• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.02a
• /
• pp.239-240
• /
• 2012

With advancements in semiconductor device technologies, manufacturing processes are getting more complex and it became more difficult to maintain tighter process control. As the number of processing step increased for fabricating complex chip structure, potential fault inducing factors are prevail and their allowable margins are continuously reduced. Therefore, one of the key to success in semiconductor manufacturing is highly accurate and fast fault detection and classification at each stage to reduce any undesired variation and identify the cause of the fault. Sensors in the equipment are used to monitor the state of the process. The idea is that whenever there is a fault in the process, it appears as some variation in the output from any of the sensors monitoring the process. These sensors may refer to information about pressure, RF power or gas flow and etc. in the equipment. By relating the data from these sensors to the process condition, any abnormality in the process can be identified, but it still holds some degree of certainty. Our hypothesis in this research is to capture the features of equipment condition data from healthy process library. We can use the health data as a reference for upcoming processes and this is made possible by mathematically modeling of the acquired data. In this work we demonstrate the use of recurrent neural network (RNN) has been used. RNN is a dynamic neural network that makes the output as a function of previous inputs. In our case we have etch equipment tool set data, consisting of 22 parameters and 9 runs. This data was first synchronized using the Dynamic Time Warping (DTW) algorithm. The synchronized data from the sensors in the form of time series is then provided to RNN which trains and restructures itself according to the input and then predicts a value, one step ahead in time, which depends on the past values of data. Eight runs of process data were used to train the network, while in order to check the performance of the network, one run was used as a test input. Next, a mean squared error based probability generating function was used to assign probability of fault in each parameter by comparing the predicted and actual values of the data. In the future we will make use of the Bayesian Networks to classify the detected faults. Bayesian Networks use directed acyclic graphs that relate different parameters through their conditional dependencies in order to find inference among them. The relationships between parameters from the data will be used to generate the structure of Bayesian Network and then posterior probability of different faults will be calculated using inference algorithms.

• Korean Journal of Remote Sensing
• /
• v.15 no.2
• /
• pp.147-158
• /
• 1999

Remote sensing technique has offered better understanding of our environment for the decades by providing useful level of information on the landcover. In many applications using the remotely sensed data, digital image processing methodology has been usefully employed to characterize the features in the data and develop the models. Random field models, especially Markov Random Field (MRF) models exploiting spatial relationships, are successfully utilized in many problems such as texture modeling, region labeling and so on. Usually, remotely sensed imagery are very large in nature and the data increase greatly in the problem requiring temporal data over time period. The time required to process increasing larger images is not linear. In this study, the methodology to reduce the computational cost is investigated in the utilization of the Markov Random Field. For this, multiresolution framework is explored which provides convenient and efficient structures for the transition between the local and global features. The computational requirements for parameter estimation of the MRF model also become excessive as image size increases. A Bayesian approach is investigated as an alternative estimation method to reduce the computational burden in estimation of the parameters of large images.

• Journal of the Korean Institute of Intelligent Systems
• /
• v.19 no.4
• /
• pp.562-567
• /
• 2009

As a key mechanism of the human emotion interaction, Facial Expression is a powerful tools in HRI(Human Robot Interface) such as Human Computer Interface. By using a facial expression, we can bring out various reaction correspond to emotional state of user in HCI(Human Computer Interaction). Also it can infer that suitable services to supply user from service agents such as intelligent robot. In this article, We addresses the issue of expressive face modeling using an advanced active appearance model for facial emotion recognition. We consider the six universal emotional categories that are defined by Ekman. In human face, emotions are most widely represented with eyes and mouth expression. If we want to recognize the human's emotion from this facial image, we need to extract feature points such as Action Unit(AU) of Ekman. Active Appearance Model (AAM) is one of the commonly used methods for facial feature extraction and it can be applied to construct AU. Regarding the traditional AAM depends on the setting of the initial parameters of the model and this paper introduces a facial emotion recognizing method based on which is combined Advanced AAM with Bayesian Network. Firstly, we obtain the reconstructive parameters of the new gray-scale image by sample-based learning and use them to reconstruct the shape and texture of the new image and calculate the initial parameters of the AAM by the reconstructed facial model. Then reduce the distance error between the model and the target contour by adjusting the parameters of the model. Finally get the model which is matched with the facial feature outline after several iterations and use them to recognize the facial emotion by using Bayesian Network.

