• 제목/요약/키워드: ZnO/Si

검색결과 1,049건 처리시간 0.029초

4H-SiC 기판의 a-, c-, m-면방향에 따른 ZnO 나노선의 Photoluminescence 특성 분석 (Photoluminescence Characteristics of ZnO Nanowires Grown on a-, c- and m-plane Oriented 4H-SiC Substrates)

  • 김익주;여인형;문병무;강민석;구상모
    • 한국전기전자재료학회논문지
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    • 제25권5호
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    • pp.349-352
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    • 2012
  • ZnO thin films were deposited on a-, c- and m- plane oriented 4H-SiC substrates by pulsed laser deposition. ZnO nanowires were formed on substrates by tube furnace. Shape and density of the ZnO nanowires were investigated by field emission scanning electron microscope. Average surface roughness and root mean square surface roughness were measure by atomic force microscope. Optical properties were investigated by Photoluminescence measurement. Density of ZnO nanowires grown on a-, c- and m-plane oriented 4H-SiC substrates were 17.89 ${\mu}m^{-2}$, 9.98 ${\mu}m^{-2}$ and 2.61 ${\mu}m^{-2}$, respectively.

RF MEMS 기법을 이용한 US PCS 대역 FBAR BPF 개발

  • 박희대
    • 한국전자파학회지:전자파기술
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    • 제14권3호
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    • pp.15-19
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    • 2003
  • 본 연구에서는 RF magnetron sputtering으로 상온에서 증착된 ZnO압전박막을 이용하여, 1.96 GHz 대역의 air gap type의 FBAR BPF를 개발하였다. FBAR BPF는 Si wafer에 절연막으로 열 산화막층(SiO$_2$)을 형성한 후, 형성된 산화막 위에 바닥전극(Al), ZnO압전층 그리고 상부전극(Mo)를 차례로 RF magnetron sputter장비를 사용하여 증착시키고, Si wafer를 dry etching하여 air hole을 구현함으로써 device를 제조하였다. 제조된 FBAR BPF의 ZnO압전층의 XRD분석 결과 (002)면 방향으로 우선 배향되었으며, XRC의 $\sigma$값은 1.018이었다. 삽입손실 1 dB 내외로 우수한 특성을 나타내었다.

에어로솔-젤 법을 이용한 SiO2에 분산된 ZnO 양자점의 합성과 그 특성 (Aerosol-gel synthesis of ZnO quantum dots dispersed in SiO2 matrix and their characteristics)

  • 김상규;;이광승;이동근
    • 한국입자에어로졸학회지
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    • 제6권2호
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    • pp.51-59
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    • 2010
  • ZnO quantum dots embedded in a silica matrix without agglomeration were synthesized from $TEOS:Zn(NO_3)_2$ solutions in one-step process by aerosol-gel method. It was successfully demonstrated that the size of ZnO Q-dots could be controlled from 2 to 7 mm verified by a high resolution transmission electron microscope observation. The line scanning energy dispersive X-ray spectroscopy(EDS) revealed that the Q-dots existed preferentially inside SiO2 sphere when Zn/Si < 0.5. However, the Q-dots distributed homogeneously all over the sphere when Zn/Si > 1.0. Blue-shifted UV/Vis absorption peak observation confirmed the quantum size effect on the optical properties. The photoluminescence(PL) emission peaks of the powders at room temperature were consistent with previous reports in the following aspects: 1) PL characteristics are dominated by two peaks of deep-level defect-related emissions at 2.4 - 2.8 eV, 2) the first defect-related peak at 2.4 eV was blue shifted due to the quantum size effect with decreasing the concentration of $Zn(NO_3)_2$(decreasing the size of ZnO q dots). More interestingly, the existence of surface-exposed ZnO q dots affects greatly the second defect PL peak at 2.8 eV.

Atomic Layer Deposition of Nitrogen Doped ZnO and Application for Highly Sensitive Coreshell Nanowire Photo Detector

  • 정한얼;강혜민;천태훈;김수현;김도영;김형준
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2011년도 춘계학술발표대회
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    • pp.26.1-26.1
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    • 2011
  • We investigated the atomic layer deposition (ALD) process for nitrogen doped ZnO and the application for n-ZnO : N/p-Si (NW) coaxial hetero-junction photodetectors. ALD ZnO:N was deposited using diethylzinc (DEZ) and diluted $NH_4OH$ at $150^{\circ}C$ of substrate temperature. About 100~300 nm diameter and 5 um length of Si nanowires array were prepared using electroless etching technique in 0.108 g of $AgNO_3$ melted 20 ml HF liquid at $75^{\circ}C$. TEM images showed ZnO were deposited on densely packed SiNW structure achieving extraordinary conformality. When UV (360 nm) light was illuminated on n-ZnO:N/p-SiNW, I-V curve showed about three times larger photocurrent generation than film structure at 10 V reverse bias. Especially, at 660 nm wave length, the coaxial structure has 90.8% of external quantum efficiency (EQE) and 0.573 A/W of responsivity.

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Sol-gel법에 의한 $Zn_2SiO_4$:Mn, Al 형광체의 합성과 발광특성 (Sol-gel synthesis and luminescence of $Zn_2SiO_4$:Mn, Al phosphor)

  • 김창준;권명석
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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    • pp.271-278
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    • 2006
  • Green light emitting $Zn_2SiO_4$Mn and Al co-doped $Zn_2SiO_4$:Mn phosphor were synthesized by a sol-gel method combined with a furnace firing. The luminescent properties of the sample have been investigated. We have found that the phosphor powder with uniform shape show the maximum luminescent intensity when it is prepared with sol-gel method and fired at relatively high temperature ($1100{\sim}1300^{\circ}C$).

