• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.23 no.8
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• pp.601-604
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• 2010

In this study, the piezoelectric energy harvester was investigated employing the pillar structure with the diameter size of 50~500 um. Usually, the aspect ratio between the height and diameter was related with the piezoelectric performance. High aspect ratio was showed the low electric noise and high piezoelectric properties than low aspect ratio. Therefore, we have selected the Su-8 photo-resist and modified lithography process to manufacture the pillar structure with height above the 250 ${\mu}m$. In this presentation, we will report the process and properties of micro pillar structure based on the PMN-PZT (Pb$(Mg_{1/3}Nb_{2/3})O_3$-PbZrTiO$_3$) materials.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.03a
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• pp.208-208
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• 2003

저온균일침전법(HPPLT)으로 제조된 TiO$_2$나노분말은 10$0^{\circ}C$이하의 온도에서 rutile상을 얻을 수 있다. 또한, rutile에서 anatase로의 상변화는 합성시간, 가열속도, 반응온도 그리고 음이온 첨가에 의해 일어난다고 보고되어졌지만, 금속양이온들에 의한 상변화는 알려진 바가 없다. 따라서, 다양한 양이온을 첨가하여 저온균일침전법에서 TiO$_2$의 상변화가 어떻게 일어나는지를 조사하였다. 출발원료인 TIC1$_4$를 사용하여 가수분해하여 0.67M의 TiOCl$_2$을 얻었다. 얻어진 TiOCl$_2$ 수용액에 각각 0.01M의 금속염화물(ZrOCl$_2$, NiCl$_2$, CuCl$_2$, FeCl$_3$, AlCl$_3$ 그리고 NbCl$_{5}$)을 첨가한 후 반응기에 넣고 10$0^{\circ}C$에서 4시간동안 가열하였다 가열한 후 얻어진 침전물에 NaOH 수용액을 이용하여 PH 7-8로 중화한 후 증류수로 Cl$^{-}$이온이 제거될 때까지 충분히 세척하였다. 세척된 침전물을 105$^{\circ}C$에서 24h동안 건조하여 분말을 얻었고, rutile에서 anatase로의 상변화특성을 관찰하기 위하여 XRD, SEM, TEM, ICP 분석을 실시하였다.

• Proceedings of the KIEE Conference
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• 2003.10a
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• pp.107-109
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• 2003

This paper was to measure the structure, piezoelectric properties of $0.03Pb(Mg_{0.5}W_{0.5})O_3$ - $0.12Pb(Sb_{0.5}Nb_{0.5})O_3$ - $0.85Pb(Zr_{0.52}Ti_{0.48})O_3$ + $0.5[wt%]MnO_2$ ceramics dropped with additive CuO after manufacturing the specimens with a general method. It is shown that X-ray diffraction pattern variation of lines (211) have tendency to move minutely by addition of additive CuO. According to dropping with Cu, the dielectric constant at 20[$^{\circ}C$] reduced to CuO 3.0[wt%]. In case of sintering at 1050[$^{\circ}C$], dielectric constant was maximum value 623.59 at CuO 1.0[wt%]. Dielectric loss was maximum value 2.7[%] at Cu 2.0[wt%] in case of sintering at 1050[$^{\circ}C$].

• Economic and Environmental Geology
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• v.31 no.4
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• pp.349-360
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• 1998

The alkali granite occurred as small stock and dyke is distributed in the Kyeomyeongsan Formation in the vicinity of the Chungju city. Geochemical characteristics in major and trace element of alkali granite in the Kyeomyeongsan Formation indicate that the alkali granites are peralkaline and have similar geochemical features to the A-type alkali granite. The rock enriched in HFSE such as Zr, Nb, Y, REE etc. According to the discrimination diagram the alkali granites mostly belong to the within-plate granite field, and to the $A_1$ group of A-type granite. This suggests that they might be emplaced in a extentional rift environment. The alkali granites are characterized by remarkably high total REE content, and enriched, relatively flat to somewhat HREE-depleted patterns with large negative Eu anomaly. The Sm-Nd age of the alkali granite is $338{\pm}30Ma$ with ${\varepsilon}_{Nd(t)}$ beings -7.3 to -8.5. On the basis of the geochemical studies the source magma was derived from a enriched mantle-like source and had a few or clearly interaction with sialic continental crust. In conclusion, the alkali granitic rock of the Kyeomyeongsan Formation might be formed from the high F peralkaline magma that was emplaced in continental rift environment, and generated at the early Carboniferous.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.07a
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• pp.972-975
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• 2001

The effect of Cr$_2$O$_3$(0 to 0.5 wt%) doping on the microstructure and electrical properties of ternary Pb(Zr,Ti)O$_3$-Pb(Ni,Nb)O$_3$piezoelectric ceramic has been investigated. Abnormal grain growth (grain size 3.3 to 11.2 $\mu$m) and densification are found. Minor additives of $\leq$0.1 wt% improve the mechanical coupling factor, but with more additives of $\geq$0.2 wt% electrical properties deteriorate. Thus, these phenomna can be ascribed mainly to anomalous developed microstructure. The large grains were composed of a core region that is free of Cr and a surrounding shell region rich in Cr. The interfaces between the core and the shell were composed of misfit dislocations. The mechanical properties of the specimens were strongly influenced by this microstructural change. The microstrutural and compositonal evolution of the specimens containing different amounts of Cr$_2$O$_3$were monitored. Electrical properties were measured and related to the variations in the microstructure.

