• Title/Summary/Keyword: airflow

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A Study on the 3-D Airflow and Dynamic Cross Contamination in the Photolithography Process Cleanroom (광식각공정이 있는 클린룸에서의 3차원 기류 및 동적교차오염에 관한 연구)

  • Noh, Kwang-Chul;Oh, Myung-Do;Lee, Seung-Chul
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.28 no.5
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    • pp.560-568
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    • 2004
  • We performed the numerical study on the characteristics of the 3-D airflow and dynamic cross contamination in the photolithography process cleanroom. The nonunifurmity, the deflection angle and the global cross contamination were used for analyzing the characteristics and performances of cleanroom. From the numerical results, we knew that the airflow characteristics of the cleanrooms are largely affected by the porosity of panel and the adjustment of dampers and the global cross contamination varies with the location of source and the passage of time through the concentration ratio.

A Numerical Study on the Characteristics of Airflow and Cross Contamination in the Photolithography Process Cleanroom (광식각공정 클린룸에서의 기류 및 교차오염에 대한 수치적 연구)

  • Noh, Kwang-Chul;Lee, Seung-Chul;Oh, Myung-Do
    • Proceedings of the KSME Conference
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    • 2003.11a
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    • pp.151-156
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    • 2003
  • We performed the numerical study on the characteristics of the airflow and cross contamination in the photolithography process cleanroom. The nonuniformity, the deflection angle and the global cross contamination were used for analyzing the characteristics and performances of cleanroom. We knew that the airflow characteristics of the cleanrooms are largely affected by the porosity of panel and the adjustment of dampers. And the numerical result showed that the global cross contamination varies with the location of source and the passage of time.

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Measurement of Particle Deposition Velocity Toward a Vertical Wafer Surface (수직 웨이퍼상의 입자 침착속도의 측정)

  • Bae, G.N.;Lee, C.S.;Park, S.O.;Ahn, K.H.
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.7 no.3
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    • pp.521-527
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    • 1995
  • The average particle deposition velocity toward a vertical wafer surface in a vertical airflow chamber was measured by a wafer surface scanner(PMS Model SAS-3600). Polystyrene latex(PSL) spheres with diameters between 0.3 and $0.8{\mu}m$ were used. To examine the effect of the airflow velocity on the deposition velocity, experiments were conducted for three vertical airflow velocities ; 20, 30, 50cm/s. Experimental data of particle deposition velocity were compared with those given by prediction model suggested by Liu and Ahn(1987).

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Effects of Flow Settling Means on the Performance of Fan Tester (유동안정화 장치가 홴 테스터의 성능에 미치는 영향)

  • Choi Young-Seok;Kim Deok-Su;Yoon Joon-Yong
    • The KSFM Journal of Fluid Machinery
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    • v.9 no.4 s.37
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    • pp.43-48
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    • 2006
  • In this study, the effect of flow settling means on the performance of fan tester were numerically investigated by using a computational fluid dynamics(CFD). The airflow rate was calculated from the pressure differential across a flow nozzle in the measuring plane and the flow settling means were generally installed in the chamber of the fan tester to provide proper airflow patterns ahead of the measuring plane. The predicted nozzle differential pressures with uniform inlet velocities were compared with the values of the ANSI/AMCA 210-99 to verify the performance of the commercial CFD code CFX 5.6. The influence of flow settling means on the measurement of airflow rate in a fan tester were discussed with various porosities and inlet jet velocities. The results obtained show that the proper band of porosities exist to meet the AMCA standard in a specified inlet jet velocity.

Numerical Analysis on Features of Airflow through Open Door in Pressure Differential System (급기가압 제연시스템의 방연풍속 형성특성에 대한 수치해석적 분석)

  • Kim, Jung-Yup;Rie, Dong-Ho;Kim, Ha-Young
    • Proceedings of the SAREK Conference
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    • 2008.11a
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    • pp.463-468
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    • 2008
  • The fact that the major cases of life casualties are from smoke in the fire accidents and the expected steep increase of skyscrapers, huge spaces, multiplexes and huge scaled underground spaces demand establishment of efficient smoke countermeasure. In pressure differential systems for smoke management, the speed of airflow through open door between accommodation and lobby should be maintained over 0.5m/s on the whole area of door to prevent smoke from infiltrate into evacuation root when the door is open for refuge. The numerical analysis on features of airflow through open door are carried out and the results are presented.

