• 제목/요약/키워드: a-C:Ti

검색결과 3,743건 처리시간 0.033초

Effect of annealing temperature on the structural and electrical properties of titanium nitride film resistors

  • Cuong, Nguyen Duy;Kim, Dong-Jin;Kang, Byoung-Don;Kim, Chang-Soo;Yoon, Soon-Gil
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
    • /
    • pp.36-37
    • /
    • 2006
  • Titanium oxy-nitride ($TiN_O_y$) thin films were deposited on $SiO_2$/Si substrates using reactive dc magnetron sputtering, and were then annealed at various temperatures in air ambient to incorporate oxygen into the films. The effect of annealing temperature on the structural and electrical properties of the films was investigated. The grain size of the films decreases with increasing annealing temperature. On the other hand, crystallinity of the films is independent of annealing temperature in air ambient. Resistivity of the films increases remarkably as an annealing temperature increases and temperature coefficience of resistance (TCR) of the films varies from a positive value to a negative value. The films annealed at $350^{\circ}C$ for 30 min exhibited a near-zero TCR value of approximately -5 ppm/K. The decrease of the grain size with increasing annealing temperature was attributed to an increase of oxygen concentration incorporated into the films during anncaling treatment.

  • PDF

Eu와 V 동시 도핑에 의한 BiFeO3 박막의 구조와 전기적 특성 (Structural and Electrical Properties of BiFeO3 Thin Films by Eu and V Co-Doping)

  • 장성근;김윤장
    • 한국전기전자재료학회논문지
    • /
    • 제32권3호
    • /
    • pp.229-233
    • /
    • 2019
  • Pure $BiFeO_3$ (BFO) and (Eu, V) co-doped $Bi_{0.9}Eu_{0.1}Fe_{0.975}V_{0.025}O_{3+{\delta}}$ (BEFVO) thin films were deposited on $Pt(111)/Ti/SiO_2/Si(100)$ substrates by chemical solution deposition. The effects of co-doping were observed by X-ray diffraction, Raman spectroscopy, and scanning electron microscopy (SEM). The electrical properties of the BEFVO thin film were improved as compared to those of the pure BFO thin film. The remnant polarization ($2P_r$) of the BEFVO thin film was approximately $26{\mu}C/cm^2$ at a maximum electric field of 1,190 kV/cm with a frequency of 1 kHz. The leakage current density of the co-doped BEFVO thin film ($4.81{\times}10^{-5}A/cm^2$ at 100 kV/cm) was two orders of magnitude lower than of that of the pure BFO thin film.

Localized Corrosion Resistance and Microstructural Changes in UNS N07718 Alloy After Solution Heat Treatment

  • Yoon-Hwa Lee;Jun-Seob Lee;Soon il Kwon;Jungho Shin;Je-Hyun Lee
    • Corrosion Science and Technology
    • /
    • 제23권2호
    • /
    • pp.166-178
    • /
    • 2024
  • The localized corrosion resistance of UNS N07718 alloy was investigated after solution heat treatment. When the alloy was heat-treated at 1050 ℃ for 2.5 hours, it experienced an increase in average grain diameter, a reduction in grain boundary area, and the dissolution of delta phases along grain boundaries. Additionally, primary metallic nitrides (MN) and metallic carbides (MC), enriched with either Ti or Nb, were identified and exhibited a random distribution within the microstructures. Despite the solution heat treatment, the composition, diameter, and abundance of MNs and MCs remained relatively consistent. The critical pitting temperature (CPT), as determined by the ASTM G48-C immersion test, revealed similar values of 45 ℃ for both treated and untreated alloys. However, a decrease in maximum pit depth and corrosion rate was observed after the solution heat treatment. The microstructural changes that occurred during the heat treatment and their potential implications were discussed to understand the influence of the solution heat treatment.

호주 퀸즈랜드 주 캔닝턴 광상 모암의 아연-첨정석-규선석-석류석에 관한 연구 :변성작용과 아연-광화작용에 대해서 (Gahnite-Sillimanite-Garnet Mineral Assemblage from the Host Rocks of the Cannington Deposit, North Queensland, Australia: Relationship between Metamorphism and Zn-Mineralization)

