A Numerical Analysis on the Airflow Characteristics in Super Cleanrooms with Different Design Types |
노광철
(서울시립대학교 대학원 기계공학과)
이승철 (동해대학교 자동차공학과) 오명도 (서울시립대학교 기계정보공학과) |
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Cleanroom and contamination control
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Study on the characteristic of the air flow and particle diffusion in the cleanroom
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High isolation minienvironment for process involving toxic substances
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5 |
Comparison of different K-ε models for indoor airflow computations
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Filter pleating designs
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7 |
A trend of GIGA level cleanroom technology
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Airflow characteristic experiments for the upper plenum design of clean room
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Cleanrooms and associated controlled environments-Part 1:Classification of air cleanliness
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Ventilation efficiency as a guide to design
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11 |
Design and evaluation of a minienvironment for semiconductor manufacture process
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ScienceOn |
12 |
A experimental study on the airflow characteristics for clean tunnel type cleanroom design
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13 |
Deterministic simulation and assessment of air-recirculation performance of unidirectional-flow cleanrooms that incorporate age of air concept
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ScienceOn |
14 |
Study on the laminar and turbulent flow sharing for the particle control in the cleanroom
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Study on the thermal and fluid characteristic in the cleanroom
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Next generation cleanroom technology and air quality control
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Effects of the floor panel on flows in a vertical laminar flow type clean room
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