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A Numerical Analysis on the Airflow Characteristics in Super Cleanrooms with Different Design Types (초청정 클린룸 공조방식에 따른 기류특성에 관한 수치해석)

  • 노광철;이승철;오명도
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.15 no.9
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    • pp.751-761
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    • 2003
  • We performed the numerical analysis on the airflow characteristics in the two type of cleanroom systems, which are the axial fan type (AFT) and the fan filter unit (FFU). A computational fluid dynamic model was applied to investigate and compare the nonuniformity, the deflection angle and the air ventilation effectiveness of the two designs of cleanrooms when dampers are adjusted and not adjusted. And the flow-resistance models of the various components were used in this simulation. We know that the airflow characteristics of the cleanrooms are largely affected by damper adjusting And we also find out that the FFU system is superior to the AFT system through the comparison of the cleanroom performance indices.

Flutter behavior of graded graphene platelet reinforced cylindrical shells with porosities under supersonic airflow

  • Mohammad Mashhour;Mohammad Reza Barati;Hossein Shahverdi
    • Steel and Composite Structures
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    • v.46 no.5
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    • pp.611-619
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    • 2023
  • In the present work, the flutter characteristics of porous nanocomposite cylindrical shells, reinforced with graphene platelets (GPLs) in supersonic airflow, have been investigated. Different distributions for GPLs and porosities have been considered which are named uniform and non-uniform distributions thorough the shell's thickness. The effective material properties have been determined via Halpin-Tsai micromechanical model. The cylindrical shell formulation considering supersonic airflow has been developed in the context of first-order shell and first-order piston theories. The governing equations have been solved using Galerkin's method to find the frequency-pressure plots. It will be seen that the flutter points of the shell are dependent on the both amount and distribution of porosities and GPLs and also shell geometrical parameters.

Flow Characteristics of Upper Airway After Neck Dissection and Reconstructive Surgery in Tongue Cancer Patients (설암 환자에서 경부청소술 및 재건술에 따른 수술 전 후 기도 내 공기 유동 특성)

  • Jae Min Song;Heerim Seo;Eunseop Yeom
    • Journal of the Korean Society of Visualization
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    • v.22 no.2
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    • pp.90-95
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    • 2024
  • This study examined changes in airway airflow characteristics before and after extensive surgery for tongue cancer, which includes neck dissection and reconstruction. Pre- and post-operative CBCT scans were used to model 3D upper airways. Computational fluid dynamics (CFD) simulations analyzed airflow and pressure variations. Results showed a significant reduction in airway volume post-surgery, especially in the posterior tongue and epiglottis areas, leading to increased airflow velocity and complex vortex formations. Pressure drop analysis revealed that post-surgery, higher negative pressure is required for inhalation, indicating increased breathing effort. This suggests that the surgical removal of cancerous tissues and lymph nodes, along with reconstruction, alters airway geometry significantly, potentially impacting respiratory function. The findings highlight the clinical importance of assessing airway changes in tongue cancer surgery to anticipate and mitigate postoperative respiratory complications.

Simulation of Drying Grain with Solar-Heated Air (태양에너지를 이용한 곡물건조시스템의 시뮬레이션에 관한 연구)