  • 김형수
    • 한국광물학회지
    • /
    • 제17권4호
    • /
    • pp.309-325
    • /
    • 2004
  • 연구는 호주 퀸즈랜드 주 북서부에 위치하는 은-납-아연 캔닝턴 광상은 호상편마암, 미그마타이트, 규선석-석류석 편암 그리고 각섬암으로 구성된 모암 주변부에서 발달해 있다. 모암에서 산출되는 규선석의 세 가지 다른 결정형태, 규선석을 포획광물로 함유한 아연-첨정석과 석류석 반상변정은 모암의 변성작용과 아연과 관련된 광화작용에 대한 지질학적 지시자로 사용되었다. 변성작용과 아연 광화작용과의 관계는 프로그램 THERMOCALC를 이용하여 KFMASH (K$_2$O-FeO-MgO-A1$_2$O$_3$-SiO$_2$- $H_2O$), KFMASHTO (K$_2$O-FeO-MgO-A1$_2$O$_3$-SiO$_2$-$H_2O$-TiO$_2$-Fe$_2$O$_3$), NCKFMASH ($Na_2$O-CaO-K$_2$O-FeO-MgO-Al$_2$O$_3$-SiO$_2$-$H_2O$) 그리고 MnNCKFMASH (MnO-$Na_2$O-CaO-K$_2$O-FeO-MgO-Al$_2$O$_3$-SiO$_2$-$H_2O$) 화학계에서 이들 세 가지 광물의 공생관계와 규선석-석류석-부분용융의 상평형 관계를 이용하여 결정하였다. MnNCKFMASH와 NCKFMASH계에서 부분 용융은 KFMASH와 KFMASHTO계에서 보다 낮은 온도에서 일어나며, MnNCKFMASH 계에서 용융 온도는 암석 화학 성분의 Na+Ca+K)의 비가 증가함에 따라 감소하는 경향을 보인다. 캔닝턴 광상의 모암은 MnNCKFMASH계의 경우 최고 온도와 압력 환경에서(634$\pm$62$^{\circ}C$, 4.8$\pm$1.3 kbar) 약 15% 용융되지만, KFMASHTO계하에서는 부분 용융이 일어나지 않는다. 규선석의 등변성도선과 모드 비의 변화를 근거로, 주상과 능면형의 규선석과 주상의 규선석을 포획하는 아연-첨정석 반상변정은 부분 용융을 포함하는 온도와 압력의 증가(약 550~$600^{\circ}C$, 2.0~3.0 kbar에서 700~75$0^{\circ}C$, 5.0~7.0 kbar)로 인한 것으로 생각된다. 또한 이와 같은 변성작용 동안의 최대 수축 변형 방향은 남-북 그 다음 동서 방향으로 주로 D$_1$과 D$_2$ 변형작용 동안에 형성되어졌다. 결론적으로 아연-첨정석의 성장과 관련된 아연 광화 작용은 D$_2$ 동안에 일어났고 그 후 부분 용융과 후기 변형/변성작용에 의해 재배치 또는 재농집 되어진 것으로 생각된다.

세라믹 종류, 두께 및 소성온도에 따른 식물개체제어형 세라믹 자동점적관수시스템의 점적성능 (Trickling Performance of Individual Watering System with Variety, Thickness and Firing Temperature of Ceramic)

  • 양원모
    • 생물환경조절학회지
    • /
    • 제8권4호
    • /
    • pp.257-264
    • /
    • 1999
  • 세라믹의 종류와 두께 그리고 소성온도를 달리하여 제작한 세라믹 자동점적센서의 점적성능을 비교 분석하였다. 자체제작 세라믹센서에 가장 많이 함유된 조성성분은 $SiO_2$로 54.17~71.62wt.%였으며 다음이 A1$_2$O로 15.42~33.79 wt.%였다. 두 성분의 합계는 백자토 92.34 wt.%, 옹기토 89.18 wt.%, 미립분청토 88.17 wt.%, 세립분청토 87.96 wt.%, 대조구(시판수입제품) 87.04 wt.%였다. $SiO_2$:A1$_2$O의 비율은 백자토 73.2:26.8, 옹기토 80.2:19.8, 미립분청토 68.9:31.1, 세립분청토 61.6:38.4, 재조구 82.3:17.7이었다 기타 Fe$_2$ $O_3$, CaO, MgO, $Na_2$O, $K_2$O, Ti $O_2$, P$_2$ $O_{5}$ 등이 10wt.%내외 함유되어 있었다. 공극율은 세립분청토에서 가장 높았고 백자토, 옹기토 순이었으며 소성온도가 높을수록 두께가 두꺼울수록 공극율이 높았다. 두께 2.5mm로 성형한 세라믹의 점토종류에 따른 공극율은 세립분청토 37.47%, 세립분청토와 옹기토의 혼합토 34.82%, 백자토 34.71%, 옹기토 32.5% 순이었다. 세라믹의 점토종류, 소성온도에 관계없이 자동점적이 가능하였으나 점적센서의 반응주기와 점적량의 집중도는 차이가 있었으며, 세라믹의 두께나 상부 플라스틱 개폐장치의 탄력성에 따라서도 점적패턴과 점적량의 집중도에 큰 차이가 있었다. 세립분청토나 백자토에서는 점적지속시간이 짧았으며 백자토의 경우 점적량의 증가가 급격하지만 감소는 서서히 이루어졌다. 또한 세라믹의 두께가 두꺼울수록 점적지속시간이 짧았으며 점적량의 증가는 급격하였고 감소는 완만하였다. 그러나 두께 1mm로 얇은 경우는 백자토를 제외하고는 정상적인 급액이 이루어지지 못하였다. 세라믹 센서를 50$0^{\circ}C$에서 소성한 경우 점적지속시간이나 단위시간당 점적량이 불안정하였으며 $600^{\circ}C$$700^{\circ}C$에서는 비교적 안정된 양상을 보였으나 점적지속시간이 길어졌으며 80$0^{\circ}C$ 또는 90$0^{\circ}C$에서 소성한 경우는 점적지속시간이 짧은 반면 단위시간당 점적량이 커지면서 점적의 개시와 종료가 뚜렷하였다.

