• 제목/요약/키워드: a-C:Ti

검색결과 3,743건 처리시간 0.028초

AIP법에서 증착시간이 SM45C 강의 TiN 코팅층 성질에 미치는 영향 (Effect of Deposition Time on the Properties of TiN-coated Layer of SM45C Steel by Arc Ion Plating)

  • 김해지
    • 한국기계가공학회지
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    • 제10권5호
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    • pp.44-50
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    • 2011
  • The effect of deposition time in arc ion plating on surface properties of the TiN-coated SM45C steel is presented in this paper. The surface roughness, micro-particle, micro-hardness, coated thickness, atomic distribution of TiN, and adhesion strength are measured for various deposition times. It has been shown that the deposition time has a considerable effect on the micro-hardness, the coated thickness, and the atomic distribution of TiN of the SM45C steels but that it has little influence on the surface roughness and adhesion strength.

고분자 열분해 방법으로 제조된 TiN-Ti5Si3 세라믹 복합체의 고온 산화 거동 (High-Temperature Oxidation Behavior of TiN-Ti5Si3 Ceramic Composites Manufactured by Polymer Pyrolysis)

  • 김범섭;김득중;이동복
    • 한국세라믹학회지
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    • 제43권8호
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    • pp.486-491
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    • 2006
  • A new $TiN-Ti_5Si_3$ bulk composite was synthesized from preceramic, inorganic polymer (methylpolysilsesquioxane) and $TiH_2$ filler powders via polymer pyrolysis. Using this process, ceramics with high melting points can be produced relatively easily to a near net shape. The $TiN-Ti_5Si_3$ composite oxidized slowly during heating to $1000^{\circ}C$. During heating at the temperatures of at 700 and $800^{\circ}C$, TiN oxidized to Rutile-$TiO_2$ whereas $Ti_5Si_3$ resisted to oxidation. The oxide scale formed consisted primarily of $TiO_2$ containing $Ti_5Si_3$.

SrTiO3계 GBL Capacitor의 미세구조 및 유전특성 (Microstructure and Dielectric Properties of a SrTiO3-based GBL Capacitor)

  • 천채일;김호기
    • 한국세라믹학회지
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    • 제24권3호
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    • pp.270-276
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    • 1987
  • The microstructure and dielectric properties of a SrTiO3-based GBL (Grain Boundary Layer) capacitor were investigated. The 0.6 mol% Nb2O5 doped SrTiO3 was sintered for 3 hr at 1450$^{\circ}C$ in mixed gas(N2/H2) atmosphere. The Nb2O5 promoted the grain growth of the SrTiO3 ceramics was decreased with the amount of Nb2O5. The oxide mixture(PbO, Bi2O3, B2O3) were painted on the reduced specimen and fired at 1000$^{\circ}C$ to 1100$^{\circ}C$ in air. The penetrated oxide mixture into specimen were located in grain boundaries. A SrTiO3-based GBL capacitor had the apparent permittivity of about 3.0${\times}$104, the dielectric loss of 0.01-0.02, and insulating resistance of 108-109$\Omega$.cm. The capacitor had the stable temperature coefficient of capacitance and exhibited dielectric dispersion over 107 Hz. The capacitance-voltage measurements indicated that the grain boundary was composed of the continuous insulating layers.

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화학증착법에 의한 PbTiO3박막의 조성분석 및 전기적성질에 관한 연구 (Study on the Composition Analysis and Electrical Properties of Chemical Vapor Deposited PbTiO3 Thin Film)

  • 이혜용;윤순길;김호기
    • 한국세라믹학회지
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    • 제26권5호
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    • pp.670-676
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    • 1989
  • The PbTiO3 is well known materials having remarkable ferroelectric, piezoelectric, and pyroelectric properties. PbTiO3 thin films with a perovskite structure were successfully fabricated on titanium substrate by chemical vapor deposition. These films were characterized according to composition, crystal structure, and electrical properties. Semi-quantitative compositional analysis of the deposited films was made by Auger Electron Spectroscopy(AES). The PbTiO3 film deposited on titanium substrate at the deposition temperature 75$0^{\circ}C$, the Ti(C2H5O)4 fraction 0.15, and O2 partial pressure 0.06atm, has a columnar structure and grows with(001) preferred orientation, and has stoichiometric composition. A clear dielectric transition and offset in the dc conductivity near the transition temperature(48$0^{\circ}C$) were observed in the deposited lead titanate film.