  • 금동혁;김용운
    • Journal of Biosystems Engineering
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    • v.4 no.2
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    • pp.65-83
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    • 1979
  • Low-temperature drying systems have been extensively used for drying cereal grain such as shelled corn and wheat. Since the 1973 energy crisis, many researches have been conducted to apply solar energy as supplemental heat to natural air drying systems. However, little research on rough rice drying has been done in this area, especially very little in Korea. In designing a solar drying system, quality loss, airflow requirements, temperature rise of drying air, fan power and energy requirements should be throughly studied. The factors affecting solar drying systems are airflow rate, initial moisture content, the amount of heat added to drying air, fan operation method and the weather conditions. The major objectives of this study were to analyze the effects of the performance factors and determine design parameters such as airflow requirements, optimum bed depth, optimum temperature rise of drying air, fan operation method and collector size. Three hourly observations based on the 4-year weather data in Chuncheon area were used to simulate rough rice drying. The results can be summarized as follows: 1. The results of the statistical analysis indicated that the experimental and predicted values of the temperature rise of the air passing through the collector agreed well. 2. Equilibrium moisture content was affected a little by airflow rate, but affected mainly by the amount of heat added, to drying air. Equilibrium moisture content ranged from 12.2 to 13.2 percent wet basis for the continuous fan operation, from 10.4 to 11.7 percent wet basis for the intermittent fan operation respectively, in range of 1. 6 to 5. 9 degrees Centigrade average temperature rise of drying air. 3. Average moisture content when top layer was dried to 15 percent wet basis ranged from 13.1 to 13.9 percent wet basis for the continuous fan operation, from 11.9 to 13.4 percent wet basis for the intermittent fan operation respectively, in the range of 1.6 to 5.9 degrees Centigrade average temperature rise of drying air and 18 to 24 percent wet basis initial moisture content. The results indicated that grain was overdried with the intermittent fan operation in any range of temperature rise of drying air. Therefore, the continuous fan operation is usually more effective than the intermittent fan operation considering the overdrying. 4. For the continuous fan operation, the average temperature rise of drying air may be limited to 2.2 to 3. 3 degrees Centigrade considering safe storage moisture level of 13.5 to 14 perceut wet basis. 5. Required drying time decrease ranged from 40 to 50 percent each time the airflow rate was doubled and from 3.9 to 4.3 percent approximately for each one degrees Centigrade in average temperature rise of drying air regardless of the fan operation methods. Therefore, the average temperature rise of drying air had a little effect on required drying time. 6. Required drying time increase ranged from 18 to 30 percent approximately for each 2 percent increase in initial moisture content regardless of the fan operation methods, in the range of 18 to 24 percent moisture. 7. The intermittent fan operation showed about 36 to 42 percent decrease in required drying time as compared with the continuous fan operation. 8. Drymatter loss decrease ranged from 34 to 46 percent each time the airflow rate was doubled and from 2 to 3 percent approximately for each one degrees Centigrade in average temperature rise of drying air, regardless of the fan operation methods. Therefore, the average temperature rise of drying air had a little effect on drymatter loss. 9. Drymatter loss increase ranged from 50 to 78 percent approximately for each 2 percent increase in initial moisture content, in the range of 18 to 24 percent moisture. 10. The intermittent fan operation: showed about 40 to 50 percent increase in drymatter loss as compared with the continuous fan operation and the increasing rate was higher at high level of initial moisture and average temperature rise. 11. Year-to-year weather conditions had a little effect on required drying time and drymatter loss. 12. The equations for estimating time required to dry top layer to 16 and 1536 wet basis and drymatter loss were derived as functions of the performance factors. by the least square method. 13. Minimum airflow rates based on 0.5 percent drymatter loss were estimated. Minimum airflow rates for the intermittent fan operation were approximately 1.5 to 1.8 times as much as compared with the continuous fan operation, but a few differences among year-to-year. 14. Required fan horsepower and energy for the intermittent fan operation were 3. 7 and 1. 5 times respectively as much as compared with the continuous fan operation. 15. The continuous fan operation may be more effective than the intermittent fan operation considering overdrying, fan horsepower requirements, and energy use. 16. A method for estimating the required collection area of flat-plate solar collector using average temperature rise and airflow rate was presented.

