no.4
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    • pp.1-9
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    • 2016
  • The warpage on mobile phone camera packages occurs due to the CTE(Coefficient of Thermal Expansion) mismatch between a thin silicon die and a substrate. The warpage in the optical instruments such as camera module has an effect on the field curvature, which is one of the factors degrading the optical performance and the product yield. In this paper, we studied the effect of die bonding epoxy on the package and optical performance of mobile phone camera packages. We calculated the warpages of camera module packages by using a finite element analysis, and their shapes were in good agreement showing parabolic curvature. We also measured the warpages and through-focus MTF of camera module specimens with experiments. The warpage was improved on an epoxy with low elastic modulus at both finite element analysis and experiment results, and the MTF performance increased accordingly. The results show that die bonding epoxy affects the warpage generated on the image sensor during the packaging process, and this warpage eventually affects the optical performance associated with the field curvature.

A 1D model considering the combined effect of strain-rate and temperature for soft soil

  • Zhu, Qi-Yin;Jin, Yin-Fu;Shang, Xiang-Yu;Chen, Tuo
    • Geomechanics and Engineering
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    • v.18 no.2
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    • pp.133-140
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    • 2019
  • Strain-rate and temperature have significant effects on the one-dimensional (1D) compression behavior of soils. This paper focuses on the bonding degradation effect of soil structure on the time and temperature dependent behavior of soft structured clay. The strain-rate and temperature dependency of preconsolidation pressure are investigated in double logarithm plane and a thermal viscoplastic model considering the combined effect of strain-rate and temperature is developed to describe the mechanical behavior of unstructured clay. By incorporating the bonding degradation, the model is extended that can be suitable for structured clay. The extended model is used to simulate CRS (Constant Rate of Strain) tests conducted on structural Berthierville clay with different strain-rates and temperatures. The comparisons between predicted and experimental results show that the extended model can reasonably describe the effect of bonding degradation on the stain-rate and temperature dependent behavior of soft structural clay under 1D condition. Although the model is proposed for 1D analysis, it can be a good base for developing a more general 3D model.

Hydrogen Bonding Effect on γ-Ray Irradiated Poly(vinyl alcohol) Hydrogels in Different Drying Conditions

  • Gwon, Hui-Jeong;Jo, Sun Young;Park, Eun Ji;Shin, Young Min;Choi, Jong-Bae;Park, Jong-Seok;Lim, Youn-Mook;Nho, Young-Chang;Kang, Phil Hyun
    • Journal of Radiation Industry
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    • v.6 no.1
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    • pp.89-94
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    • 2012
  • Three-dimensional network hydrogels were prepared by ${\gamma}$-irradiation of aqueous solutions of poly(vinyl alcohol) (PVA) and glycerol (Gly). Oven-drying was used to measure the gel fraction (G), hydration (H) or swelling behavior (S) of the prepared hydrogels. This study made a hypothesis that hydrogen bonds due to addition of glycerol and change of dry states such as freeze-drying (FD), room-drying (RD) and oven-drying (OD) acts on the G, H, and S. Interesting results on the hydrogen bonding effect in the prepared hydrogels are monitored at different drying conditions. The FD samples have a higher G values with increase in glycerol content as compared with the OD and RD samples. The formation of strong hydrogen bonding network among Gly molecules and hydrogel matrix was considered as the main driving force, resulting in the changes in the G, H, and S of the hydrogels under different drying conditions.

Effects of Hardeners on the Low-Temperature Snap Cure Behaviors of Epoxy Adhesives for Flip Chip Bonding (플립칩용 에폭시 접착제의 저온 속경화 거동에 미치는 경화제의 영향)

  • Choi, Won-Jung;Yoo, Se-Hoon;Lee, Hyo-Soo;Kim, Mok-Soon;Kim, Jun-Ki
    • Korean Journal of Materials Research
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    • v.22 no.9
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    • pp.454-458
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    • 2012
  • Various adhesive materials are used in flip chip packaging for electrical interconnection and structural reinforcement. In cases of COF(chip on film) packages, low temperature bonding adhesive is currently needed for the utilization of low thermal resistance substrate films, such as PEN(polyethylene naphthalate) and PET(polyethylene terephthalate). In this study, the effects of anhydride and dihydrazide hardeners on the low-temperature snap cure behavior of epoxy based non-conductive pastes(NCPs) were investigated to reduce flip chip bonding temperature. Dynamic DSC(differential scanning calorimetry) and isothermal DEA(dielectric analysis) results showed that the curing rate of MHHPA(hexahydro-4-methylphthalic anhydride) at $160^{\circ}C$ was faster than that of ADH(adipic dihydrazide) when considering the onset and peak curing temperatures. In a die shear test performed after flip chip bonding, however, ADH-containing formulations indicated faster trends in reaching saturated bond strength values due to the post curing effect. More enhanced HAST(highly accelerated stress test) reliability could be achieved in an assembly having a higher initial bond strength and, thus, MHHPA is considered to be a more effective hardener than ADH for low temperature snap cure NCPs.

