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http://dx.doi.org/10.5574/KSOE.2013.27.6.095

Fabrication of piezoelectric PZT thick film by aerosol deposition method  

Kim, Ki-Hoon (Department of Materials Science and Engineering, Pukyong National University)
Bang, Kook-Soo (Department of Advanced Materials system Engineering, Pukyong National University)
Park, Chan (Department of Materials Science and Engineering, Pukyong National University)
Publication Information
Journal of Ocean Engineering and Technology / v.27, no.6, 2013 , pp. 95-99 More about this Journal
Abstract
Lead zirconate titanate (PZT) thick films with a thickness of $10-20{\mu}m$ were fabricated on silicone substrates using an aerosol deposition method. The starting powder, which had diameters of $1-2{\mu}m$, was observed using SEM. The average diameter ($d_{50}$) was $1.1{\mu}m$. An XRD analysis showed a typical perovskite structure, a mixture of the tetragonal phase and rhombohedral phase. The as-deposited film with nano-sized grains had a fairly dense microstructure without any cracks. The deposited film showed a mixture of an amorphous phase and a very fine crystalline phase by diffraction pattern analysis using TEM. The as-deposited films on silicon were annealed at a temperature of $700^{\circ}C$. A 20-${\mu}m$ thick PZT film was torn out as a result of the high compressive stress between the PZT film and substrate.
Keywords
PZT powder; Aerosol deposition method; FE-SEM; Thick film; Ceramics; TEM;
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Times Cited By KSCI : 1  (Citation Analysis)
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