Effects of Gas Mixing Ratio on the Properties of Thin Films in the ZnO Synthesis by MOCVD (MOCVD에 의한 ZnO 합성에서 기체혼합비가 박막의 물성에 미치는 영향)
-
- Journal of the Korean Institute of Electrical and Electronic Material Engineers
- /
- v.26 no.2
- /
- pp.109-113
- /
- 2013