• Title/Summary/Keyword: bonding properties

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Fabrication of a micromachined ceramic thin-film type pressure sensor for high overpressure tolerance and Its characteristics (과부하 방지용 마이크로머시닝 세라믹 박막형 압력센서의 제작과 그 특성)

  • Kim, Jae-Min;Chung, Gwiy-Sang
    • Journal of Sensor Science and Technology
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    • v.12 no.5
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    • pp.199-204
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    • 2003
  • This paper describes on the fabrication and characteristics of a ceramic thin-film pressure sensor based on Ta-N strain-gauges for harsh environment applications. The Ta-N thin-film strain-gauges are sputter-deposited onto a micromachined Si diaphragms with buried cavity for overpressure protectors. The proposed device takes advantages of the good mechanical properties of single-crystalline Si as diaphragms fabricated by SDB and electrochemical etch-stop technology, and in order to extend the operating temperature range, it incorporates relatively the high resistance, stability and gauge factor of Ta-N thin-films. The fabricated pressure sensor presents a low temperature coefficient of resistance, high-sensitivity, low non-linearity and excellent temperature stability. The sensitivity is $1.097-1.21\;mV/V{\codt}kgf/cm^2$ in the temperature range of $25-200^{\circ}C$ and the maximum non-linearity is 0.43%FS.

Characteristics of PECVD-W thin films deposited on $Si_3N_4$ ($Si_3N_4$상에 PECVD법으로 형성한 텅스텐 박막의 특성)

  • 이찬용;배성찬;최시영
    • Journal of the Korean Vacuum Society
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    • v.7 no.2
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    • pp.141-149
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    • 1998
  • The W thin films were deposited on Si3N4 by a PECVD technique. The effects of substrate temperature and gas flow ratio on the properties of the W films were investigated. The deposition of W films were limited by surface reaction at the temperature range of 150>~$250^{\circ}C$, W films had the deposition rate of 150~530 $\AA$/min and stress of 0.85~$14.35\times10 ^9 \textrm {dynes/cm}^2}$ at various substrate temperatures and $SiH_4/WF_6$ flow ratios. $SiH_4/WF_6$ flow ratio affected the deposition rate and stress of the W films, expecially, excessive flow of SiH4 abruptly changed the structure, chemical bonding, and stress of the W films. Among the deposited W films on TiN, Ti, Mo, NiCr and Al adhesion layer, the one on the Al had the best adhesion property.

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keV and MeV Ion Beam Modification of Polyimide Films

  • Lee, Yeonhee;Seunghee Han;Song, Jong-Han;Hyuneui Lim;Moojin Suh
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.170-170
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    • 2000
  • Synthetic polymers such as polyimide, polycarbonate, and poly(methyl methacrylate) are long chain molecules which consist of carbon, hydrogen, and heteroatom linked together chemically. Recently, polymer surface can be modified by using a high energy ion beam process. High energy ions are introduced into polymer structure with high velocity and provide a high degree of chemical bonding between molecular chains. In high energy beam process the modified polymers have the highly crosslinked three-dimensionally connected rigid network structure and they showed significant improvements in electrical conductivity, in hardness and in resistance to wear and chemicals. Polyimide films (Kapton, types HN) with thickness of 50~100${\mu}{\textrm}{m}$ were used for investigations. They were treated with two different surface modification techniques: Plasma Source Ion Implantation (PSII) and conventional Ion Implantation. Polyimide films were implanted with different ion species such as Ar+, N+, C+, He+, and O+ with dose from 1 x 1015 to 1 x 1017 ions/cm2. Ion energy was varied from 10keV to 60keV for PSII experiment. Polyimide samples were also implanted with 1 MeV hydrogen, oxygen, nitrogen ions with a dose of 1x1015ions/cm2. This work provides the possibility for inducing conductivity in polyimide films by ion beam bombardment in the keloelectronvolt to megaelectronvolt energy range. The electrical properties of implanted polyimide were determined by four-point probe measurement. Depending on ion energy, doses, and ion type, the surface resistivity of the film is reduced by several orders of magnitude. Ion bombarded layers were characterized by Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS), XPS, and SEM.

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A Study on the Resistance Welding of Metallic Sandwich Panel : Part 1 - Determination of Process Parameters (저항 용접을 이용한 금속 샌드위치 판재 접합에 관한 연구 : Part 1 - 공정변수의 선정)

  • Lee Sang-Min;Kim Jin-Beom;Na Suck-Joo
    • Journal of Welding and Joining
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    • v.23 no.6
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    • pp.49-54
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    • 2005
  • Inner Structured and Bonded(ISB) panel, a kind of metallic sandwich panel, consists of two thin skin plates bonded to a micro-patterned inner structure. Its overall thickness is $1\~3mm$and it has attractive properties such as ultra-lightweight, high efficiency in stiffness-to-weight and strength-to-weight ratio. In many previous studies, resistance welding, brazing and adhesive bonding are studied for joining the panel. However these methods did not consider productivity, but focused on structural characteristics of joined panels, so that the joining process is very complicated and expensive. In this paper, a new joining process with resistance welding is developed. Curved surface electrodes are used to consider the productivity and the stopper is used between electrodes during welding time to maintain the shape of inner structure. Welding time, gap of electrodes and distance between welding points are selected as the process parameters. By measuring the tensile load with respect to the variation of welding time and gap of electrodes, proper welding conditions are studied. Welding time is proper between 1.5-2.5cycle. If welding time is too long, then inner structures are damaged by overheating. Gap of electrode should be shorter than threshold value fur joint strength, when total thickness of inner structure and skin plate is 3.3mm, the threshold distance is 3.0mm.