  • PDF

생균제의 급여가 육계의 생산성과 장내 미생물의 변화에 미치는 영향 (Effect of Feeding Probiotics on Performance and Intestinal Microflora of Broiler Chicks)

  • 류경선;박홍석
    • 한국가금학회지
    • /
    • 제25권1호
    • /
    • pp.31-37
    • /
    • 1998
  • Two experiment were conducted to evaluate the feeding value of probiotics for the broiler chicks. Basal diets based on corn and soybean meal with no supplemental probiotics contained 21% dietary crude protein for the first 3 weeks and 19% for the rest of two weeks. In experiment 1, 0.2 % probiotics containing 2X 10 6 cfu /ml of Saccharomyces cerevisiae(S), Clostridium butyricum(C), Lactobacillus acidophilus(L), Bacillus polyfermenticus(B) were respectively supplemented to control groups. Two hundred day-olo chicks were randomly assigned to five treatments which had four replicates of 10 chicks each per treatment. Weight gain, feed consurnption, feed conversion ratio (FCR) were weekly measured for 5 weeks. The number of intestinal microflora was examined at the end of experiment. In experiment 1, Weight gain and feed intake of chicks fed probiotics exhibited a significant response compared to those of control for the first three weeks(P<0.01). Weight gain of S or C treatments was higher than that of control for the rest of two weeks, whereas it was significantly lower in L and B treatments than S or C treatments (P<0.01). Chicks fed S or C was significantly increased weight gain(P <0.05) compared to that of control at five weeks of age. FCR of C treatment seemed to improve relative to other supplemental probiotics groups, but was not significantly different. The number of intestinal anaerobes and Lactobacillus in large intestine of chicks fed probiotics supplements was significantly decreased compared to control groups(P<0.01). In experiment 2, there were six treatments: Ti, control; T2, 0.2%S; T3, 0.2%S + 0.2%C; T4, 0.2%S + 0.2%L; T5, 0.2%S + 0.2%B; T6, 0.2%S + 0.1%C + o.i%L + 0.1%B. Control diet based on corn soybean meal contained 21% CP and 3,2OOca1 /g ME with no probiotics. There were four replicates of 10 chicks each per treatment. Weight gain of chicks fed probiotics tended to increase compared to control groups, but were not significantly different between them. FCR was also improved in probiotics treatments. However, there were no significant differences between probiotics supplementation and control groups. The results of these experiments indicated that dietary supplemental probiotics improved weight gain, feed efficiency for the first three weeks of young broiler chicks, whereas supplementation of C, L, B combined probiotics to young broiler chicks was not superior to those of single or two probiotics.

  • PDF

n-InGaAs MOSFETs을 위한 Pd 중간층을 이용한 Ni-InGaAs의 열 안정성 개선 (Improvement of Thermal Stability of Ni-InGaAs Using Pd Interlayer for n-InGaAs MOSFETs)

  • 이맹;신건호;이정찬;오정우;이희덕
    • 한국전기전자재료학회논문지
    • /
    • 제31권3호
    • /
    • pp.141-145
    • /
    • 2018
  • Ni-InGaAs shows promise as a self-aligned S/D (source/drain) alloy for n-InGaAs MOSFETs (metal-oxide-semiconductor field-effect transistors). However, limited thermal stability and instability of the microstructural morphology of Ni-InGaAs could limit the device performance. The in situ deposition of a Pd interlayer beneath the Ni layer was proposed as a strategy to improve the thermal stability of Ni-InGaAs. The Ni-InGaAs alloy layer prepared with the Pd interlayer showed better surface roughness and thermal stability after furnace annealing at $570^{\circ}C$ for 30 min, while the Ni-InGaAs without the Pd interlayer showed degradation above $500^{\circ}C$. The Pd/Ni/TiN structure offers a promising route to thermally immune Ni-InGaAs with applications in future n-InGaAs MOSFET technologies.