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Simulation of Drying Grain with Solar-Heated Air (태양에너지를 이용한 곡물건조시스템의 시뮬레이션에 관한 연구)

  • Keum, Dong-Hyuk
    • Journal of Biosystems Engineering
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    • v.4 no.2
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    • pp.64-64
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    • 1979
  • Low-temperature drying systems have been extensively used for drying cereal grain such as shelled corn and wheat. Since the 1973 energy crisis, many researches have been conducted to apply solar energy as supplemental heat to natural air drying systems. However, little research on rough rice drying has been done in this area, especially very little in Korea. In designing a solar drying system, quality loss, airflow requirements, temperature rise of drying air, fan power and energy requirements should be throughly studied. The factors affecting solar drying systems are airflow rate, initial moisture content, the amount of heat added to drying air, fan operation method and the weather conditions. The major objectives of this study were to analyze the effects of the performance factors and determine design parameters such as airflow requirements, optimum bed depth, optimum temperature rise of drying air, fan operation method and collector size. Three hourly observations based on the 4-year weather data in Chuncheon area were used to simulate rough rice drying. The results can be summarized as follows: 1. The results of the statistical analysis indicated that the experimental and predicted values of the temperature rise of the air passing through the collector agreed well.2. Equilibrium moisture content was affected a little by airflow rate, but affected mainly by the amount of heat added, to drying air. Equilibrium moisture content ranged from 12.2 to 13.2 percent wet basis for the continuous fan operation, from 10.4 to 11.7 percent wet basis for the intermittent fan operation respectively, in range of 1. 6 to 5. 9 degrees Centigrade average temperature rise of drying air.3. Average moisture content when top layer was dried to 15 percent wet basis ranged from 13.1 to 13.9 percent wet basis for the continuous fan operation, from 11.9 to 13.4 percent wet basis for the intermittent fan operation respectively, in the range of 1.6 to 5.9 degrees Centigrade average temperature rise of drying air and 18 to 24 percent wet basis initial moisture content. The results indicated that grain was overdried with the intermittent fan operation in any range of temperature rise of drying air. Therefore, the continuous fan operation is usually more effective than the intermittent fan operation considering the overdrying.4. For the continuous fan operation, the average temperature rise of drying air may be limited to 2.2 to 3. 3 degrees Centigrade considering safe storage moisture level of 13.5 to 14 perceut wet basis.5. Required drying time decrease ranged from 40 to 50 percent each time the airflow rate was doubled and from 3.9 to 4.3 percent approximately for each one degrees Centigrade in average temperature rise of drying air regardless of the fan operation methods. Therefore, the average temperature rise of drying air had a little effect on required drying time.6. Required drying time increase ranged from 18 to 30 percent approximately for each 2 percent increase in initial moisture content regardless of the fan operation methods, in the range of 18 to 24 percent moisture.7. The intermittent fan operation showed about 36 to 42 percent decrease in required drying time as compared with the continuous fan operation.8. Drymatter loss decrease ranged from 34 to 46 percent each time the airflow rate was doubled and from 2 to 3 percent approximately for each one degrees Centigrade in average temperature rise of drying air, regardless of the fan operation methods. Therefore, the average temperature rise of drying air had a little effect on drymatter loss. 9. Drymatter loss increase ranged from 50 to 78 percent approximately for each 2 percent increase in initial moisture content, in the range of 18 to 24 percent moisture. 10. The intermittent fan operation: showed about 40 to 50 percent increase in drymatter loss as compared with the continuous fan operation and the increasing rate was higher at high level of initial moisture and average temperature rise.11. Year-to-year weather conditions had a little effect on required drying time and drymatter loss.12. The equations for estimating time required to dry top layer to 16 and 1536 wet basis and drymatter loss were derived as functions of the performance factors. by the least square method.13. Minimum airflow rates based on 0.5 percent drymatter loss were estimated.Minimum airflow rates for the intermittent fan operation were approximately 1.5 to 1.8 times as much as compared with the continuous fan operation, but a few differences among year-to-year.14. Required fan horsepower and energy for the intermittent fan operation were3. 7 and 1. 5 times respectively as much as compared with the continuous fan operation.15. The continuous fan operation may be more effective than the intermittent fan operation considering overdrying, fan horsepower requirements, and energy use.16. A method for estimating the required collection area of flat-plate solar collector using average temperature rise and airflow rate was presented.