Effect of Multiple Reflows on the Mechanical Reliability of Solder Joint in LED Package (LED 패키지 솔더 접합부의 기계적 신뢰성에 미치는 리플로우 횟수의 영향)

  • Lee, Young-Chul;Kim, Kwang-Seok;Ahn, Ji-Hyuk;Yoon, Jeong-Won;Ko, Min-Kwan;Jung, Seung-Boo
    • Korean Journal of Metals and Materials
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    • v.48 no.11
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    • pp.1035-1040
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    • 2010
  • The research efforts on GaN-based light-emitting diodes (LEDs) keep increasing due to their significant impact on the illumination industry. Surface mount technology (SMT) is widely used to mount the LED packages for practical application. In surface mount soldering both the device body and leads are intentionally heated by a reflow process. We studied on the effects of multiple reflows on microstructural variation and joint strength of the solder joints between the LED package and the substrate. In this study, Pb-free Sn-3.0Ag-0.5Cu solder and a finished pad with organic solderability preservatives (OSP) were employed. A $Cu_6Sn_5$ intermetallic compound (IMC) layer was formed during the multiple reflows, and the thickness of the IMC layerincreased with an increasing number of reflows. The shear force decreased after three reflows. From the observation of the fracture surface after a shear test, partially brittle fractures were observed after five reflows.

Geotechnical engineering behavior of biopolymer-treated soft marine soil

  • Kwon, Yeong-Man;Chang, Ilhan;Lee, Minhyeong;Cho, Gye-Chun
    • Geomechanics and Engineering
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    • v.17 no.5
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    • pp.453-464
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    • 2019
  • Soft marine soil has high fine-grained soil content and in-situ water content. Thus, it has low shear strength and bearing capacity and is susceptible to a large settlement, which leads to difficulties with coastal infrastructure construction. Therefore, strength improvement and settlement control are essential considerations for construction on soft marine soil deposits. Biopolymers show their potential for improving soil stability, which can reduce the environmental drawbacks of conventional soil treatment. This study used two biopolymers, an anionic xanthan gum biopolymer and a cationic ${\varepsilon}-polylysine$ biopolymer, as representatives to enhance the geotechnical engineering properties of soft marine soil. Effects of the biopolymers on marine soil were analyzed through a series of experiments considering the Atterberg limits, shear strength at a constant water content, compressive strength in a dry condition, laboratory consolidation, and sedimentation. Xanthan gum treatment affects the Atterberg limits, shear strength, and compressive strength by interparticle bonding and the formation of a viscous hydrogel. However, xanthan gum delays the consolidation procedure and increases the compressibility of soils. While ${\varepsilon}-polylysine$ treatment does not affect compressive strength, it shows potential for coagulating soil particles in a suspension state. ${\varepsilon}-Polylysine$ forms bridges between soil particles, showing an increase in settling velocity and final sediment density. The results of this study show various potential applications of biopolymers. Xanthan gum biopolymer was identified as a soil strengthening material, while ${\varepsilon}-polylysine$ biopolymer can be applied as a soil-coagulating material.

Interfacial Properties of Friction-Welded TiAl and SCM440 Alloys with Cu as Insert Metal (삽입금속 Cu를 이용한 TiAl 합금과 SCM440의 마찰용접 계면 특성)

  • Park, Sung-Hyun;Kim, Ki-Young;Park, Jong-Moon;Choi, In-Chul;Ito, Kazuhiro;Oh, Myung-Hoon
    • Korean Journal of Materials Research
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    • v.29 no.4
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    • pp.258-263
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    • 2019
  • Since the directly bonded interface between TiAl alloy and SCM440 includes lots of cracks and generated intermetallic compounds(IMCs) such as TiC, FeTi, and $Fe_2Ti$, the interfacial strength can be significantly reduced. Therefore, in this study, Cu is selected as an insert metal to improve the lower tensile strength of the joint between TiAl alloy and SCM440 during friction welding. As a result, newly formed IMCs, such as $Cu_2TiAl$, CuTiAl, and $TiCu_2$, are found at the interface between TiAl alloy and Cu layer and the thickness of IMCs layers is found to vary with friction time. In addition, to determine the relationship between the thickness of the IMCs and the strength of the welded interfaces, a tensile test was performed using sub-size specimens obtained from the center to the peripheral region of the friction-welded interface. The results are discussed in terms of changes in the IMCs and the underlying deformation mechanism. Finally, it is found that the friction welding process needs to be idealized because IMCs generated between TiAl alloy and Cu act to not only increase the bonding strength but also form an easy path of fracture propagation.

