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http://dx.doi.org/10.4313/JKEM.2010.23.8.601

Processing Study for the Micro Pillar for Piezoelectric Energy Harvest  

Yun, Seok-Woo (Department of Electronic Materials Engineering, Kwangwoon University)
Lee, Ku-Tak (Department of Electronic Materials Engineering, Kwangwoon University)
Lee, Kyoung-Su (Department of Electronic Materials Engineering, Kwangwoon University)
Jeong, Soon-Jong (Research Center of Energy semiconductor, Korea Electrotechnology Research Institute)
Kim, Min-Soo (Research Center of Energy semiconductor, Korea Electrotechnology Research Institute)
Cho, Kyoung-Ho (Research Headquarter of the Fourth Technology, Agency for Defense Development)
Koh, Jung-Hyuk (Department of Electronic Materials Engineering, Kwangwoon University)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.23, no.8, 2010 , pp. 601-604 More about this Journal
Abstract
In this study, the piezoelectric energy harvester was investigated employing the pillar structure with the diameter size of 50~500 um. Usually, the aspect ratio between the height and diameter was related with the piezoelectric performance. High aspect ratio was showed the low electric noise and high piezoelectric properties than low aspect ratio. Therefore, we have selected the Su-8 photo-resist and modified lithography process to manufacture the pillar structure with height above the 250 ${\mu}m$. In this presentation, we will report the process and properties of micro pillar structure based on the PMN-PZT (Pb$(Mg_{1/3}Nb_{2/3})O_3$-PbZrTiO$_3$) materials.
Keywords
Energy havesting; Micro pillar structure;
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