지향성 스피커용 PSN-PZT 세라믹스의 압전 특성에 미치는 CeO2 첨가 효과 (Effect of CeO2 on piezoelectric properties of PSN-PZT ceramics for a hypersonic sound speaker application)

  • 최정범;송건화;김한지;황성익;유광수
    • 센서학회지
    • /
    • 제17권2호
    • /
    • pp.127-132
    • /
    • 2008
  • The effect of $CeO_2$ as a sintering additive on the microstructure and the piezoelectric property of yPb$(Sb_{0.5}Nb_{0.5})O_3$-(1-y)Pb$(Zr_{0.52}Ti_{0.48})O_3$ ($0{\leq}y{\leq}0.1$, PSN-PZT) for a hypersonic sound speaker (HSS) application was investigated. The samples were sintered at $1250^{\circ}C$ for 2 h. The crystal structure and surface morphology of the samples were examined using XRD and FE-SEM, respectively. Study on the influence of $CeO_2$ additives on the dielectric and piezoelectric properties indicated that the $CeO_2$-added PSN-PZT system had a high piezoelectric properties. The optimized results of ${\varepsilon}_r=1209$, $K_p$=52% $d_{33}$=351(pC/N) and $Q_m$=1230.16 were obtained at 0.4 wt.% $CeO_2$-added PSN-PZT.

영동분지에 분포하는 백악기 퇴적암류의 재자화 (Remagnetization of the Cretaceous Sedimentary Rocks in the Yeongdong Basin)

  • 도성재;조윤영;석동우
    • 자원환경지질
    • /
    • 제29권2호
    • /
    • pp.193-209
    • /
    • 1996
  • Paleomagnetic and rock-magnetic data have been obtained from the Cretaceous rocks (Yeongdong Group, volcanic rock, and intrusive rocks) which are exposed in the Yeongdong Basin. The characteristic remanent directions of these rocks, which are mainly carried by magnetite and hematite of single and pseudo-single domain sizes, are normally magnetized (Yeongdong Group: $D/I=29.6/59.0^{\circ}C$, k=75.7, ${\alpha}_{95}=3.3^{\circ}$, N=25 sites, paleopole at $198.0^{\circ}E$, $66.4^{\circ}N$, K=46.1, $A_{95}=4.3^{\circ}$; volcanic rock: $D/I=352.8/44.1^{\circ}$, k=44.2, ${\alpha}_{95}=18.8^{\circ}$, N=3 sites, paleopole at $340.0^{\circ}E$, $78.8^{\circ}N$, $K=49.8^{\circ}E$, $A_{95}=17.6^{\circ}$X>; intrusive rocks: $D/I=358.4/51.9^{\circ}C$, k=20.0, ${\alpha}_{95}=13.8^{\circ}$, N=7 sites, paleopole at $338.1^{\circ}E$, $86.8^{\circ}N$, K=13.5, $A_{95}=17.1^{\circ}$). The stepwise unfolding of the characteristic remanent magnetization (ChRM) of the Yeongdong Group reveals that a maximum value of k is observed at 60% of unfolding with $D/I=13.0/58.6^{\circ}$ (k=124.62, ${\alpha}_{95}2.6^{\circ}$) indicating that the ChRM was aquired during ti1ting of the strata. This remagnetized ChRM in the sedimentary strata is due to acquisition of geomagnetic field direction at the time of formation of authigenic magnetic minerals, although it is not totally ruled out that the formation of authigenic magnetic minerals was affected indirect1y by the elevated temperature originated from the volcanic and intrusive rocks which intruded between Late Cretaceous and Early Tertiary.

  • PDF

플라즈모닉스 현상을 이용한 전반사 기반 다층 유전체 박막 센서의 특성 분석 (Characteristics Analysis of Total Internal Reflection-based Dielectric Multi-layer Sensor Using Plasmonics Phenomena)

  • 김홍승;이태경;김두근;정유라;오금윤;이병현;기현철;최영완
    • 한국전기전자재료학회논문지
    • /
    • 제25권7호
    • /
    • pp.516-520
    • /
    • 2012
  • In this paper, we have theoretically analyzed and designed a dielectric multi-layer sensor with a SPR (surface plasmon resonance) using analytical calculation and FDTD (finite difference time-domain) methods. The proposed structure is composed of periodic layer and thin metal film. It has many advantages. One of that is a high sensitivity of the SPR. Another is a high Q-factor of the characteristics in the PhC (photonic crystals) micro-cavity structure. The incident light has double resonance characteristics, because the filtered light by PhC structure, dielectric multi-layer, is met the thin metal film for SPR effect. We have also observed the change of resonance characteristics according to the variation of effective index on the metal film.