• Title/Summary/Keyword: arc detection

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Optical In-Situ Plasma Process Monitoring Technique for Detection of Abnormal Plasma Discharge

  • Hong, Sang Jeen;Ahn, Jong Hwan;Park, Won Taek;May, Gary S.
    • Transactions on Electrical and Electronic Materials
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    • v.14 no.2
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    • pp.71-77
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    • 2013
  • Advanced semiconductor manufacturing technology requires methods to maximize tool efficiency and improve product quality by reducing process variability. Real-time plasma process monitoring and diagnosis have become crucial for fault detection and classification (FDC) and advanced process control (APC). Additional sensors may increase the accuracy of detection of process anomalies, and optical monitoring methods are non-invasive. In this paper, we propose the use of a chromatic data acquisition system for real-time in-situ plasma process monitoring called the Plasma Eyes Chromatic System (PECS). The proposed system was initially tested in a six-inch research tool, and it was then further evaluated for its potential to detect process anomalies in an eight-inch production tool for etching blanket oxide films. Chromatic representation of the PECS output shows a clear correlation with small changes in process parameters, such as RF power, pressure, and gas flow. We also present how the PECS may be adapted as an in-situ plasma arc detector. The proposed system can provide useful indications of a faulty process in a timely and non-invasive manner for successful run-to-run (R2R) control and FDC.

Optimal Allocation Model of Anti-Artillery Radar by Using ArcGIS and its Specifications (지형공간정보와 제원 특성을 적용한 대포병레이더 최적배치모형)

  • Lee, Moon Gul
    • Journal of Korean Society of Industrial and Systems Engineering
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    • v.41 no.2
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    • pp.74-83
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    • 2018
  • It is very crucial activities that Korean army have to detect and recognize enemy's locations and types of weapon of their artillery firstly for effective operation of friendly force's artillery weapons during wartime. For these activities, one of the most critical artillery weapon systems is the anti-artillery radar (hereafter; radars) for immediate counter-fire operations against the target. So, in early wartime these radar's roles are very important for minimizing friendly force's damage because arbiters have to recognize a several enemy's artillery positions quickly and then to take an action right away. Up to date, Republic of Korea Army for tactical artillery operations only depends on individual commander's intuition and capability. Therefore, we propose these radars allocation model based on integer programming that combines ArcGIS (Geographic Information System) analysis data and each radar's performances which include allowable specific ranges of altitude, azimuth (FOV; field of view) and distances for target detection, and weapons types i.e., rocket, mortars and cannon ammo etc. And we demonstrate the effectiveness of their allocation's solution of available various types of radar asset through several experimental scenarios. The proposed model can be ensured the optimal detection coverage, the enhancement of artillery radar's operations and assisting a quick decision for commander finally.

The Electrical Characteristics of Arc for Precise Arc Detection (정밀한 아크검출을 위한 아크의 전기적 특성 분석)

  • SEO, Hyunuk;Bang, S.B;Cho, Y.H;Choe, G.H
    • Proceedings of the KIPE Conference
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    • 2013.11a
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    • pp.231-232
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    • 2013
  • 본 논문에서는 아크검출 알고리즘을 제안한다. 아크를 검출하기 위하여 아크의 전기적 특성 중 하나인 고조파에 대하여 분석하고 아크로 인한 홀수고조파의 변화를 분석하여 아크를 검출할 수 있는 아크 검출 알고리즘을 설계한다. 이를 증명하기 위하여 UL1699에서 제안하는 직렬아크 발생장치를 통하여 아크를 발생시키고 측정한 전류파형을 기반으로 알고리즘을 검증하였다.

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Performance Evaluation of the Harmonic Parameters for High Impedance Fault Detection in Distribution System (배전계통의 고 임피던스 고장 검출 고조파 변수 성능 평가)

  • Oh, Yong-Taek;Kim, C.J.
    • Proceedings of the KIEE Conference
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    • 1997.07c
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    • pp.883-885
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    • 1997
  • High impedance fault(HIF) is random in its behavior even in a similar environment. The detection of Ire HIF has focused on the development of algorithms based on harmonic, parameters of the arc currents. However, a fact that proper selection of the harmonic parameters, rather than algorithm selection, is more important is shown in this paper by applying three different performance evaluation methods on two HIF detection algorithms using eight harmonic parameters.

