• 한국공작기계학회논문집
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• 제17권4호
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• pp.51-58
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• 2008

This paper presents a new design of the precision stage for the reticle in lithography process and a low hunting control method for the stage. The stage has three axes for X, Y, ${\theta}_z$ those actuated by three voice coil motors individually. The designed reticle stage system has three gap sensors and voice coil motors, and supported by four air bearings and the forward/inverse kinematics of the stage were solved to get an accurate reference position. When a stage is in regulating control mode, there always exist small fluctuations(stage hunting) in the stage movement. Because the low stage hunting characteristic is very important in recent lithography and nano-level applications, a special regulating controller for ultra low hunting is proposed in this paper. Also this research proposed the 2-step transmission system for preventing the noise infection from environmental devices. The experimental results showed the proposed regulating control system reduced hunting noise as 35nm(rms) when a conventional PID generates 77nm(rms) in the same mechanical system. Besides the reticle stage has 100nm linear accuracy and $1{\mu}rad$ rotation accuracy at the control frequency of 8kHz.

• 제어로봇시스템학회논문지
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• 제15권5호
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• pp.543-547
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• 2009

This paper describes the design, simulation, development, and experiment of a six degree-of-freedom micropositioning parallel manipulator. A movable stage was supported with six links, each of which extends with a dc-servo micropositioning actuator. In case of parallel manipulator, while the solution of the inverse kinematics is easily found by the vectors of the links which are composed of the joint coordinates in base and platform, but forward kinematic is not easily solved because of the nonlinearity and complexity of the parallel manipulator's kinematic output equation with the multi-solutions. The movable range of the prototype was ${\pm}25mm$ in the x- and y-directions and ${\pm}12.5mm$ in the z-direction. The minimum incremental motion of the prototype was $1{\mu}m$ in the x- and y-directions and $0.5{\mu}m$ in the z-direction. The repeatability of the prototype was ${\pm}2{\mu}m$ in the x- and y-directions and ${\pm}1{\mu}m$ in the z-direction. The motion performance was also evaluated by not only the computer simulation of CAD model but also the experiment using a capacitive sensor system.

• 로봇학회논문지
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• 제12권2호
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• pp.184-193
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• 2017

This work shows how to create an algorithm and implementation for motion and image matching between a vehicle simulator and Unity 3D based virtual object. The motion information of the virtual vehicle is transmitted to the real simulator via a RS232 communication protocol, and the motion is controlled based on the inverse kinematics solution of the platform adopting rotary-type six actuators driving system. Wash-out filters to implement the effective motion of the motion platform are adopted, and thereby reduce the dizziness and increase the realistic sense of motion. Furthermore, the simulator system is successfully designed aiming to reducing size and cost with adaptation of rotary-type six actuators, real driving environment via VR (Virtual Reality), and control schemes which employ a synchronization between 6 motors and 3rd order motion profiles. By providing relatively big sense of motion particularly in impact and straight motions mainly causing simulator sickness, dizziness is remarkably reduced, thereby enhancing the sense of realistic motion.

• 한국지능시스템학회논문지
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• 제23권1호
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• pp.24-28
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• 2013

이 논문에서는 아동 크기 휴머노이드 로봇의 설계 및 개발과정에 대하여 기술한다. 경량형 휴머노이드 로봇의 설계 개념을 제시하고, 3차원 설계 툴을 이용하여 1m 이상 크기 휴머노이드 로봇의 메커니즘을 설계하였다. 로봇의 구동을 위한 하드웨어는 제한된 로봇의 무게 내에서 최적의 성능을 낼 수 있도록 설계하였다. 3차원 설계 툴을 사용하여 설계한 로봇의 프레임 및 링크들은 가볍고 강도가 좋은 재료를 선정하고 정밀 가공을 통해 제작하였다. 제작된 아동 크기의 휴머노이드 로봇은 역기구학, 균형제어를 적용하여 기본 동작을 구현하고 그 성능을 실험을 통하여 확인하였다.

• 한국기계가공학회지
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• 제10권2호
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• pp.9-15
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• 2011

In order to develop a practical postprocessor for 5-axis machining, the general equations of numerically controlled (NC) data for 5-axis configurations with not only non-orthogonal rotary axes but also orthogonal rotary axes were exactly expressed by the inverse kinematics, and a Windows-based postprocessor written in Visual Basic was developed according to the proposed algorithm. The developed postprocessor is a general system that suitable for all kinds of 5-axis machine tool with orthogonal and non-orthogonal rotary axes. Through implementation of the developed postprocessor and verification by a cutting simulation and machining experiment, the effectiveness of the proposed algorithm is confirmed. Compatibility is improved by allowing exchange of data formats such as rotational tool center position (RTCP) controlled NC data, vector post NC data, and program object file (POF) cutter location (CL)data, and convenience is increased by adding the function of work-piece origin offset. Consequently, the technology of practical post-processor for 5-axis machining is developed.