Fabrication and Characteristics of Electroplated Sn-0.7Cu Micro-bumps for Flip-Chip Packaging (플립칩 패키징용 Sn-0.7Cu 전해도금 초미세 솔더 범프의 제조와 특성)

  • Roh, Myong-Hoon;Lee, Hea-Yeol;Kim, Wonjoong;Jung, Jae Pil
    • Korean Journal of Metals and Materials
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    • v.49 no.5
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    • pp.411-418
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    • 2011
  • The current study investigates the electroplating characteristics of Sn-Cu eutectic micro-bumps electroplated on a Si chip for flip chip application. Under bump metallization (UBM) layers consisting of Cr, Cu, Ni and Au sequentially from bottom to top with the aim of achieving Sn-Cu bumps $10\times10\times6$ ${\mu}m$ in size, with 20${\mu}m$ pitch. In order to determine optimal plating parameters, the polarization curve, current density and plating time were analyzed. Experimental results showed the equilibrium potential from the Sn-Cu polarization curve is -0.465 V, which is attained when Sn-Cu electro-deposition occurred. The thickness of the electroplated bumps increased with rising current density and plating time up to 20 mA/$cm^2$ and 30 min respectively. The near eutectic composition of the Sn-0.72wt%Cu bump was obtained by plating at 10 mA/$cm^2$ for 20 min, and the bump size at these conditions was $10\times10\times6$ ${\mu}m$. The shear strength of the eutectic Sn-Cu bump was 9.0 gf when the shearing tip height was 50% of the bump height.

An Experimental Study to Secure Electromagnetic Pulse Shielding Performance of Concrete Coated by an Arc Metal Spraying Process (아크 금속 용사 공법에 의해 코팅된 콘크리트의 전자기파 차폐 성능 확보를 위한 실험적 연구)

  • Jang, Jong-Min;Jeong, Hwa-Rang;Lee, Han-Seung
    • Journal of the Korea Institute of Building Construction
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    • v.21 no.6
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    • pp.519-527
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    • 2021
  • In this study, an electromagnetic pulse shielding effect was obtained by applying the arc metal spraying method to the ordinary concrete. For this study, to evaluate the electrical properties in the thickness of the metal sprayed coating, 8 types of metals(Cu, CuAl, CuNi, CuZn, Al, Zn, ZnAl, AlMg) were sprayed as coatings with a thickness of 100, 200 and 500㎛. The electrical conductivity on the surface was measured with a 4-pin probe, and an electromagnetic wave shielding effect test was performed according to KS. Based on the test results, 200 ㎛ was proposed as an optimal metal coating thickness for electromagnetic pulse shielding, and it was thermally sprayed on a 300×300×100mm concrete specimen to analyze the electromagnetic wave shielding performance. However, in the area of adhesion strength, the maximum was 1.11MPa, which was found to be less than 74% of the target performance.

A Study on Selective Transfer and Reflow Process of Micro-LED using Micro Stamp (마이크로 스탬프를 이용한 Micro-LED 개별 전사 및리플로우 공정에 관한 연구)

  • Han, Seung;Yoon, Min-Ah;Kim, Chan;Kim, Jae-Hyun;Kim, Kwang-Seop
    • Tribology and Lubricants
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    • v.38 no.3
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    • pp.93-100
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    • 2022
  • Micro-light emitting diode (micro-LED) displays offer numerous advantages such as high brightness, fast response, and low power consumption. Hence, they are spotlighted as the next-generation display. However, defective LEDs may be created due to non-uniform contact loads or LED alignment errors. Therefore, a repair process involving the replacement of defective LEDs with favorable ones is necessitated. The general repair process involves the removal of defective micro-LEDs, interconnection material transfer, as well as new micro-LED transfer and bonding. However, micro-LEDs are difficult to repair since their size decreases to a few tens of micron in width and less than 10 ㎛ in thickness. The conventional nozzle-type dispenser for fluxes and the conventional vacuum chuck for LEDs are not applicable to the micro-LED repair process. In this study, transfer conditions are determined using a micro stamp for repairing micro-LEDs. Results show that the aging time should be set to within 60 min, based on measuring the aging time of the flux. Additionally, the micro-LEDs are subjected to a compression test, and the result shows that they should be transferred under 18.4 MPa. Finally, the I-V curves of micro-LEDs processed by the laser and hot plate reflows are measured to compare the electrical properties of the micro-LEDs based on the reflow methods. It was confirmed that the micro-LEDs processed by the laser reflow show similar electrical performance with that processed by the hot plate reflow. The results can provide guidance for the repair of micro-LEDs using micro stamps.