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Development of Single Phase Cabinet Panel with Electrical Safety Monitoring System by Mobile (모바일 이용 가능형 ESMS 기능의 단상 분전반 개발 연구)

  • Kim, Gi-Hyun;Lee, Sang-Ick;Shin, Seong-Su;Bae, Suk-Myong
    • Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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    • v.25 no.7
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    • pp.92-96
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    • 2011
  • In this paper, in order to reduce the electrical disaster such as electrical fire at traditional markets, we need to develop the ESMS(electrical safety monitoring system) which is able to monitor the power status of electrical equipments. Therefore, for solving the those problems, we developed the detection censor(ZCT, CT) and equipment of data analysis and transmission. The detection censor and equipment are able to monitor the electrical equipments condition(over current, leakage current, arc, etc.). We constructed Test-Bed for testing reliability of the ESMS and obtained certification. And we tested the over current, leakage current and arc under the normal condition.

A Study on Welding Performance Improvement of $CO_2$ Inverter Arc Welding Machine by Short Circuiting Delay Control and Arc Reignition Detection Control (단락지연제어 및 아크재생검출제어에 의한 $CO_2$ 인버터 아크 용접기의 용접성능향상에 관한 연구)

  • 고재석;김길남;채영민;이승요;이명언;최규하
    • The Transactions of the Korean Institute of Power Electronics
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    • v.7 no.3
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    • pp.272-280
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    • 2002
  • The recent research topics on $CO_2$ arc welding power supplies are focused mainly on the reduction of spatter generation. The method for reducing the spatters can be approached in several ways: finding the new materials fur consumable electrode and shielding gases, researching on the circuit topology and the controller. In this paper, the metal transfer and several control methods for the $CO_2$ GMAW were described. And it was proposed and compared with other schemes that the control method for reducing spatter by controlling the welding current when short-circuit and re-ignition.

A Study of a Dual-Electromagnetic Sensor for Automatic Weld Seam Tracking (용접선 자동추적을 위한 이중 전자기센서의 개발에 관한 연구)

  • 신준호;김재응
    • Journal of Welding and Joining
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    • v.18 no.4
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    • pp.70-75
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    • 2000
  • The weld seam tracking system for arc welding process uses various kinds of sensors such as arc sensor, vision sensor, laser displacement and so on. Among the variety of sensors available, electro-magnetic sensor is one of the most useful methods especially in sheet metal butt-joint arc welding, primarily because it is hardly affected by the intense arc light and fume generated during the welding process, and also by the surface condition of weldments. In this study, a dual-electromagnetic sensor, which utilizes the induced current variation in the sensing coil due to the eddy current variation of the metal near the sensor, was developed for arc welding of sheet metal butt-joints. The dual-electromagnetic sensor thus detects the offset displacement of weld line from the center of sensor head even though there's no clearance in the joint. A set of design variables of the sensor were determined for the maximum sensing capability through the repeated experiments. Seam tracking is performed by correcting the position of sensor to the amount of offset displacement every sampling period. From the experimental results, the developed sensor showed the excellent capability of weld seam detection when the sensor to workpiece distance is near less than 5 mm, and it was revealed that the system has excellent seam tracking ability for the butt-joint of sheet metal.