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무가압 Annealing한 $SiC-TiB_2$전도성 세라믹 복합체의 특성 (Properties of SiC-Ti $B_2$ Electroconductive Ceramic Composites by Pressureless Annealing)

  • 신용덕;주진영;최광수;오상수;윤양웅
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제52권2호
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    • pp.80-84
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    • 2003
  • The mechanical and electrical properties of the hot-pressed and pressureless annealed SiC-Ti $B_2$electroconductive ceramic composites were investigated as functions of the liquid additives of $Al_2$ $O_3$+ $Y_2$ $O_3$. The result of phase analysis for the SiC-Ti $B_2$ composites by XRD revealed $\alpha$-SiC(6H), Ti $B_2$, and YAG(A $l_{5}$ $Y_3$ $O_{12}$ ) crystal phase. The relative density of SiC-Ti $B_2$ composites was increased with increased $Al_2$ $O_3$+ $Y_2$ $O_3$ contents. The fracture toughness showed the highest value of 6.04 Mpa $m^{\frac{1}{2}}$ for composites added with l2wt% A1$_2$ $O_3$+ $Y_2$ $O_3$ additives at room temperature. The electrical resistivity showed the lowest value of 6.2$\times$10$^{-3}$ $\Omega$ㆍcm for composite added with l6wt% $Al_2$ $O_3$+ $Y_2$ $O_3$ additives at room temperature. The electrical resistivity of the SiC-Ti $B_2$ composites was all positive temperature cofficient resistance(PTCR) in the temperature ranges from $25^{\circ}C$ to $700^{\circ}C$.

Ti-capped NiSi 형성 및 열적안정성에 관한 연구 (A Study on the Formation of Ti-capped NiSi and it′s Thermal Stability)

  • 박수진;이근우;김주연;배규식
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 하계학술대회 논문집
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    • pp.288-291
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    • 2002
  • Application of metal silicides such as TiSi$_2$ and CoSi$_2$ as contacts and gate electrodes are being studied. However, TiSi$_2$ due to the linewidth-dependance, and CoSi$_2$ due to the excessive Si consumption during silicidation cannot be applied to the deep-submicron MOSFET device. NiSi shows no such problems and can be formed at the low temperature. But, NiSi shows thermal instability. In this investigation, NiSi was formed with a Ti-capping layer to improve the thermal stability. Ni and Ti films were deposited by the thermal evaporator. The samples were then annealed in the N$_2$ ambient at 300-800$^{\circ}C$ in a RTA (rapid thermal annealing) system. Four point probe, FESEM, and AES were used to study the thermal properties of Ti-capped NiSi layers. The Ti-capped NiSi was stable up to 700$^{\circ}C$ for 100 sec. RTA, while the uncapped NiSi layers showed high sheet resistance after 600$^{\circ}C$. The AES results revealed that the Ni diffusion further into the Si substrate was retarded by the capping layer, resulting in the suppression of agglomeration of NiSi films.

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Optical and structural properties of metal-dielectric near-infrared cutoff filters for plasma display panel application

  • Lee, Jang-Hoon;Lee, Kwang-Su;Hwangbo, Chang-Kwon
    • 한국진공학회지
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    • 제12권S1호
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    • pp.88-91
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    • 2003
  • Electromagnetic interference shielding and near-infrared cutoff filters for plasma display panel application were designed and fabricated by radio frequency magnetron sputtering. Three types of the filters were prepared: the basic structure of type A consisted of [$TiO_2$ Ti Ag $TiO_2$]; type B, of [$TiO_2$ ITO Ag $TiO_2$]; type C, of [$TiO_2$ ITO Ag ITO $TiO_2$]. Ti and ITO layers deposited on Ag layers were employed as barriers to prevent the oxidation and the diffusion of Ag film into the adjacent oxide layers. Optical, electrical, chemical, and structural properties were investigated, and the result shows that the filters with the ITO barrier layers provided an enhancement in transmittance in the visible owing to a lower absorption of ITO layers than Ti layers. Type C filter showed better optical and electrical performances and smoother surface roughness than Type B and C filters: the average sheet resistance was as low as 1.51 $\Omega\Box$ (where $\square$ stands for a square film), the peak transmittance in the visible was as high as 78.2 %, and the average surface roughness was 1.48 nm.