Influence of loose bonding, initial stress and reinforcement on Love-type wave propagating in a functionally graded piezoelectric composite structure

  • Singh, Abhishek K.;Parween, Zeenat;Chaki, Mriganka S.;Mahto, Shruti
    • Smart Structures and Systems
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    • v.22 no.3
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    • pp.341-358
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    • 2018
  • This present study investigates Love-type wave propagation in composite structure consists of a loosely bonded functionally graded piezoelectric material (FGPM) stratum lying over a functionally graded initially-stressed fibre-reinforced material (FGIFM) substrate. The closed-form expressions of the dispersion relation have been obtained analytically for both the cases of electrically open and electrically short conditions. Some special cases of the problem have also been studied and the obtained results are found in well-agreement with the classical Love wave equation. The emphatic influence of wave number, bonding parameter associated with bonding of stratum with substrate of the composite structure, piezoelectric coefficient as well as dielectric constant of the piezoelectric stratum, horizontal initial stresses, and functional gradedness of the composite structure on the phase velocity of Love-type wave has been reported and illustrated through numerical computation along with graphical demonstration in both the cases of electrically open and electrically short condition for the reinforced and reinforced-free composite structure. Comparative study has been carried out to analyze the distinct cases associated with functional gradedness of the composite structure and also various cases which reveals the influence of piezoelectricity, reinforcement and horizontal initial stress acting in the composite structure, and bonding of the stratum and substrate of the composite structure in context of the present problem which serves as one of the major highlights of the study.

Effects of Indium and Tin on Interfacial Property of Porcelain Fused to Low Gold Alloys (도재소부용 금합금에서 인듐, 주석 첨가가 금속-도재계면 특성에 미치는 영향)

  • Nam, Sang-Yong;Kwak, Dong-Ju;Chung, Suk-Min
    • Journal of Technologic Dentistry
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    • v.23 no.1
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    • pp.31-43
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    • 2001
  • This study was performed to observe the micro-structure change of surface, behavior of oxide change of element, the component transformation of the alloy and the bonding strength between the porcelain interface in order to investigate effects of indium, tin on interfacial properties of porcelain fused to low gold alloy. Hardness of castings was measured with a micro-Vicker's hardness tester. The compositional change of the surface of heat-treated specimen was analyzed with an EDS and an EPMA. The interfacial shear bonding strength between alloy specimen and fused porcelain was measured with a mechanical testing system(MTS 858.20). The results were as follows: 1) The hardness value of alloy increased as increasing amount of indium addition. 2) The formation of oxidation increased as increasing indium and tin contents after heat treatment. 3) Diffusion of indium and tin elements increased as increasing indium and tin contents in metal-porcelain surface after porcelain fused to metal firing. 4) The most interfacial shear bonding strength was increased as increasing a composition of adding elements, and a heat-treatment time, and an oxygen partial pressure. From the results of this study it was found that the addition of alloying elements such as indium and tin increase hardness of as-cast alloy, produce surface oxide layer of adding elements by heat-treatment which may improve interfacial bonding strength between alloy and porcelain.

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Bonding Strength of Conductive Inner-Electrode Layers in Piezoelectric Multilayer Ceramics

  • Wang, Yiping;Yang, Ying;Zheng, Bingjin;Chen, Jing;Yao, Jinyi;Sheng, Yun
    • Transactions on Electrical and Electronic Materials
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    • v.18 no.4
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    • pp.181-184
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    • 2017
  • Multilayer ceramics in which piezoelectric layers of $0.90Pb(Zr_{0.48}Ti_{0.52})O_3-0.05Pb(Mn_{1/3}Sb_{2/3})O_3-0.05Pb(Zn_{1/3}Nb_{2/3})O_3$ (0.90PZT-0.05PMS-0.05PZN) stack alternately with silver electrode layers were prepared by an advanced low-temperature co-fired ceramic (LTCC) method. The electrical properties and bonding strength of the multilayers were associated with the interface morphologies between the piezoelectric and silver-electrode layers. Usually, the inner silver electrodes are fabricated by sintering silver paste in multi-layer stacks. To improve the interface bonding strength, piezoelectric powders of 0.90PZT-0.05PMS-0.05PZN with an average particle size of $23{\mu}m$ were added to silver paste to form a gradient interface. SEM observation indicated clear interfaces in multilayer ceramics without powder addition. With the increase of piezoelectric powder addition in the silver paste, gradient interfaces were successfully obtained. The multilayer ceramics with gradient interfaces present greater bonding strength as well as excellent piezoelectric properties for 30~40 wt% of added powder. On the other hand, over addition greatly increased the resistance of the inner silver electrodes, leading to a piezoelectric behavior like that of bulk ceramics in multilayers.

Enhancement of Cu Wire Bondability by Increasing the Surface Roughness of Capillary (표면 요철이 발달된 캐필러리 적용에 따른 Cu 와이어의 본딩 특성)

  • Lee, Jong-Hyun;Kim, Ju-Hyung;Kang, Hong-Jeon;Kim, Hak-Bum;Moon, Jung-Tak;Riu, Doh-Hyung
    • Korean Journal of Metals and Materials
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    • v.50 no.12
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    • pp.913-920
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    • 2012
  • In spite of some problems in processability and bondability, Au wires in the microelectronics industry are gradually being replaced by copper wires to reduce the cost of raw material. In this article, the effects of surface roughness enhanced capillaries on thermosonic Cu wire bonding were evaluated. The roughness-enhanced zirconia toughened alumina (ZTA) capillaries were fabricated via a thermal grooving technique. As a result, the shear bond strength of first bonds (ball bonds) bonded using the roughness-enhanced capillary was enhanced by 15% as compared with that of normal bonds due to more effective plastic deformation and flow of a Cu ball. In the pull-out test of second bonds (stitch bonds), processed at two limit conditions on combinations of process parameters, the bond strength of bonds formed using the roughness-enhanced capillary also resulted in values higher by 55.5% than that of normal bonds because of the increase in the bonding area, indicating the expansion of a processing window for Cu wire bonding. These results suggest that the adoption of roughness-enhanced capillaries is a promising approach for enhancing processability and bondability in Cu wire bonding.