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A Study on a Dual Electromagnetic Sensor System for Weld Seam Tracking of I-Butt Joints

  • Kim, J.-W.;Shin, J.-H.
    • International Journal of Korean Welding Society
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    • v.2 no.2
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    • pp.51-56
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    • 2002
  • The weld seam tracking system for arc welding process uses various kinds of sensors such as arc sensor, vision sensor, laser displacement sensor and so on. Among the variety of sensors available, electro-magnetic sensor is one of the most useful methods especially in sheet metal butt-joint arc welding, primarily because it is hardly affected by the intense arc light and fume generated during the welding process, and also by the surface condition of weldments. In this study, a dual-electromagnetic sensor, which utilizes the induced current variation in the sensing coil due to the eddy current variation of the metal near the sensor, was developed for arc welding of sheet metal I-butt joints. The dual-electromagnetic sensor thus detects the offset displacement of weld line from the center of sensor head even though there's no clearance in the joint. A set of design variables of the sensor was determined far the maximum sensing capability through the repeated experiments. Seam tracking is performed by correcting the position of sensor to the amount of offset displacement every sampling period. From the experimental results, the developed sensor showed the excellent capability of weld seam detection when the sensor to workpiece distance is near less than 5 ㎜, and it was revealed that the system has excellent seam tracking ability for the I-butt joint of sheet metal.

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Mitigation of Potential-Induced Degradation (PID) for PERC Solar Cells Using SiO2 Structure of ARC Layer (반사방지막(ARC)의 SiO2 구조에 따른 PERC 태양전지 PID 열화 완화 상관관계 연구)

  • Oh, Kyoung Suk;Park, Ji Won;Chan, Sung Il
    • Current Photovoltaic Research
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    • v.8 no.4
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    • pp.114-119
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    • 2020
  • In this study, Mitigation of Potential-induced degradation (PID) for PERC solar cells using SiO2 Structure of ARC layer. The conventional PID test was conducted with a cell-level test based on the IEC-62804 test standard, but a copper PID test device was manufactured to increase the PID detection rate. The accelerated aging test was conducted by maintaining 96 hours with a potential difference of 1000 V at a temperature of 60℃. As a result, the PERC solar cell of SiO2-Free ARC structure decreased 22.11% compared to the initial efficiency, and the PERC solar cell of the Upper-SiO2 ARC structure decreased 30.78% of the initial efficiency and the PID reliability was not good. However, the PERC solar cell with the lower-SiO2 ARC structure reduced only 2.44%, effectively mitigating the degradation of PID. Na+ ions in the cover glass generate PID on the surface of the PERC solar cell. In order to prevent PID, the structure of SiNx and SiO2 thin films of the ARC layer is important. SiO2 thin film must be deposited on bottom of ARC layer and the surface of the PERC solar cell N-type emitter to prevent surface recombination and stacking fault defects of the PERC solar cell and mitigated PID degradation.

Development of Electrical Fire Detection System Applying Fuzzy Logic for Main Causes of Electrical Fire in Traditional Market Shops

  • Kim, Doo Hyun;Hwang, Dong Kyu;Kim, Sung Chul;Kim, Sang Ryull;Kim, Yoon Bok
    • International Journal of Safety
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    • v.11 no.2
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    • pp.15-21
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    • 2012
  • This paper is aimed to develop an electrical fire detection system (EFDS) which can analyze the possibility of electrical fire for overcurrent, leakage current and arc signals of panel board in traditional market shop. The EFDS adopted fuzzy logic and precursory data for overcurrent, leakage current and arc signals to evaluate the possibility of electrical fire. The signals are obtained directly from panel board in traditional market shops and fuzzy membership function is obtained from experiment, simulation, expert's advice. The overcurrent data is acquired by thermal data of normal and abnormal states (partial disconnection) on the insulated electrical wire, in accordance with the increase of the current signal, The leakage current data is obtained under various environments. The arc signal is acquisited by waveforms of instantaneous value in time domain and frequency band in frequency domain. The Fuzzy algorithm for DB of EFDS consists of fuzzification, inference engine by Mamdani's method and defuzzification by center of gravity method. In order to verify the performance and reliability of EFDS, it was applied to Jeon-Ju traditional market shops (90 shops) in Korea. Results show that EFDS in this paper is useful in alarming the fire case, which will prevent severe damage to human beings and properties, and reduce the electrical fires in a vulnerable area of electrical disaster.