• 제목/요약/키워드: annealing temperature

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MOCVD법과 MOD법으로 제작된 Ta2O5 박막의 열처리 온도에 따른 유전특성연구 (Dielectric Properties of Ta2O5 Films Annealed at Various Temperature by MOCVD and MOD)

  • 강필규;진정근;변동진;배재준;남산
    • 한국재료학회지
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    • 제13권12호
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    • pp.801-805
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    • 2003
  • To explore the annealing temperature dependence of dielectric properties $Ta_2$$O_{5}$ thin films were prepared by MOCVD(metal-organic chemical vapor deposition) and MOD(metal-organic decomposition). The $Ta_2$$O_{5}$thin films fabricated MOCVD and MOD were annealed in $O_2$at temperature between 600 and 90$0^{\circ}C$. The measured dielectric constant of both films at 100 KHz was the highest value at $650^{\circ}C$ and decreased with increasing annealing temperature above $650^{\circ}C$. Plane-view SEM image showed that the boundary seems to be crack broke out with increasing annealing temperature. It was confirmed that outbreak of boundary influenced a decrease of dielectric constant with increasing annealing temperature. The leakage current density increased with increasing annealing temperature.

열처리 조건에 따른 폴리(에틸렌 테레프탈레이트)의 열적 특성 및 결정화 거동 (Thermal Properties and Crystallization Behaviors of Poly(ethylene terephthalate) at Various Annealing Conditions)

  • 류민영;배유리
    • 폴리머
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    • 제27권2호
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    • pp.113-119
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    • 2003
  • 폴리(에틸렌 테레프탈레이트) (PET)의 열처리 조건들 즉, 상대 습도, 온도 그리고 시간 등에 따라 나타나는 PET의 열적 특성과 결정화 거동에 대해서 연구하였다. PET샘플에 열처리를 수행한 후 수분 함유량, 유리 전이온도($T_g$), 그리고 결정화 온도($T_{\propto}$) 등의 변화를 조사하였다. 그리고 열처리된 PET시편에 대해서 결정화를 시키고 결정화도에 따른 열변형 온도(HDT)를 측정하였다. 또한 사출 성형으로 제작된 PET샘플의 열처리 후 잔류 응력의 완화를 편광 필름을 통하여 조사하였다. 열처리 시의 상대 습도, 온도, 그리고 시간이 증가함에 따라 PET샘플 내의 수분 함유량은 최대 6000 ppm이상 까지 증가하였다. $T_g$$T_c$는 시편 내에 수분 함유량이 증가할수록 감소하였다. PET샘플의 결정화도는 수분의 함유량이 증가함에 따라 증가되었다. 그러나 같은 양의 수분 함량에서 결정화도는 열처리의 조건에 따라 다르게 나타났다. PET샘플 내의 잔류응력의 완화는 열처리 조건에 따라 다르게 나타났으며, PET샘플 내에 잔류 응력이 감소할수록 최대 결정화도는 증가하였다.

Characteristics of Hafnium Silicate Films Deposited on Si by Atomic Layer Deposition Process

  • Lee, Jung-Chan;Kim, Kwang-Sook;Jeong, Seok-Won;Roh, Yong-Han
    • Transactions on Electrical and Electronic Materials
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    • 제12권3호
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    • pp.127-130
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    • 2011
  • We investigated the effects of $O_2$ annealing (i.e., temperature and time) on the characteristics of hafnium silicate ($HfSi_xO_y$) films deposited on a Si substrate by atomic layer deposition process (ALD). We found that the post deposition annealing under oxidizing ambient causes the oxidation of residual Hf metal components, resulting in the improvement of electrical characteristics (e.g., hysteresis window and leakage current are decreased). In addition, we observed the annealing temperature is more important than the annealing time for post deposition annealing. Based on these observations, we suggest that post deposition annealing under oxidizing ambient is necessary to improve the electrical characteristics of $HfSi_xO_y$ films deposited by ALD. However, the annealing temperature has to be carefully controlled to minimize the regrowth of interfacial oxide, which degrades the value of equivalent oxide thickness.