Photocatalytic Effect for TiO2/ACF Composite Electrochemically Prepared with TNB Electrolyte

  • Chen, Ming-Liang;Lim, Chang-Sung;Oh, Won-Chun
    • Carbon letters
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    • 제8권3호
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    • pp.177-183
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    • 2007
  • [ $TiO_2$ ]ACF composites were prepared by the electrochemical method with Titanium (IV) n-butoxide (TNB) electrolyte under different electrochemical operation time. The BET surface area for $TiO_2$/ACF composites decrease with the increase of electrochemical operation time. There is a single crystal structure which is anatase in all of the samples from the data of XRD. The SEM micrphotographs of $TiO_2$/ACF composites show that the $TiO_2$ particles were well mixed with the ACF. There are O and P with strong C and Ti peaks in all samples from EDX results, and it also shows that a decrease of the C content with a increasing of Ti content with increasing of the electrochemical operation time in the over all composites. DSC cures show that the exothermic peak of all composites at $560^{\circ}C$ represents the transformation heat of amorphous parts to anatase phase and the discontinuous grain growth of the transformed anatase particles. Finally, the excellent photoactivity of $TiO_2$/ACF composites (especially, ACFT10) could be attributed that the decrease of concentration of MB can be concluded to be much faster for the adsorption by ACF than for photocatalytic decomposition by $TiO_2$.

Pathogen-Imprinted Polymer Film Integrated probe/Ti3C2Tx MXenes Electrochemical Sensor for Highly Sensitive Determination of Listeria Monocytogenes

  • Xiaohua, Jiang;Zhiwen, Lv;Wenjie, Ding;Ying, Zhang;Feng, Lin
    • Journal of Electrochemical Science and Technology
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    • 제13권4호
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    • pp.431-437
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    • 2022
  • As one of the most hazardous and deadliest pathogens, Listeria monocytogenes (LM) posed various serious diseases to the human being, thus designing effective strategy for its detection is of great significance. In this work, by preparing Ti3C2Tx MXenes nanoribbon (Ti3C2TxR) as carrier and selecting thionine (Th) acted simultaneously as signal probe and functional monomer, a LM pathogen-imprinted polymers (PIP) integrated probe electrochemical sensor was design to monitor LM for the first time, that was carried out through the electropolymerization of Th on the Ti3C2TxR/GCE surface in the existence of LM. Upon eluting the templates from the LM imprinted cavities, the fabricated PIP/Ti3C2TxR/GCE sensor can rebound LM cells effectively. By recording the peak current of Th as the response signal, it can be weakened when LM cell was re-bound to the LM imprinted cavity on PIP/Ti3C2TxR/GCE, and the absolute values of peak current change increase with the increasement of LM concentrations. After optimizing three key parameters, a considerable low analytical limit (2 CFU mL-1) and wide linearity (10-108 CFU mL-1) for LM were achieved. In addition, the experiments demonstrated that the PIP/Ti3C2TxR sensor offers satisfactory selectivity, reproducibility and stability.

졸-겔법으로 Pt/Ti/SiO2/Si 기판위에 제작된 (Bi,La)Ti3O12 강유전체 박막의 특성 연구 (Charaterization of (Bi,La)Ti3O12 Ferroelectric Thin Films on Pt/Ti/SiO2/Si Substrates by sol-gel Method)

  • 황선환;장호정
    • 한국재료학회지
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    • 제12권11호
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    • pp.835-839
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    • 2002
  • Metal-Ferroelectric-Metal(MFM) capacitors were prepared using $Bi_{3.3}$ $La_{0.7}$ $Ti_3$$O_{12}$ (BLT) ferroelectric thin films which were spin coated on $Pt/Ti/SiO_2$/Si substrates by the Sol-Gel method. BLT thin films annealed at above $650^{\circ}C$ showed polycrystalline structures with typical c-axis preferred orientation. The grain size and surface roughness were increased as the annealing temperature increased from $650^{\circ}C$ to $700^{\circ}C$. In addition, the full width at half maximum (FWHM) values were decreased with increasing annealing temperatures, indicating the improvement of crystallinity. The remanent polarization (2Pr= $Pr^{+}$ $+Pr^{-) }$ and leakage current of the BLT film annealed at $650^{\circ}C$ were about 29.3 $\mu$C/cm$^2$ and $2.3$\times$10^{-8}$$ A/cm^2$ at 3V. There were no distinct changes in the retention charges after $10^{10}$ polarization switching cycles, showing good fatigue property of the annealed BLT films.