• 제어로봇시스템학회논문지
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• 제17권5호
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• pp.460-470
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• 2011

This paper presents a dynamic workspace control method of underwater manipulator considering a floating ROV (Remotely Operated vehicle) motion caused by sea wave. This method is necessary for the underwater work required linear motion control of a manipulator's end-effector mounted on a floating ROV in undersea. In the proposed method, the motion of ROV is modeled as nonlinear first-order differential equation excluded dynamic elements. For online manipulator control achievement, we develop the position tracking method based on sensor data and EKF (Extended Kalman Filter) and the input velocity compensation method. The dynamic workspace control method is established by applying these methods to differential inverse kinematics solution. For verification of the proposed method, experimental data based test of ROV position tracking and simulation of the proposed control method are performed, which is based on the specification of the KORDI deep-sea ROV Hemire.

• 한국기계가공학회지
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• 제17권3호
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• pp.155-162
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• 2018

Delta robots are usually used for industrial manufacturing, but heavy weight and expensive price have been obstacles to rapid propagation of robots in the field. The goal of this research is to make light-weight and price-competitive delta robots. To reduce the weight, we used plastic material for the arm link, and to reduce the price, we used a step-motor as the main actuator. First we formulated the equations of inverse kinematics for the designed delta robot and then verified these equations by using multibody-dynamics simulation. An algorithm of motion control was developed and applied to the motion-processing unit using a timer-interrupt of 8 milliseconds. Finally, we tested the performance of the new delta robot by checking its control of motion along line segments.

• 로봇학회논문지
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• 제6권3호
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• pp.263-273
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• 2011

This paper analyzes the motion of a horseback riding robot which has two actuators and three joints. It is impossible to control the saddle to get to any position and orientation using the two motors because the robot has less degrees of freedom than the number of joints. Therefore it is required to know the possible location and orientation along with the velocity characteristics of each pose prior to motion planning. For this purpose, this paper analyzes the characteristics of the robot motion. The authors derive the forward and inverse kinematics of the robot motion and developed the trajectory editor for motion planning. Also, Jacobian of the robot is analyzed. It reveals that one of the actuator has little influence to the speed of the saddle motion while the other affects the speed of the saddle motion dominantly. The approach of the paper can be applied for the analysis of characteristics of a robot which has less number of actuators than that of joints.

• 로봇학회논문지
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• 제13권2호
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• pp.129-141
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• 2018

This paper proposes a unified framework that overcomes four motion constraints including joint limit, kinematic singularity, algorithmic singularity and obstacles. The proposed framework is based on our previous works which can insert or remove tasks continuously using activation parameters and be applied to avoid joint limit and singularity. Additionally, we develop a method for avoiding obstacles and combine it into the framework to consider four motion constraints simultaneously. The performance of the proposed framework was demonstrated by simulation tests with considering four motion constraints. Results of the simulations verified the framework's effectiveness near joint limit, kinematic singularity, algorithmic singularity and obstacles. We also analyzed sensitivity of our algorithm near singularity when using closed loop inverse kinematics depending on magnitude of gain matrix.

• 천문학논총
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• 제30권2호
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• pp.93-97
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• 2015

How high-mass stars form is currently unclear. Calculations suggest that the radiation pressure of a forming star can halt spherical infall, preventing further growth when it reaches $10M_{\odot}$. Two major theoretical models on the further growth of stellar mass have been proposed. One model suggests the merging of less massive stellar objects, and the other is through accretion, but with the help of a disk. Inflow motions are key evidence for how forming stars gain further mass to build up massive stars. Recent developments in technology have boosted the search for inflow motion. A number of high-mass collapse candidates were obtained with single dish observations, and mostly showed blue profiles. Infalling signatures seem to be more common in regions which have developed radiation pressure than in younger cores, which is the opposite of the theoretical prediction and is also very different from observations of low mass star formation. Interferometer studies so far confirm this tendency with more obvious blue profiles or inverse P Cygni profiles. Results seem to favor the accretion model. However, the evolution of the infall motion in massive star forming cores needs to be further explored. Direct evidence for monolithic or competitive collapse processes is still lacking. ALMA will enable us to probe more detail of the gravitional processes.