• Journal of the Korean Magnetics Society
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• v.18 no.1
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• pp.14-18
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• 2008

Bismuth-substituted yttrium iron garnet(Bi:YIG) films, which show excellent magnetic and magneto-optical properties as well as low optical losses by optimizing their deposition and post-annealing condition, have been attracting great attention in optical device research area. In this study, the Bi:YIG thick films were deposited with the aerosol deposition method for the final purpose of applying them to optical isolators. Since the aerosol deposition is based on the impact adhesion of sub-micrometer particles accelerated by a carrier gas to a substrate, the flow rate of carrier gas, which is in proportion to mechanically collision energy, should be treated as an important parameter. The Bi:YIG($Bi_{0.5}Y_{2.5}Fe_5O_{12}$) particles with $100{\sim}500$ nm in average diameter were carried and accelerated by nitrogen gas with the flow rate of 0.5 l/min${\sim}$10 l/min. The coercive force decreased from 51 Oe to 37 Oe exponentially with increasing gas flow rate. This is presumably due to the fact that the optimal collision energy results in reduction of impurity and pore, which makes the film to be soft magnetically. The saturation magnetization decreased due to crystallographical distortion of the film with increasing gas flow rate.

• Proceedings of the Korea Air Pollution Research Association Conference
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• 2002.11a
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• pp.385-386
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• 2002

Many important physical properties of natural or man-made aerosol particles such as light scattering, electrostatics charges, and toxicity, as well as their behavior involving physical processes like diffusion and thermophoresis depend strongly on their size distribution. Important aerosol behavior mechanisms affecting the size distribution of aerosol particles include condensation, deposition, and coagulation. (omitted)

• Particle and aerosol research
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• v.5 no.3
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• pp.111-122
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• 2009

This paper reviews about synthesis of nanoparticles by spark discharge and applications. A method of catalytic activation with Pd and Pt aerosol nanoparticles produced by spark discharge was introduced. After annealing, the catalytically activated substrate placed into a solution for electroless silver deposition. The silver was then formed only on the activated regions of the substrate. Silver line patterns having a width of $18{\mu}m$ and a height of $1{\mu}m$ were created with the ability to be effectively reproduced. Antimicrobial nanoparticles such as silver were used for removal of bioaerosols. Silver nanoparticles deposited air filters such as ACF filters were evaluated by antimicrobial test.

• Journal of Ocean Engineering and Technology
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• v.27 no.6
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• pp.95-99
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• 2013

Lead zirconate titanate (PZT) thick films with a thickness of $10-20{\mu}m$ were fabricated on silicone substrates using an aerosol deposition method. The starting powder, which had diameters of $1-2{\mu}m$, was observed using SEM. The average diameter ($d_{50}$) was $1.1{\mu}m$. An XRD analysis showed a typical perovskite structure, a mixture of the tetragonal phase and rhombohedral phase. The as-deposited film with nano-sized grains had a fairly dense microstructure without any cracks. The deposited film showed a mixture of an amorphous phase and a very fine crystalline phase by diffraction pattern analysis using TEM. The as-deposited films on silicon were annealed at a temperature of $700^{\circ}C$. A 20-${\mu}m$ thick PZT film was torn out as a result of the high compressive stress between the PZT film and substrate.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.159-159
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• 2011

Among the semiconductor ternary compounds in the I-III-$VI_2$ series, $CulnS_2$ ($CulnSe_2$) are one of the promising materials for photovoltaic applications because of the suitability of their electrical and optical properties. The $CuInS_2$ thin film is one of I-III-$VI_2$ type semiconductors, which crystallizes in the chalcopyrite structure. Its direct band gap of 1.5 eV, high absorption coefficient and environmental viewpoint that $CuInS_2$ does not contain any toxic constituents make it suitable for terrestrial photovoltaic applications. A variety of techniques have been applied to deposit $CuInS_2$ thin films, such as single/double source evaporation, coevaporation, rf sputtering, chemical vapor deposition and chemical spray pyrolysis. This is the first report that $CuInS_2$ thin films have been prepared by Aerosol Jet Deposition (AJD) technique which is a novel and attractive method because thin films with high deposition rate can be grown at very low cost. In this study, $CuInS_2$ thin films have been prepared by Aerosol Jet Deposition (AJD) method which employs a nozzle expansion. The mixed fluid is expanded through the nozzle into the chamber evacuated in a lower pressure to deposit $CuInS_2$ films on Mo coated glass substrate. In this AJD system, the characteristics of $CuInS_2$ films are dependent on various deposition parameters, such as compositional ratio of precursor solution, flow rate of carrier gas, stagnation pressure, substrate temperature, nozzle shape, nozzle size and chamber pressure, etc. In this report, $CuInS_2$ thin films are deposited using the deposition parameters such as the compositional ratio of the precursor solution and the substrate temperature. The deposited $CuInS_2$ thin films will be analyzed in terms of deposition rate, crystal structure, and optical properties.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.24 no.4
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• pp.608-613
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• 2000

The present study has proposed a novel aerosol CVD utilizing an internal jet in the conventional MCVD reactor for the purpose of enhancing the deposition efficiency(and rate) and the uniformity of deposited film. The use of impingement of high temperature jet through a thin inner tube ensures the reduction of non-uniform particle deposition zone as well as higher thermophoretic particle deposition. It is shown that significant improvements have been achieved for both aspects of deposition efficiency and uniformity. As jet temperatures increase, the tapered length is reduced and deposition efficiency is significantly increased.

• Transactions of the Korean hydrogen and new energy society
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• v.21 no.2
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• pp.117-122
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• 2010

BCY($Ba(Ce_{0.9}Y_{0.1})O_{3-\delta}$) oxide, shows high protonic conductivity at high temperatures, and are referred to as hydrogen separation membrane. For high efficiency of hydrogen separation ($H_2$ flux and selectivity) and low fabrication cost, ultimate thin and dense BCY-Ni layer have to be coated on a porous substrate such as $ZrO_2$. Aerosol depostion (AD) process is a novel technique to grow ceramic film with high density and nano-crystal structure at room-temperature, and would be applied to the fabrication process of AD integration ceramic layer effectively. XRD and SEM measurements were conducted in order to analyze the characteristics of BCY-Ni membrane fabricated by AD process.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.33 no.3
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• pp.208-213
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• 2020

Four types of BaTiO₃ powders are prepared and successfully deposited on glass and Pt/Si substrates using the aerosol deposition process. Particles with sizes of 0.45 ㎛ and 0.3 ㎛ are selected as the starting powder, while those powders are treated using a different milling method. The jet-milled and ball-milled powders not only showed a smaller particle-size distribution, but compared with the non-milled powder, it also had a higher deposition rate using the uniformly generated aerosol. Although the films deposited using particles with size 0.45 ㎛ exhibited some craters on the surface, significantly flat film surfaces were obtained. However, particles with size 0.3 ㎛ create a slightly rough film surface, but the dielectric constant was greater than in the case involving particles with size 0.45 ㎛. Consequently, a suitably large particle size significantly influences the deposition rate and improvement in the surface roughness, and a uniform particle size distribution appears to contribute to an improved dielectric constant. Therefore, it is believed that the dielectric properties along with the growth characteristics can be enhanced by limiting particle size and shape.

• Proceedings of the Korean Vacuum Society Conference
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• 2009.08a
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• pp.326-326
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• 2009

• Proceedings of the Korean Vacuum Society Conference
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• 2009.08a
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• pp.296-296
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• 2009