• Proceedings of the Korean Operations and Management Science Society Conference
• /
• 1993.10a
• /
• pp.24-30
• /
• 1993

When modeling a complex system we use an event tree to analyze propagation of failure. An event tree cannot represent the statistical interrelationships among parameters, but it can be represented as a statistically identical influence diagram so that parameter updating can be easily performed. After updating parameters we can calculate posterior distribution of the failure rate for each path. But exact distribution requires considerably complex numerical integration. We propose an approximation method to calculate the posterior and derive the predictive distribution of the time to next failure. Finally we introduce the system which implements our methodology.

• Communications for Statistical Applications and Methods
• /
• v.4 no.1
• /
• pp.193-205
• /
• 1997

The multiprocess dynamic model provides a good framework for the modeling and analysis of the time series that contains outliers and is subject to abrupt changes in pattern. In this paper we consider the multiprocess discount generalized model with parameters having a dependent non-linear structure. This model has nice properties such as insensitivity to outliers and quick reaction to abrupt change of pattern in parameters.

• Journal of Korean Society of Industrial and Systems Engineering
• /
• v.23 no.60
• /
• pp.23-36
• /
• 2000

A probabilistic model of burr formation in face milling of gray cast iron is proposed. During a face milling operation, an irregular pattern of the edge profile consisting of burrs and edge breakouts is observed at the end of cut. Based on the metal cutting theory, we derive a probabilistic model. The operational bayesian modeling approach is adopted to include the relevant theory in the model.

• Journal of Korea Multimedia Society
• /
• v.10 no.6
• /
• pp.799-806
• /
• 2007

The prototypical smart environment to support the context-aware interactions between user and ubiquitous campus environment based on multi-agent system paradigm is proposed in this paper. In this model, the dynamic Bayesian is investigated to solicit and organize agents to produce information and presentation assembly process in order to allocate the resources for an unseen task across multiple services in a dynamic environment. The user model is used to manage varying user constraints and user preferences to achieve system's goals.

• International Journal of Advanced Culture Technology
• /
• v.1 no.2
• /
• pp.13-17
• /
• 2013

Today, most of the companies have numerous issues to take advantage of the data within the organization. Modeling techniques could be described using profile and historical log data as a tool of data mining techniques. It is covered increasingly with data entry, research, processing, modeling and reporting components of the icon in the form of easy-to-use in many datamining tools. Visual data mining process can create a data stream. In this paper, customer behavior is predicted in pages or products, using the history profile analysis and the navigation items are necessary to predict unknown features.

• Journal of the Korean Data and Information Science Society
• /
• v.27 no.5
• /
• pp.1423-1431
• /
• 2016

When the sample size in a certain domain is too small to produce adequate information, small area model with random effects is usually used. Also, if we do not consider an inherent pattern which data possess, it considerably affects inference. In this paper, we mainly focus on modeling to handle increased variation of the Current Population Survey (CPS) median income as the Internal Revenue Service (IRS) mean income increases. In a hierarchical Bayesian framework, most estimations are carried out through the Gibbs sampler while the grid method is used to generate parameters from non-standard form. Numerical study indicates that the performance of proposed model is better than that of CPS method in terms of four comparison measurements.

• Nuclear Engineering and Technology
• /
• v.49 no.6
• /
• pp.1219-1225
• /
• 2017

In this work, a scalable algorithm for model calibration in nuclear engineering applications is presented and tested. The algorithm relies on the construction of surrogate models to replace the original model within the region of interest. These surrogate models can be constructed efficiently via reduced order modeling and subspace analysis. Once constructed, these surrogate models can be used to perform computationally expensive mathematical analyses. This work proposes a surrogate based model calibration algorithm. The proposed algorithm is used to calibrate various neutronics and thermal-hydraulics parameters. The virtual environment for reactor applications-core simulator (VERA-CS) is used to simulate a three-dimensional core depletion problem. The proposed algorithm is then used to construct a reduced order model (a surrogate) which is then used in a Bayesian approach to calibrate the neutronics and thermal-hydraulics parameters. The algorithm is tested and the benefits of data assimilation and calibration are highlighted in an uncertainty quantification study and requantification after the calibration process. Results showed that the proposed algorithm could help to reduce the uncertainty in key reactor attributes based on experimental and operational data.