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High Luminance $Zn_2SiO_4$:Mn phosphors Prepared by Homogeneous Precipitation Method

  • Jung, Ha-Kyun;Sohn, Kee-Sun;Sung, Bu-Young;Park, Hee-Dong
    • Journal of Information Display
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    • 제1권1호
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    • pp.35-41
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    • 2000
  • Manganese-doped $Zn_2SiO_4$ phosphors well known as a green emitter with high luminescence efficiency were prepared by the homogeneous precipitation method, and their photoluminescence properties under vacuum-ultraviolet (VUV) excitation were investigated. $Zn_2SiO_4$:Mn phosphors obtained by this method have exhibited a high luminance of property and a spherical shape of particles. In particular, the green emission intensity of zinc orthosilicate prepared as containing around 2 mole% of manganese was much stronger than that of the commercial $Zn_2SiO_4$:Mn phosphor, while the decay time was longer. However, addition of $Al^{3+}$ and $Li^+$ into $Zn_2SiO_4$:Mn composition has significantly diminished the decay time of the phosphor without much degradation of the emission intensity.

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$Zn_2SiO_4:Tb$ 녹색 형광체의 Dy 첨가 효과 (Effect of Dy addition on $Zn_2SiO_4:Tb$ green Phosphor)

  • 임원빈;강종혁;이동진;전덕영
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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    • pp.968-971
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    • 2003
  • Due to a low efficiency of phosphor with large Stoke shift in Vacuum Ultra Violet (VUV) excitation environment, new PDP phosphors which can be excited in UV excitation environment need to be developed. In this study, $Zn_2SiO_4:Tb$ phosphor was synthesized by solid-state reaction method at $1300^{\circ}C$ with varying Tb concentration, and its cross relaxation effect was observed by Photoluminescence (PL) measurement. In order to decrease $^5D_3{\to}7F_j$ transition with blue emission in $Zn_2SiO_4:Tb$ phosphor, Dy, co-activator element, was added to $Zn_2SiO_4:Tb$ phosphor. In 254nm excitation environment, broad-emission peak was observed around 524nm, green emission.

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Preparation and Luminescence Properties of PDP Green Phosphors using Polymer Matrix Technique

  • Jun, Sang-Bae;Lee, Dong-Kyu;Kim, Soo-Jong;Masaki, Takaki;Han, Chung-Hwa
    • Transactions on Electrical and Electronic Materials
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    • 제8권3호
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    • pp.121-124
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    • 2007
  • The $Zn_2SiO_4:Mn$ phosphors were prepared using polymer matrix technique in order to improve the performance of green emitting phosphors for plasma display panel(PDP). $Zn_2SiO_4:Mn$ phosphor exhibits a strong green emission around 520-530 nm. The emission intensity and particle size of powders were controlled by sintering temperature and raw material composition. The zinc silicate $Zn_2SiO_4:Mn$ single phase were obtained at lower temperature than prepared by solid-state reaction method. PL luminance of $Zn_2SiO_4:Mn$ phosphor was similar to the commercial material.

이종 물질의 접합계면에 의한 반도체 물질의 광학적 특성 (Optical Properties of Semiconductors Depending on the Contact Characteristic Between Different Groups)

  • 오데레사;노종구
    • 한국전기전자재료학회논문지
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    • 제27권2호
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    • pp.71-75
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    • 2014
  • To observe the optical characteristic of oxide semiconductor depending on the degree of bonding structures, SiOC, ZnO and IGZO were prepared by the RF magnetron sputter system and chemical vapor deposition. Generally, crystal ZnO, amorphous SiOC and IGZO changed the optical characteristics in according to the electro-chemical behavior due to the oxygen vacancy at an interface between different groups. Transmittance of SiOC and IGZO with amorphous structures was higher than that of ZnO with crystal structure, because of lowering the carrier concentration due to the recombination of electron and holes carriers as oxygen vacancies. Besides, the energy gap of amorphous SiOC and IGZO was higher than the energy gap of crystal ZnO. The diffusion mobility of holes is higher than the drift mobility of electrons.

ZnO와 PbO가 Sr-페라이트의 자기적 특성에 미치는 영향 (Effects of ZnO and PbO on the Magnetic Properties of Sr-ferrite)

  • 김정훈;김동엽;김동진;정완배;오재현
    • 한국세라믹학회지
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    • 제28권6호
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    • pp.471-477
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    • 1991
  • Effects of ZnO, PbO and SiO2 on the grain growth and magnetic properties of Sr-ferrite were investigated. (1) Addition of ZnO to Sr-ferrite increased remanence, but decreased coercivity and maximum energy product. (2) Addition of PbO up to 0.5 wt% increased (B$.$H)max of Sr-ferrite, but addition more than 0.5 wt% decreased (B$.$H)mzx (3) SiO2 addition to the 0.5 wt% PbO doped Sr-ferrite decreased remanence and increased coercivity. The coercivity increase in due to the grain refinement effect of SiO2. But addition of SiO2 more than 0.5 wt% invoked a decrease of coercivity and (B$.$H)max of Sr-ferrite due to abnormal grain growth. Sr-ferrite magnet having maximum energy product of 3.7MGOe was fabricated by using the roasting product of Pyrrhotite.

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