The Influence of the Annealing of Corn Starch on the formation and Characteristics of Enzyme-resistant Starch

  • Yoon, Ji-Young;Lee, Young-Eun
    • Preventive Nutrition and Food Science
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    • 제4권4호
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    • pp.215-220
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    • 1999
  • The Physical properties of corn starch were investigated by scanning electron microscopy, X-ray diffractometry and differential scanning calorimetry during the formation of enzyme-resistant starch(RS). Samples were studied in their native states and after annealing at 50, 55, 60 and 65℃ in excess water(starch : water=1:3) for 48hr. Starch granules became smaller and more rounded after annealing than in their native state. Annealing did not change the X-ray profile of native corn starch. After autoclaving-cooling cycles, native starch lost most of its crystallinity but annealed ones showed some of their crystallinity left as diffuse or poor B-type, which didn't relate to increasing Rs yields. During formation of RS, however, both native and annealed starches changed their X-ray profile from A-type to poor B-type of retrograded amylose. Annealing caused an increase in gelatinization temperature and enthalpy, but a narrowing of gelatinization temperature range. Only starch annealed at 65℃, however, showed a decrease in enthalpy even though its gelatinization temperature increased, which appeared to be due to the partial gelatinization in the amorphous region during annealing. Peak height index(PHI), the ratio of ΔH to Ti-To, increased by annealing. PHI values, therefore, showed the possibility as an indicator to predict RS yield which cannot be differentiated by differential scanning calorimetry and X-ray diffraction data.

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Epoxy/Annealing $SiO_2$ Composites의 충진함량에 대한 저 유전특성 (Low Dielectric Properties of Epoxy/Annealing $SiO_2$ Composites for Filler Contents Variation)

  • 박재준;안준오;윤종현
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 추계학술대회 논문집
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    • pp.224-225
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    • 2007
  • The Low dielectric properties of epoxy/Annealing $SiO_2$ composites using Annealing new material of nanosized amorphous particles were investigated as function frequency, temperature and filler contents composition. The dielectric constant decrease with increasing frequency and also increase with increasing ambient temperature. The dielectric constant decrease with increase annealing filler contents for epoxy base. The result of x-ray diffraction could obtained single crystal of annealing $SiO_2$ from 500nm amorphous $SiO_2$ powder.

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Ni-Ti계 합금 선재의 변태온도 변화에 따른 인장변형 및 회복 특성 (Characteristics of Tensile Deformation and Shape Recovery with Transformation Temperature Change in a Ni-Ti Alloy Wire)

  • 최윤길;김미선;조우석;장우양
    • 열처리공학회지
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    • 제21권6호
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    • pp.307-313
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    • 2008
  • The tensile deformation and shape recovery behaviors were studied in Ni-Ti shape memory wires showing different transformation characteristics by annealing at $200{\sim}600^{\circ}C$. Both R phase ${\rightarrow}$ B19' martensitic transformation at lower temperature and B2 ${\rightarrow}$ R phase transformation at higher temperature occurred in the shape memory wires annealed at $200{\sim}500^{\circ}C$. Transformation temperature and heat flow of B19' martensite increase but those of R phase main almost constant even with increasing annealing temperature. In the case of wires annealed and then cooled to $20^{\circ}C$, plateau on stress-strain curves in tensile testing can be observed due to the collapse of R phase variants and the formation of deformation-induced B19' martensite. In the case of wires annealed and then cooled to $-196^{\circ}C$, however, plateau on stress-strain curves does not appear and stress increases steadily with increasing tensile deformation. Comparing shape recovery rate with cooling temperature after annealing, shape recovery rate of the wire cooled to $20^{\circ}C$ is higher than that of the wire cooled to $-196^{\circ}C$ after annealing, and maximum shape recovery rate of 95% appears in the wire annealed at $400^{\circ}C$ and then cooled to $20^{\circ}C$. $R_s$ and $R_f$ temperatures measured during shape recovery tests are higher than $A_s$ and $A_f$ temperatures measured by DSC tests even at the same annealing temperature.

A Study of the Properties of CuInS2 Thin Film by Sulfurization

  • Yang, Hyeon-Hun;Park, Gye-Choon
    • Transactions on Electrical and Electronic Materials
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    • 제11권2호
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    • pp.73-76
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    • 2010
  • The copper indium disulfide ($CuInS_2$) thin film was manufactured using sputtering and thermal evaporation methods, and the annealing with sulfurization process was used in the vacuum chamber to the substrate temperature on the glass substrate, the annealing temperature and the composition ratio, and the characteristics thereof were investigated. The $CuInS_2$ thin film was manufactured by the sulfurization of a soda lime glass (SLG) Cu/In/S stacked [1] elemental layer deposited on a glass substrate by vacuum chamber annealing [2] with sulfurization for various times at a temperature of substrate temperature of $200^{\circ}C$. The structure and electrical properties of the film was measured in order to determine the optimum conditions for the growth of $CuInS_2$ ternary compound semiconductor $CuInS_2$ thin films with a non-stoichiometric composition. The physical properties of the thin film were investigated under various fabrication conditions [3,4], including the substrate temperature, annealing temperature and annealing time by X-ray diffraction (XRD), field Emission scanning electron microscope (FE-SEM), and Hall measurement systems. [5] The sputtering rate depending upon the DC/RF power was controlled so that the composition ratio of Cu versus In might be around 1:1, and the substrate temperature affecting the quality of the film was varied in the range of room temperature (RT) to $300^{\circ}C$ at intervals of $100^{\circ}C$, and the annealing temperature of the thin film was varied RT to $550^{\circ}C$ in intervals of $100^{\circ}C$.