• Journal of the Korean Ceramic Society
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• v.29 no.1
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• pp.65-73
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• 1992

The effect of grain size on the time-dependent piezoelectrice degradation of a poled PZT of MPB composition Pb0.988Sr0.012 (Zr0.52Ti0.48)O3 with 2.4 mol% of Nb2O5 was studied, and the degradation mechanism was discussed. Changes in the internal bias field and the internal stress both responsible for the time-dependent degradation of poled PZT were examined by the polarization reveral technique, XRD and Vickers indentation, respectively. The piezoelectric degradation increased with increasing time and grain size, and the internal bias field due to space charge diffusion decreased with increasing grain size of poled PZT. The internal bias field, however, was almost insensitive to the degradation time regardless of the grain size. On the other hand, both the x-ray diffraction peak intensity ratio of (002) to (200) and the fracture behavior including the crack propagation support that the ferroelectric domain rearrangement of larger grain size showed rapid relaxation of the internal stress compared with smaller one, which is thought the origin of the larger piezoelectric degradation in the former. In conclusion, the contribution of space charge diffusion on the piezoelectric degradation of PZT is strongly dependent on both the grain size and the composition. Thus, the relaxation of internal stress due to the ferroelectric domain rearrangement as well as the amount and time-dependence of the internal bias field due to space charge diffusion should be considered simultaneously in the degradation mechanism of PZT.

• Journal of the Korean institute of surface engineering
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• v.28 no.6
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• pp.368-375
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• 1995

Thermal CVD method is in general used for the fabrication of TiC/$Al_2O_3$-coated carbide tools. The growth of TiC layer and the coating morphology depended on the chemical composition of the hard metal substrate on which the tool properties were strongly influenced. TiC-coated layer was grown by the diffusion of carbon from the substrate, whereas the growth of $Al_2O_3$ layer was unrelated to the composition of substrate. In the nitride hard coatings of Zr, Nb and Mo metals deposited on high speed steel substrate by magnetron sputtering, the reactivity of the metal elements was decreased with increasing group number in one period of the periodic system. The hard material films exhibited the highest adhesion with the chemical composition of stoichiometry or substoichiometry. The critical load as a measure of adhesion was evaluated using scratch tester. The CVD tools indicated the values of 80 and 40N in the coated layers with proper bonding to the substrate and with $\eta$ phase of 1$\mu\textrm{m}$ in the interface respectively, but the nitride films prepared by sputtering of PVD showed only the values between 10 and 20N.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2003.12a
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• pp.163-168
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• 2003

In the present study, the piezoelectricity and polarization of multilayer ceramic actuator, being designed to stack PMN-PZ-PT ceramic layers and Ag-Pd electrode layers alternatively, were investigated under a consideration of geometric factor, the volume ratio of the ceramic to the electrode layers. The actuators were fabricated by tape casting of $0.2Pb(Mg_{1/3}Nb_{2/3)O_3-0.38PbZrO_3-0,42PbTiO_3$ followed by lamination and burnout & co-firing processes. The actuators of $10\times10\times0.6~2\textrm{mm}^3$ in size were formed in a way that $60 ~ 200\mu\textrm{m}$ thick were stacked alternatively with $5\mu\textrm{m}$ thick electrode layer. Increases in polarization and electric field-induced displacement with thickness of the ceramic layer were attributed to change of $90^{\circ}$/$180^{\circ}$ domain ratio, which was affected by interlayer internal stress. The piezoelectricity and actuation behaviors were found to depend upon the volume ratio (or thickness ratio) of ceramic to electrode layers.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.05c
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• pp.253-256
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• 2003

This study presents the combined effect of electric field application and mechanical compressive stress loading on deformation in a multilayer ceramic actuator, designed with stacking alternatively $0.2(PbMn_{1/3}Nb_{2/3}O_3)-0.8(PbZr_{0.475}Ti_{0.525}O_3)$ ceramics and Ag-Pd electrode. The deformation behaviors were thought to be attributed to relative $180^{\circ}$domain quantities which is determined by pre-loaded stress and electric field. The non-linearity of piezoelectricity and strain are dependent upon the young's modulus resulting from the domain reorientation.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.07a
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• pp.419-422
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• 2000

This paper was to measure the structure, piezoelectric properties of 0.05Pb($A1_{0.5}$$Nb_{0.5}$)-0.95Pb($Zr_{0.52}$$Ti_{0.48}$)$O_3$ ceramics dopped with additive after creating the specimens with a general method. It is shown that X-ray diffraction pattern variation of lines (200) have tendency to move in simple peak by addition of additive. According to the increase of $Cr_2$$O_3$, tetragonality hardly have variation, according to the increase of $Fe_2$$O_3$, tetragonality decreased on the whole. According to dopping with $Cr_2$$O_3$ and $Fe_2$$O_3$, electromechanical factor(kp) largely increased, in case of sintering at $1200^{\circ}C$ kp was maximum value of 40.04[%] at $Cr_2$$O_3$ 0.3wt%, and maximum value of kp 42.9 [%] at $Fe_2$$O_3$, 0.9wt%. In case of sintering at 120$0^{\circ}C$, mechanical duality factor(Qm) was maximum value of Qm 268.8 at $Cr_2$$O_3$, 0.9 wt%.