Browse > Article
http://dx.doi.org/10.4313/JKEM.2005.18.2.116

A Study on Properties of ZnO:Al Films on PC Substrate for Solar Cell Applications  

Na, Young-il (군산대학교 전자정보공학부)
Lee, Jae-Heong (군산대학교 전자정보공학부)
Lim, Dong-Gun (충주대학교 전자공학과)
Yang, Kea-Joon (충주대학교 전자공학과)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.18, no.2, 2005 , pp. 116-119 More about this Journal
Abstract
Al doped ZnO thin films (ZnO:Al) were deposited on poly carbonate (PC) substrate by rf magnetron sputtering. In addition, the electrical, optical properties of the films prepared at various conditions were investigated. As the sputter power increased, the resistivity of ZnO:Al films decreased, regardless of substrate types. However, the resistivity of the films increased with the sputter pressure. The ZnO:Al films were increasingly dark gray colored as the sputter power increased, resulting in the loss of transmittance. High quality films with resistivity as low as 1.43${\times}$10$^{-4}$ Ω-cm and transmittance over 80 % have been obtained by suitably controlling the deposition parameters.
Keywords
ZnO; TCO; RF sputtering; PC substrate; Electrical properly; Optical properly;
Citations & Related Records
연도 인용수 순위
  • Reference
1 T. W. Choi and S. C. Yoo, 'Electrical and mechanical properties of ceramics', J. of KIEEME(in Korean), Vol. 15, No. 1, p. 10, 2001
2 Wen-Fa Wu and Bi-Shou Chiou, 'Effect of annealing on electrical and optical properties of RF magnetron sputtered indium tin oxide films', Thin Solid Films, Vol. 247, p. 201, 1994
3 B. H. Choi, 'Heat Treatment of RF Sputtered and Ga-doped Zinc Oxide Thin Films', KOSEF 913-0606-002-1, 1991
4 S. Kumar and B. Drevillon, J. Appl. Phys., 65, 3023, 1989