Annealing 처리가 가교결합 옥수수전분의 저항전분 수율에 미치는 영향 (The Effects of Annealing on Resistant Starch Contents of Cross-linked Maize Starches)

  • 문세훈;신말식
    • 한국식품과학회지
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    • 제34권3호
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    • pp.431-436
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    • 2002
  • 보통 옥수수 전분을 이용하여 저항전분을 제조할 때 저항 전분의 수율을 높일 수 있는 방법을 개발하기 위한 목적으로 가교결합 전분을 제조하고 annealing처리를 병행하였다. Annealing은 $40{\sim}60^{\circ}C$ 범위에서 실시하였고, 이와 비교하기 위하여 $70^{\circ}C$$100^{\circ}C$에서 열처리한 후 가교결합 전분을 제조하였다. RS 분석방법으로는 pancreain-gravimetric법(P/G법)을 사용하였다. 보통 옥수수전분과 고아밀로오스 옥수수전분으로 annealing하지 않고 가교결합 전분을 제조했을 때의 RS수율은 각각 14.7, 45.3%였고, annealing 한 후 가교결합 전분을 제조했을 때 28.0, 63.4%까지 증가하였다. 가교결합 전분의 팽윤력은 annealing 처리에 의해 영향받지 않았으나, 보통 옥수수전분으로 제조한 시료의 경우는 호화온도이상에서 열처리했을 때 팽윤력이 2배이상 증가하였다. 두가지 전분으로부터 제조된 가교결합 전분의 X-선 회절도와 주사전자현미경에 의한 특성 역시 annealing에 의해 영향받지 않았다.

Superconducting Transitions of $(Pb,V)Sr_2(Ca,Er)Cu_2O_z$ Quenched from High Temperatures

  • Lee, Ho-Keun
    • Progress in Superconductivity
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    • 제1권1호
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    • pp.9-13
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    • 1999
  • The influence of quenching temperature and annealing time on superconducting characteristics has been investigated for a $(Pb_{0.6}V_{0.4})Sr_2(Ca_{0.65}Er_{0.35})Cu_2O_z$ compound. From the resistivity measurements for samples annealed at $400^{\circ}C$ to $860^{\circ}C$ in oxygen and subsequently quenched, it is observed that $T_c$(zero) of the sample decreases with the increase of annealing temperature up to $600^{\circ}C$ and increases again beyond $700^{\circ}C$. Annealings of the sample at $860^{\circ}C$ show that $T_c$(zero) goes through a maximum of 62K with the increase of the annealing time. It is also found that $T_c$(zero) of the sample quenched from high temperature decreases when the sample is subjected to low temperature annealing below. $600^{\circ}C$ in oxygen. The experimental results indicate that the as-prepared samples contain excessive oxygen and removal of this excessive oxygen in as-prepared samples is a key factor in controlling the superconducting properties of the samples and are discussed in connection with thermal gravimetric measurements.

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Polyester사를 이용한 충전용 솜사의 물성 (The Physical Properties of Filling Batt Using Polyester Yarn)

  • 박명수
    • 한국의류산업학회지
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    • 제9권3호
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    • pp.347-350
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    • 2007
  • To analyse basic properties for making packing batt according to doubling condition, packing batt yarn, of $300^D$, $900^D$, $3600^D$ made from DTY yarn $150^D$/48 were produced from KTDI. The results are as follows: The birefringence of the sample yarn increased with increasing the annealing temperature and denier. The initial modulus of the sample yarn decreased with increasing the annealing temperature and denier. The higher than annealing temperature of $160^{\circ}C$, initial modulus of the sample are equilibrated. The strain recovery ratio of samples decreased with increasing the annealing temperature and denier. The lower than annealing temperature of $140^{\circ}C$, strain recovery ratio of the sample are decreased Where the $900^D$, $3600^D$ yarns are at $100^{\circ}C$ the specific bending rigidity value obtained is 0.65kgf/d but the twisted yarn (3,600) obtained 0.006 ($gfcm^2/tex^2$). However, where the heat temperature is $160^{\circ}C$, specific bending rigidity value obtained 0.003($gfcm^2/tex^2$).